9/24/2011	9:38:40 AM	H2 valve closed
9/24/2011	9:38:43 AM	H2 MFC set to  0.000000
9/24/2011	9:38:54 AM	Main Vac valve closed
9/24/2011	9:39:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/24/2011	9:39:39 AM	Recipe started at 9:39 AM
9/24/2011	9:39:39 AM	Helium valve closed
9/24/2011	9:39:39 AM	H2 valve closed
9/24/2011	9:39:39 AM	BCl3 valve closed
9/24/2011	9:39:39 AM	PH3 valve closed
9/24/2011	9:39:39 AM	SiCl4 pre valve closed
9/24/2011	9:39:39 AM	SiCl4 post valve closed
9/24/2011	9:39:39 AM	Main Vac valve closed
9/24/2011	9:39:39 AM	Bypass valve closed
9/24/2011	9:39:39 AM	Bubbler valve closed
9/24/2011	9:39:39 AM	Helium MFC set to  0.000000
9/24/2011	9:39:39 AM	H2 MFC set to  0.000000
9/24/2011	9:39:39 AM	BCl3 MFC set to  0.000000
9/24/2011	9:39:39 AM	PHl3 MFC set to  0.000000
9/24/2011	9:39:39 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:39:39 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:39:40 AM	Tube furnace set to 0
9/24/2011	9:39:43 AM	H2 valve closed
9/24/2011	9:39:43 AM	BCl3 valve closed
9/24/2011	9:39:43 AM	PH3 valve closed
9/24/2011	9:39:43 AM	SiCl4 pre valve closed
9/24/2011	9:39:43 AM	SiCl4 post valve closed
9/24/2011	9:39:43 AM	Main Vac valve closed
9/24/2011	9:39:43 AM	Bypass valve closed
9/24/2011	9:39:43 AM	Bubbler valve closed
9/24/2011	9:39:43 AM	Helium valve opened
9/24/2011	9:39:43 AM	Helium MFC set to  500.000000
9/24/2011	9:39:43 AM	H2 MFC set to  0.000000
9/24/2011	9:39:43 AM	BCl3 MFC set to  0.000000
9/24/2011	9:39:43 AM	PHl3 MFC set to  0.000000
9/24/2011	9:39:43 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:39:43 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:39:43 AM	Tube furnace set to 0
9/24/2011	9:40:42 AM	Helium valve closed
9/24/2011	9:40:42 AM	H2 valve closed
9/24/2011	9:40:42 AM	BCl3 valve closed
9/24/2011	9:40:42 AM	PH3 valve closed
9/24/2011	9:40:42 AM	SiCl4 pre valve closed
9/24/2011	9:40:42 AM	SiCl4 post valve closed
9/24/2011	9:40:42 AM	Main Vac valve closed
9/24/2011	9:40:42 AM	Bypass valve closed
9/24/2011	9:40:42 AM	Bubbler valve closed
9/24/2011	9:40:42 AM	Helium MFC set to  0.000000
9/24/2011	9:40:42 AM	H2 MFC set to  0.000000
9/24/2011	9:40:43 AM	BCl3 MFC set to  0.000000
9/24/2011	9:40:43 AM	PHl3 MFC set to  0.000000
9/24/2011	9:40:43 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:40:43 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:40:43 AM	Tube furnace set to 0
9/24/2011	9:40:44 AM	Run finished at 9:40 AM
9/24/2011	9:40:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/24/2011	9:41:10 AM	Helium MFC set to  500.000000
9/24/2011	9:41:30 AM	Helium valve opened
9/24/2011	9:41:35 AM	Bubbler valve opened
9/24/2011	9:46:48 AM	Tube furnace set to 200
9/24/2011	9:47:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/24/2011	9:47:40 AM	Recipe started at 9:47 AM
9/24/2011	9:47:40 AM	Helium valve closed
9/24/2011	9:47:40 AM	H2 valve closed
9/24/2011	9:47:40 AM	BCl3 valve closed
9/24/2011	9:47:40 AM	PH3 valve closed
9/24/2011	9:47:40 AM	SiCl4 pre valve closed
9/24/2011	9:47:40 AM	SiCl4 post valve closed
9/24/2011	9:47:40 AM	Main Vac valve closed
9/24/2011	9:47:40 AM	Bubbler valve closed
9/24/2011	9:47:40 AM	Bypass valve opened
9/24/2011	9:47:40 AM	Helium MFC set to  0.000000
9/24/2011	9:47:40 AM	H2 MFC set to  0.000000
9/24/2011	9:47:40 AM	BCl3 MFC set to  0.000000
9/24/2011	9:47:40 AM	PHl3 MFC set to  0.000000
9/24/2011	9:47:40 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:47:40 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:47:40 AM	Tube furnace set to 0
9/24/2011	9:48:36 AM	Helium valve closed
9/24/2011	9:48:36 AM	H2 valve closed
9/24/2011	9:48:36 AM	BCl3 valve closed
9/24/2011	9:48:36 AM	PH3 valve closed
9/24/2011	9:48:36 AM	SiCl4 pre valve closed
9/24/2011	9:48:36 AM	SiCl4 post valve closed
9/24/2011	9:48:36 AM	Main Vac valve closed
9/24/2011	9:48:36 AM	Bubbler valve closed
9/24/2011	9:48:36 AM	Bypass valve opened
9/24/2011	9:48:36 AM	Helium MFC set to  0.000000
9/24/2011	9:48:36 AM	H2 MFC set to  0.000000
9/24/2011	9:48:36 AM	BCl3 MFC set to  0.000000
9/24/2011	9:48:36 AM	PHl3 MFC set to  0.000000
9/24/2011	9:48:36 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:48:36 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:48:36 AM	Tube furnace set to 0
9/24/2011	9:49:06 AM	Helium valve closed
9/24/2011	9:49:06 AM	H2 valve closed
9/24/2011	9:49:06 AM	BCl3 valve closed
9/24/2011	9:49:06 AM	PH3 valve closed
9/24/2011	9:49:06 AM	SiCl4 pre valve closed
9/24/2011	9:49:06 AM	SiCl4 post valve closed
9/24/2011	9:49:06 AM	Bypass valve closed
9/24/2011	9:49:06 AM	Bubbler valve closed
9/24/2011	9:49:06 AM	Main Vac valve opened
9/24/2011	9:49:06 AM	Helium MFC set to  0.000000
9/24/2011	9:49:06 AM	H2 MFC set to  0.000000
9/24/2011	9:49:06 AM	BCl3 MFC set to  0.000000
9/24/2011	9:49:06 AM	PHl3 MFC set to  0.000000
9/24/2011	9:49:06 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:49:06 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:49:06 AM	Tube furnace set to 0
9/24/2011	9:49:36 AM	H2 valve closed
9/24/2011	9:49:36 AM	BCl3 valve closed
9/24/2011	9:49:36 AM	PH3 valve closed
9/24/2011	9:49:36 AM	SiCl4 pre valve closed
9/24/2011	9:49:36 AM	SiCl4 post valve closed
9/24/2011	9:49:36 AM	Bypass valve closed
9/24/2011	9:49:36 AM	Bubbler valve closed
9/24/2011	9:49:36 AM	Helium valve opened
9/24/2011	9:49:36 AM	Main Vac valve opened
9/24/2011	9:49:36 AM	Helium MFC set to  20.000000
9/24/2011	9:49:36 AM	H2 MFC set to  0.000000
9/24/2011	9:49:36 AM	BCl3 MFC set to  0.000000
9/24/2011	9:49:36 AM	PHl3 MFC set to  0.000000
9/24/2011	9:49:36 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:49:36 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:49:37 AM	Tube furnace set to 0
9/24/2011	9:50:07 AM	Helium valve closed
9/24/2011	9:50:07 AM	H2 valve closed
9/24/2011	9:50:07 AM	BCl3 valve closed
9/24/2011	9:50:07 AM	PH3 valve closed
9/24/2011	9:50:07 AM	SiCl4 pre valve closed
9/24/2011	9:50:07 AM	SiCl4 post valve closed
9/24/2011	9:50:07 AM	Bypass valve closed
9/24/2011	9:50:07 AM	Bubbler valve closed
9/24/2011	9:50:07 AM	Main Vac valve opened
9/24/2011	9:50:07 AM	Helium MFC set to  0.000000
9/24/2011	9:50:07 AM	H2 MFC set to  0.000000
9/24/2011	9:50:07 AM	BCl3 MFC set to  0.000000
9/24/2011	9:50:07 AM	PHl3 MFC set to  0.000000
9/24/2011	9:50:07 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:50:07 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:50:07 AM	Tube furnace set to 0
9/24/2011	9:50:37 AM	H2 valve closed
9/24/2011	9:50:37 AM	BCl3 valve closed
9/24/2011	9:50:37 AM	PH3 valve closed
9/24/2011	9:50:37 AM	SiCl4 pre valve closed
9/24/2011	9:50:37 AM	SiCl4 post valve closed
9/24/2011	9:50:37 AM	Bypass valve closed
9/24/2011	9:50:37 AM	Bubbler valve closed
9/24/2011	9:50:37 AM	Helium valve opened
9/24/2011	9:50:37 AM	Main Vac valve opened
9/24/2011	9:50:37 AM	Helium MFC set to  20.000000
9/24/2011	9:50:37 AM	H2 MFC set to  0.000000
9/24/2011	9:50:37 AM	BCl3 MFC set to  0.000000
9/24/2011	9:50:37 AM	PHl3 MFC set to  0.000000
9/24/2011	9:50:37 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:50:37 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:50:37 AM	Tube furnace set to 0
9/24/2011	9:51:07 AM	Helium valve closed
9/24/2011	9:51:07 AM	H2 valve closed
9/24/2011	9:51:07 AM	BCl3 valve closed
9/24/2011	9:51:07 AM	PH3 valve closed
9/24/2011	9:51:07 AM	SiCl4 pre valve closed
9/24/2011	9:51:07 AM	SiCl4 post valve closed
9/24/2011	9:51:07 AM	Bypass valve closed
9/24/2011	9:51:07 AM	Bubbler valve closed
9/24/2011	9:51:07 AM	Main Vac valve opened
9/24/2011	9:51:07 AM	Helium MFC set to  0.000000
9/24/2011	9:51:07 AM	H2 MFC set to  0.000000
9/24/2011	9:51:07 AM	BCl3 MFC set to  0.000000
9/24/2011	9:51:07 AM	PHl3 MFC set to  0.000000
9/24/2011	9:51:07 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:51:07 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:51:07 AM	Tube furnace set to 0
9/24/2011	9:51:37 AM	H2 valve closed
9/24/2011	9:51:37 AM	BCl3 valve closed
9/24/2011	9:51:37 AM	PH3 valve closed
9/24/2011	9:51:37 AM	SiCl4 pre valve closed
9/24/2011	9:51:37 AM	SiCl4 post valve closed
9/24/2011	9:51:37 AM	Bypass valve closed
9/24/2011	9:51:37 AM	Bubbler valve closed
9/24/2011	9:51:37 AM	Helium valve opened
9/24/2011	9:51:37 AM	Main Vac valve opened
9/24/2011	9:51:37 AM	Helium MFC set to  20.000000
9/24/2011	9:51:37 AM	H2 MFC set to  0.000000
9/24/2011	9:51:37 AM	BCl3 MFC set to  0.000000
9/24/2011	9:51:37 AM	PHl3 MFC set to  0.000000
9/24/2011	9:51:37 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:51:37 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:51:37 AM	Tube furnace set to 0
9/24/2011	9:52:07 AM	Helium valve closed
9/24/2011	9:52:07 AM	H2 valve closed
9/24/2011	9:52:07 AM	BCl3 valve closed
9/24/2011	9:52:07 AM	PH3 valve closed
9/24/2011	9:52:07 AM	SiCl4 pre valve closed
9/24/2011	9:52:07 AM	SiCl4 post valve closed
9/24/2011	9:52:07 AM	Bypass valve closed
9/24/2011	9:52:07 AM	Bubbler valve closed
9/24/2011	9:52:07 AM	Main Vac valve opened
9/24/2011	9:52:07 AM	Helium MFC set to  0.000000
9/24/2011	9:52:07 AM	H2 MFC set to  0.000000
9/24/2011	9:52:07 AM	BCl3 MFC set to  0.000000
9/24/2011	9:52:07 AM	PHl3 MFC set to  0.000000
9/24/2011	9:52:07 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:52:07 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:52:08 AM	Tube furnace set to 0
9/24/2011	9:52:19 AM	Run aborted at 9:52 AM
9/24/2011	9:52:19 AM	Helium valve closed
9/24/2011	9:52:19 AM	H2 valve closed
9/24/2011	9:52:19 AM	BCl3 valve closed
9/24/2011	9:52:19 AM	PH3 valve closed
9/24/2011	9:52:19 AM	SiCl4 pre valve closed
9/24/2011	9:52:19 AM	SiCl4 post valve closed
9/24/2011	9:52:19 AM	Bypass valve closed
9/24/2011	9:52:19 AM	Main Vac valve closed
9/24/2011	9:52:19 AM	Bubbler valve closed
9/24/2011	9:52:19 AM	Helium MFC set to  0.000000
9/24/2011	9:52:19 AM	H2 MFC set to  0.000000
9/24/2011	9:52:19 AM	BCl3 MFC set to  0.000000
9/24/2011	9:52:19 AM	PHl3 MFC set to  0.000000
9/24/2011	9:52:19 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:52:19 AM	Tube furnace set to 0
9/24/2011	9:52:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/24/2011	9:52:32 AM	Tube furnace set to 200
9/24/2011	9:52:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/24/2011	9:52:41 AM	Recipe started at 9:52 AM
9/24/2011	9:52:41 AM	Helium valve closed
9/24/2011	9:52:41 AM	H2 valve closed
9/24/2011	9:52:41 AM	BCl3 valve closed
9/24/2011	9:52:41 AM	PH3 valve closed
9/24/2011	9:52:41 AM	SiCl4 pre valve closed
9/24/2011	9:52:41 AM	SiCl4 post valve closed
9/24/2011	9:52:41 AM	Main Vac valve closed
9/24/2011	9:52:41 AM	Bypass valve closed
9/24/2011	9:52:41 AM	Bubbler valve closed
9/24/2011	9:52:41 AM	Helium MFC set to  0.000000
9/24/2011	9:52:41 AM	H2 MFC set to  0.000000
9/24/2011	9:52:41 AM	BCl3 MFC set to  0.000000
9/24/2011	9:52:41 AM	PHl3 MFC set to  0.000000
9/24/2011	9:52:41 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:52:41 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:52:41 AM	Tube furnace set to 0
9/24/2011	9:52:44 AM	H2 valve closed
9/24/2011	9:52:44 AM	BCl3 valve closed
9/24/2011	9:52:44 AM	PH3 valve closed
9/24/2011	9:52:44 AM	SiCl4 pre valve closed
9/24/2011	9:52:44 AM	SiCl4 post valve closed
9/24/2011	9:52:44 AM	Main Vac valve closed
9/24/2011	9:52:44 AM	Bypass valve closed
9/24/2011	9:52:44 AM	Bubbler valve closed
9/24/2011	9:52:44 AM	Helium valve opened
9/24/2011	9:52:44 AM	Helium MFC set to  500.000000
9/24/2011	9:52:44 AM	H2 MFC set to  0.000000
9/24/2011	9:52:44 AM	BCl3 MFC set to  0.000000
9/24/2011	9:52:44 AM	PHl3 MFC set to  0.000000
9/24/2011	9:52:44 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:52:44 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:52:44 AM	Tube furnace set to 0
9/24/2011	9:52:47 AM	Run aborted at 9:52 AM
9/24/2011	9:52:47 AM	Helium valve closed
9/24/2011	9:52:47 AM	H2 valve closed
9/24/2011	9:52:47 AM	BCl3 valve closed
9/24/2011	9:52:47 AM	PH3 valve closed
9/24/2011	9:52:47 AM	SiCl4 pre valve closed
9/24/2011	9:52:47 AM	SiCl4 post valve closed
9/24/2011	9:52:47 AM	Bypass valve closed
9/24/2011	9:52:47 AM	Main Vac valve closed
9/24/2011	9:52:47 AM	Bubbler valve closed
9/24/2011	9:52:47 AM	Helium MFC set to  0.000000
9/24/2011	9:52:47 AM	H2 MFC set to  0.000000
9/24/2011	9:52:47 AM	BCl3 MFC set to  0.000000
9/24/2011	9:52:47 AM	PHl3 MFC set to  0.000000
9/24/2011	9:52:47 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:52:47 AM	Tube furnace set to 0
9/24/2011	9:52:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/24/2011	9:52:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/24/2011	9:53:09 AM	Recipe started at 9:53 AM
9/24/2011	9:53:09 AM	Helium valve closed
9/24/2011	9:53:09 AM	H2 valve closed
9/24/2011	9:53:09 AM	BCl3 valve closed
9/24/2011	9:53:09 AM	PH3 valve closed
9/24/2011	9:53:09 AM	SiCl4 pre valve closed
9/24/2011	9:53:09 AM	SiCl4 post valve closed
9/24/2011	9:53:09 AM	Main Vac valve closed
9/24/2011	9:53:09 AM	Bubbler valve closed
9/24/2011	9:53:09 AM	Bypass valve opened
9/24/2011	9:53:09 AM	Helium MFC set to  0.000000
9/24/2011	9:53:09 AM	H2 MFC set to  0.000000
9/24/2011	9:53:09 AM	BCl3 MFC set to  0.000000
9/24/2011	9:53:09 AM	PHl3 MFC set to  0.000000
9/24/2011	9:53:09 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:53:09 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:53:09 AM	Tube furnace set to 0
9/24/2011	9:53:44 AM	Helium valve closed
9/24/2011	9:53:44 AM	H2 valve closed
9/24/2011	9:53:44 AM	BCl3 valve closed
9/24/2011	9:53:44 AM	PH3 valve closed
9/24/2011	9:53:44 AM	SiCl4 pre valve closed
9/24/2011	9:53:44 AM	SiCl4 post valve closed
9/24/2011	9:53:44 AM	Main Vac valve closed
9/24/2011	9:53:44 AM	Bubbler valve closed
9/24/2011	9:53:44 AM	Bypass valve opened
9/24/2011	9:53:44 AM	Helium MFC set to  0.000000
9/24/2011	9:53:44 AM	H2 MFC set to  0.000000
9/24/2011	9:53:44 AM	BCl3 MFC set to  0.000000
9/24/2011	9:53:44 AM	PHl3 MFC set to  0.000000
9/24/2011	9:53:44 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:53:44 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:53:44 AM	Tube furnace set to 0
9/24/2011	9:53:48 AM	Helium valve closed
9/24/2011	9:53:48 AM	H2 valve closed
9/24/2011	9:53:48 AM	BCl3 valve closed
9/24/2011	9:53:48 AM	PH3 valve closed
9/24/2011	9:53:48 AM	SiCl4 pre valve closed
9/24/2011	9:53:48 AM	SiCl4 post valve closed
9/24/2011	9:53:49 AM	Bypass valve closed
9/24/2011	9:53:49 AM	Bubbler valve closed
9/24/2011	9:53:49 AM	Main Vac valve opened
9/24/2011	9:53:49 AM	Helium MFC set to  0.000000
9/24/2011	9:53:49 AM	H2 MFC set to  0.000000
9/24/2011	9:53:49 AM	BCl3 MFC set to  0.000000
9/24/2011	9:53:49 AM	PHl3 MFC set to  0.000000
9/24/2011	9:53:49 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:53:49 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:53:49 AM	Tube furnace set to 0
9/24/2011	9:54:19 AM	H2 valve closed
9/24/2011	9:54:19 AM	BCl3 valve closed
9/24/2011	9:54:19 AM	PH3 valve closed
9/24/2011	9:54:19 AM	SiCl4 pre valve closed
9/24/2011	9:54:19 AM	SiCl4 post valve closed
9/24/2011	9:54:19 AM	Bypass valve closed
9/24/2011	9:54:19 AM	Bubbler valve closed
9/24/2011	9:54:19 AM	Helium valve opened
9/24/2011	9:54:19 AM	Main Vac valve opened
9/24/2011	9:54:19 AM	Helium MFC set to  20.000000
9/24/2011	9:54:19 AM	H2 MFC set to  0.000000
9/24/2011	9:54:19 AM	BCl3 MFC set to  0.000000
9/24/2011	9:54:19 AM	PHl3 MFC set to  0.000000
9/24/2011	9:54:19 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:54:19 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:54:19 AM	Tube furnace set to 0
9/24/2011	9:54:49 AM	Helium valve closed
9/24/2011	9:54:49 AM	H2 valve closed
9/24/2011	9:54:49 AM	BCl3 valve closed
9/24/2011	9:54:49 AM	PH3 valve closed
9/24/2011	9:54:49 AM	SiCl4 pre valve closed
9/24/2011	9:54:49 AM	SiCl4 post valve closed
9/24/2011	9:54:49 AM	Bypass valve closed
9/24/2011	9:54:49 AM	Bubbler valve closed
9/24/2011	9:54:49 AM	Main Vac valve opened
9/24/2011	9:54:49 AM	Helium MFC set to  0.000000
9/24/2011	9:54:49 AM	H2 MFC set to  0.000000
9/24/2011	9:54:49 AM	BCl3 MFC set to  0.000000
9/24/2011	9:54:49 AM	PHl3 MFC set to  0.000000
9/24/2011	9:54:49 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:54:49 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:54:49 AM	Tube furnace set to 0
9/24/2011	9:55:19 AM	H2 valve closed
9/24/2011	9:55:19 AM	BCl3 valve closed
9/24/2011	9:55:19 AM	PH3 valve closed
9/24/2011	9:55:19 AM	SiCl4 pre valve closed
9/24/2011	9:55:19 AM	SiCl4 post valve closed
9/24/2011	9:55:19 AM	Bypass valve closed
9/24/2011	9:55:19 AM	Bubbler valve closed
9/24/2011	9:55:19 AM	Helium valve opened
9/24/2011	9:55:19 AM	Main Vac valve opened
9/24/2011	9:55:19 AM	Helium MFC set to  20.000000
9/24/2011	9:55:19 AM	H2 MFC set to  0.000000
9/24/2011	9:55:19 AM	BCl3 MFC set to  0.000000
9/24/2011	9:55:19 AM	PHl3 MFC set to  0.000000
9/24/2011	9:55:19 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:55:19 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:55:19 AM	Tube furnace set to 0
9/24/2011	9:55:49 AM	Helium valve closed
9/24/2011	9:55:49 AM	H2 valve closed
9/24/2011	9:55:49 AM	BCl3 valve closed
9/24/2011	9:55:49 AM	PH3 valve closed
9/24/2011	9:55:49 AM	SiCl4 pre valve closed
9/24/2011	9:55:49 AM	SiCl4 post valve closed
9/24/2011	9:55:49 AM	Bypass valve closed
9/24/2011	9:55:49 AM	Bubbler valve closed
9/24/2011	9:55:49 AM	Main Vac valve opened
9/24/2011	9:55:49 AM	Helium MFC set to  0.000000
9/24/2011	9:55:49 AM	H2 MFC set to  0.000000
9/24/2011	9:55:49 AM	BCl3 MFC set to  0.000000
9/24/2011	9:55:49 AM	PHl3 MFC set to  0.000000
9/24/2011	9:55:49 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:55:49 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:55:49 AM	Tube furnace set to 0
9/24/2011	9:56:20 AM	H2 valve closed
9/24/2011	9:56:20 AM	BCl3 valve closed
9/24/2011	9:56:20 AM	PH3 valve closed
9/24/2011	9:56:20 AM	SiCl4 pre valve closed
9/24/2011	9:56:20 AM	SiCl4 post valve closed
9/24/2011	9:56:20 AM	Bypass valve closed
9/24/2011	9:56:20 AM	Bubbler valve closed
9/24/2011	9:56:20 AM	Helium valve opened
9/24/2011	9:56:20 AM	Main Vac valve opened
9/24/2011	9:56:20 AM	Helium MFC set to  20.000000
9/24/2011	9:56:20 AM	H2 MFC set to  0.000000
9/24/2011	9:56:20 AM	BCl3 MFC set to  0.000000
9/24/2011	9:56:20 AM	PHl3 MFC set to  0.000000
9/24/2011	9:56:20 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:56:20 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:56:20 AM	Tube furnace set to 0
9/24/2011	9:56:50 AM	Helium valve closed
9/24/2011	9:56:50 AM	H2 valve closed
9/24/2011	9:56:50 AM	BCl3 valve closed
9/24/2011	9:56:50 AM	PH3 valve closed
9/24/2011	9:56:50 AM	SiCl4 pre valve closed
9/24/2011	9:56:50 AM	SiCl4 post valve closed
9/24/2011	9:56:50 AM	Bypass valve closed
9/24/2011	9:56:50 AM	Bubbler valve closed
9/24/2011	9:56:50 AM	Main Vac valve opened
9/24/2011	9:56:50 AM	Helium MFC set to  0.000000
9/24/2011	9:56:50 AM	H2 MFC set to  0.000000
9/24/2011	9:56:50 AM	BCl3 MFC set to  0.000000
9/24/2011	9:56:50 AM	PHl3 MFC set to  0.000000
9/24/2011	9:56:50 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:56:50 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:56:50 AM	Tube furnace set to 0
9/24/2011	9:57:20 AM	H2 valve closed
9/24/2011	9:57:20 AM	BCl3 valve closed
9/24/2011	9:57:20 AM	PH3 valve closed
9/24/2011	9:57:20 AM	SiCl4 pre valve closed
9/24/2011	9:57:20 AM	SiCl4 post valve closed
9/24/2011	9:57:20 AM	Bypass valve closed
9/24/2011	9:57:20 AM	Bubbler valve closed
9/24/2011	9:57:20 AM	Helium valve opened
9/24/2011	9:57:20 AM	Main Vac valve opened
9/24/2011	9:57:20 AM	Helium MFC set to  20.000000
9/24/2011	9:57:20 AM	H2 MFC set to  0.000000
9/24/2011	9:57:20 AM	BCl3 MFC set to  0.000000
9/24/2011	9:57:20 AM	PHl3 MFC set to  0.000000
9/24/2011	9:57:20 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:57:20 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:57:20 AM	Tube furnace set to 0
9/24/2011	9:57:50 AM	Helium valve closed
9/24/2011	9:57:50 AM	H2 valve closed
9/24/2011	9:57:50 AM	BCl3 valve closed
9/24/2011	9:57:50 AM	PH3 valve closed
9/24/2011	9:57:50 AM	SiCl4 pre valve closed
9/24/2011	9:57:50 AM	SiCl4 post valve closed
9/24/2011	9:57:50 AM	Bypass valve closed
9/24/2011	9:57:50 AM	Bubbler valve closed
9/24/2011	9:57:50 AM	Main Vac valve opened
9/24/2011	9:57:50 AM	Helium MFC set to  0.000000
9/24/2011	9:57:50 AM	H2 MFC set to  0.000000
9/24/2011	9:57:50 AM	BCl3 MFC set to  0.000000
9/24/2011	9:57:50 AM	PHl3 MFC set to  0.000000
9/24/2011	9:57:50 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:57:50 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:57:50 AM	Tube furnace set to 0
9/24/2011	9:58:20 AM	H2 valve closed
9/24/2011	9:58:20 AM	BCl3 valve closed
9/24/2011	9:58:20 AM	PH3 valve closed
9/24/2011	9:58:20 AM	SiCl4 pre valve closed
9/24/2011	9:58:20 AM	SiCl4 post valve closed
9/24/2011	9:58:20 AM	Bypass valve closed
9/24/2011	9:58:20 AM	Bubbler valve closed
9/24/2011	9:58:20 AM	Helium valve opened
9/24/2011	9:58:20 AM	Main Vac valve opened
9/24/2011	9:58:20 AM	Helium MFC set to  20.000000
9/24/2011	9:58:20 AM	H2 MFC set to  0.000000
9/24/2011	9:58:20 AM	BCl3 MFC set to  0.000000
9/24/2011	9:58:20 AM	PHl3 MFC set to  0.000000
9/24/2011	9:58:20 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:58:20 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:58:21 AM	Tube furnace set to 0
9/24/2011	9:58:51 AM	Helium valve closed
9/24/2011	9:58:51 AM	H2 valve closed
9/24/2011	9:58:51 AM	BCl3 valve closed
9/24/2011	9:58:51 AM	PH3 valve closed
9/24/2011	9:58:51 AM	SiCl4 pre valve closed
9/24/2011	9:58:51 AM	SiCl4 post valve closed
9/24/2011	9:58:51 AM	Bypass valve closed
9/24/2011	9:58:51 AM	Bubbler valve closed
9/24/2011	9:58:51 AM	Main Vac valve opened
9/24/2011	9:58:51 AM	Helium MFC set to  0.000000
9/24/2011	9:58:51 AM	H2 MFC set to  0.000000
9/24/2011	9:58:51 AM	BCl3 MFC set to  0.000000
9/24/2011	9:58:51 AM	PHl3 MFC set to  0.000000
9/24/2011	9:58:51 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:58:51 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:58:51 AM	Tube furnace set to 0
9/24/2011	9:59:21 AM	H2 valve closed
9/24/2011	9:59:21 AM	BCl3 valve closed
9/24/2011	9:59:21 AM	PH3 valve closed
9/24/2011	9:59:21 AM	SiCl4 pre valve closed
9/24/2011	9:59:21 AM	SiCl4 post valve closed
9/24/2011	9:59:21 AM	Bypass valve closed
9/24/2011	9:59:21 AM	Bubbler valve closed
9/24/2011	9:59:21 AM	Helium valve opened
9/24/2011	9:59:21 AM	Main Vac valve opened
9/24/2011	9:59:21 AM	Helium MFC set to  20.000000
9/24/2011	9:59:21 AM	H2 MFC set to  0.000000
9/24/2011	9:59:21 AM	BCl3 MFC set to  0.000000
9/24/2011	9:59:21 AM	PHl3 MFC set to  0.000000
9/24/2011	9:59:21 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:59:21 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:59:21 AM	Tube furnace set to 0
9/24/2011	9:59:51 AM	Helium valve closed
9/24/2011	9:59:51 AM	H2 valve closed
9/24/2011	9:59:51 AM	BCl3 valve closed
9/24/2011	9:59:51 AM	PH3 valve closed
9/24/2011	9:59:51 AM	SiCl4 pre valve closed
9/24/2011	9:59:51 AM	SiCl4 post valve closed
9/24/2011	9:59:51 AM	Bypass valve closed
9/24/2011	9:59:51 AM	Bubbler valve closed
9/24/2011	9:59:51 AM	Main Vac valve opened
9/24/2011	9:59:51 AM	Helium MFC set to  0.000000
9/24/2011	9:59:51 AM	H2 MFC set to  0.000000
9/24/2011	9:59:51 AM	BCl3 MFC set to  0.000000
9/24/2011	9:59:51 AM	PHl3 MFC set to  0.000000
9/24/2011	9:59:51 AM	SiCl4 MFC set to  0.000000
9/24/2011	9:59:51 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:59:51 AM	Tube furnace set to 0
9/24/2011	10:00:21 AM	H2 valve closed
9/24/2011	10:00:21 AM	BCl3 valve closed
9/24/2011	10:00:21 AM	PH3 valve closed
9/24/2011	10:00:21 AM	SiCl4 pre valve closed
9/24/2011	10:00:21 AM	SiCl4 post valve closed
9/24/2011	10:00:21 AM	Bypass valve closed
9/24/2011	10:00:21 AM	Bubbler valve closed
9/24/2011	10:00:21 AM	Helium valve opened
9/24/2011	10:00:21 AM	Main Vac valve opened
9/24/2011	10:00:21 AM	Helium MFC set to  20.000000
9/24/2011	10:00:21 AM	H2 MFC set to  0.000000
9/24/2011	10:00:21 AM	BCl3 MFC set to  0.000000
9/24/2011	10:00:21 AM	PHl3 MFC set to  0.000000
9/24/2011	10:00:21 AM	SiCl4 MFC set to  0.000000
9/24/2011	10:00:21 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:00:21 AM	Tube furnace set to 0
9/24/2011	10:00:51 AM	Helium valve closed
9/24/2011	10:00:51 AM	H2 valve closed
9/24/2011	10:00:51 AM	BCl3 valve closed
9/24/2011	10:00:51 AM	PH3 valve closed
9/24/2011	10:00:51 AM	SiCl4 pre valve closed
9/24/2011	10:00:51 AM	SiCl4 post valve closed
9/24/2011	10:00:51 AM	Bypass valve closed
9/24/2011	10:00:51 AM	Bubbler valve closed
9/24/2011	10:00:51 AM	Main Vac valve opened
9/24/2011	10:00:51 AM	Helium MFC set to  0.000000
9/24/2011	10:00:51 AM	H2 MFC set to  0.000000
9/24/2011	10:00:51 AM	BCl3 MFC set to  0.000000
9/24/2011	10:00:51 AM	PHl3 MFC set to  0.000000
9/24/2011	10:00:51 AM	SiCl4 MFC set to  0.000000
9/24/2011	10:00:51 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:00:52 AM	Tube furnace set to 0
9/24/2011	10:01:22 AM	H2 valve closed
9/24/2011	10:01:22 AM	BCl3 valve closed
9/24/2011	10:01:22 AM	PH3 valve closed
9/24/2011	10:01:22 AM	SiCl4 pre valve closed
9/24/2011	10:01:22 AM	SiCl4 post valve closed
9/24/2011	10:01:22 AM	Bypass valve closed
9/24/2011	10:01:22 AM	Bubbler valve closed
9/24/2011	10:01:22 AM	Helium valve opened
9/24/2011	10:01:22 AM	Main Vac valve opened
9/24/2011	10:01:22 AM	Helium MFC set to  20.000000
9/24/2011	10:01:22 AM	H2 MFC set to  0.000000
9/24/2011	10:01:22 AM	BCl3 MFC set to  0.000000
9/24/2011	10:01:22 AM	PHl3 MFC set to  0.000000
9/24/2011	10:01:22 AM	SiCl4 MFC set to  0.000000
9/24/2011	10:01:22 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:01:22 AM	Tube furnace set to 0
9/24/2011	10:01:52 AM	Helium valve closed
9/24/2011	10:01:52 AM	H2 valve closed
9/24/2011	10:01:52 AM	BCl3 valve closed
9/24/2011	10:01:52 AM	PH3 valve closed
9/24/2011	10:01:52 AM	SiCl4 pre valve closed
9/24/2011	10:01:52 AM	SiCl4 post valve closed
9/24/2011	10:01:52 AM	Bypass valve closed
9/24/2011	10:01:52 AM	Bubbler valve closed
9/24/2011	10:01:52 AM	Main Vac valve opened
9/24/2011	10:01:52 AM	Helium MFC set to  0.000000
9/24/2011	10:01:52 AM	H2 MFC set to  0.000000
9/24/2011	10:01:52 AM	BCl3 MFC set to  0.000000
9/24/2011	10:01:52 AM	PHl3 MFC set to  0.000000
9/24/2011	10:01:52 AM	SiCl4 MFC set to  0.000000
9/24/2011	10:01:52 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:01:52 AM	Tube furnace set to 0
9/24/2011	10:02:22 AM	H2 valve closed
9/24/2011	10:02:22 AM	BCl3 valve closed
9/24/2011	10:02:22 AM	PH3 valve closed
9/24/2011	10:02:22 AM	SiCl4 pre valve closed
9/24/2011	10:02:22 AM	SiCl4 post valve closed
9/24/2011	10:02:22 AM	Bypass valve closed
9/24/2011	10:02:22 AM	Bubbler valve closed
9/24/2011	10:02:22 AM	Helium valve opened
9/24/2011	10:02:22 AM	Main Vac valve opened
9/24/2011	10:02:22 AM	Helium MFC set to  20.000000
9/24/2011	10:02:22 AM	H2 MFC set to  0.000000
9/24/2011	10:02:22 AM	BCl3 MFC set to  0.000000
9/24/2011	10:02:22 AM	PHl3 MFC set to  0.000000
9/24/2011	10:02:22 AM	SiCl4 MFC set to  0.000000
9/24/2011	10:02:22 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:02:22 AM	Tube furnace set to 0
9/24/2011	10:02:52 AM	Helium valve closed
9/24/2011	10:02:52 AM	H2 valve closed
9/24/2011	10:02:52 AM	BCl3 valve closed
9/24/2011	10:02:52 AM	PH3 valve closed
9/24/2011	10:02:52 AM	SiCl4 pre valve closed
9/24/2011	10:02:52 AM	SiCl4 post valve closed
9/24/2011	10:02:52 AM	Bypass valve closed
9/24/2011	10:02:52 AM	Bubbler valve closed
9/24/2011	10:02:52 AM	Main Vac valve opened
9/24/2011	10:02:52 AM	Helium MFC set to  0.000000
9/24/2011	10:02:52 AM	H2 MFC set to  0.000000
9/24/2011	10:02:52 AM	BCl3 MFC set to  0.000000
9/24/2011	10:02:52 AM	PHl3 MFC set to  0.000000
9/24/2011	10:02:52 AM	SiCl4 MFC set to  0.000000
9/24/2011	10:02:52 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:02:52 AM	Tube furnace set to 0
9/24/2011	10:03:22 AM	H2 valve closed
9/24/2011	10:03:22 AM	BCl3 valve closed
9/24/2011	10:03:22 AM	PH3 valve closed
9/24/2011	10:03:22 AM	SiCl4 pre valve closed
9/24/2011	10:03:22 AM	SiCl4 post valve closed
9/24/2011	10:03:22 AM	Bypass valve closed
9/24/2011	10:03:22 AM	Bubbler valve closed
9/24/2011	10:03:22 AM	Helium valve opened
9/24/2011	10:03:22 AM	Main Vac valve opened
9/24/2011	10:03:22 AM	Helium MFC set to  20.000000
9/24/2011	10:03:22 AM	H2 MFC set to  0.000000
9/24/2011	10:03:22 AM	BCl3 MFC set to  0.000000
9/24/2011	10:03:22 AM	PHl3 MFC set to  0.000000
9/24/2011	10:03:22 AM	SiCl4 MFC set to  0.000000
9/24/2011	10:03:22 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:03:23 AM	Tube furnace set to 0
9/24/2011	10:03:53 AM	Helium valve closed
9/24/2011	10:03:53 AM	H2 valve closed
9/24/2011	10:03:53 AM	BCl3 valve closed
9/24/2011	10:03:53 AM	PH3 valve closed
9/24/2011	10:03:53 AM	SiCl4 pre valve closed
9/24/2011	10:03:53 AM	SiCl4 post valve closed
9/24/2011	10:03:53 AM	Bypass valve closed
9/24/2011	10:03:53 AM	Bubbler valve closed
9/24/2011	10:03:53 AM	Main Vac valve opened
9/24/2011	10:03:53 AM	Helium MFC set to  0.000000
9/24/2011	10:03:53 AM	H2 MFC set to  0.000000
9/24/2011	10:03:53 AM	BCl3 MFC set to  0.000000
9/24/2011	10:03:53 AM	PHl3 MFC set to  0.000000
9/24/2011	10:03:53 AM	SiCl4 MFC set to  0.000000
9/24/2011	10:03:53 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:03:53 AM	Tube furnace set to 0
9/24/2011	10:03:54 AM	Run finished at 10:03 AM
9/24/2011	10:03:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/24/2011	10:04:04 AM	H2 MFC set to  20.000000
9/24/2011	10:04:08 AM	H2 valve opened
9/24/2011	10:05:08 AM	H2 valve closed
9/24/2011	10:05:11 AM	H2 MFC set to  0.000000
9/24/2011	10:05:51 AM	Main Vac valve closed
9/24/2011	10:05:59 AM	Main Vac valve opened
9/24/2011	10:06:35 AM	H2 MFC set to  0.000000
9/24/2011	10:06:43 AM	Tube furnace set to 200
9/24/2011	10:13:32 AM	Recipe started at 10:13 AM
9/24/2011	10:13:33 AM	H2 valve closed
9/24/2011	10:13:33 AM	BCl3 valve closed
9/24/2011	10:13:33 AM	PH3 valve closed
9/24/2011	10:13:33 AM	SiCl4 pre valve closed
9/24/2011	10:13:33 AM	SiCl4 post valve closed
9/24/2011	10:13:33 AM	Bypass valve closed
9/24/2011	10:13:33 AM	Bubbler valve closed
9/24/2011	10:13:33 AM	Helium valve opened
9/24/2011	10:13:33 AM	Main Vac valve opened
9/24/2011	10:13:33 AM	Helium MFC set to  10.000000
9/24/2011	10:13:33 AM	H2 MFC set to  0.000000
9/24/2011	10:13:33 AM	BCl3 MFC set to  0.000000
9/24/2011	10:13:33 AM	PHl3 MFC set to  0.000000
9/24/2011	10:13:33 AM	SiCl4 MFC set to  0.000000
9/24/2011	10:13:33 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:13:33 AM	Tube furnace set to 180
9/24/2011	10:14:03 AM	Helium valve closed
9/24/2011	10:14:03 AM	H2 valve closed
9/24/2011	10:14:03 AM	BCl3 valve closed
9/24/2011	10:14:03 AM	PH3 valve closed
9/24/2011	10:14:03 AM	SiCl4 pre valve closed
9/24/2011	10:14:03 AM	SiCl4 post valve closed
9/24/2011	10:14:03 AM	Bypass valve closed
9/24/2011	10:14:03 AM	Bubbler valve closed
9/24/2011	10:14:03 AM	Main Vac valve opened
9/24/2011	10:14:03 AM	Helium MFC set to  0.000000
9/24/2011	10:14:03 AM	H2 MFC set to  0.000000
9/24/2011	10:14:03 AM	BCl3 MFC set to  0.000000
9/24/2011	10:14:03 AM	PHl3 MFC set to  0.000000
9/24/2011	10:14:03 AM	SiCl4 MFC set to  0.000000
9/24/2011	10:14:03 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:14:03 AM	Tube furnace set to 180
9/24/2011	10:14:33 AM	H2 valve closed
9/24/2011	10:14:33 AM	BCl3 valve closed
9/24/2011	10:14:33 AM	PH3 valve closed
9/24/2011	10:14:33 AM	SiCl4 pre valve closed
9/24/2011	10:14:33 AM	SiCl4 post valve closed
9/24/2011	10:14:33 AM	Bypass valve closed
9/24/2011	10:14:33 AM	Bubbler valve closed
9/24/2011	10:14:33 AM	Helium valve opened
9/24/2011	10:14:33 AM	Main Vac valve opened
9/24/2011	10:14:33 AM	Helium MFC set to  10.000000
9/24/2011	10:14:33 AM	H2 MFC set to  0.000000
9/24/2011	10:14:33 AM	BCl3 MFC set to  0.000000
9/24/2011	10:14:33 AM	PHl3 MFC set to  0.000000
9/24/2011	10:14:33 AM	SiCl4 MFC set to  0.000000
9/24/2011	10:14:33 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:14:33 AM	Tube furnace set to 180
9/24/2011	10:15:03 AM	Helium valve closed
9/24/2011	10:15:03 AM	H2 valve closed
9/24/2011	10:15:03 AM	BCl3 valve closed
9/24/2011	10:15:03 AM	PH3 valve closed
9/24/2011	10:15:03 AM	SiCl4 pre valve closed
9/24/2011	10:15:03 AM	SiCl4 post valve closed
9/24/2011	10:15:03 AM	Bypass valve closed
9/24/2011	10:15:03 AM	Bubbler valve closed
9/24/2011	10:15:03 AM	Main Vac valve opened
9/24/2011	10:15:03 AM	Helium MFC set to  0.000000
9/24/2011	10:15:03 AM	H2 MFC set to  0.000000
9/24/2011	10:15:03 AM	BCl3 MFC set to  0.000000
9/24/2011	10:15:03 AM	PHl3 MFC set to  0.000000
9/24/2011	10:15:03 AM	SiCl4 MFC set to  0.000000
9/24/2011	10:15:03 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:15:03 AM	Tube furnace set to 180
9/24/2011	11:15:03 AM	Helium valve closed
9/24/2011	11:15:03 AM	H2 valve closed
9/24/2011	11:15:03 AM	BCl3 valve closed
9/24/2011	11:15:03 AM	PH3 valve closed
9/24/2011	11:15:03 AM	SiCl4 pre valve closed
9/24/2011	11:15:03 AM	SiCl4 post valve closed
9/24/2011	11:15:03 AM	Main Vac valve closed
9/24/2011	11:15:03 AM	Bypass valve closed
9/24/2011	11:15:03 AM	Bubbler valve closed
9/24/2011	11:15:03 AM	Helium MFC set to  0.000000
9/24/2011	11:15:03 AM	H2 MFC set to  0.000000
9/24/2011	11:15:03 AM	BCl3 MFC set to  0.000000
9/24/2011	11:15:03 AM	PHl3 MFC set to  0.000000
9/24/2011	11:15:03 AM	SiCl4 MFC set to  0.000000
9/24/2011	11:15:03 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:15:04 AM	Tube furnace set to 1000
9/24/2011	11:16:04 AM	Helium valve closed
9/24/2011	11:16:04 AM	BCl3 valve closed
9/24/2011	11:16:04 AM	PH3 valve closed
9/24/2011	11:16:04 AM	SiCl4 pre valve closed
9/24/2011	11:16:04 AM	SiCl4 post valve closed
9/24/2011	11:16:04 AM	Main Vac valve closed
9/24/2011	11:16:04 AM	Bypass valve closed
9/24/2011	11:16:04 AM	Bubbler valve closed
9/24/2011	11:16:04 AM	H2 valve opened
9/24/2011	11:16:04 AM	Helium MFC set to  0.000000
9/24/2011	11:16:04 AM	H2 MFC set to  500.000000
9/24/2011	11:16:04 AM	BCl3 MFC set to  0.000000
9/24/2011	11:16:04 AM	PHl3 MFC set to  0.000000
9/24/2011	11:16:04 AM	SiCl4 MFC set to  0.000000
9/24/2011	11:16:04 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:16:04 AM	Tube furnace set to 1000
9/24/2011	11:17:05 AM	Helium valve closed
9/24/2011	11:17:05 AM	BCl3 valve closed
9/24/2011	11:17:05 AM	PH3 valve closed
9/24/2011	11:17:05 AM	SiCl4 pre valve closed
9/24/2011	11:17:05 AM	SiCl4 post valve closed
9/24/2011	11:17:05 AM	Main Vac valve closed
9/24/2011	11:17:05 AM	Bypass valve closed
9/24/2011	11:17:05 AM	H2 valve opened
9/24/2011	11:17:05 AM	Bubbler valve opened
9/24/2011	11:17:05 AM	Helium MFC set to  0.000000
9/24/2011	11:17:05 AM	H2 MFC set to  500.000000
9/24/2011	11:17:05 AM	BCl3 MFC set to  0.000000
9/24/2011	11:17:05 AM	PHl3 MFC set to  0.000000
9/24/2011	11:17:05 AM	SiCl4 MFC set to  0.000000
9/24/2011	11:17:05 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:17:06 AM	Tube furnace set to 1000
9/24/2011	11:17:07 AM	Helium valve closed
9/24/2011	11:17:07 AM	BCl3 valve closed
9/24/2011	11:17:07 AM	PH3 valve closed
9/24/2011	11:17:07 AM	SiCl4 pre valve closed
9/24/2011	11:17:07 AM	SiCl4 post valve closed
9/24/2011	11:17:07 AM	Main Vac valve closed
9/24/2011	11:17:07 AM	Bypass valve closed
9/24/2011	11:17:07 AM	H2 valve opened
9/24/2011	11:17:07 AM	Bubbler valve opened
9/24/2011	11:17:07 AM	Helium MFC set to  0.000000
9/24/2011	11:17:07 AM	H2 MFC set to  500.000000
9/24/2011	11:17:07 AM	BCl3 MFC set to  0.000000
9/24/2011	11:17:07 AM	PHl3 MFC set to  0.000000
9/24/2011	11:17:07 AM	SiCl4 MFC set to  0.000000
9/24/2011	11:17:07 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:17:07 AM	Tube furnace set to 1000
9/24/2011	11:37:07 AM	Helium valve closed
9/24/2011	11:37:07 AM	PH3 valve closed
9/24/2011	11:37:07 AM	Main Vac valve closed
9/24/2011	11:37:07 AM	Bypass valve closed
9/24/2011	11:37:07 AM	H2 valve opened
9/24/2011	11:37:07 AM	BCl3 valve opened
9/24/2011	11:37:07 AM	SiCl4 pre valve opened
9/24/2011	11:37:07 AM	SiCl4 post valve opened
9/24/2011	11:37:07 AM	Bubbler valve opened
9/24/2011	11:37:07 AM	Helium MFC set to  0.000000
9/24/2011	11:37:07 AM	H2 MFC set to  500.000000
9/24/2011	11:37:07 AM	BCl3 MFC set to  2.500000
9/24/2011	11:37:07 AM	PHl3 MFC set to  0.000000
9/24/2011	11:37:07 AM	SiCl4 MFC set to  50.000000
9/24/2011	11:37:07 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:37:07 AM	Tube furnace set to 1000
9/24/2011	11:53:07 AM	Helium valve closed
9/24/2011	11:53:07 AM	BCl3 valve closed
9/24/2011	11:53:07 AM	PH3 valve closed
9/24/2011	11:53:07 AM	SiCl4 pre valve closed
9/24/2011	11:53:07 AM	SiCl4 post valve closed
9/24/2011	11:53:07 AM	Main Vac valve closed
9/24/2011	11:53:07 AM	Bypass valve closed
9/24/2011	11:53:07 AM	H2 valve opened
9/24/2011	11:53:07 AM	Bubbler valve opened
9/24/2011	11:53:07 AM	Helium MFC set to  0.000000
9/24/2011	11:53:07 AM	H2 MFC set to  500.000000
9/24/2011	11:53:07 AM	BCl3 MFC set to  0.000000
9/24/2011	11:53:07 AM	PHl3 MFC set to  0.000000
9/24/2011	11:53:07 AM	SiCl4 MFC set to  0.000000
9/24/2011	11:53:07 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:53:07 AM	Tube furnace set to 975
9/24/2011	11:54:37 AM	Helium valve closed
9/24/2011	11:54:37 AM	BCl3 valve closed
9/24/2011	11:54:37 AM	PH3 valve closed
9/24/2011	11:54:37 AM	SiCl4 pre valve closed
9/24/2011	11:54:37 AM	SiCl4 post valve closed
9/24/2011	11:54:37 AM	Main Vac valve closed
9/24/2011	11:54:37 AM	Bypass valve closed
9/24/2011	11:54:37 AM	H2 valve opened
9/24/2011	11:54:37 AM	Bubbler valve opened
9/24/2011	11:54:37 AM	Helium MFC set to  0.000000
9/24/2011	11:54:37 AM	H2 MFC set to  500.000000
9/24/2011	11:54:37 AM	BCl3 MFC set to  0.000000
9/24/2011	11:54:37 AM	PHl3 MFC set to  0.000000
9/24/2011	11:54:37 AM	SiCl4 MFC set to  0.000000
9/24/2011	11:54:37 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:54:37 AM	Tube furnace set to 950
9/24/2011	11:56:07 AM	Helium valve closed
9/24/2011	11:56:07 AM	BCl3 valve closed
9/24/2011	11:56:07 AM	PH3 valve closed
9/24/2011	11:56:07 AM	SiCl4 pre valve closed
9/24/2011	11:56:07 AM	SiCl4 post valve closed
9/24/2011	11:56:07 AM	Main Vac valve closed
9/24/2011	11:56:07 AM	Bypass valve closed
9/24/2011	11:56:07 AM	H2 valve opened
9/24/2011	11:56:07 AM	Bubbler valve opened
9/24/2011	11:56:07 AM	Helium MFC set to  0.000000
9/24/2011	11:56:07 AM	H2 MFC set to  500.000000
9/24/2011	11:56:07 AM	BCl3 MFC set to  0.000000
9/24/2011	11:56:07 AM	PHl3 MFC set to  0.000000
9/24/2011	11:56:07 AM	SiCl4 MFC set to  0.000000
9/24/2011	11:56:07 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:56:07 AM	Tube furnace set to 925
9/24/2011	11:57:37 AM	Helium valve closed
9/24/2011	11:57:37 AM	BCl3 valve closed
9/24/2011	11:57:37 AM	PH3 valve closed
9/24/2011	11:57:37 AM	SiCl4 pre valve closed
9/24/2011	11:57:37 AM	SiCl4 post valve closed
9/24/2011	11:57:37 AM	Main Vac valve closed
9/24/2011	11:57:37 AM	Bypass valve closed
9/24/2011	11:57:37 AM	H2 valve opened
9/24/2011	11:57:37 AM	Bubbler valve opened
9/24/2011	11:57:37 AM	Helium MFC set to  0.000000
9/24/2011	11:57:37 AM	H2 MFC set to  500.000000
9/24/2011	11:57:37 AM	BCl3 MFC set to  0.000000
9/24/2011	11:57:37 AM	PHl3 MFC set to  0.000000
9/24/2011	11:57:37 AM	SiCl4 MFC set to  0.000000
9/24/2011	11:57:37 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:57:38 AM	Tube furnace set to 900
9/24/2011	11:59:08 AM	H2 valve closed
9/24/2011	11:59:08 AM	BCl3 valve closed
9/24/2011	11:59:08 AM	PH3 valve closed
9/24/2011	11:59:08 AM	SiCl4 pre valve closed
9/24/2011	11:59:08 AM	SiCl4 post valve closed
9/24/2011	11:59:08 AM	Main Vac valve closed
9/24/2011	11:59:08 AM	Bypass valve closed
9/24/2011	11:59:08 AM	Helium valve opened
9/24/2011	11:59:08 AM	Bubbler valve opened
9/24/2011	11:59:08 AM	Helium MFC set to  500.000000
9/24/2011	11:59:08 AM	H2 MFC set to  0.000000
9/24/2011	11:59:08 AM	BCl3 MFC set to  0.000000
9/24/2011	11:59:08 AM	PHl3 MFC set to  0.000000
9/24/2011	11:59:08 AM	SiCl4 MFC set to  0.000000
9/24/2011	11:59:08 AM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:59:08 AM	Tube furnace set to 875
9/24/2011	12:00:38 PM	H2 valve closed
9/24/2011	12:00:38 PM	BCl3 valve closed
9/24/2011	12:00:38 PM	PH3 valve closed
9/24/2011	12:00:38 PM	SiCl4 pre valve closed
9/24/2011	12:00:38 PM	SiCl4 post valve closed
9/24/2011	12:00:38 PM	Main Vac valve closed
9/24/2011	12:00:38 PM	Bypass valve closed
9/24/2011	12:00:38 PM	Helium valve opened
9/24/2011	12:00:38 PM	Bubbler valve opened
9/24/2011	12:00:38 PM	Helium MFC set to  500.000000
9/24/2011	12:00:38 PM	H2 MFC set to  0.000000
9/24/2011	12:00:38 PM	BCl3 MFC set to  0.000000
9/24/2011	12:00:38 PM	PHl3 MFC set to  0.000000
9/24/2011	12:00:38 PM	SiCl4 MFC set to  0.000000
9/24/2011	12:00:38 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	12:00:38 PM	Tube furnace set to 850
9/24/2011	12:02:08 PM	H2 valve closed
9/24/2011	12:02:08 PM	BCl3 valve closed
9/24/2011	12:02:08 PM	PH3 valve closed
9/24/2011	12:02:08 PM	SiCl4 pre valve closed
9/24/2011	12:02:08 PM	SiCl4 post valve closed
9/24/2011	12:02:08 PM	Main Vac valve closed
9/24/2011	12:02:08 PM	Bypass valve closed
9/24/2011	12:02:08 PM	Helium valve opened
9/24/2011	12:02:08 PM	Bubbler valve opened
9/24/2011	12:02:08 PM	Helium MFC set to  500.000000
9/24/2011	12:02:08 PM	H2 MFC set to  0.000000
9/24/2011	12:02:08 PM	BCl3 MFC set to  0.000000
9/24/2011	12:02:08 PM	PHl3 MFC set to  0.000000
9/24/2011	12:02:08 PM	SiCl4 MFC set to  0.000000
9/24/2011	12:02:08 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	12:02:08 PM	Tube furnace set to 825
9/24/2011	12:03:38 PM	H2 valve closed
9/24/2011	12:03:38 PM	BCl3 valve closed
9/24/2011	12:03:38 PM	PH3 valve closed
9/24/2011	12:03:38 PM	SiCl4 pre valve closed
9/24/2011	12:03:38 PM	SiCl4 post valve closed
9/24/2011	12:03:38 PM	Main Vac valve closed
9/24/2011	12:03:38 PM	Bypass valve closed
9/24/2011	12:03:38 PM	Helium valve opened
9/24/2011	12:03:38 PM	Bubbler valve opened
9/24/2011	12:03:38 PM	Helium MFC set to  500.000000
9/24/2011	12:03:38 PM	H2 MFC set to  0.000000
9/24/2011	12:03:38 PM	BCl3 MFC set to  0.000000
9/24/2011	12:03:38 PM	PHl3 MFC set to  0.000000
9/24/2011	12:03:38 PM	SiCl4 MFC set to  0.000000
9/24/2011	12:03:38 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	12:03:38 PM	Tube furnace set to 800
9/24/2011	12:05:08 PM	H2 valve closed
9/24/2011	12:05:08 PM	BCl3 valve closed
9/24/2011	12:05:08 PM	PH3 valve closed
9/24/2011	12:05:08 PM	SiCl4 pre valve closed
9/24/2011	12:05:08 PM	SiCl4 post valve closed
9/24/2011	12:05:08 PM	Main Vac valve closed
9/24/2011	12:05:08 PM	Bypass valve closed
9/24/2011	12:05:08 PM	Helium valve opened
9/24/2011	12:05:08 PM	Bubbler valve opened
9/24/2011	12:05:08 PM	Helium MFC set to  500.000000
9/24/2011	12:05:08 PM	H2 MFC set to  0.000000
9/24/2011	12:05:08 PM	BCl3 MFC set to  0.000000
9/24/2011	12:05:08 PM	PHl3 MFC set to  0.000000
9/24/2011	12:05:08 PM	SiCl4 MFC set to  0.000000
9/24/2011	12:05:08 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	12:05:09 PM	Tube furnace set to 0
9/24/2011	12:20:09 PM	Helium valve closed
9/24/2011	12:20:09 PM	H2 valve closed
9/24/2011	12:20:09 PM	BCl3 valve closed
9/24/2011	12:20:09 PM	PH3 valve closed
9/24/2011	12:20:09 PM	SiCl4 pre valve closed
9/24/2011	12:20:09 PM	SiCl4 post valve closed
9/24/2011	12:20:09 PM	Main Vac valve closed
9/24/2011	12:20:09 PM	Bypass valve closed
9/24/2011	12:20:09 PM	Bubbler valve closed
9/24/2011	12:20:09 PM	Helium MFC set to  0.000000
9/24/2011	12:20:09 PM	H2 MFC set to  0.000000
9/24/2011	12:20:09 PM	BCl3 MFC set to  0.000000
9/24/2011	12:20:09 PM	PHl3 MFC set to  0.000000
9/24/2011	12:20:09 PM	SiCl4 MFC set to  0.000000
9/24/2011	12:20:09 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	12:20:09 PM	Tube furnace set to 0
9/24/2011	12:57:26 PM	Run aborted at 12:57 PM
9/24/2011	12:57:26 PM	Helium valve closed
9/24/2011	12:57:26 PM	H2 valve closed
9/24/2011	12:57:26 PM	BCl3 valve closed
9/24/2011	12:57:26 PM	PH3 valve closed
9/24/2011	12:57:26 PM	SiCl4 pre valve closed
9/24/2011	12:57:26 PM	SiCl4 post valve closed
9/24/2011	12:57:26 PM	Bypass valve closed
9/24/2011	12:57:26 PM	Main Vac valve closed
9/24/2011	12:57:26 PM	Bubbler valve closed
9/24/2011	12:57:26 PM	Helium MFC set to  0.000000
9/24/2011	12:57:26 PM	H2 MFC set to  0.000000
9/24/2011	12:57:26 PM	BCl3 MFC set to  0.000000
9/24/2011	12:57:26 PM	PHl3 MFC set to  0.000000
9/24/2011	12:57:26 PM	SiCl4 MFC set to  0.000000
9/24/2011	12:57:27 PM	Tube furnace set to 0
9/24/2011	12:57:31 PM	Tube furnace set to 150
9/24/2011	12:59:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/24/2011	12:59:39 PM	Recipe started at 12:59 PM
9/24/2011	12:59:39 PM	Helium valve closed
9/24/2011	12:59:39 PM	H2 valve closed
9/24/2011	12:59:39 PM	BCl3 valve closed
9/24/2011	12:59:39 PM	PH3 valve closed
9/24/2011	12:59:39 PM	SiCl4 pre valve closed
9/24/2011	12:59:39 PM	SiCl4 post valve closed
9/24/2011	12:59:39 PM	Main Vac valve closed
9/24/2011	12:59:39 PM	Bypass valve closed
9/24/2011	12:59:39 PM	Bubbler valve closed
9/24/2011	12:59:39 PM	Helium MFC set to  0.000000
9/24/2011	12:59:39 PM	H2 MFC set to  0.000000
9/24/2011	12:59:39 PM	BCl3 MFC set to  0.000000
9/24/2011	12:59:39 PM	PHl3 MFC set to  0.000000
9/24/2011	12:59:39 PM	SiCl4 MFC set to  0.000000
9/24/2011	12:59:39 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	12:59:39 PM	Tube furnace set to 0
9/24/2011	12:59:42 PM	H2 valve closed
9/24/2011	12:59:42 PM	BCl3 valve closed
9/24/2011	12:59:42 PM	PH3 valve closed
9/24/2011	12:59:42 PM	SiCl4 pre valve closed
9/24/2011	12:59:42 PM	SiCl4 post valve closed
9/24/2011	12:59:42 PM	Main Vac valve closed
9/24/2011	12:59:42 PM	Bypass valve closed
9/24/2011	12:59:42 PM	Bubbler valve closed
9/24/2011	12:59:42 PM	Helium valve opened
9/24/2011	12:59:42 PM	Helium MFC set to  500.000000
9/24/2011	12:59:42 PM	H2 MFC set to  0.000000
9/24/2011	12:59:42 PM	BCl3 MFC set to  0.000000
9/24/2011	12:59:42 PM	PHl3 MFC set to  0.000000
9/24/2011	12:59:42 PM	SiCl4 MFC set to  0.000000
9/24/2011	12:59:42 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	12:59:43 PM	Tube furnace set to 0
9/24/2011	12:59:50 PM	Helium valve closed
9/24/2011	12:59:50 PM	H2 valve closed
9/24/2011	12:59:50 PM	BCl3 valve closed
9/24/2011	12:59:50 PM	PH3 valve closed
9/24/2011	12:59:50 PM	SiCl4 pre valve closed
9/24/2011	12:59:50 PM	SiCl4 post valve closed
9/24/2011	12:59:50 PM	Main Vac valve closed
9/24/2011	12:59:50 PM	Bypass valve closed
9/24/2011	12:59:50 PM	Bubbler valve closed
9/24/2011	12:59:50 PM	Helium MFC set to  0.000000
9/24/2011	12:59:50 PM	H2 MFC set to  0.000000
9/24/2011	12:59:50 PM	BCl3 MFC set to  0.000000
9/24/2011	12:59:50 PM	PHl3 MFC set to  0.000000
9/24/2011	12:59:50 PM	SiCl4 MFC set to  0.000000
9/24/2011	12:59:50 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	12:59:50 PM	Tube furnace set to 0
9/24/2011	12:59:51 PM	Run finished at 12:59 PM
9/24/2011	12:59:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/24/2011	12:59:58 PM	Helium MFC set to  500.000000
9/24/2011	1:00:00 PM	Helium valve opened
9/24/2011	1:00:04 PM	Bubbler valve opened
9/24/2011	1:04:11 PM	Bubbler valve closed
9/24/2011	1:04:12 PM	Helium valve closed
9/24/2011	1:04:15 PM	Helium MFC set to  0.000000
9/24/2011	1:04:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/24/2011	1:04:20 PM	Recipe started at 1:04 PM
9/24/2011	1:04:20 PM	Helium valve closed
9/24/2011	1:04:20 PM	H2 valve closed
9/24/2011	1:04:20 PM	BCl3 valve closed
9/24/2011	1:04:20 PM	PH3 valve closed
9/24/2011	1:04:20 PM	SiCl4 pre valve closed
9/24/2011	1:04:20 PM	SiCl4 post valve closed
9/24/2011	1:04:20 PM	Main Vac valve closed
9/24/2011	1:04:20 PM	Bubbler valve closed
9/24/2011	1:04:20 PM	Bypass valve opened
9/24/2011	1:04:20 PM	Helium MFC set to  0.000000
9/24/2011	1:04:20 PM	H2 MFC set to  0.000000
9/24/2011	1:04:20 PM	BCl3 MFC set to  0.000000
9/24/2011	1:04:20 PM	PHl3 MFC set to  0.000000
9/24/2011	1:04:20 PM	SiCl4 MFC set to  0.000000
9/24/2011	1:04:20 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	1:04:20 PM	Tube furnace set to 0
9/24/2011	1:05:19 PM	Helium valve closed
9/24/2011	1:05:19 PM	H2 valve closed
9/24/2011	1:05:19 PM	BCl3 valve closed
9/24/2011	1:05:19 PM	PH3 valve closed
9/24/2011	1:05:19 PM	SiCl4 pre valve closed
9/24/2011	1:05:19 PM	SiCl4 post valve closed
9/24/2011	1:05:19 PM	Main Vac valve closed
9/24/2011	1:05:19 PM	Bubbler valve closed
9/24/2011	1:05:19 PM	Bypass valve opened
9/24/2011	1:05:19 PM	Helium MFC set to  0.000000
9/24/2011	1:05:19 PM	H2 MFC set to  0.000000
9/24/2011	1:05:19 PM	BCl3 MFC set to  0.000000
9/24/2011	1:05:19 PM	PHl3 MFC set to  0.000000
9/24/2011	1:05:19 PM	SiCl4 MFC set to  0.000000
9/24/2011	1:05:19 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	1:05:20 PM	Tube furnace set to 0
9/24/2011	1:06:20 PM	Helium valve closed
9/24/2011	1:06:20 PM	H2 valve closed
9/24/2011	1:06:20 PM	BCl3 valve closed
9/24/2011	1:06:20 PM	PH3 valve closed
9/24/2011	1:06:20 PM	SiCl4 pre valve closed
9/24/2011	1:06:20 PM	SiCl4 post valve closed
9/24/2011	1:06:20 PM	Bypass valve closed
9/24/2011	1:06:20 PM	Bubbler valve closed
9/24/2011	1:06:20 PM	Main Vac valve opened
9/24/2011	1:06:20 PM	Helium MFC set to  0.000000
9/24/2011	1:06:20 PM	H2 MFC set to  0.000000
9/24/2011	1:06:20 PM	BCl3 MFC set to  0.000000
9/24/2011	1:06:20 PM	PHl3 MFC set to  0.000000
9/24/2011	1:06:20 PM	SiCl4 MFC set to  0.000000
9/24/2011	1:06:20 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	1:06:20 PM	Tube furnace set to 0
9/24/2011	1:06:21 PM	Run finished at 1:06 PM
9/24/2011	1:06:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/24/2011	1:54:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/24/2011	1:54:09 PM	Recipe started at 1:54 PM
9/24/2011	1:54:09 PM	Helium valve closed
9/24/2011	1:54:09 PM	H2 valve closed
9/24/2011	1:54:09 PM	BCl3 valve closed
9/24/2011	1:54:09 PM	PH3 valve closed
9/24/2011	1:54:09 PM	SiCl4 pre valve closed
9/24/2011	1:54:09 PM	SiCl4 post valve closed
9/24/2011	1:54:09 PM	Main Vac valve closed
9/24/2011	1:54:09 PM	Bypass valve closed
9/24/2011	1:54:09 PM	Bubbler valve closed
9/24/2011	1:54:09 PM	Helium MFC set to  0.000000
9/24/2011	1:54:09 PM	H2 MFC set to  0.000000
9/24/2011	1:54:09 PM	BCl3 MFC set to  0.000000
9/24/2011	1:54:09 PM	PHl3 MFC set to  0.000000
9/24/2011	1:54:09 PM	SiCl4 MFC set to  0.000000
9/24/2011	1:54:09 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	1:54:09 PM	Tube furnace set to 0
9/24/2011	1:54:12 PM	H2 valve closed
9/24/2011	1:54:12 PM	BCl3 valve closed
9/24/2011	1:54:12 PM	PH3 valve closed
9/24/2011	1:54:12 PM	SiCl4 pre valve closed
9/24/2011	1:54:12 PM	SiCl4 post valve closed
9/24/2011	1:54:12 PM	Main Vac valve closed
9/24/2011	1:54:12 PM	Bypass valve closed
9/24/2011	1:54:12 PM	Bubbler valve closed
9/24/2011	1:54:12 PM	Helium valve opened
9/24/2011	1:54:12 PM	Helium MFC set to  500.000000
9/24/2011	1:54:12 PM	H2 MFC set to  0.000000
9/24/2011	1:54:12 PM	BCl3 MFC set to  0.000000
9/24/2011	1:54:12 PM	PHl3 MFC set to  0.000000
9/24/2011	1:54:12 PM	SiCl4 MFC set to  0.000000
9/24/2011	1:54:12 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	1:54:12 PM	Tube furnace set to 0
9/24/2011	1:55:15 PM	Helium valve closed
9/24/2011	1:55:15 PM	H2 valve closed
9/24/2011	1:55:15 PM	BCl3 valve closed
9/24/2011	1:55:15 PM	PH3 valve closed
9/24/2011	1:55:15 PM	SiCl4 pre valve closed
9/24/2011	1:55:15 PM	SiCl4 post valve closed
9/24/2011	1:55:15 PM	Main Vac valve closed
9/24/2011	1:55:15 PM	Bypass valve closed
9/24/2011	1:55:15 PM	Bubbler valve closed
9/24/2011	1:55:15 PM	Helium MFC set to  0.000000
9/24/2011	1:55:15 PM	H2 MFC set to  0.000000
9/24/2011	1:55:15 PM	BCl3 MFC set to  0.000000
9/24/2011	1:55:15 PM	PHl3 MFC set to  0.000000
9/24/2011	1:55:15 PM	SiCl4 MFC set to  0.000000
9/24/2011	1:55:15 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	1:55:16 PM	Tube furnace set to 0
9/24/2011	1:55:17 PM	Run finished at 1:55 PM
9/24/2011	1:55:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/24/2011	1:58:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/24/2011	1:58:41 PM	Recipe started at 1:58 PM
9/24/2011	1:58:41 PM	Helium valve closed
9/24/2011	1:58:41 PM	H2 valve closed
9/24/2011	1:58:41 PM	BCl3 valve closed
9/24/2011	1:58:41 PM	PH3 valve closed
9/24/2011	1:58:41 PM	SiCl4 pre valve closed
9/24/2011	1:58:41 PM	SiCl4 post valve closed
9/24/2011	1:58:41 PM	Main Vac valve closed
9/24/2011	1:58:41 PM	Bubbler valve closed
9/24/2011	1:58:41 PM	Bypass valve opened
9/24/2011	1:58:41 PM	Helium MFC set to  0.000000
9/24/2011	1:58:41 PM	H2 MFC set to  0.000000
9/24/2011	1:58:41 PM	BCl3 MFC set to  0.000000
9/24/2011	1:58:41 PM	PHl3 MFC set to  0.000000
9/24/2011	1:58:41 PM	SiCl4 MFC set to  0.000000
9/24/2011	1:58:41 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	1:58:42 PM	Tube furnace set to 0
9/24/2011	1:59:55 PM	Helium valve closed
9/24/2011	1:59:55 PM	H2 valve closed
9/24/2011	1:59:55 PM	BCl3 valve closed
9/24/2011	1:59:55 PM	PH3 valve closed
9/24/2011	1:59:55 PM	SiCl4 pre valve closed
9/24/2011	1:59:55 PM	SiCl4 post valve closed
9/24/2011	1:59:55 PM	Main Vac valve closed
9/24/2011	1:59:55 PM	Bubbler valve closed
9/24/2011	1:59:55 PM	Bypass valve opened
9/24/2011	1:59:55 PM	Helium MFC set to  0.000000
9/24/2011	1:59:55 PM	H2 MFC set to  0.000000
9/24/2011	1:59:55 PM	BCl3 MFC set to  0.000000
9/24/2011	1:59:55 PM	PHl3 MFC set to  0.000000
9/24/2011	1:59:55 PM	SiCl4 MFC set to  0.000000
9/24/2011	1:59:55 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	1:59:55 PM	Tube furnace set to 0
9/24/2011	2:00:55 PM	Helium valve closed
9/24/2011	2:00:55 PM	H2 valve closed
9/24/2011	2:00:55 PM	BCl3 valve closed
9/24/2011	2:00:55 PM	PH3 valve closed
9/24/2011	2:00:55 PM	SiCl4 pre valve closed
9/24/2011	2:00:55 PM	SiCl4 post valve closed
9/24/2011	2:00:55 PM	Bypass valve closed
9/24/2011	2:00:55 PM	Bubbler valve closed
9/24/2011	2:00:55 PM	Main Vac valve opened
9/24/2011	2:00:55 PM	Helium MFC set to  0.000000
9/24/2011	2:00:55 PM	H2 MFC set to  0.000000
9/24/2011	2:00:55 PM	BCl3 MFC set to  0.000000
9/24/2011	2:00:55 PM	PHl3 MFC set to  0.000000
9/24/2011	2:00:55 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:00:55 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:00:55 PM	Tube furnace set to 0
9/24/2011	2:00:56 PM	Run finished at 2:00 PM
9/24/2011	2:00:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/24/2011	2:02:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/24/2011	2:02:40 PM	Recipe started at 2:02 PM
9/24/2011	2:02:40 PM	Helium valve closed
9/24/2011	2:02:40 PM	H2 valve closed
9/24/2011	2:02:41 PM	BCl3 valve closed
9/24/2011	2:02:41 PM	PH3 valve closed
9/24/2011	2:02:41 PM	SiCl4 pre valve closed
9/24/2011	2:02:41 PM	SiCl4 post valve closed
9/24/2011	2:02:41 PM	Main Vac valve closed
9/24/2011	2:02:41 PM	Bubbler valve closed
9/24/2011	2:02:41 PM	Bypass valve opened
9/24/2011	2:02:41 PM	Helium MFC set to  0.000000
9/24/2011	2:02:41 PM	H2 MFC set to  0.000000
9/24/2011	2:02:41 PM	BCl3 MFC set to  0.000000
9/24/2011	2:02:41 PM	PHl3 MFC set to  0.000000
9/24/2011	2:02:41 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:02:41 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:02:41 PM	Tube furnace set to 0
9/24/2011	2:02:41 PM	Helium valve closed
9/24/2011	2:02:41 PM	H2 valve closed
9/24/2011	2:02:41 PM	BCl3 valve closed
9/24/2011	2:02:41 PM	PH3 valve closed
9/24/2011	2:02:41 PM	SiCl4 pre valve closed
9/24/2011	2:02:41 PM	SiCl4 post valve closed
9/24/2011	2:02:41 PM	Main Vac valve closed
9/24/2011	2:02:41 PM	Bubbler valve closed
9/24/2011	2:02:41 PM	Bypass valve opened
9/24/2011	2:02:41 PM	Helium MFC set to  0.000000
9/24/2011	2:02:41 PM	H2 MFC set to  0.000000
9/24/2011	2:02:41 PM	BCl3 MFC set to  0.000000
9/24/2011	2:02:41 PM	PHl3 MFC set to  0.000000
9/24/2011	2:02:41 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:02:41 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:02:41 PM	Tube furnace set to 0
9/24/2011	2:02:49 PM	Helium valve closed
9/24/2011	2:02:49 PM	H2 valve closed
9/24/2011	2:02:49 PM	BCl3 valve closed
9/24/2011	2:02:49 PM	PH3 valve closed
9/24/2011	2:02:49 PM	SiCl4 pre valve closed
9/24/2011	2:02:49 PM	SiCl4 post valve closed
9/24/2011	2:02:49 PM	Bypass valve closed
9/24/2011	2:02:49 PM	Bubbler valve closed
9/24/2011	2:02:49 PM	Main Vac valve opened
9/24/2011	2:02:49 PM	Helium MFC set to  0.000000
9/24/2011	2:02:49 PM	H2 MFC set to  0.000000
9/24/2011	2:02:49 PM	BCl3 MFC set to  0.000000
9/24/2011	2:02:49 PM	PHl3 MFC set to  0.000000
9/24/2011	2:02:49 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:02:49 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:02:49 PM	Tube furnace set to 0
9/24/2011	2:03:19 PM	H2 valve closed
9/24/2011	2:03:19 PM	BCl3 valve closed
9/24/2011	2:03:19 PM	PH3 valve closed
9/24/2011	2:03:19 PM	SiCl4 pre valve closed
9/24/2011	2:03:19 PM	SiCl4 post valve closed
9/24/2011	2:03:19 PM	Bypass valve closed
9/24/2011	2:03:19 PM	Bubbler valve closed
9/24/2011	2:03:19 PM	Helium valve opened
9/24/2011	2:03:19 PM	Main Vac valve opened
9/24/2011	2:03:19 PM	Helium MFC set to  20.000000
9/24/2011	2:03:19 PM	H2 MFC set to  0.000000
9/24/2011	2:03:19 PM	BCl3 MFC set to  0.000000
9/24/2011	2:03:19 PM	PHl3 MFC set to  0.000000
9/24/2011	2:03:19 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:03:19 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:03:19 PM	Tube furnace set to 0
9/24/2011	2:03:49 PM	Helium valve closed
9/24/2011	2:03:49 PM	H2 valve closed
9/24/2011	2:03:49 PM	BCl3 valve closed
9/24/2011	2:03:49 PM	PH3 valve closed
9/24/2011	2:03:49 PM	SiCl4 pre valve closed
9/24/2011	2:03:49 PM	SiCl4 post valve closed
9/24/2011	2:03:49 PM	Bypass valve closed
9/24/2011	2:03:49 PM	Bubbler valve closed
9/24/2011	2:03:49 PM	Main Vac valve opened
9/24/2011	2:03:49 PM	Helium MFC set to  0.000000
9/24/2011	2:03:49 PM	H2 MFC set to  0.000000
9/24/2011	2:03:49 PM	BCl3 MFC set to  0.000000
9/24/2011	2:03:49 PM	PHl3 MFC set to  0.000000
9/24/2011	2:03:49 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:03:49 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:03:50 PM	Tube furnace set to 0
9/24/2011	2:04:20 PM	H2 valve closed
9/24/2011	2:04:20 PM	BCl3 valve closed
9/24/2011	2:04:20 PM	PH3 valve closed
9/24/2011	2:04:20 PM	SiCl4 pre valve closed
9/24/2011	2:04:20 PM	SiCl4 post valve closed
9/24/2011	2:04:20 PM	Bypass valve closed
9/24/2011	2:04:20 PM	Bubbler valve closed
9/24/2011	2:04:20 PM	Helium valve opened
9/24/2011	2:04:20 PM	Main Vac valve opened
9/24/2011	2:04:20 PM	Helium MFC set to  20.000000
9/24/2011	2:04:20 PM	H2 MFC set to  0.000000
9/24/2011	2:04:20 PM	BCl3 MFC set to  0.000000
9/24/2011	2:04:20 PM	PHl3 MFC set to  0.000000
9/24/2011	2:04:20 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:04:20 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:04:20 PM	Tube furnace set to 0
9/24/2011	2:04:50 PM	Helium valve closed
9/24/2011	2:04:50 PM	H2 valve closed
9/24/2011	2:04:50 PM	BCl3 valve closed
9/24/2011	2:04:50 PM	PH3 valve closed
9/24/2011	2:04:50 PM	SiCl4 pre valve closed
9/24/2011	2:04:50 PM	SiCl4 post valve closed
9/24/2011	2:04:50 PM	Bypass valve closed
9/24/2011	2:04:50 PM	Bubbler valve closed
9/24/2011	2:04:50 PM	Main Vac valve opened
9/24/2011	2:04:50 PM	Helium MFC set to  0.000000
9/24/2011	2:04:50 PM	H2 MFC set to  0.000000
9/24/2011	2:04:50 PM	BCl3 MFC set to  0.000000
9/24/2011	2:04:50 PM	PHl3 MFC set to  0.000000
9/24/2011	2:04:50 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:04:50 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:04:50 PM	Tube furnace set to 0
9/24/2011	2:05:20 PM	H2 valve closed
9/24/2011	2:05:20 PM	BCl3 valve closed
9/24/2011	2:05:20 PM	PH3 valve closed
9/24/2011	2:05:20 PM	SiCl4 pre valve closed
9/24/2011	2:05:20 PM	SiCl4 post valve closed
9/24/2011	2:05:20 PM	Bypass valve closed
9/24/2011	2:05:20 PM	Bubbler valve closed
9/24/2011	2:05:20 PM	Helium valve opened
9/24/2011	2:05:20 PM	Main Vac valve opened
9/24/2011	2:05:20 PM	Helium MFC set to  20.000000
9/24/2011	2:05:20 PM	H2 MFC set to  0.000000
9/24/2011	2:05:20 PM	BCl3 MFC set to  0.000000
9/24/2011	2:05:20 PM	PHl3 MFC set to  0.000000
9/24/2011	2:05:20 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:05:20 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:05:20 PM	Tube furnace set to 0
9/24/2011	2:05:50 PM	Helium valve closed
9/24/2011	2:05:50 PM	H2 valve closed
9/24/2011	2:05:50 PM	BCl3 valve closed
9/24/2011	2:05:50 PM	PH3 valve closed
9/24/2011	2:05:50 PM	SiCl4 pre valve closed
9/24/2011	2:05:50 PM	SiCl4 post valve closed
9/24/2011	2:05:50 PM	Bypass valve closed
9/24/2011	2:05:50 PM	Bubbler valve closed
9/24/2011	2:05:50 PM	Main Vac valve opened
9/24/2011	2:05:50 PM	Helium MFC set to  0.000000
9/24/2011	2:05:50 PM	H2 MFC set to  0.000000
9/24/2011	2:05:50 PM	BCl3 MFC set to  0.000000
9/24/2011	2:05:50 PM	PHl3 MFC set to  0.000000
9/24/2011	2:05:50 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:05:50 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:05:50 PM	Tube furnace set to 0
9/24/2011	2:06:20 PM	H2 valve closed
9/24/2011	2:06:20 PM	BCl3 valve closed
9/24/2011	2:06:20 PM	PH3 valve closed
9/24/2011	2:06:20 PM	SiCl4 pre valve closed
9/24/2011	2:06:20 PM	SiCl4 post valve closed
9/24/2011	2:06:20 PM	Bypass valve closed
9/24/2011	2:06:20 PM	Bubbler valve closed
9/24/2011	2:06:20 PM	Helium valve opened
9/24/2011	2:06:20 PM	Main Vac valve opened
9/24/2011	2:06:20 PM	Helium MFC set to  20.000000
9/24/2011	2:06:20 PM	H2 MFC set to  0.000000
9/24/2011	2:06:20 PM	BCl3 MFC set to  0.000000
9/24/2011	2:06:20 PM	PHl3 MFC set to  0.000000
9/24/2011	2:06:20 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:06:20 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:06:21 PM	Tube furnace set to 0
9/24/2011	2:06:51 PM	Helium valve closed
9/24/2011	2:06:51 PM	H2 valve closed
9/24/2011	2:06:51 PM	BCl3 valve closed
9/24/2011	2:06:51 PM	PH3 valve closed
9/24/2011	2:06:51 PM	SiCl4 pre valve closed
9/24/2011	2:06:51 PM	SiCl4 post valve closed
9/24/2011	2:06:51 PM	Bypass valve closed
9/24/2011	2:06:51 PM	Bubbler valve closed
9/24/2011	2:06:51 PM	Main Vac valve opened
9/24/2011	2:06:51 PM	Helium MFC set to  0.000000
9/24/2011	2:06:51 PM	H2 MFC set to  0.000000
9/24/2011	2:06:51 PM	BCl3 MFC set to  0.000000
9/24/2011	2:06:51 PM	PHl3 MFC set to  0.000000
9/24/2011	2:06:51 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:06:51 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:06:51 PM	Tube furnace set to 0
9/24/2011	2:07:21 PM	H2 valve closed
9/24/2011	2:07:21 PM	BCl3 valve closed
9/24/2011	2:07:21 PM	PH3 valve closed
9/24/2011	2:07:21 PM	SiCl4 pre valve closed
9/24/2011	2:07:21 PM	SiCl4 post valve closed
9/24/2011	2:07:21 PM	Bypass valve closed
9/24/2011	2:07:21 PM	Bubbler valve closed
9/24/2011	2:07:21 PM	Helium valve opened
9/24/2011	2:07:21 PM	Main Vac valve opened
9/24/2011	2:07:21 PM	Helium MFC set to  20.000000
9/24/2011	2:07:21 PM	H2 MFC set to  0.000000
9/24/2011	2:07:21 PM	BCl3 MFC set to  0.000000
9/24/2011	2:07:21 PM	PHl3 MFC set to  0.000000
9/24/2011	2:07:21 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:07:21 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:07:21 PM	Tube furnace set to 0
9/24/2011	2:07:51 PM	Helium valve closed
9/24/2011	2:07:51 PM	H2 valve closed
9/24/2011	2:07:51 PM	BCl3 valve closed
9/24/2011	2:07:51 PM	PH3 valve closed
9/24/2011	2:07:51 PM	SiCl4 pre valve closed
9/24/2011	2:07:51 PM	SiCl4 post valve closed
9/24/2011	2:07:51 PM	Bypass valve closed
9/24/2011	2:07:51 PM	Bubbler valve closed
9/24/2011	2:07:51 PM	Main Vac valve opened
9/24/2011	2:07:51 PM	Helium MFC set to  0.000000
9/24/2011	2:07:51 PM	H2 MFC set to  0.000000
9/24/2011	2:07:51 PM	BCl3 MFC set to  0.000000
9/24/2011	2:07:51 PM	PHl3 MFC set to  0.000000
9/24/2011	2:07:51 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:07:51 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:07:51 PM	Tube furnace set to 0
9/24/2011	2:08:21 PM	H2 valve closed
9/24/2011	2:08:21 PM	BCl3 valve closed
9/24/2011	2:08:21 PM	PH3 valve closed
9/24/2011	2:08:21 PM	SiCl4 pre valve closed
9/24/2011	2:08:21 PM	SiCl4 post valve closed
9/24/2011	2:08:21 PM	Bypass valve closed
9/24/2011	2:08:21 PM	Bubbler valve closed
9/24/2011	2:08:21 PM	Helium valve opened
9/24/2011	2:08:21 PM	Main Vac valve opened
9/24/2011	2:08:21 PM	Helium MFC set to  20.000000
9/24/2011	2:08:21 PM	H2 MFC set to  0.000000
9/24/2011	2:08:21 PM	BCl3 MFC set to  0.000000
9/24/2011	2:08:21 PM	PHl3 MFC set to  0.000000
9/24/2011	2:08:21 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:08:21 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:08:21 PM	Tube furnace set to 0
9/24/2011	2:08:51 PM	Helium valve closed
9/24/2011	2:08:51 PM	H2 valve closed
9/24/2011	2:08:51 PM	BCl3 valve closed
9/24/2011	2:08:51 PM	PH3 valve closed
9/24/2011	2:08:51 PM	SiCl4 pre valve closed
9/24/2011	2:08:51 PM	SiCl4 post valve closed
9/24/2011	2:08:51 PM	Bypass valve closed
9/24/2011	2:08:51 PM	Bubbler valve closed
9/24/2011	2:08:51 PM	Main Vac valve opened
9/24/2011	2:08:51 PM	Helium MFC set to  0.000000
9/24/2011	2:08:51 PM	H2 MFC set to  0.000000
9/24/2011	2:08:52 PM	BCl3 MFC set to  0.000000
9/24/2011	2:08:52 PM	PHl3 MFC set to  0.000000
9/24/2011	2:08:52 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:08:52 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:08:52 PM	Tube furnace set to 0
9/24/2011	2:09:22 PM	H2 valve closed
9/24/2011	2:09:22 PM	BCl3 valve closed
9/24/2011	2:09:22 PM	PH3 valve closed
9/24/2011	2:09:22 PM	SiCl4 pre valve closed
9/24/2011	2:09:22 PM	SiCl4 post valve closed
9/24/2011	2:09:22 PM	Bypass valve closed
9/24/2011	2:09:22 PM	Bubbler valve closed
9/24/2011	2:09:22 PM	Helium valve opened
9/24/2011	2:09:22 PM	Main Vac valve opened
9/24/2011	2:09:22 PM	Helium MFC set to  20.000000
9/24/2011	2:09:22 PM	H2 MFC set to  0.000000
9/24/2011	2:09:22 PM	BCl3 MFC set to  0.000000
9/24/2011	2:09:22 PM	PHl3 MFC set to  0.000000
9/24/2011	2:09:22 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:09:22 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:09:22 PM	Tube furnace set to 0
9/24/2011	2:09:52 PM	Helium valve closed
9/24/2011	2:09:52 PM	H2 valve closed
9/24/2011	2:09:52 PM	BCl3 valve closed
9/24/2011	2:09:52 PM	PH3 valve closed
9/24/2011	2:09:52 PM	SiCl4 pre valve closed
9/24/2011	2:09:52 PM	SiCl4 post valve closed
9/24/2011	2:09:52 PM	Bypass valve closed
9/24/2011	2:09:52 PM	Bubbler valve closed
9/24/2011	2:09:52 PM	Main Vac valve opened
9/24/2011	2:09:52 PM	Helium MFC set to  0.000000
9/24/2011	2:09:52 PM	H2 MFC set to  0.000000
9/24/2011	2:09:52 PM	BCl3 MFC set to  0.000000
9/24/2011	2:09:52 PM	PHl3 MFC set to  0.000000
9/24/2011	2:09:52 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:09:52 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:09:52 PM	Tube furnace set to 0
9/24/2011	2:10:22 PM	H2 valve closed
9/24/2011	2:10:22 PM	BCl3 valve closed
9/24/2011	2:10:22 PM	PH3 valve closed
9/24/2011	2:10:22 PM	SiCl4 pre valve closed
9/24/2011	2:10:22 PM	SiCl4 post valve closed
9/24/2011	2:10:22 PM	Bypass valve closed
9/24/2011	2:10:22 PM	Bubbler valve closed
9/24/2011	2:10:22 PM	Helium valve opened
9/24/2011	2:10:22 PM	Main Vac valve opened
9/24/2011	2:10:22 PM	Helium MFC set to  20.000000
9/24/2011	2:10:22 PM	H2 MFC set to  0.000000
9/24/2011	2:10:22 PM	BCl3 MFC set to  0.000000
9/24/2011	2:10:22 PM	PHl3 MFC set to  0.000000
9/24/2011	2:10:22 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:10:22 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:10:22 PM	Tube furnace set to 0
9/24/2011	2:10:52 PM	Helium valve closed
9/24/2011	2:10:52 PM	H2 valve closed
9/24/2011	2:10:52 PM	BCl3 valve closed
9/24/2011	2:10:52 PM	PH3 valve closed
9/24/2011	2:10:52 PM	SiCl4 pre valve closed
9/24/2011	2:10:52 PM	SiCl4 post valve closed
9/24/2011	2:10:52 PM	Bypass valve closed
9/24/2011	2:10:52 PM	Bubbler valve closed
9/24/2011	2:10:52 PM	Main Vac valve opened
9/24/2011	2:10:52 PM	Helium MFC set to  0.000000
9/24/2011	2:10:52 PM	H2 MFC set to  0.000000
9/24/2011	2:10:52 PM	BCl3 MFC set to  0.000000
9/24/2011	2:10:52 PM	PHl3 MFC set to  0.000000
9/24/2011	2:10:52 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:10:52 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:10:53 PM	Tube furnace set to 0
9/24/2011	2:11:23 PM	H2 valve closed
9/24/2011	2:11:23 PM	BCl3 valve closed
9/24/2011	2:11:23 PM	PH3 valve closed
9/24/2011	2:11:23 PM	SiCl4 pre valve closed
9/24/2011	2:11:23 PM	SiCl4 post valve closed
9/24/2011	2:11:23 PM	Bypass valve closed
9/24/2011	2:11:23 PM	Bubbler valve closed
9/24/2011	2:11:23 PM	Helium valve opened
9/24/2011	2:11:23 PM	Main Vac valve opened
9/24/2011	2:11:23 PM	Helium MFC set to  20.000000
9/24/2011	2:11:23 PM	H2 MFC set to  0.000000
9/24/2011	2:11:23 PM	BCl3 MFC set to  0.000000
9/24/2011	2:11:23 PM	PHl3 MFC set to  0.000000
9/24/2011	2:11:23 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:11:23 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:11:23 PM	Tube furnace set to 0
9/24/2011	2:11:53 PM	Helium valve closed
9/24/2011	2:11:53 PM	H2 valve closed
9/24/2011	2:11:53 PM	BCl3 valve closed
9/24/2011	2:11:53 PM	PH3 valve closed
9/24/2011	2:11:53 PM	SiCl4 pre valve closed
9/24/2011	2:11:53 PM	SiCl4 post valve closed
9/24/2011	2:11:53 PM	Bypass valve closed
9/24/2011	2:11:53 PM	Bubbler valve closed
9/24/2011	2:11:53 PM	Main Vac valve opened
9/24/2011	2:11:53 PM	Helium MFC set to  0.000000
9/24/2011	2:11:53 PM	H2 MFC set to  0.000000
9/24/2011	2:11:53 PM	BCl3 MFC set to  0.000000
9/24/2011	2:11:53 PM	PHl3 MFC set to  0.000000
9/24/2011	2:11:53 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:11:53 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:11:53 PM	Tube furnace set to 0
9/24/2011	2:12:23 PM	H2 valve closed
9/24/2011	2:12:23 PM	BCl3 valve closed
9/24/2011	2:12:23 PM	PH3 valve closed
9/24/2011	2:12:23 PM	SiCl4 pre valve closed
9/24/2011	2:12:23 PM	SiCl4 post valve closed
9/24/2011	2:12:23 PM	Bypass valve closed
9/24/2011	2:12:23 PM	Bubbler valve closed
9/24/2011	2:12:23 PM	Helium valve opened
9/24/2011	2:12:23 PM	Main Vac valve opened
9/24/2011	2:12:23 PM	Helium MFC set to  20.000000
9/24/2011	2:12:23 PM	H2 MFC set to  0.000000
9/24/2011	2:12:23 PM	BCl3 MFC set to  0.000000
9/24/2011	2:12:23 PM	PHl3 MFC set to  0.000000
9/24/2011	2:12:23 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:12:23 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:12:23 PM	Tube furnace set to 0
9/24/2011	2:12:53 PM	Helium valve closed
9/24/2011	2:12:53 PM	H2 valve closed
9/24/2011	2:12:53 PM	BCl3 valve closed
9/24/2011	2:12:53 PM	PH3 valve closed
9/24/2011	2:12:53 PM	SiCl4 pre valve closed
9/24/2011	2:12:53 PM	SiCl4 post valve closed
9/24/2011	2:12:53 PM	Bypass valve closed
9/24/2011	2:12:53 PM	Bubbler valve closed
9/24/2011	2:12:53 PM	Main Vac valve opened
9/24/2011	2:12:53 PM	Helium MFC set to  0.000000
9/24/2011	2:12:53 PM	H2 MFC set to  0.000000
9/24/2011	2:12:53 PM	BCl3 MFC set to  0.000000
9/24/2011	2:12:53 PM	PHl3 MFC set to  0.000000
9/24/2011	2:12:53 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:12:53 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:12:53 PM	Tube furnace set to 0
9/24/2011	2:12:54 PM	Run finished at 2:12 PM
9/24/2011	2:12:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/24/2011	2:13:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/24/2011	2:13:31 PM	Recipe started at 2:13 PM
9/24/2011	2:13:31 PM	Helium valve closed
9/24/2011	2:13:31 PM	H2 valve closed
9/24/2011	2:13:31 PM	BCl3 valve closed
9/24/2011	2:13:31 PM	PH3 valve closed
9/24/2011	2:13:31 PM	SiCl4 pre valve closed
9/24/2011	2:13:31 PM	SiCl4 post valve closed
9/24/2011	2:13:31 PM	Main Vac valve closed
9/24/2011	2:13:31 PM	Bubbler valve closed
9/24/2011	2:13:31 PM	Bypass valve opened
9/24/2011	2:13:31 PM	Helium MFC set to  0.000000
9/24/2011	2:13:31 PM	H2 MFC set to  0.000000
9/24/2011	2:13:31 PM	BCl3 MFC set to  0.000000
9/24/2011	2:13:31 PM	PHl3 MFC set to  0.000000
9/24/2011	2:13:31 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:13:31 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:13:31 PM	Tube furnace set to 0
9/24/2011	2:13:31 PM	Helium valve closed
9/24/2011	2:13:31 PM	H2 valve closed
9/24/2011	2:13:31 PM	BCl3 valve closed
9/24/2011	2:13:31 PM	PH3 valve closed
9/24/2011	2:13:31 PM	SiCl4 pre valve closed
9/24/2011	2:13:31 PM	SiCl4 post valve closed
9/24/2011	2:13:31 PM	Main Vac valve closed
9/24/2011	2:13:31 PM	Bubbler valve closed
9/24/2011	2:13:31 PM	Bypass valve opened
9/24/2011	2:13:31 PM	Helium MFC set to  0.000000
9/24/2011	2:13:31 PM	H2 MFC set to  0.000000
9/24/2011	2:13:31 PM	BCl3 MFC set to  0.000000
9/24/2011	2:13:31 PM	PHl3 MFC set to  0.000000
9/24/2011	2:13:31 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:13:31 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:13:31 PM	Tube furnace set to 0
9/24/2011	2:13:34 PM	Helium valve closed
9/24/2011	2:13:34 PM	H2 valve closed
9/24/2011	2:13:34 PM	BCl3 valve closed
9/24/2011	2:13:34 PM	PH3 valve closed
9/24/2011	2:13:34 PM	SiCl4 pre valve closed
9/24/2011	2:13:34 PM	SiCl4 post valve closed
9/24/2011	2:13:34 PM	Bypass valve closed
9/24/2011	2:13:34 PM	Bubbler valve closed
9/24/2011	2:13:34 PM	Main Vac valve opened
9/24/2011	2:13:34 PM	Helium MFC set to  0.000000
9/24/2011	2:13:34 PM	H2 MFC set to  0.000000
9/24/2011	2:13:34 PM	BCl3 MFC set to  0.000000
9/24/2011	2:13:34 PM	PHl3 MFC set to  0.000000
9/24/2011	2:13:34 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:13:34 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:13:34 PM	Tube furnace set to 0
9/24/2011	2:14:04 PM	H2 valve closed
9/24/2011	2:14:04 PM	BCl3 valve closed
9/24/2011	2:14:04 PM	PH3 valve closed
9/24/2011	2:14:04 PM	SiCl4 pre valve closed
9/24/2011	2:14:04 PM	SiCl4 post valve closed
9/24/2011	2:14:04 PM	Bypass valve closed
9/24/2011	2:14:04 PM	Bubbler valve closed
9/24/2011	2:14:04 PM	Helium valve opened
9/24/2011	2:14:04 PM	Main Vac valve opened
9/24/2011	2:14:04 PM	Helium MFC set to  20.000000
9/24/2011	2:14:04 PM	H2 MFC set to  0.000000
9/24/2011	2:14:04 PM	BCl3 MFC set to  0.000000
9/24/2011	2:14:04 PM	PHl3 MFC set to  0.000000
9/24/2011	2:14:04 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:14:04 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:14:04 PM	Tube furnace set to 0
9/24/2011	2:14:34 PM	Helium valve closed
9/24/2011	2:14:34 PM	H2 valve closed
9/24/2011	2:14:34 PM	BCl3 valve closed
9/24/2011	2:14:34 PM	PH3 valve closed
9/24/2011	2:14:34 PM	SiCl4 pre valve closed
9/24/2011	2:14:34 PM	SiCl4 post valve closed
9/24/2011	2:14:34 PM	Bypass valve closed
9/24/2011	2:14:34 PM	Bubbler valve closed
9/24/2011	2:14:34 PM	Main Vac valve opened
9/24/2011	2:14:34 PM	Helium MFC set to  0.000000
9/24/2011	2:14:34 PM	H2 MFC set to  0.000000
9/24/2011	2:14:34 PM	BCl3 MFC set to  0.000000
9/24/2011	2:14:34 PM	PHl3 MFC set to  0.000000
9/24/2011	2:14:34 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:14:34 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:14:34 PM	Tube furnace set to 0
9/24/2011	2:15:04 PM	H2 valve closed
9/24/2011	2:15:04 PM	BCl3 valve closed
9/24/2011	2:15:04 PM	PH3 valve closed
9/24/2011	2:15:04 PM	SiCl4 pre valve closed
9/24/2011	2:15:04 PM	SiCl4 post valve closed
9/24/2011	2:15:04 PM	Bypass valve closed
9/24/2011	2:15:04 PM	Bubbler valve closed
9/24/2011	2:15:04 PM	Helium valve opened
9/24/2011	2:15:04 PM	Main Vac valve opened
9/24/2011	2:15:04 PM	Helium MFC set to  20.000000
9/24/2011	2:15:04 PM	H2 MFC set to  0.000000
9/24/2011	2:15:04 PM	BCl3 MFC set to  0.000000
9/24/2011	2:15:04 PM	PHl3 MFC set to  0.000000
9/24/2011	2:15:04 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:15:04 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:15:05 PM	Tube furnace set to 0
9/24/2011	2:15:35 PM	Helium valve closed
9/24/2011	2:15:35 PM	H2 valve closed
9/24/2011	2:15:35 PM	BCl3 valve closed
9/24/2011	2:15:35 PM	PH3 valve closed
9/24/2011	2:15:35 PM	SiCl4 pre valve closed
9/24/2011	2:15:35 PM	SiCl4 post valve closed
9/24/2011	2:15:35 PM	Bypass valve closed
9/24/2011	2:15:35 PM	Bubbler valve closed
9/24/2011	2:15:35 PM	Main Vac valve opened
9/24/2011	2:15:35 PM	Helium MFC set to  0.000000
9/24/2011	2:15:35 PM	H2 MFC set to  0.000000
9/24/2011	2:15:35 PM	BCl3 MFC set to  0.000000
9/24/2011	2:15:35 PM	PHl3 MFC set to  0.000000
9/24/2011	2:15:35 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:15:35 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:15:35 PM	Tube furnace set to 0
9/24/2011	2:16:05 PM	H2 valve closed
9/24/2011	2:16:05 PM	BCl3 valve closed
9/24/2011	2:16:05 PM	PH3 valve closed
9/24/2011	2:16:05 PM	SiCl4 pre valve closed
9/24/2011	2:16:05 PM	SiCl4 post valve closed
9/24/2011	2:16:05 PM	Bypass valve closed
9/24/2011	2:16:05 PM	Bubbler valve closed
9/24/2011	2:16:05 PM	Helium valve opened
9/24/2011	2:16:05 PM	Main Vac valve opened
9/24/2011	2:16:05 PM	Helium MFC set to  20.000000
9/24/2011	2:16:05 PM	H2 MFC set to  0.000000
9/24/2011	2:16:05 PM	BCl3 MFC set to  0.000000
9/24/2011	2:16:05 PM	PHl3 MFC set to  0.000000
9/24/2011	2:16:05 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:16:05 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:16:05 PM	Tube furnace set to 0
9/24/2011	2:16:35 PM	Helium valve closed
9/24/2011	2:16:35 PM	H2 valve closed
9/24/2011	2:16:35 PM	BCl3 valve closed
9/24/2011	2:16:35 PM	PH3 valve closed
9/24/2011	2:16:35 PM	SiCl4 pre valve closed
9/24/2011	2:16:35 PM	SiCl4 post valve closed
9/24/2011	2:16:35 PM	Bypass valve closed
9/24/2011	2:16:35 PM	Bubbler valve closed
9/24/2011	2:16:35 PM	Main Vac valve opened
9/24/2011	2:16:35 PM	Helium MFC set to  0.000000
9/24/2011	2:16:35 PM	H2 MFC set to  0.000000
9/24/2011	2:16:35 PM	BCl3 MFC set to  0.000000
9/24/2011	2:16:35 PM	PHl3 MFC set to  0.000000
9/24/2011	2:16:35 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:16:35 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:16:35 PM	Tube furnace set to 0
9/24/2011	2:17:05 PM	H2 valve closed
9/24/2011	2:17:05 PM	BCl3 valve closed
9/24/2011	2:17:05 PM	PH3 valve closed
9/24/2011	2:17:05 PM	SiCl4 pre valve closed
9/24/2011	2:17:05 PM	SiCl4 post valve closed
9/24/2011	2:17:05 PM	Bypass valve closed
9/24/2011	2:17:05 PM	Bubbler valve closed
9/24/2011	2:17:05 PM	Helium valve opened
9/24/2011	2:17:05 PM	Main Vac valve opened
9/24/2011	2:17:05 PM	Helium MFC set to  20.000000
9/24/2011	2:17:05 PM	H2 MFC set to  0.000000
9/24/2011	2:17:05 PM	BCl3 MFC set to  0.000000
9/24/2011	2:17:05 PM	PHl3 MFC set to  0.000000
9/24/2011	2:17:05 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:17:05 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:17:05 PM	Tube furnace set to 0
9/24/2011	2:17:35 PM	Helium valve closed
9/24/2011	2:17:35 PM	H2 valve closed
9/24/2011	2:17:35 PM	BCl3 valve closed
9/24/2011	2:17:35 PM	PH3 valve closed
9/24/2011	2:17:35 PM	SiCl4 pre valve closed
9/24/2011	2:17:35 PM	SiCl4 post valve closed
9/24/2011	2:17:35 PM	Bypass valve closed
9/24/2011	2:17:35 PM	Bubbler valve closed
9/24/2011	2:17:35 PM	Main Vac valve opened
9/24/2011	2:17:35 PM	Helium MFC set to  0.000000
9/24/2011	2:17:35 PM	H2 MFC set to  0.000000
9/24/2011	2:17:35 PM	BCl3 MFC set to  0.000000
9/24/2011	2:17:35 PM	PHl3 MFC set to  0.000000
9/24/2011	2:17:35 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:17:35 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:17:36 PM	Tube furnace set to 0
9/24/2011	2:18:06 PM	H2 valve closed
9/24/2011	2:18:06 PM	BCl3 valve closed
9/24/2011	2:18:06 PM	PH3 valve closed
9/24/2011	2:18:06 PM	SiCl4 pre valve closed
9/24/2011	2:18:06 PM	SiCl4 post valve closed
9/24/2011	2:18:06 PM	Bypass valve closed
9/24/2011	2:18:06 PM	Bubbler valve closed
9/24/2011	2:18:06 PM	Helium valve opened
9/24/2011	2:18:06 PM	Main Vac valve opened
9/24/2011	2:18:06 PM	Helium MFC set to  20.000000
9/24/2011	2:18:06 PM	H2 MFC set to  0.000000
9/24/2011	2:18:06 PM	BCl3 MFC set to  0.000000
9/24/2011	2:18:06 PM	PHl3 MFC set to  0.000000
9/24/2011	2:18:06 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:18:06 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:18:06 PM	Tube furnace set to 0
9/24/2011	2:18:36 PM	Helium valve closed
9/24/2011	2:18:36 PM	H2 valve closed
9/24/2011	2:18:36 PM	BCl3 valve closed
9/24/2011	2:18:36 PM	PH3 valve closed
9/24/2011	2:18:36 PM	SiCl4 pre valve closed
9/24/2011	2:18:36 PM	SiCl4 post valve closed
9/24/2011	2:18:36 PM	Bypass valve closed
9/24/2011	2:18:36 PM	Bubbler valve closed
9/24/2011	2:18:36 PM	Main Vac valve opened
9/24/2011	2:18:36 PM	Helium MFC set to  0.000000
9/24/2011	2:18:36 PM	H2 MFC set to  0.000000
9/24/2011	2:18:36 PM	BCl3 MFC set to  0.000000
9/24/2011	2:18:36 PM	PHl3 MFC set to  0.000000
9/24/2011	2:18:36 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:18:36 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:18:36 PM	Tube furnace set to 0
9/24/2011	2:19:06 PM	H2 valve closed
9/24/2011	2:19:06 PM	BCl3 valve closed
9/24/2011	2:19:06 PM	PH3 valve closed
9/24/2011	2:19:06 PM	SiCl4 pre valve closed
9/24/2011	2:19:06 PM	SiCl4 post valve closed
9/24/2011	2:19:06 PM	Bypass valve closed
9/24/2011	2:19:06 PM	Bubbler valve closed
9/24/2011	2:19:06 PM	Helium valve opened
9/24/2011	2:19:06 PM	Main Vac valve opened
9/24/2011	2:19:06 PM	Helium MFC set to  20.000000
9/24/2011	2:19:06 PM	H2 MFC set to  0.000000
9/24/2011	2:19:06 PM	BCl3 MFC set to  0.000000
9/24/2011	2:19:06 PM	PHl3 MFC set to  0.000000
9/24/2011	2:19:06 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:19:06 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:19:06 PM	Tube furnace set to 0
9/24/2011	2:19:36 PM	Helium valve closed
9/24/2011	2:19:36 PM	H2 valve closed
9/24/2011	2:19:36 PM	BCl3 valve closed
9/24/2011	2:19:36 PM	PH3 valve closed
9/24/2011	2:19:36 PM	SiCl4 pre valve closed
9/24/2011	2:19:36 PM	SiCl4 post valve closed
9/24/2011	2:19:36 PM	Bypass valve closed
9/24/2011	2:19:36 PM	Bubbler valve closed
9/24/2011	2:19:36 PM	Main Vac valve opened
9/24/2011	2:19:36 PM	Helium MFC set to  0.000000
9/24/2011	2:19:36 PM	H2 MFC set to  0.000000
9/24/2011	2:19:36 PM	BCl3 MFC set to  0.000000
9/24/2011	2:19:36 PM	PHl3 MFC set to  0.000000
9/24/2011	2:19:36 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:19:36 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:19:36 PM	Tube furnace set to 0
9/24/2011	2:20:06 PM	H2 valve closed
9/24/2011	2:20:06 PM	BCl3 valve closed
9/24/2011	2:20:06 PM	PH3 valve closed
9/24/2011	2:20:06 PM	SiCl4 pre valve closed
9/24/2011	2:20:06 PM	SiCl4 post valve closed
9/24/2011	2:20:06 PM	Bypass valve closed
9/24/2011	2:20:06 PM	Bubbler valve closed
9/24/2011	2:20:06 PM	Helium valve opened
9/24/2011	2:20:06 PM	Main Vac valve opened
9/24/2011	2:20:06 PM	Helium MFC set to  20.000000
9/24/2011	2:20:06 PM	H2 MFC set to  0.000000
9/24/2011	2:20:06 PM	BCl3 MFC set to  0.000000
9/24/2011	2:20:06 PM	PHl3 MFC set to  0.000000
9/24/2011	2:20:06 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:20:06 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:20:07 PM	Tube furnace set to 0
9/24/2011	2:20:37 PM	Helium valve closed
9/24/2011	2:20:37 PM	H2 valve closed
9/24/2011	2:20:37 PM	BCl3 valve closed
9/24/2011	2:20:37 PM	PH3 valve closed
9/24/2011	2:20:37 PM	SiCl4 pre valve closed
9/24/2011	2:20:37 PM	SiCl4 post valve closed
9/24/2011	2:20:37 PM	Bypass valve closed
9/24/2011	2:20:37 PM	Bubbler valve closed
9/24/2011	2:20:37 PM	Main Vac valve opened
9/24/2011	2:20:37 PM	Helium MFC set to  0.000000
9/24/2011	2:20:37 PM	H2 MFC set to  0.000000
9/24/2011	2:20:37 PM	BCl3 MFC set to  0.000000
9/24/2011	2:20:37 PM	PHl3 MFC set to  0.000000
9/24/2011	2:20:37 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:20:37 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:20:37 PM	Tube furnace set to 0
9/24/2011	2:21:07 PM	H2 valve closed
9/24/2011	2:21:07 PM	BCl3 valve closed
9/24/2011	2:21:07 PM	PH3 valve closed
9/24/2011	2:21:07 PM	SiCl4 pre valve closed
9/24/2011	2:21:07 PM	SiCl4 post valve closed
9/24/2011	2:21:07 PM	Bypass valve closed
9/24/2011	2:21:07 PM	Bubbler valve closed
9/24/2011	2:21:07 PM	Helium valve opened
9/24/2011	2:21:07 PM	Main Vac valve opened
9/24/2011	2:21:07 PM	Helium MFC set to  20.000000
9/24/2011	2:21:07 PM	H2 MFC set to  0.000000
9/24/2011	2:21:07 PM	BCl3 MFC set to  0.000000
9/24/2011	2:21:07 PM	PHl3 MFC set to  0.000000
9/24/2011	2:21:07 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:21:07 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:21:07 PM	Tube furnace set to 0
9/24/2011	2:21:37 PM	Helium valve closed
9/24/2011	2:21:37 PM	H2 valve closed
9/24/2011	2:21:37 PM	BCl3 valve closed
9/24/2011	2:21:37 PM	PH3 valve closed
9/24/2011	2:21:37 PM	SiCl4 pre valve closed
9/24/2011	2:21:37 PM	SiCl4 post valve closed
9/24/2011	2:21:37 PM	Bypass valve closed
9/24/2011	2:21:37 PM	Bubbler valve closed
9/24/2011	2:21:37 PM	Main Vac valve opened
9/24/2011	2:21:37 PM	Helium MFC set to  0.000000
9/24/2011	2:21:37 PM	H2 MFC set to  0.000000
9/24/2011	2:21:37 PM	BCl3 MFC set to  0.000000
9/24/2011	2:21:37 PM	PHl3 MFC set to  0.000000
9/24/2011	2:21:37 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:21:37 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:21:37 PM	Tube furnace set to 0
9/24/2011	2:22:07 PM	H2 valve closed
9/24/2011	2:22:07 PM	BCl3 valve closed
9/24/2011	2:22:07 PM	PH3 valve closed
9/24/2011	2:22:07 PM	SiCl4 pre valve closed
9/24/2011	2:22:07 PM	SiCl4 post valve closed
9/24/2011	2:22:07 PM	Bypass valve closed
9/24/2011	2:22:07 PM	Bubbler valve closed
9/24/2011	2:22:07 PM	Helium valve opened
9/24/2011	2:22:07 PM	Main Vac valve opened
9/24/2011	2:22:07 PM	Helium MFC set to  20.000000
9/24/2011	2:22:07 PM	H2 MFC set to  0.000000
9/24/2011	2:22:07 PM	BCl3 MFC set to  0.000000
9/24/2011	2:22:07 PM	PHl3 MFC set to  0.000000
9/24/2011	2:22:07 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:22:07 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:22:07 PM	Tube furnace set to 0
9/24/2011	2:22:37 PM	Helium valve closed
9/24/2011	2:22:37 PM	H2 valve closed
9/24/2011	2:22:37 PM	BCl3 valve closed
9/24/2011	2:22:37 PM	PH3 valve closed
9/24/2011	2:22:37 PM	SiCl4 pre valve closed
9/24/2011	2:22:37 PM	SiCl4 post valve closed
9/24/2011	2:22:37 PM	Bypass valve closed
9/24/2011	2:22:37 PM	Bubbler valve closed
9/24/2011	2:22:37 PM	Main Vac valve opened
9/24/2011	2:22:37 PM	Helium MFC set to  0.000000
9/24/2011	2:22:37 PM	H2 MFC set to  0.000000
9/24/2011	2:22:37 PM	BCl3 MFC set to  0.000000
9/24/2011	2:22:37 PM	PHl3 MFC set to  0.000000
9/24/2011	2:22:37 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:22:37 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:22:38 PM	Tube furnace set to 0
9/24/2011	2:23:08 PM	H2 valve closed
9/24/2011	2:23:08 PM	BCl3 valve closed
9/24/2011	2:23:08 PM	PH3 valve closed
9/24/2011	2:23:08 PM	SiCl4 pre valve closed
9/24/2011	2:23:08 PM	SiCl4 post valve closed
9/24/2011	2:23:08 PM	Bypass valve closed
9/24/2011	2:23:08 PM	Bubbler valve closed
9/24/2011	2:23:08 PM	Helium valve opened
9/24/2011	2:23:08 PM	Main Vac valve opened
9/24/2011	2:23:08 PM	Helium MFC set to  20.000000
9/24/2011	2:23:08 PM	H2 MFC set to  0.000000
9/24/2011	2:23:08 PM	BCl3 MFC set to  0.000000
9/24/2011	2:23:08 PM	PHl3 MFC set to  0.000000
9/24/2011	2:23:08 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:23:08 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:23:08 PM	Tube furnace set to 0
9/24/2011	2:23:38 PM	Helium valve closed
9/24/2011	2:23:38 PM	H2 valve closed
9/24/2011	2:23:38 PM	BCl3 valve closed
9/24/2011	2:23:38 PM	PH3 valve closed
9/24/2011	2:23:38 PM	SiCl4 pre valve closed
9/24/2011	2:23:38 PM	SiCl4 post valve closed
9/24/2011	2:23:38 PM	Bypass valve closed
9/24/2011	2:23:38 PM	Bubbler valve closed
9/24/2011	2:23:38 PM	Main Vac valve opened
9/24/2011	2:23:38 PM	Helium MFC set to  0.000000
9/24/2011	2:23:38 PM	H2 MFC set to  0.000000
9/24/2011	2:23:38 PM	BCl3 MFC set to  0.000000
9/24/2011	2:23:38 PM	PHl3 MFC set to  0.000000
9/24/2011	2:23:38 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:23:38 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:23:38 PM	Tube furnace set to 0
9/24/2011	2:23:39 PM	Run finished at 2:23 PM
9/24/2011	2:23:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/24/2011	2:26:39 PM	Recipe started at 2:26 PM
9/24/2011	2:26:39 PM	Helium valve closed
9/24/2011	2:26:39 PM	H2 valve closed
9/24/2011	2:26:39 PM	BCl3 valve closed
9/24/2011	2:26:39 PM	PH3 valve closed
9/24/2011	2:26:39 PM	SiCl4 pre valve closed
9/24/2011	2:26:39 PM	SiCl4 post valve closed
9/24/2011	2:26:39 PM	Main Vac valve closed
9/24/2011	2:26:39 PM	Bypass valve closed
9/24/2011	2:26:39 PM	Bubbler valve closed
9/24/2011	2:26:40 PM	Helium MFC set to  0.000000
9/24/2011	2:26:40 PM	H2 MFC set to  0.000000
9/24/2011	2:26:40 PM	BCl3 MFC set to  0.000000
9/24/2011	2:26:40 PM	PHl3 MFC set to  0.000000
9/24/2011	2:26:40 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:26:40 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:26:40 PM	Tube furnace set to 0
9/24/2011	2:26:43 PM	Helium valve closed
9/24/2011	2:26:43 PM	BCl3 valve closed
9/24/2011	2:26:43 PM	PH3 valve closed
9/24/2011	2:26:43 PM	SiCl4 pre valve closed
9/24/2011	2:26:43 PM	SiCl4 post valve closed
9/24/2011	2:26:43 PM	Main Vac valve closed
9/24/2011	2:26:43 PM	Bypass valve closed
9/24/2011	2:26:43 PM	Bubbler valve closed
9/24/2011	2:26:43 PM	H2 valve opened
9/24/2011	2:26:43 PM	Helium MFC set to  0.000000
9/24/2011	2:26:43 PM	H2 MFC set to  500.000000
9/24/2011	2:26:43 PM	BCl3 MFC set to  0.000000
9/24/2011	2:26:43 PM	PHl3 MFC set to  0.000000
9/24/2011	2:26:43 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:26:43 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:26:43 PM	Tube furnace set to 0
9/24/2011	2:27:18 PM	Run aborted at 2:27 PM
9/24/2011	2:27:18 PM	Helium valve closed
9/24/2011	2:27:18 PM	H2 valve closed
9/24/2011	2:27:18 PM	BCl3 valve closed
9/24/2011	2:27:18 PM	PH3 valve closed
9/24/2011	2:27:18 PM	SiCl4 pre valve closed
9/24/2011	2:27:18 PM	SiCl4 post valve closed
9/24/2011	2:27:18 PM	Bypass valve closed
9/24/2011	2:27:18 PM	Main Vac valve closed
9/24/2011	2:27:18 PM	Bubbler valve closed
9/24/2011	2:27:18 PM	Helium MFC set to  0.000000
9/24/2011	2:27:18 PM	H2 MFC set to  0.000000
9/24/2011	2:27:18 PM	BCl3 MFC set to  0.000000
9/24/2011	2:27:18 PM	PHl3 MFC set to  0.000000
9/24/2011	2:27:18 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:27:19 PM	Tube furnace set to 0
9/24/2011	2:27:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/24/2011	2:27:23 PM	Recipe started at 2:27 PM
9/24/2011	2:27:23 PM	Helium valve closed
9/24/2011	2:27:23 PM	H2 valve closed
9/24/2011	2:27:23 PM	BCl3 valve closed
9/24/2011	2:27:23 PM	PH3 valve closed
9/24/2011	2:27:23 PM	SiCl4 pre valve closed
9/24/2011	2:27:23 PM	SiCl4 post valve closed
9/24/2011	2:27:23 PM	Main Vac valve closed
9/24/2011	2:27:23 PM	Bubbler valve closed
9/24/2011	2:27:23 PM	Bypass valve opened
9/24/2011	2:27:23 PM	Helium MFC set to  0.000000
9/24/2011	2:27:23 PM	H2 MFC set to  0.000000
9/24/2011	2:27:23 PM	BCl3 MFC set to  0.000000
9/24/2011	2:27:23 PM	PHl3 MFC set to  0.000000
9/24/2011	2:27:23 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:27:23 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:27:23 PM	Tube furnace set to 0
9/24/2011	2:27:25 PM	Helium valve closed
9/24/2011	2:27:25 PM	H2 valve closed
9/24/2011	2:27:25 PM	BCl3 valve closed
9/24/2011	2:27:25 PM	PH3 valve closed
9/24/2011	2:27:25 PM	SiCl4 pre valve closed
9/24/2011	2:27:25 PM	SiCl4 post valve closed
9/24/2011	2:27:25 PM	Main Vac valve closed
9/24/2011	2:27:25 PM	Bubbler valve closed
9/24/2011	2:27:25 PM	Bypass valve opened
9/24/2011	2:27:25 PM	Helium MFC set to  0.000000
9/24/2011	2:27:25 PM	H2 MFC set to  0.000000
9/24/2011	2:27:25 PM	BCl3 MFC set to  0.000000
9/24/2011	2:27:25 PM	PHl3 MFC set to  0.000000
9/24/2011	2:27:25 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:27:25 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:27:26 PM	Tube furnace set to 0
9/24/2011	2:27:29 PM	Run aborted at 2:27 PM
9/24/2011	2:27:29 PM	Helium valve closed
9/24/2011	2:27:29 PM	H2 valve closed
9/24/2011	2:27:29 PM	BCl3 valve closed
9/24/2011	2:27:29 PM	PH3 valve closed
9/24/2011	2:27:29 PM	SiCl4 pre valve closed
9/24/2011	2:27:29 PM	SiCl4 post valve closed
9/24/2011	2:27:29 PM	Bypass valve closed
9/24/2011	2:27:29 PM	Main Vac valve closed
9/24/2011	2:27:29 PM	Bubbler valve closed
9/24/2011	2:27:29 PM	Helium MFC set to  0.000000
9/24/2011	2:27:29 PM	H2 MFC set to  0.000000
9/24/2011	2:27:29 PM	BCl3 MFC set to  0.000000
9/24/2011	2:27:29 PM	PHl3 MFC set to  0.000000
9/24/2011	2:27:29 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:27:30 PM	Tube furnace set to 0
9/24/2011	2:27:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/24/2011	2:27:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/24/2011	2:27:33 PM	Recipe started at 2:27 PM
9/24/2011	2:27:33 PM	Helium valve closed
9/24/2011	2:27:33 PM	H2 valve closed
9/24/2011	2:27:33 PM	BCl3 valve closed
9/24/2011	2:27:33 PM	PH3 valve closed
9/24/2011	2:27:33 PM	SiCl4 pre valve closed
9/24/2011	2:27:33 PM	SiCl4 post valve closed
9/24/2011	2:27:33 PM	Main Vac valve closed
9/24/2011	2:27:33 PM	Bubbler valve closed
9/24/2011	2:27:33 PM	Bypass valve opened
9/24/2011	2:27:33 PM	Helium MFC set to  0.000000
9/24/2011	2:27:33 PM	H2 MFC set to  0.000000
9/24/2011	2:27:33 PM	BCl3 MFC set to  0.000000
9/24/2011	2:27:33 PM	PHl3 MFC set to  0.000000
9/24/2011	2:27:33 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:27:33 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:27:33 PM	Tube furnace set to 0
9/24/2011	2:28:01 PM	Helium valve closed
9/24/2011	2:28:01 PM	H2 valve closed
9/24/2011	2:28:01 PM	BCl3 valve closed
9/24/2011	2:28:01 PM	PH3 valve closed
9/24/2011	2:28:01 PM	SiCl4 pre valve closed
9/24/2011	2:28:01 PM	SiCl4 post valve closed
9/24/2011	2:28:01 PM	Main Vac valve closed
9/24/2011	2:28:01 PM	Bubbler valve closed
9/24/2011	2:28:01 PM	Bypass valve opened
9/24/2011	2:28:01 PM	Helium MFC set to  0.000000
9/24/2011	2:28:01 PM	H2 MFC set to  0.000000
9/24/2011	2:28:01 PM	BCl3 MFC set to  0.000000
9/24/2011	2:28:01 PM	PHl3 MFC set to  0.000000
9/24/2011	2:28:01 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:28:01 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:28:01 PM	Tube furnace set to 0
9/24/2011	2:29:01 PM	Helium valve closed
9/24/2011	2:29:01 PM	H2 valve closed
9/24/2011	2:29:01 PM	BCl3 valve closed
9/24/2011	2:29:02 PM	PH3 valve closed
9/24/2011	2:29:02 PM	SiCl4 pre valve closed
9/24/2011	2:29:02 PM	SiCl4 post valve closed
9/24/2011	2:29:02 PM	Bypass valve closed
9/24/2011	2:29:02 PM	Bubbler valve closed
9/24/2011	2:29:02 PM	Main Vac valve opened
9/24/2011	2:29:02 PM	Helium MFC set to  0.000000
9/24/2011	2:29:02 PM	H2 MFC set to  0.000000
9/24/2011	2:29:02 PM	BCl3 MFC set to  0.000000
9/24/2011	2:29:02 PM	PHl3 MFC set to  0.000000
9/24/2011	2:29:02 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:29:02 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:29:02 PM	Tube furnace set to 0
9/24/2011	2:29:03 PM	Run finished at 2:29 PM
9/24/2011	2:29:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/24/2011	2:29:55 PM	Main Vac valve closed
9/24/2011	2:30:04 PM	Main Vac valve opened
9/24/2011	2:56:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/24/2011	2:56:56 PM	Recipe started at 2:56 PM
9/24/2011	2:56:56 PM	Helium valve closed
9/24/2011	2:56:56 PM	H2 valve closed
9/24/2011	2:56:56 PM	BCl3 valve closed
9/24/2011	2:56:56 PM	PH3 valve closed
9/24/2011	2:56:56 PM	SiCl4 pre valve closed
9/24/2011	2:56:56 PM	SiCl4 post valve closed
9/24/2011	2:56:56 PM	Main Vac valve closed
9/24/2011	2:56:56 PM	Bypass valve closed
9/24/2011	2:56:56 PM	Bubbler valve closed
9/24/2011	2:56:56 PM	Helium MFC set to  0.000000
9/24/2011	2:56:56 PM	H2 MFC set to  0.000000
9/24/2011	2:56:56 PM	BCl3 MFC set to  0.000000
9/24/2011	2:56:56 PM	PHl3 MFC set to  0.000000
9/24/2011	2:56:56 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:56:56 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:56:56 PM	Tube furnace set to 0
9/24/2011	2:56:59 PM	H2 valve closed
9/24/2011	2:56:59 PM	BCl3 valve closed
9/24/2011	2:56:59 PM	PH3 valve closed
9/24/2011	2:56:59 PM	SiCl4 pre valve closed
9/24/2011	2:56:59 PM	SiCl4 post valve closed
9/24/2011	2:56:59 PM	Main Vac valve closed
9/24/2011	2:56:59 PM	Bypass valve closed
9/24/2011	2:56:59 PM	Bubbler valve closed
9/24/2011	2:56:59 PM	Helium valve opened
9/24/2011	2:56:59 PM	Helium MFC set to  500.000000
9/24/2011	2:56:59 PM	H2 MFC set to  0.000000
9/24/2011	2:56:59 PM	BCl3 MFC set to  0.000000
9/24/2011	2:56:59 PM	PHl3 MFC set to  0.000000
9/24/2011	2:56:59 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:56:59 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:56:59 PM	Tube furnace set to 0
9/24/2011	2:58:06 PM	Helium valve closed
9/24/2011	2:58:06 PM	H2 valve closed
9/24/2011	2:58:06 PM	BCl3 valve closed
9/24/2011	2:58:06 PM	PH3 valve closed
9/24/2011	2:58:06 PM	SiCl4 pre valve closed
9/24/2011	2:58:06 PM	SiCl4 post valve closed
9/24/2011	2:58:06 PM	Main Vac valve closed
9/24/2011	2:58:06 PM	Bypass valve closed
9/24/2011	2:58:06 PM	Bubbler valve closed
9/24/2011	2:58:06 PM	Helium MFC set to  0.000000
9/24/2011	2:58:06 PM	H2 MFC set to  0.000000
9/24/2011	2:58:06 PM	BCl3 MFC set to  0.000000
9/24/2011	2:58:06 PM	PHl3 MFC set to  0.000000
9/24/2011	2:58:06 PM	SiCl4 MFC set to  0.000000
9/24/2011	2:58:06 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	2:58:06 PM	Tube furnace set to 0
9/24/2011	2:58:07 PM	Run finished at 2:58 PM
9/24/2011	2:58:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/24/2011	3:07:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/24/2011	3:07:32 PM	Recipe started at 3:07 PM
9/24/2011	3:07:32 PM	Helium valve closed
9/24/2011	3:07:32 PM	H2 valve closed
9/24/2011	3:07:32 PM	BCl3 valve closed
9/24/2011	3:07:32 PM	PH3 valve closed
9/24/2011	3:07:32 PM	SiCl4 pre valve closed
9/24/2011	3:07:32 PM	SiCl4 post valve closed
9/24/2011	3:07:32 PM	Main Vac valve closed
9/24/2011	3:07:32 PM	Bubbler valve closed
9/24/2011	3:07:32 PM	Bypass valve opened
9/24/2011	3:07:32 PM	Helium MFC set to  0.000000
9/24/2011	3:07:32 PM	H2 MFC set to  0.000000
9/24/2011	3:07:32 PM	BCl3 MFC set to  0.000000
9/24/2011	3:07:32 PM	PHl3 MFC set to  0.000000
9/24/2011	3:07:32 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:07:32 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:07:32 PM	Tube furnace set to 0
9/24/2011	3:08:46 PM	Helium valve closed
9/24/2011	3:08:46 PM	H2 valve closed
9/24/2011	3:08:46 PM	BCl3 valve closed
9/24/2011	3:08:46 PM	PH3 valve closed
9/24/2011	3:08:46 PM	SiCl4 pre valve closed
9/24/2011	3:08:46 PM	SiCl4 post valve closed
9/24/2011	3:08:46 PM	Main Vac valve closed
9/24/2011	3:08:46 PM	Bubbler valve closed
9/24/2011	3:08:46 PM	Bypass valve opened
9/24/2011	3:08:46 PM	Helium MFC set to  0.000000
9/24/2011	3:08:46 PM	H2 MFC set to  0.000000
9/24/2011	3:08:46 PM	BCl3 MFC set to  0.000000
9/24/2011	3:08:46 PM	PHl3 MFC set to  0.000000
9/24/2011	3:08:46 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:08:46 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:08:46 PM	Tube furnace set to 0
9/24/2011	3:09:46 PM	Helium valve closed
9/24/2011	3:09:46 PM	H2 valve closed
9/24/2011	3:09:46 PM	BCl3 valve closed
9/24/2011	3:09:46 PM	PH3 valve closed
9/24/2011	3:09:46 PM	SiCl4 pre valve closed
9/24/2011	3:09:46 PM	SiCl4 post valve closed
9/24/2011	3:09:46 PM	Bypass valve closed
9/24/2011	3:09:46 PM	Bubbler valve closed
9/24/2011	3:09:46 PM	Main Vac valve opened
9/24/2011	3:09:46 PM	Helium MFC set to  0.000000
9/24/2011	3:09:46 PM	H2 MFC set to  0.000000
9/24/2011	3:09:46 PM	BCl3 MFC set to  0.000000
9/24/2011	3:09:46 PM	PHl3 MFC set to  0.000000
9/24/2011	3:09:46 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:09:46 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:09:46 PM	Tube furnace set to 0
9/24/2011	3:09:47 PM	Run finished at 3:09 PM
9/24/2011	3:09:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/24/2011	3:10:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/24/2011	3:10:25 PM	Recipe started at 3:10 PM
9/24/2011	3:10:25 PM	Helium valve closed
9/24/2011	3:10:25 PM	H2 valve closed
9/24/2011	3:10:25 PM	BCl3 valve closed
9/24/2011	3:10:25 PM	PH3 valve closed
9/24/2011	3:10:25 PM	SiCl4 pre valve closed
9/24/2011	3:10:25 PM	SiCl4 post valve closed
9/24/2011	3:10:25 PM	Main Vac valve closed
9/24/2011	3:10:25 PM	Bubbler valve closed
9/24/2011	3:10:25 PM	Bypass valve opened
9/24/2011	3:10:25 PM	Helium MFC set to  0.000000
9/24/2011	3:10:25 PM	H2 MFC set to  0.000000
9/24/2011	3:10:25 PM	BCl3 MFC set to  0.000000
9/24/2011	3:10:25 PM	PHl3 MFC set to  0.000000
9/24/2011	3:10:25 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:10:25 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:10:25 PM	Tube furnace set to 0
9/24/2011	3:10:25 PM	Helium valve closed
9/24/2011	3:10:25 PM	H2 valve closed
9/24/2011	3:10:25 PM	BCl3 valve closed
9/24/2011	3:10:25 PM	PH3 valve closed
9/24/2011	3:10:25 PM	SiCl4 pre valve closed
9/24/2011	3:10:25 PM	SiCl4 post valve closed
9/24/2011	3:10:25 PM	Main Vac valve closed
9/24/2011	3:10:25 PM	Bubbler valve closed
9/24/2011	3:10:25 PM	Bypass valve opened
9/24/2011	3:10:25 PM	Helium MFC set to  0.000000
9/24/2011	3:10:25 PM	H2 MFC set to  0.000000
9/24/2011	3:10:25 PM	BCl3 MFC set to  0.000000
9/24/2011	3:10:25 PM	PHl3 MFC set to  0.000000
9/24/2011	3:10:25 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:10:25 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:10:25 PM	Tube furnace set to 0
9/24/2011	3:10:55 PM	Helium valve closed
9/24/2011	3:10:55 PM	H2 valve closed
9/24/2011	3:10:55 PM	BCl3 valve closed
9/24/2011	3:10:55 PM	PH3 valve closed
9/24/2011	3:10:55 PM	SiCl4 pre valve closed
9/24/2011	3:10:55 PM	SiCl4 post valve closed
9/24/2011	3:10:55 PM	Bypass valve closed
9/24/2011	3:10:55 PM	Bubbler valve closed
9/24/2011	3:10:55 PM	Main Vac valve opened
9/24/2011	3:10:55 PM	Helium MFC set to  0.000000
9/24/2011	3:10:55 PM	H2 MFC set to  0.000000
9/24/2011	3:10:55 PM	BCl3 MFC set to  0.000000
9/24/2011	3:10:55 PM	PHl3 MFC set to  0.000000
9/24/2011	3:10:55 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:10:55 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:10:56 PM	Tube furnace set to 0
9/24/2011	3:11:26 PM	H2 valve closed
9/24/2011	3:11:26 PM	BCl3 valve closed
9/24/2011	3:11:26 PM	PH3 valve closed
9/24/2011	3:11:26 PM	SiCl4 pre valve closed
9/24/2011	3:11:26 PM	SiCl4 post valve closed
9/24/2011	3:11:26 PM	Bypass valve closed
9/24/2011	3:11:26 PM	Bubbler valve closed
9/24/2011	3:11:26 PM	Helium valve opened
9/24/2011	3:11:26 PM	Main Vac valve opened
9/24/2011	3:11:26 PM	Helium MFC set to  20.000000
9/24/2011	3:11:26 PM	H2 MFC set to  0.000000
9/24/2011	3:11:26 PM	BCl3 MFC set to  0.000000
9/24/2011	3:11:26 PM	PHl3 MFC set to  0.000000
9/24/2011	3:11:26 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:11:26 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:11:26 PM	Tube furnace set to 0
9/24/2011	3:11:56 PM	Helium valve closed
9/24/2011	3:11:56 PM	H2 valve closed
9/24/2011	3:11:56 PM	BCl3 valve closed
9/24/2011	3:11:56 PM	PH3 valve closed
9/24/2011	3:11:56 PM	SiCl4 pre valve closed
9/24/2011	3:11:56 PM	SiCl4 post valve closed
9/24/2011	3:11:56 PM	Bypass valve closed
9/24/2011	3:11:56 PM	Bubbler valve closed
9/24/2011	3:11:56 PM	Main Vac valve opened
9/24/2011	3:11:56 PM	Helium MFC set to  0.000000
9/24/2011	3:11:56 PM	H2 MFC set to  0.000000
9/24/2011	3:11:56 PM	BCl3 MFC set to  0.000000
9/24/2011	3:11:56 PM	PHl3 MFC set to  0.000000
9/24/2011	3:11:56 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:11:56 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:11:56 PM	Tube furnace set to 0
9/24/2011	3:12:26 PM	H2 valve closed
9/24/2011	3:12:26 PM	BCl3 valve closed
9/24/2011	3:12:26 PM	PH3 valve closed
9/24/2011	3:12:26 PM	SiCl4 pre valve closed
9/24/2011	3:12:26 PM	SiCl4 post valve closed
9/24/2011	3:12:26 PM	Bypass valve closed
9/24/2011	3:12:26 PM	Bubbler valve closed
9/24/2011	3:12:26 PM	Helium valve opened
9/24/2011	3:12:26 PM	Main Vac valve opened
9/24/2011	3:12:26 PM	Helium MFC set to  20.000000
9/24/2011	3:12:26 PM	H2 MFC set to  0.000000
9/24/2011	3:12:26 PM	BCl3 MFC set to  0.000000
9/24/2011	3:12:26 PM	PHl3 MFC set to  0.000000
9/24/2011	3:12:26 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:12:26 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:12:26 PM	Tube furnace set to 0
9/24/2011	3:12:56 PM	Helium valve closed
9/24/2011	3:12:56 PM	H2 valve closed
9/24/2011	3:12:56 PM	BCl3 valve closed
9/24/2011	3:12:56 PM	PH3 valve closed
9/24/2011	3:12:56 PM	SiCl4 pre valve closed
9/24/2011	3:12:56 PM	SiCl4 post valve closed
9/24/2011	3:12:56 PM	Bypass valve closed
9/24/2011	3:12:56 PM	Bubbler valve closed
9/24/2011	3:12:56 PM	Main Vac valve opened
9/24/2011	3:12:56 PM	Helium MFC set to  0.000000
9/24/2011	3:12:56 PM	H2 MFC set to  0.000000
9/24/2011	3:12:56 PM	BCl3 MFC set to  0.000000
9/24/2011	3:12:56 PM	PHl3 MFC set to  0.000000
9/24/2011	3:12:56 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:12:56 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:12:56 PM	Tube furnace set to 0
9/24/2011	3:13:26 PM	H2 valve closed
9/24/2011	3:13:26 PM	BCl3 valve closed
9/24/2011	3:13:26 PM	PH3 valve closed
9/24/2011	3:13:26 PM	SiCl4 pre valve closed
9/24/2011	3:13:26 PM	SiCl4 post valve closed
9/24/2011	3:13:26 PM	Bypass valve closed
9/24/2011	3:13:26 PM	Bubbler valve closed
9/24/2011	3:13:26 PM	Helium valve opened
9/24/2011	3:13:26 PM	Main Vac valve opened
9/24/2011	3:13:26 PM	Helium MFC set to  20.000000
9/24/2011	3:13:26 PM	H2 MFC set to  0.000000
9/24/2011	3:13:26 PM	BCl3 MFC set to  0.000000
9/24/2011	3:13:26 PM	PHl3 MFC set to  0.000000
9/24/2011	3:13:26 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:13:26 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:13:27 PM	Tube furnace set to 0
9/24/2011	3:13:57 PM	Helium valve closed
9/24/2011	3:13:57 PM	H2 valve closed
9/24/2011	3:13:57 PM	BCl3 valve closed
9/24/2011	3:13:57 PM	PH3 valve closed
9/24/2011	3:13:57 PM	SiCl4 pre valve closed
9/24/2011	3:13:57 PM	SiCl4 post valve closed
9/24/2011	3:13:57 PM	Bypass valve closed
9/24/2011	3:13:57 PM	Bubbler valve closed
9/24/2011	3:13:57 PM	Main Vac valve opened
9/24/2011	3:13:57 PM	Helium MFC set to  0.000000
9/24/2011	3:13:57 PM	H2 MFC set to  0.000000
9/24/2011	3:13:57 PM	BCl3 MFC set to  0.000000
9/24/2011	3:13:57 PM	PHl3 MFC set to  0.000000
9/24/2011	3:13:57 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:13:57 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:13:57 PM	Tube furnace set to 0
9/24/2011	3:14:27 PM	H2 valve closed
9/24/2011	3:14:27 PM	BCl3 valve closed
9/24/2011	3:14:27 PM	PH3 valve closed
9/24/2011	3:14:27 PM	SiCl4 pre valve closed
9/24/2011	3:14:27 PM	SiCl4 post valve closed
9/24/2011	3:14:27 PM	Bypass valve closed
9/24/2011	3:14:27 PM	Bubbler valve closed
9/24/2011	3:14:27 PM	Helium valve opened
9/24/2011	3:14:27 PM	Main Vac valve opened
9/24/2011	3:14:27 PM	Helium MFC set to  20.000000
9/24/2011	3:14:27 PM	H2 MFC set to  0.000000
9/24/2011	3:14:27 PM	BCl3 MFC set to  0.000000
9/24/2011	3:14:27 PM	PHl3 MFC set to  0.000000
9/24/2011	3:14:27 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:14:27 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:14:27 PM	Tube furnace set to 0
9/24/2011	3:14:57 PM	Helium valve closed
9/24/2011	3:14:57 PM	H2 valve closed
9/24/2011	3:14:57 PM	BCl3 valve closed
9/24/2011	3:14:57 PM	PH3 valve closed
9/24/2011	3:14:57 PM	SiCl4 pre valve closed
9/24/2011	3:14:57 PM	SiCl4 post valve closed
9/24/2011	3:14:57 PM	Bypass valve closed
9/24/2011	3:14:57 PM	Bubbler valve closed
9/24/2011	3:14:57 PM	Main Vac valve opened
9/24/2011	3:14:57 PM	Helium MFC set to  0.000000
9/24/2011	3:14:57 PM	H2 MFC set to  0.000000
9/24/2011	3:14:57 PM	BCl3 MFC set to  0.000000
9/24/2011	3:14:57 PM	PHl3 MFC set to  0.000000
9/24/2011	3:14:57 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:14:57 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:14:57 PM	Tube furnace set to 0
9/24/2011	3:15:27 PM	H2 valve closed
9/24/2011	3:15:27 PM	BCl3 valve closed
9/24/2011	3:15:27 PM	PH3 valve closed
9/24/2011	3:15:27 PM	SiCl4 pre valve closed
9/24/2011	3:15:27 PM	SiCl4 post valve closed
9/24/2011	3:15:27 PM	Bypass valve closed
9/24/2011	3:15:27 PM	Bubbler valve closed
9/24/2011	3:15:27 PM	Helium valve opened
9/24/2011	3:15:27 PM	Main Vac valve opened
9/24/2011	3:15:27 PM	Helium MFC set to  20.000000
9/24/2011	3:15:27 PM	H2 MFC set to  0.000000
9/24/2011	3:15:27 PM	BCl3 MFC set to  0.000000
9/24/2011	3:15:27 PM	PHl3 MFC set to  0.000000
9/24/2011	3:15:27 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:15:27 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:15:27 PM	Tube furnace set to 0
9/24/2011	3:15:57 PM	Helium valve closed
9/24/2011	3:15:57 PM	H2 valve closed
9/24/2011	3:15:57 PM	BCl3 valve closed
9/24/2011	3:15:57 PM	PH3 valve closed
9/24/2011	3:15:57 PM	SiCl4 pre valve closed
9/24/2011	3:15:57 PM	SiCl4 post valve closed
9/24/2011	3:15:57 PM	Bypass valve closed
9/24/2011	3:15:57 PM	Bubbler valve closed
9/24/2011	3:15:57 PM	Main Vac valve opened
9/24/2011	3:15:57 PM	Helium MFC set to  0.000000
9/24/2011	3:15:57 PM	H2 MFC set to  0.000000
9/24/2011	3:15:57 PM	BCl3 MFC set to  0.000000
9/24/2011	3:15:57 PM	PHl3 MFC set to  0.000000
9/24/2011	3:15:57 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:15:57 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:15:58 PM	Tube furnace set to 0
9/24/2011	3:16:28 PM	H2 valve closed
9/24/2011	3:16:28 PM	BCl3 valve closed
9/24/2011	3:16:28 PM	PH3 valve closed
9/24/2011	3:16:28 PM	SiCl4 pre valve closed
9/24/2011	3:16:28 PM	SiCl4 post valve closed
9/24/2011	3:16:28 PM	Bypass valve closed
9/24/2011	3:16:28 PM	Bubbler valve closed
9/24/2011	3:16:28 PM	Helium valve opened
9/24/2011	3:16:28 PM	Main Vac valve opened
9/24/2011	3:16:28 PM	Helium MFC set to  20.000000
9/24/2011	3:16:28 PM	H2 MFC set to  0.000000
9/24/2011	3:16:28 PM	BCl3 MFC set to  0.000000
9/24/2011	3:16:28 PM	PHl3 MFC set to  0.000000
9/24/2011	3:16:28 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:16:28 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:16:28 PM	Tube furnace set to 0
9/24/2011	3:16:58 PM	Helium valve closed
9/24/2011	3:16:58 PM	H2 valve closed
9/24/2011	3:16:58 PM	BCl3 valve closed
9/24/2011	3:16:58 PM	PH3 valve closed
9/24/2011	3:16:58 PM	SiCl4 pre valve closed
9/24/2011	3:16:58 PM	SiCl4 post valve closed
9/24/2011	3:16:58 PM	Bypass valve closed
9/24/2011	3:16:58 PM	Bubbler valve closed
9/24/2011	3:16:58 PM	Main Vac valve opened
9/24/2011	3:16:58 PM	Helium MFC set to  0.000000
9/24/2011	3:16:58 PM	H2 MFC set to  0.000000
9/24/2011	3:16:58 PM	BCl3 MFC set to  0.000000
9/24/2011	3:16:58 PM	PHl3 MFC set to  0.000000
9/24/2011	3:16:58 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:16:58 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:16:58 PM	Tube furnace set to 0
9/24/2011	3:17:28 PM	H2 valve closed
9/24/2011	3:17:28 PM	BCl3 valve closed
9/24/2011	3:17:28 PM	PH3 valve closed
9/24/2011	3:17:28 PM	SiCl4 pre valve closed
9/24/2011	3:17:28 PM	SiCl4 post valve closed
9/24/2011	3:17:28 PM	Bypass valve closed
9/24/2011	3:17:28 PM	Bubbler valve closed
9/24/2011	3:17:28 PM	Helium valve opened
9/24/2011	3:17:28 PM	Main Vac valve opened
9/24/2011	3:17:28 PM	Helium MFC set to  20.000000
9/24/2011	3:17:28 PM	H2 MFC set to  0.000000
9/24/2011	3:17:28 PM	BCl3 MFC set to  0.000000
9/24/2011	3:17:28 PM	PHl3 MFC set to  0.000000
9/24/2011	3:17:28 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:17:28 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:17:28 PM	Tube furnace set to 0
9/24/2011	3:17:58 PM	Helium valve closed
9/24/2011	3:17:58 PM	H2 valve closed
9/24/2011	3:17:58 PM	BCl3 valve closed
9/24/2011	3:17:58 PM	PH3 valve closed
9/24/2011	3:17:58 PM	SiCl4 pre valve closed
9/24/2011	3:17:58 PM	SiCl4 post valve closed
9/24/2011	3:17:58 PM	Bypass valve closed
9/24/2011	3:17:58 PM	Bubbler valve closed
9/24/2011	3:17:58 PM	Main Vac valve opened
9/24/2011	3:17:58 PM	Helium MFC set to  0.000000
9/24/2011	3:17:58 PM	H2 MFC set to  0.000000
9/24/2011	3:17:58 PM	BCl3 MFC set to  0.000000
9/24/2011	3:17:58 PM	PHl3 MFC set to  0.000000
9/24/2011	3:17:58 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:17:58 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:17:58 PM	Tube furnace set to 0
9/24/2011	3:18:28 PM	H2 valve closed
9/24/2011	3:18:28 PM	BCl3 valve closed
9/24/2011	3:18:28 PM	PH3 valve closed
9/24/2011	3:18:28 PM	SiCl4 pre valve closed
9/24/2011	3:18:28 PM	SiCl4 post valve closed
9/24/2011	3:18:28 PM	Bypass valve closed
9/24/2011	3:18:28 PM	Bubbler valve closed
9/24/2011	3:18:28 PM	Helium valve opened
9/24/2011	3:18:28 PM	Main Vac valve opened
9/24/2011	3:18:28 PM	Helium MFC set to  20.000000
9/24/2011	3:18:28 PM	H2 MFC set to  0.000000
9/24/2011	3:18:28 PM	BCl3 MFC set to  0.000000
9/24/2011	3:18:28 PM	PHl3 MFC set to  0.000000
9/24/2011	3:18:28 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:18:28 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:18:29 PM	Tube furnace set to 0
9/24/2011	3:18:59 PM	Helium valve closed
9/24/2011	3:18:59 PM	H2 valve closed
9/24/2011	3:18:59 PM	BCl3 valve closed
9/24/2011	3:18:59 PM	PH3 valve closed
9/24/2011	3:18:59 PM	SiCl4 pre valve closed
9/24/2011	3:18:59 PM	SiCl4 post valve closed
9/24/2011	3:18:59 PM	Bypass valve closed
9/24/2011	3:18:59 PM	Bubbler valve closed
9/24/2011	3:18:59 PM	Main Vac valve opened
9/24/2011	3:18:59 PM	Helium MFC set to  0.000000
9/24/2011	3:18:59 PM	H2 MFC set to  0.000000
9/24/2011	3:18:59 PM	BCl3 MFC set to  0.000000
9/24/2011	3:18:59 PM	PHl3 MFC set to  0.000000
9/24/2011	3:18:59 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:18:59 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:18:59 PM	Tube furnace set to 0
9/24/2011	3:19:29 PM	H2 valve closed
9/24/2011	3:19:29 PM	BCl3 valve closed
9/24/2011	3:19:29 PM	PH3 valve closed
9/24/2011	3:19:29 PM	SiCl4 pre valve closed
9/24/2011	3:19:29 PM	SiCl4 post valve closed
9/24/2011	3:19:29 PM	Bypass valve closed
9/24/2011	3:19:29 PM	Bubbler valve closed
9/24/2011	3:19:29 PM	Helium valve opened
9/24/2011	3:19:29 PM	Main Vac valve opened
9/24/2011	3:19:29 PM	Helium MFC set to  20.000000
9/24/2011	3:19:29 PM	H2 MFC set to  0.000000
9/24/2011	3:19:29 PM	BCl3 MFC set to  0.000000
9/24/2011	3:19:29 PM	PHl3 MFC set to  0.000000
9/24/2011	3:19:29 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:19:29 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:19:29 PM	Tube furnace set to 0
9/24/2011	3:19:59 PM	Helium valve closed
9/24/2011	3:19:59 PM	H2 valve closed
9/24/2011	3:19:59 PM	BCl3 valve closed
9/24/2011	3:19:59 PM	PH3 valve closed
9/24/2011	3:19:59 PM	SiCl4 pre valve closed
9/24/2011	3:19:59 PM	SiCl4 post valve closed
9/24/2011	3:19:59 PM	Bypass valve closed
9/24/2011	3:19:59 PM	Bubbler valve closed
9/24/2011	3:19:59 PM	Main Vac valve opened
9/24/2011	3:19:59 PM	Helium MFC set to  0.000000
9/24/2011	3:19:59 PM	H2 MFC set to  0.000000
9/24/2011	3:19:59 PM	BCl3 MFC set to  0.000000
9/24/2011	3:19:59 PM	PHl3 MFC set to  0.000000
9/24/2011	3:19:59 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:19:59 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:19:59 PM	Tube furnace set to 0
9/24/2011	3:20:29 PM	H2 valve closed
9/24/2011	3:20:29 PM	BCl3 valve closed
9/24/2011	3:20:29 PM	PH3 valve closed
9/24/2011	3:20:29 PM	SiCl4 pre valve closed
9/24/2011	3:20:29 PM	SiCl4 post valve closed
9/24/2011	3:20:29 PM	Bypass valve closed
9/24/2011	3:20:29 PM	Bubbler valve closed
9/24/2011	3:20:29 PM	Helium valve opened
9/24/2011	3:20:29 PM	Main Vac valve opened
9/24/2011	3:20:29 PM	Helium MFC set to  20.000000
9/24/2011	3:20:29 PM	H2 MFC set to  0.000000
9/24/2011	3:20:29 PM	BCl3 MFC set to  0.000000
9/24/2011	3:20:29 PM	PHl3 MFC set to  0.000000
9/24/2011	3:20:29 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:20:29 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:20:29 PM	Tube furnace set to 0
9/24/2011	3:20:59 PM	Helium valve closed
9/24/2011	3:20:59 PM	H2 valve closed
9/24/2011	3:20:59 PM	BCl3 valve closed
9/24/2011	3:20:59 PM	PH3 valve closed
9/24/2011	3:20:59 PM	SiCl4 pre valve closed
9/24/2011	3:20:59 PM	SiCl4 post valve closed
9/24/2011	3:20:59 PM	Bypass valve closed
9/24/2011	3:20:59 PM	Bubbler valve closed
9/24/2011	3:20:59 PM	Main Vac valve opened
9/24/2011	3:20:59 PM	Helium MFC set to  0.000000
9/24/2011	3:20:59 PM	H2 MFC set to  0.000000
9/24/2011	3:20:59 PM	BCl3 MFC set to  0.000000
9/24/2011	3:20:59 PM	PHl3 MFC set to  0.000000
9/24/2011	3:20:59 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:20:59 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:21:00 PM	Tube furnace set to 0
9/24/2011	3:21:01 PM	Run finished at 3:21 PM
9/24/2011	3:21:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/24/2011	3:21:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/24/2011	3:21:17 PM	Recipe started at 3:21 PM
9/24/2011	3:21:17 PM	Helium valve closed
9/24/2011	3:21:17 PM	H2 valve closed
9/24/2011	3:21:17 PM	BCl3 valve closed
9/24/2011	3:21:17 PM	PH3 valve closed
9/24/2011	3:21:17 PM	SiCl4 pre valve closed
9/24/2011	3:21:17 PM	SiCl4 post valve closed
9/24/2011	3:21:17 PM	Main Vac valve closed
9/24/2011	3:21:17 PM	Bubbler valve closed
9/24/2011	3:21:17 PM	Bypass valve opened
9/24/2011	3:21:17 PM	Helium MFC set to  0.000000
9/24/2011	3:21:17 PM	H2 MFC set to  0.000000
9/24/2011	3:21:17 PM	BCl3 MFC set to  0.000000
9/24/2011	3:21:17 PM	PHl3 MFC set to  0.000000
9/24/2011	3:21:17 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:21:17 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:21:17 PM	Tube furnace set to 0
9/24/2011	3:21:17 PM	Helium valve closed
9/24/2011	3:21:17 PM	H2 valve closed
9/24/2011	3:21:17 PM	BCl3 valve closed
9/24/2011	3:21:17 PM	PH3 valve closed
9/24/2011	3:21:17 PM	SiCl4 pre valve closed
9/24/2011	3:21:17 PM	SiCl4 post valve closed
9/24/2011	3:21:17 PM	Main Vac valve closed
9/24/2011	3:21:17 PM	Bubbler valve closed
9/24/2011	3:21:17 PM	Bypass valve opened
9/24/2011	3:21:17 PM	Helium MFC set to  0.000000
9/24/2011	3:21:17 PM	H2 MFC set to  0.000000
9/24/2011	3:21:17 PM	BCl3 MFC set to  0.000000
9/24/2011	3:21:17 PM	PHl3 MFC set to  0.000000
9/24/2011	3:21:17 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:21:17 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:21:17 PM	Tube furnace set to 0
9/24/2011	3:21:20 PM	Helium valve closed
9/24/2011	3:21:20 PM	H2 valve closed
9/24/2011	3:21:20 PM	BCl3 valve closed
9/24/2011	3:21:20 PM	PH3 valve closed
9/24/2011	3:21:20 PM	SiCl4 pre valve closed
9/24/2011	3:21:20 PM	SiCl4 post valve closed
9/24/2011	3:21:20 PM	Bypass valve closed
9/24/2011	3:21:20 PM	Bubbler valve closed
9/24/2011	3:21:20 PM	Main Vac valve opened
9/24/2011	3:21:20 PM	Helium MFC set to  0.000000
9/24/2011	3:21:21 PM	H2 MFC set to  0.000000
9/24/2011	3:21:21 PM	BCl3 MFC set to  0.000000
9/24/2011	3:21:21 PM	PHl3 MFC set to  0.000000
9/24/2011	3:21:21 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:21:21 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:21:21 PM	Tube furnace set to 0
9/24/2011	3:21:51 PM	H2 valve closed
9/24/2011	3:21:51 PM	BCl3 valve closed
9/24/2011	3:21:51 PM	PH3 valve closed
9/24/2011	3:21:51 PM	SiCl4 pre valve closed
9/24/2011	3:21:51 PM	SiCl4 post valve closed
9/24/2011	3:21:51 PM	Bypass valve closed
9/24/2011	3:21:51 PM	Bubbler valve closed
9/24/2011	3:21:51 PM	Helium valve opened
9/24/2011	3:21:51 PM	Main Vac valve opened
9/24/2011	3:21:51 PM	Helium MFC set to  20.000000
9/24/2011	3:21:51 PM	H2 MFC set to  0.000000
9/24/2011	3:21:51 PM	BCl3 MFC set to  0.000000
9/24/2011	3:21:51 PM	PHl3 MFC set to  0.000000
9/24/2011	3:21:51 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:21:51 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:21:51 PM	Tube furnace set to 0
9/24/2011	3:22:21 PM	Helium valve closed
9/24/2011	3:22:21 PM	H2 valve closed
9/24/2011	3:22:21 PM	BCl3 valve closed
9/24/2011	3:22:21 PM	PH3 valve closed
9/24/2011	3:22:21 PM	SiCl4 pre valve closed
9/24/2011	3:22:21 PM	SiCl4 post valve closed
9/24/2011	3:22:21 PM	Bypass valve closed
9/24/2011	3:22:21 PM	Bubbler valve closed
9/24/2011	3:22:21 PM	Main Vac valve opened
9/24/2011	3:22:21 PM	Helium MFC set to  0.000000
9/24/2011	3:22:21 PM	H2 MFC set to  0.000000
9/24/2011	3:22:21 PM	BCl3 MFC set to  0.000000
9/24/2011	3:22:21 PM	PHl3 MFC set to  0.000000
9/24/2011	3:22:21 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:22:21 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:22:21 PM	Tube furnace set to 0
9/24/2011	3:22:51 PM	H2 valve closed
9/24/2011	3:22:51 PM	BCl3 valve closed
9/24/2011	3:22:51 PM	PH3 valve closed
9/24/2011	3:22:51 PM	SiCl4 pre valve closed
9/24/2011	3:22:51 PM	SiCl4 post valve closed
9/24/2011	3:22:51 PM	Bypass valve closed
9/24/2011	3:22:51 PM	Bubbler valve closed
9/24/2011	3:22:51 PM	Helium valve opened
9/24/2011	3:22:51 PM	Main Vac valve opened
9/24/2011	3:22:51 PM	Helium MFC set to  20.000000
9/24/2011	3:22:51 PM	H2 MFC set to  0.000000
9/24/2011	3:22:51 PM	BCl3 MFC set to  0.000000
9/24/2011	3:22:51 PM	PHl3 MFC set to  0.000000
9/24/2011	3:22:51 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:22:51 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:22:51 PM	Tube furnace set to 0
9/24/2011	3:23:21 PM	Helium valve closed
9/24/2011	3:23:21 PM	H2 valve closed
9/24/2011	3:23:21 PM	BCl3 valve closed
9/24/2011	3:23:21 PM	PH3 valve closed
9/24/2011	3:23:21 PM	SiCl4 pre valve closed
9/24/2011	3:23:21 PM	SiCl4 post valve closed
9/24/2011	3:23:21 PM	Bypass valve closed
9/24/2011	3:23:21 PM	Bubbler valve closed
9/24/2011	3:23:21 PM	Main Vac valve opened
9/24/2011	3:23:21 PM	Helium MFC set to  0.000000
9/24/2011	3:23:21 PM	H2 MFC set to  0.000000
9/24/2011	3:23:21 PM	BCl3 MFC set to  0.000000
9/24/2011	3:23:21 PM	PHl3 MFC set to  0.000000
9/24/2011	3:23:21 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:23:21 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:23:22 PM	Tube furnace set to 0
9/24/2011	3:23:52 PM	H2 valve closed
9/24/2011	3:23:52 PM	BCl3 valve closed
9/24/2011	3:23:52 PM	PH3 valve closed
9/24/2011	3:23:52 PM	SiCl4 pre valve closed
9/24/2011	3:23:52 PM	SiCl4 post valve closed
9/24/2011	3:23:52 PM	Bypass valve closed
9/24/2011	3:23:52 PM	Bubbler valve closed
9/24/2011	3:23:52 PM	Helium valve opened
9/24/2011	3:23:52 PM	Main Vac valve opened
9/24/2011	3:23:52 PM	Helium MFC set to  20.000000
9/24/2011	3:23:52 PM	H2 MFC set to  0.000000
9/24/2011	3:23:52 PM	BCl3 MFC set to  0.000000
9/24/2011	3:23:52 PM	PHl3 MFC set to  0.000000
9/24/2011	3:23:52 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:23:52 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:23:52 PM	Tube furnace set to 0
9/24/2011	3:24:22 PM	Helium valve closed
9/24/2011	3:24:22 PM	H2 valve closed
9/24/2011	3:24:22 PM	BCl3 valve closed
9/24/2011	3:24:22 PM	PH3 valve closed
9/24/2011	3:24:22 PM	SiCl4 pre valve closed
9/24/2011	3:24:22 PM	SiCl4 post valve closed
9/24/2011	3:24:22 PM	Bypass valve closed
9/24/2011	3:24:22 PM	Bubbler valve closed
9/24/2011	3:24:22 PM	Main Vac valve opened
9/24/2011	3:24:22 PM	Helium MFC set to  0.000000
9/24/2011	3:24:22 PM	H2 MFC set to  0.000000
9/24/2011	3:24:22 PM	BCl3 MFC set to  0.000000
9/24/2011	3:24:22 PM	PHl3 MFC set to  0.000000
9/24/2011	3:24:22 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:24:22 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:24:22 PM	Tube furnace set to 0
9/24/2011	3:24:52 PM	H2 valve closed
9/24/2011	3:24:52 PM	BCl3 valve closed
9/24/2011	3:24:52 PM	PH3 valve closed
9/24/2011	3:24:52 PM	SiCl4 pre valve closed
9/24/2011	3:24:52 PM	SiCl4 post valve closed
9/24/2011	3:24:52 PM	Bypass valve closed
9/24/2011	3:24:52 PM	Bubbler valve closed
9/24/2011	3:24:52 PM	Helium valve opened
9/24/2011	3:24:52 PM	Main Vac valve opened
9/24/2011	3:24:52 PM	Helium MFC set to  20.000000
9/24/2011	3:24:52 PM	H2 MFC set to  0.000000
9/24/2011	3:24:52 PM	BCl3 MFC set to  0.000000
9/24/2011	3:24:52 PM	PHl3 MFC set to  0.000000
9/24/2011	3:24:52 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:24:52 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:24:52 PM	Tube furnace set to 0
9/24/2011	3:25:22 PM	Helium valve closed
9/24/2011	3:25:22 PM	H2 valve closed
9/24/2011	3:25:22 PM	BCl3 valve closed
9/24/2011	3:25:22 PM	PH3 valve closed
9/24/2011	3:25:22 PM	SiCl4 pre valve closed
9/24/2011	3:25:22 PM	SiCl4 post valve closed
9/24/2011	3:25:22 PM	Bypass valve closed
9/24/2011	3:25:22 PM	Bubbler valve closed
9/24/2011	3:25:22 PM	Main Vac valve opened
9/24/2011	3:25:22 PM	Helium MFC set to  0.000000
9/24/2011	3:25:22 PM	H2 MFC set to  0.000000
9/24/2011	3:25:22 PM	BCl3 MFC set to  0.000000
9/24/2011	3:25:22 PM	PHl3 MFC set to  0.000000
9/24/2011	3:25:22 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:25:22 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:25:22 PM	Tube furnace set to 0
9/24/2011	3:25:53 PM	H2 valve closed
9/24/2011	3:25:53 PM	BCl3 valve closed
9/24/2011	3:25:53 PM	PH3 valve closed
9/24/2011	3:25:53 PM	SiCl4 pre valve closed
9/24/2011	3:25:53 PM	SiCl4 post valve closed
9/24/2011	3:25:53 PM	Bypass valve closed
9/24/2011	3:25:53 PM	Bubbler valve closed
9/24/2011	3:25:53 PM	Helium valve opened
9/24/2011	3:25:53 PM	Main Vac valve opened
9/24/2011	3:25:53 PM	Helium MFC set to  20.000000
9/24/2011	3:25:53 PM	H2 MFC set to  0.000000
9/24/2011	3:25:53 PM	BCl3 MFC set to  0.000000
9/24/2011	3:25:53 PM	PHl3 MFC set to  0.000000
9/24/2011	3:25:53 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:25:53 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:25:53 PM	Tube furnace set to 0
9/24/2011	3:26:23 PM	Helium valve closed
9/24/2011	3:26:23 PM	H2 valve closed
9/24/2011	3:26:23 PM	BCl3 valve closed
9/24/2011	3:26:23 PM	PH3 valve closed
9/24/2011	3:26:23 PM	SiCl4 pre valve closed
9/24/2011	3:26:23 PM	SiCl4 post valve closed
9/24/2011	3:26:23 PM	Bypass valve closed
9/24/2011	3:26:23 PM	Bubbler valve closed
9/24/2011	3:26:23 PM	Main Vac valve opened
9/24/2011	3:26:23 PM	Helium MFC set to  0.000000
9/24/2011	3:26:23 PM	H2 MFC set to  0.000000
9/24/2011	3:26:23 PM	BCl3 MFC set to  0.000000
9/24/2011	3:26:23 PM	PHl3 MFC set to  0.000000
9/24/2011	3:26:23 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:26:23 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:26:23 PM	Tube furnace set to 0
9/24/2011	3:26:53 PM	H2 valve closed
9/24/2011	3:26:53 PM	BCl3 valve closed
9/24/2011	3:26:53 PM	PH3 valve closed
9/24/2011	3:26:53 PM	SiCl4 pre valve closed
9/24/2011	3:26:53 PM	SiCl4 post valve closed
9/24/2011	3:26:53 PM	Bypass valve closed
9/24/2011	3:26:53 PM	Bubbler valve closed
9/24/2011	3:26:53 PM	Helium valve opened
9/24/2011	3:26:53 PM	Main Vac valve opened
9/24/2011	3:26:53 PM	Helium MFC set to  20.000000
9/24/2011	3:26:53 PM	H2 MFC set to  0.000000
9/24/2011	3:26:53 PM	BCl3 MFC set to  0.000000
9/24/2011	3:26:53 PM	PHl3 MFC set to  0.000000
9/24/2011	3:26:53 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:26:53 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:26:53 PM	Tube furnace set to 0
9/24/2011	3:27:23 PM	Helium valve closed
9/24/2011	3:27:23 PM	H2 valve closed
9/24/2011	3:27:23 PM	BCl3 valve closed
9/24/2011	3:27:23 PM	PH3 valve closed
9/24/2011	3:27:23 PM	SiCl4 pre valve closed
9/24/2011	3:27:23 PM	SiCl4 post valve closed
9/24/2011	3:27:23 PM	Bypass valve closed
9/24/2011	3:27:23 PM	Bubbler valve closed
9/24/2011	3:27:23 PM	Main Vac valve opened
9/24/2011	3:27:23 PM	Helium MFC set to  0.000000
9/24/2011	3:27:23 PM	H2 MFC set to  0.000000
9/24/2011	3:27:23 PM	BCl3 MFC set to  0.000000
9/24/2011	3:27:23 PM	PHl3 MFC set to  0.000000
9/24/2011	3:27:23 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:27:23 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:27:23 PM	Tube furnace set to 0
9/24/2011	3:27:53 PM	H2 valve closed
9/24/2011	3:27:53 PM	BCl3 valve closed
9/24/2011	3:27:53 PM	PH3 valve closed
9/24/2011	3:27:53 PM	SiCl4 pre valve closed
9/24/2011	3:27:53 PM	SiCl4 post valve closed
9/24/2011	3:27:53 PM	Bypass valve closed
9/24/2011	3:27:53 PM	Bubbler valve closed
9/24/2011	3:27:53 PM	Helium valve opened
9/24/2011	3:27:53 PM	Main Vac valve opened
9/24/2011	3:27:53 PM	Helium MFC set to  20.000000
9/24/2011	3:27:53 PM	H2 MFC set to  0.000000
9/24/2011	3:27:53 PM	BCl3 MFC set to  0.000000
9/24/2011	3:27:53 PM	PHl3 MFC set to  0.000000
9/24/2011	3:27:53 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:27:53 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:27:54 PM	Tube furnace set to 0
9/24/2011	3:28:24 PM	Helium valve closed
9/24/2011	3:28:24 PM	H2 valve closed
9/24/2011	3:28:24 PM	BCl3 valve closed
9/24/2011	3:28:24 PM	PH3 valve closed
9/24/2011	3:28:24 PM	SiCl4 pre valve closed
9/24/2011	3:28:24 PM	SiCl4 post valve closed
9/24/2011	3:28:24 PM	Bypass valve closed
9/24/2011	3:28:24 PM	Bubbler valve closed
9/24/2011	3:28:24 PM	Main Vac valve opened
9/24/2011	3:28:24 PM	Helium MFC set to  0.000000
9/24/2011	3:28:24 PM	H2 MFC set to  0.000000
9/24/2011	3:28:24 PM	BCl3 MFC set to  0.000000
9/24/2011	3:28:24 PM	PHl3 MFC set to  0.000000
9/24/2011	3:28:24 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:28:24 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:28:24 PM	Tube furnace set to 0
9/24/2011	3:28:54 PM	H2 valve closed
9/24/2011	3:28:54 PM	BCl3 valve closed
9/24/2011	3:28:54 PM	PH3 valve closed
9/24/2011	3:28:54 PM	SiCl4 pre valve closed
9/24/2011	3:28:54 PM	SiCl4 post valve closed
9/24/2011	3:28:54 PM	Bypass valve closed
9/24/2011	3:28:54 PM	Bubbler valve closed
9/24/2011	3:28:54 PM	Helium valve opened
9/24/2011	3:28:54 PM	Main Vac valve opened
9/24/2011	3:28:54 PM	Helium MFC set to  20.000000
9/24/2011	3:28:54 PM	H2 MFC set to  0.000000
9/24/2011	3:28:54 PM	BCl3 MFC set to  0.000000
9/24/2011	3:28:54 PM	PHl3 MFC set to  0.000000
9/24/2011	3:28:54 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:28:54 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:28:54 PM	Tube furnace set to 0
9/24/2011	3:29:24 PM	Helium valve closed
9/24/2011	3:29:24 PM	H2 valve closed
9/24/2011	3:29:24 PM	BCl3 valve closed
9/24/2011	3:29:24 PM	PH3 valve closed
9/24/2011	3:29:24 PM	SiCl4 pre valve closed
9/24/2011	3:29:24 PM	SiCl4 post valve closed
9/24/2011	3:29:24 PM	Bypass valve closed
9/24/2011	3:29:24 PM	Bubbler valve closed
9/24/2011	3:29:24 PM	Main Vac valve opened
9/24/2011	3:29:24 PM	Helium MFC set to  0.000000
9/24/2011	3:29:24 PM	H2 MFC set to  0.000000
9/24/2011	3:29:24 PM	BCl3 MFC set to  0.000000
9/24/2011	3:29:24 PM	PHl3 MFC set to  0.000000
9/24/2011	3:29:24 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:29:24 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:29:24 PM	Tube furnace set to 0
9/24/2011	3:29:54 PM	H2 valve closed
9/24/2011	3:29:54 PM	BCl3 valve closed
9/24/2011	3:29:54 PM	PH3 valve closed
9/24/2011	3:29:54 PM	SiCl4 pre valve closed
9/24/2011	3:29:54 PM	SiCl4 post valve closed
9/24/2011	3:29:54 PM	Bypass valve closed
9/24/2011	3:29:54 PM	Bubbler valve closed
9/24/2011	3:29:54 PM	Helium valve opened
9/24/2011	3:29:54 PM	Main Vac valve opened
9/24/2011	3:29:54 PM	Helium MFC set to  20.000000
9/24/2011	3:29:54 PM	H2 MFC set to  0.000000
9/24/2011	3:29:54 PM	BCl3 MFC set to  0.000000
9/24/2011	3:29:54 PM	PHl3 MFC set to  0.000000
9/24/2011	3:29:54 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:29:54 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:29:54 PM	Tube furnace set to 0
9/24/2011	3:30:24 PM	Helium valve closed
9/24/2011	3:30:24 PM	H2 valve closed
9/24/2011	3:30:24 PM	BCl3 valve closed
9/24/2011	3:30:24 PM	PH3 valve closed
9/24/2011	3:30:24 PM	SiCl4 pre valve closed
9/24/2011	3:30:24 PM	SiCl4 post valve closed
9/24/2011	3:30:24 PM	Bypass valve closed
9/24/2011	3:30:24 PM	Bubbler valve closed
9/24/2011	3:30:24 PM	Main Vac valve opened
9/24/2011	3:30:24 PM	Helium MFC set to  0.000000
9/24/2011	3:30:24 PM	H2 MFC set to  0.000000
9/24/2011	3:30:24 PM	BCl3 MFC set to  0.000000
9/24/2011	3:30:24 PM	PHl3 MFC set to  0.000000
9/24/2011	3:30:24 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:30:24 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:30:25 PM	Tube furnace set to 0
9/24/2011	3:30:55 PM	H2 valve closed
9/24/2011	3:30:55 PM	BCl3 valve closed
9/24/2011	3:30:55 PM	PH3 valve closed
9/24/2011	3:30:55 PM	SiCl4 pre valve closed
9/24/2011	3:30:55 PM	SiCl4 post valve closed
9/24/2011	3:30:55 PM	Bypass valve closed
9/24/2011	3:30:55 PM	Bubbler valve closed
9/24/2011	3:30:55 PM	Helium valve opened
9/24/2011	3:30:55 PM	Main Vac valve opened
9/24/2011	3:30:55 PM	Helium MFC set to  20.000000
9/24/2011	3:30:55 PM	H2 MFC set to  0.000000
9/24/2011	3:30:55 PM	BCl3 MFC set to  0.000000
9/24/2011	3:30:55 PM	PHl3 MFC set to  0.000000
9/24/2011	3:30:55 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:30:55 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:30:55 PM	Tube furnace set to 0
9/24/2011	3:31:25 PM	Helium valve closed
9/24/2011	3:31:25 PM	H2 valve closed
9/24/2011	3:31:25 PM	BCl3 valve closed
9/24/2011	3:31:25 PM	PH3 valve closed
9/24/2011	3:31:25 PM	SiCl4 pre valve closed
9/24/2011	3:31:25 PM	SiCl4 post valve closed
9/24/2011	3:31:25 PM	Bypass valve closed
9/24/2011	3:31:25 PM	Bubbler valve closed
9/24/2011	3:31:25 PM	Main Vac valve opened
9/24/2011	3:31:25 PM	Helium MFC set to  0.000000
9/24/2011	3:31:25 PM	H2 MFC set to  0.000000
9/24/2011	3:31:25 PM	BCl3 MFC set to  0.000000
9/24/2011	3:31:25 PM	PHl3 MFC set to  0.000000
9/24/2011	3:31:25 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:31:25 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:31:25 PM	Tube furnace set to 0
9/24/2011	3:31:26 PM	Run finished at 3:31 PM
9/24/2011	3:31:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/24/2011	3:35:06 PM	Main Vac valve closed
9/24/2011	3:35:13 PM	Main Vac valve opened
9/24/2011	3:35:48 PM	Recipe started at 3:35 PM
9/24/2011	3:35:48 PM	Helium valve closed
9/24/2011	3:35:48 PM	H2 valve closed
9/24/2011	3:35:48 PM	BCl3 valve closed
9/24/2011	3:35:48 PM	PH3 valve closed
9/24/2011	3:35:48 PM	SiCl4 pre valve closed
9/24/2011	3:35:48 PM	SiCl4 post valve closed
9/24/2011	3:35:48 PM	Main Vac valve closed
9/24/2011	3:35:48 PM	Bypass valve closed
9/24/2011	3:35:48 PM	Bubbler valve closed
9/24/2011	3:35:48 PM	Helium MFC set to  0.000000
9/24/2011	3:35:48 PM	H2 MFC set to  0.000000
9/24/2011	3:35:48 PM	BCl3 MFC set to  0.000000
9/24/2011	3:35:48 PM	PHl3 MFC set to  0.000000
9/24/2011	3:35:48 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:35:48 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:35:48 PM	Tube furnace set to 0
9/24/2011	3:35:51 PM	Helium valve closed
9/24/2011	3:35:51 PM	BCl3 valve closed
9/24/2011	3:35:51 PM	PH3 valve closed
9/24/2011	3:35:51 PM	SiCl4 pre valve closed
9/24/2011	3:35:51 PM	SiCl4 post valve closed
9/24/2011	3:35:51 PM	Main Vac valve closed
9/24/2011	3:35:51 PM	Bypass valve closed
9/24/2011	3:35:51 PM	Bubbler valve closed
9/24/2011	3:35:51 PM	H2 valve opened
9/24/2011	3:35:51 PM	Helium MFC set to  0.000000
9/24/2011	3:35:51 PM	H2 MFC set to  500.000000
9/24/2011	3:35:51 PM	BCl3 MFC set to  0.000000
9/24/2011	3:35:51 PM	PHl3 MFC set to  0.000000
9/24/2011	3:35:51 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:35:51 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:35:51 PM	Tube furnace set to 0
9/24/2011	3:37:00 PM	Helium valve closed
9/24/2011	3:37:00 PM	BCl3 valve closed
9/24/2011	3:37:00 PM	PH3 valve closed
9/24/2011	3:37:00 PM	SiCl4 pre valve closed
9/24/2011	3:37:00 PM	SiCl4 post valve closed
9/24/2011	3:37:00 PM	Main Vac valve closed
9/24/2011	3:37:00 PM	Bypass valve closed
9/24/2011	3:37:00 PM	H2 valve opened
9/24/2011	3:37:01 PM	Bubbler valve opened
9/24/2011	3:37:01 PM	Helium MFC set to  0.000000
9/24/2011	3:37:01 PM	H2 MFC set to  500.000000
9/24/2011	3:37:01 PM	BCl3 MFC set to  0.000000
9/24/2011	3:37:01 PM	PHl3 MFC set to  0.000000
9/24/2011	3:37:01 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:37:01 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:37:01 PM	Tube furnace set to 0
9/24/2011	3:37:02 PM	Helium valve closed
9/24/2011	3:37:02 PM	BCl3 valve closed
9/24/2011	3:37:02 PM	PH3 valve closed
9/24/2011	3:37:02 PM	SiCl4 pre valve closed
9/24/2011	3:37:02 PM	SiCl4 post valve closed
9/24/2011	3:37:02 PM	Main Vac valve closed
9/24/2011	3:37:02 PM	Bypass valve closed
9/24/2011	3:37:02 PM	H2 valve opened
9/24/2011	3:37:02 PM	Bubbler valve opened
9/24/2011	3:37:02 PM	Helium MFC set to  0.000000
9/24/2011	3:37:02 PM	H2 MFC set to  500.000000
9/24/2011	3:37:02 PM	BCl3 MFC set to  0.000000
9/24/2011	3:37:02 PM	PHl3 MFC set to  0.000000
9/24/2011	3:37:02 PM	SiCl4 MFC set to  0.000000
9/24/2011	3:37:02 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:37:02 PM	Tube furnace set to 1000
9/24/2011	3:57:02 PM	Helium valve closed
9/24/2011	3:57:02 PM	BCl3 valve closed
9/24/2011	3:57:02 PM	PH3 valve closed
9/24/2011	3:57:02 PM	Main Vac valve closed
9/24/2011	3:57:02 PM	Bypass valve closed
9/24/2011	3:57:02 PM	H2 valve opened
9/24/2011	3:57:02 PM	SiCl4 pre valve opened
9/24/2011	3:57:02 PM	SiCl4 post valve opened
9/24/2011	3:57:02 PM	Bubbler valve opened
9/24/2011	3:57:02 PM	Helium MFC set to  0.000000
9/24/2011	3:57:02 PM	H2 MFC set to  500.000000
9/24/2011	3:57:02 PM	BCl3 MFC set to  0.000000
9/24/2011	3:57:02 PM	PHl3 MFC set to  0.000000
9/24/2011	3:57:02 PM	SiCl4 MFC set to  50.000000
9/24/2011	3:57:02 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	3:57:02 PM	Tube furnace set to 1000
9/24/2011	4:07:02 PM	Helium valve closed
9/24/2011	4:07:02 PM	BCl3 valve closed
9/24/2011	4:07:02 PM	PH3 valve closed
9/24/2011	4:07:02 PM	SiCl4 pre valve closed
9/24/2011	4:07:02 PM	SiCl4 post valve closed
9/24/2011	4:07:02 PM	Main Vac valve closed
9/24/2011	4:07:02 PM	Bypass valve closed
9/24/2011	4:07:02 PM	H2 valve opened
9/24/2011	4:07:02 PM	Bubbler valve opened
9/24/2011	4:07:02 PM	Helium MFC set to  0.000000
9/24/2011	4:07:02 PM	H2 MFC set to  500.000000
9/24/2011	4:07:02 PM	BCl3 MFC set to  0.000000
9/24/2011	4:07:02 PM	PHl3 MFC set to  0.000000
9/24/2011	4:07:02 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:07:02 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:07:02 PM	Tube furnace set to 750
9/24/2011	4:12:02 PM	H2 valve closed
9/24/2011	4:12:02 PM	BCl3 valve closed
9/24/2011	4:12:02 PM	PH3 valve closed
9/24/2011	4:12:02 PM	SiCl4 pre valve closed
9/24/2011	4:12:02 PM	SiCl4 post valve closed
9/24/2011	4:12:02 PM	Main Vac valve closed
9/24/2011	4:12:02 PM	Bypass valve closed
9/24/2011	4:12:02 PM	Helium valve opened
9/24/2011	4:12:02 PM	Bubbler valve opened
9/24/2011	4:12:02 PM	Helium MFC set to  500.000000
9/24/2011	4:12:02 PM	H2 MFC set to  0.000000
9/24/2011	4:12:02 PM	BCl3 MFC set to  0.000000
9/24/2011	4:12:02 PM	PHl3 MFC set to  0.000000
9/24/2011	4:12:02 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:12:02 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:12:02 PM	Tube furnace set to 0
9/24/2011	4:23:58 PM	Helium valve closed
9/24/2011	4:23:58 PM	H2 valve closed
9/24/2011	4:23:58 PM	BCl3 valve closed
9/24/2011	4:23:58 PM	PH3 valve closed
9/24/2011	4:23:58 PM	SiCl4 pre valve closed
9/24/2011	4:23:58 PM	SiCl4 post valve closed
9/24/2011	4:23:58 PM	Main Vac valve closed
9/24/2011	4:23:58 PM	Bypass valve closed
9/24/2011	4:23:58 PM	Bubbler valve closed
9/24/2011	4:23:58 PM	Helium MFC set to  0.000000
9/24/2011	4:23:58 PM	H2 MFC set to  0.000000
9/24/2011	4:23:58 PM	BCl3 MFC set to  0.000000
9/24/2011	4:23:58 PM	PHl3 MFC set to  0.000000
9/24/2011	4:23:58 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:23:58 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:23:58 PM	Tube furnace set to 0
9/24/2011	4:23:59 PM	Run finished at 4:23 PM
9/24/2011	4:24:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/24/2011	4:24:37 PM	Recipe started at 4:24 PM
9/24/2011	4:24:37 PM	Helium valve closed
9/24/2011	4:24:37 PM	H2 valve closed
9/24/2011	4:24:37 PM	BCl3 valve closed
9/24/2011	4:24:37 PM	PH3 valve closed
9/24/2011	4:24:37 PM	SiCl4 pre valve closed
9/24/2011	4:24:37 PM	SiCl4 post valve closed
9/24/2011	4:24:37 PM	Main Vac valve closed
9/24/2011	4:24:37 PM	Bypass valve closed
9/24/2011	4:24:37 PM	Bubbler valve closed
9/24/2011	4:24:37 PM	Helium MFC set to  0.000000
9/24/2011	4:24:37 PM	H2 MFC set to  0.000000
9/24/2011	4:24:37 PM	BCl3 MFC set to  0.000000
9/24/2011	4:24:37 PM	PHl3 MFC set to  0.000000
9/24/2011	4:24:37 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:24:37 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:24:37 PM	Tube furnace set to 0
9/24/2011	4:24:40 PM	H2 valve closed
9/24/2011	4:24:40 PM	BCl3 valve closed
9/24/2011	4:24:40 PM	PH3 valve closed
9/24/2011	4:24:40 PM	SiCl4 pre valve closed
9/24/2011	4:24:40 PM	SiCl4 post valve closed
9/24/2011	4:24:40 PM	Main Vac valve closed
9/24/2011	4:24:40 PM	Bypass valve closed
9/24/2011	4:24:40 PM	Bubbler valve closed
9/24/2011	4:24:40 PM	Helium valve opened
9/24/2011	4:24:40 PM	Helium MFC set to  500.000000
9/24/2011	4:24:40 PM	H2 MFC set to  0.000000
9/24/2011	4:24:40 PM	BCl3 MFC set to  0.000000
9/24/2011	4:24:40 PM	PHl3 MFC set to  0.000000
9/24/2011	4:24:40 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:24:40 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:24:41 PM	Tube furnace set to 0
9/24/2011	4:24:41 PM	Helium valve closed
9/24/2011	4:24:41 PM	H2 valve closed
9/24/2011	4:24:41 PM	BCl3 valve closed
9/24/2011	4:24:41 PM	PH3 valve closed
9/24/2011	4:24:41 PM	SiCl4 pre valve closed
9/24/2011	4:24:41 PM	SiCl4 post valve closed
9/24/2011	4:24:41 PM	Main Vac valve closed
9/24/2011	4:24:41 PM	Bypass valve closed
9/24/2011	4:24:41 PM	Bubbler valve closed
9/24/2011	4:24:41 PM	Helium MFC set to  0.000000
9/24/2011	4:24:41 PM	H2 MFC set to  0.000000
9/24/2011	4:24:41 PM	BCl3 MFC set to  0.000000
9/24/2011	4:24:41 PM	PHl3 MFC set to  0.000000
9/24/2011	4:24:41 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:24:41 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:24:41 PM	Tube furnace set to 0
9/24/2011	4:24:42 PM	Run finished at 4:24 PM
9/24/2011	4:24:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/24/2011	4:30:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/24/2011	4:30:15 PM	Recipe started at 4:30 PM
9/24/2011	4:30:15 PM	Helium valve closed
9/24/2011	4:30:15 PM	H2 valve closed
9/24/2011	4:30:15 PM	BCl3 valve closed
9/24/2011	4:30:15 PM	PH3 valve closed
9/24/2011	4:30:15 PM	SiCl4 pre valve closed
9/24/2011	4:30:15 PM	SiCl4 post valve closed
9/24/2011	4:30:15 PM	Main Vac valve closed
9/24/2011	4:30:15 PM	Bubbler valve closed
9/24/2011	4:30:15 PM	Bypass valve opened
9/24/2011	4:30:15 PM	Helium MFC set to  0.000000
9/24/2011	4:30:15 PM	H2 MFC set to  0.000000
9/24/2011	4:30:15 PM	BCl3 MFC set to  0.000000
9/24/2011	4:30:15 PM	PHl3 MFC set to  0.000000
9/24/2011	4:30:15 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:30:15 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:30:16 PM	Tube furnace set to 0
9/24/2011	4:31:25 PM	Helium valve closed
9/24/2011	4:31:25 PM	H2 valve closed
9/24/2011	4:31:25 PM	BCl3 valve closed
9/24/2011	4:31:25 PM	PH3 valve closed
9/24/2011	4:31:25 PM	SiCl4 pre valve closed
9/24/2011	4:31:25 PM	SiCl4 post valve closed
9/24/2011	4:31:25 PM	Main Vac valve closed
9/24/2011	4:31:25 PM	Bubbler valve closed
9/24/2011	4:31:25 PM	Bypass valve opened
9/24/2011	4:31:25 PM	Helium MFC set to  0.000000
9/24/2011	4:31:25 PM	H2 MFC set to  0.000000
9/24/2011	4:31:25 PM	BCl3 MFC set to  0.000000
9/24/2011	4:31:25 PM	PHl3 MFC set to  0.000000
9/24/2011	4:31:25 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:31:25 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:31:26 PM	Tube furnace set to 0
9/24/2011	4:32:26 PM	Helium valve closed
9/24/2011	4:32:26 PM	H2 valve closed
9/24/2011	4:32:26 PM	BCl3 valve closed
9/24/2011	4:32:26 PM	PH3 valve closed
9/24/2011	4:32:26 PM	SiCl4 pre valve closed
9/24/2011	4:32:26 PM	SiCl4 post valve closed
9/24/2011	4:32:26 PM	Bypass valve closed
9/24/2011	4:32:26 PM	Bubbler valve closed
9/24/2011	4:32:26 PM	Main Vac valve opened
9/24/2011	4:32:26 PM	Helium MFC set to  0.000000
9/24/2011	4:32:26 PM	H2 MFC set to  0.000000
9/24/2011	4:32:26 PM	BCl3 MFC set to  0.000000
9/24/2011	4:32:26 PM	PHl3 MFC set to  0.000000
9/24/2011	4:32:26 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:32:26 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:32:26 PM	Tube furnace set to 0
9/24/2011	4:32:27 PM	Run finished at 4:32 PM
9/24/2011	4:32:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/24/2011	4:33:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/24/2011	4:34:08 PM	Recipe started at 4:34 PM
9/24/2011	4:34:08 PM	Helium valve closed
9/24/2011	4:34:08 PM	H2 valve closed
9/24/2011	4:34:08 PM	BCl3 valve closed
9/24/2011	4:34:08 PM	PH3 valve closed
9/24/2011	4:34:08 PM	SiCl4 pre valve closed
9/24/2011	4:34:08 PM	SiCl4 post valve closed
9/24/2011	4:34:08 PM	Main Vac valve closed
9/24/2011	4:34:08 PM	Bubbler valve closed
9/24/2011	4:34:08 PM	Bypass valve opened
9/24/2011	4:34:08 PM	Helium MFC set to  0.000000
9/24/2011	4:34:08 PM	H2 MFC set to  0.000000
9/24/2011	4:34:08 PM	BCl3 MFC set to  0.000000
9/24/2011	4:34:08 PM	PHl3 MFC set to  0.000000
9/24/2011	4:34:08 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:34:08 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:34:08 PM	Tube furnace set to 0
9/24/2011	4:34:09 PM	Helium valve closed
9/24/2011	4:34:09 PM	H2 valve closed
9/24/2011	4:34:09 PM	BCl3 valve closed
9/24/2011	4:34:09 PM	PH3 valve closed
9/24/2011	4:34:09 PM	SiCl4 pre valve closed
9/24/2011	4:34:09 PM	SiCl4 post valve closed
9/24/2011	4:34:09 PM	Main Vac valve closed
9/24/2011	4:34:09 PM	Bubbler valve closed
9/24/2011	4:34:09 PM	Bypass valve opened
9/24/2011	4:34:09 PM	Helium MFC set to  0.000000
9/24/2011	4:34:09 PM	H2 MFC set to  0.000000
9/24/2011	4:34:09 PM	BCl3 MFC set to  0.000000
9/24/2011	4:34:09 PM	PHl3 MFC set to  0.000000
9/24/2011	4:34:09 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:34:09 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:34:09 PM	Tube furnace set to 0
9/24/2011	4:34:39 PM	Helium valve closed
9/24/2011	4:34:39 PM	H2 valve closed
9/24/2011	4:34:39 PM	BCl3 valve closed
9/24/2011	4:34:39 PM	PH3 valve closed
9/24/2011	4:34:39 PM	SiCl4 pre valve closed
9/24/2011	4:34:39 PM	SiCl4 post valve closed
9/24/2011	4:34:39 PM	Bypass valve closed
9/24/2011	4:34:39 PM	Bubbler valve closed
9/24/2011	4:34:39 PM	Main Vac valve opened
9/24/2011	4:34:39 PM	Helium MFC set to  0.000000
9/24/2011	4:34:39 PM	H2 MFC set to  0.000000
9/24/2011	4:34:39 PM	BCl3 MFC set to  0.000000
9/24/2011	4:34:39 PM	PHl3 MFC set to  0.000000
9/24/2011	4:34:39 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:34:39 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:34:39 PM	Tube furnace set to 0
9/24/2011	4:35:09 PM	H2 valve closed
9/24/2011	4:35:09 PM	BCl3 valve closed
9/24/2011	4:35:09 PM	PH3 valve closed
9/24/2011	4:35:09 PM	SiCl4 pre valve closed
9/24/2011	4:35:09 PM	SiCl4 post valve closed
9/24/2011	4:35:09 PM	Bypass valve closed
9/24/2011	4:35:09 PM	Bubbler valve closed
9/24/2011	4:35:09 PM	Helium valve opened
9/24/2011	4:35:09 PM	Main Vac valve opened
9/24/2011	4:35:09 PM	Helium MFC set to  20.000000
9/24/2011	4:35:09 PM	H2 MFC set to  0.000000
9/24/2011	4:35:09 PM	BCl3 MFC set to  0.000000
9/24/2011	4:35:09 PM	PHl3 MFC set to  0.000000
9/24/2011	4:35:09 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:35:09 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:35:09 PM	Tube furnace set to 0
9/24/2011	4:35:39 PM	Helium valve closed
9/24/2011	4:35:39 PM	H2 valve closed
9/24/2011	4:35:39 PM	BCl3 valve closed
9/24/2011	4:35:39 PM	PH3 valve closed
9/24/2011	4:35:39 PM	SiCl4 pre valve closed
9/24/2011	4:35:39 PM	SiCl4 post valve closed
9/24/2011	4:35:39 PM	Bypass valve closed
9/24/2011	4:35:39 PM	Bubbler valve closed
9/24/2011	4:35:39 PM	Main Vac valve opened
9/24/2011	4:35:39 PM	Helium MFC set to  0.000000
9/24/2011	4:35:39 PM	H2 MFC set to  0.000000
9/24/2011	4:35:39 PM	BCl3 MFC set to  0.000000
9/24/2011	4:35:39 PM	PHl3 MFC set to  0.000000
9/24/2011	4:35:39 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:35:39 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:35:39 PM	Tube furnace set to 0
9/24/2011	4:36:09 PM	H2 valve closed
9/24/2011	4:36:09 PM	BCl3 valve closed
9/24/2011	4:36:09 PM	PH3 valve closed
9/24/2011	4:36:09 PM	SiCl4 pre valve closed
9/24/2011	4:36:09 PM	SiCl4 post valve closed
9/24/2011	4:36:09 PM	Bypass valve closed
9/24/2011	4:36:09 PM	Bubbler valve closed
9/24/2011	4:36:09 PM	Helium valve opened
9/24/2011	4:36:09 PM	Main Vac valve opened
9/24/2011	4:36:09 PM	Helium MFC set to  20.000000
9/24/2011	4:36:09 PM	H2 MFC set to  0.000000
9/24/2011	4:36:09 PM	BCl3 MFC set to  0.000000
9/24/2011	4:36:09 PM	PHl3 MFC set to  0.000000
9/24/2011	4:36:09 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:36:09 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:36:10 PM	Tube furnace set to 0
9/24/2011	4:36:40 PM	Helium valve closed
9/24/2011	4:36:40 PM	H2 valve closed
9/24/2011	4:36:40 PM	BCl3 valve closed
9/24/2011	4:36:40 PM	PH3 valve closed
9/24/2011	4:36:40 PM	SiCl4 pre valve closed
9/24/2011	4:36:40 PM	SiCl4 post valve closed
9/24/2011	4:36:40 PM	Bypass valve closed
9/24/2011	4:36:40 PM	Bubbler valve closed
9/24/2011	4:36:40 PM	Main Vac valve opened
9/24/2011	4:36:40 PM	Helium MFC set to  0.000000
9/24/2011	4:36:40 PM	H2 MFC set to  0.000000
9/24/2011	4:36:40 PM	BCl3 MFC set to  0.000000
9/24/2011	4:36:40 PM	PHl3 MFC set to  0.000000
9/24/2011	4:36:40 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:36:40 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:36:40 PM	Tube furnace set to 0
9/24/2011	4:37:10 PM	H2 valve closed
9/24/2011	4:37:10 PM	BCl3 valve closed
9/24/2011	4:37:10 PM	PH3 valve closed
9/24/2011	4:37:10 PM	SiCl4 pre valve closed
9/24/2011	4:37:10 PM	SiCl4 post valve closed
9/24/2011	4:37:10 PM	Bypass valve closed
9/24/2011	4:37:10 PM	Bubbler valve closed
9/24/2011	4:37:10 PM	Helium valve opened
9/24/2011	4:37:10 PM	Main Vac valve opened
9/24/2011	4:37:10 PM	Helium MFC set to  20.000000
9/24/2011	4:37:10 PM	H2 MFC set to  0.000000
9/24/2011	4:37:10 PM	BCl3 MFC set to  0.000000
9/24/2011	4:37:10 PM	PHl3 MFC set to  0.000000
9/24/2011	4:37:10 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:37:10 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:37:10 PM	Tube furnace set to 0
9/24/2011	4:37:40 PM	Helium valve closed
9/24/2011	4:37:40 PM	H2 valve closed
9/24/2011	4:37:40 PM	BCl3 valve closed
9/24/2011	4:37:40 PM	PH3 valve closed
9/24/2011	4:37:40 PM	SiCl4 pre valve closed
9/24/2011	4:37:40 PM	SiCl4 post valve closed
9/24/2011	4:37:40 PM	Bypass valve closed
9/24/2011	4:37:40 PM	Bubbler valve closed
9/24/2011	4:37:40 PM	Main Vac valve opened
9/24/2011	4:37:40 PM	Helium MFC set to  0.000000
9/24/2011	4:37:40 PM	H2 MFC set to  0.000000
9/24/2011	4:37:40 PM	BCl3 MFC set to  0.000000
9/24/2011	4:37:40 PM	PHl3 MFC set to  0.000000
9/24/2011	4:37:40 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:37:40 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:37:40 PM	Tube furnace set to 0
9/24/2011	4:38:10 PM	H2 valve closed
9/24/2011	4:38:10 PM	BCl3 valve closed
9/24/2011	4:38:10 PM	PH3 valve closed
9/24/2011	4:38:10 PM	SiCl4 pre valve closed
9/24/2011	4:38:10 PM	SiCl4 post valve closed
9/24/2011	4:38:10 PM	Bypass valve closed
9/24/2011	4:38:10 PM	Bubbler valve closed
9/24/2011	4:38:10 PM	Helium valve opened
9/24/2011	4:38:10 PM	Main Vac valve opened
9/24/2011	4:38:10 PM	Helium MFC set to  20.000000
9/24/2011	4:38:10 PM	H2 MFC set to  0.000000
9/24/2011	4:38:10 PM	BCl3 MFC set to  0.000000
9/24/2011	4:38:10 PM	PHl3 MFC set to  0.000000
9/24/2011	4:38:10 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:38:10 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:38:10 PM	Tube furnace set to 0
9/24/2011	4:38:41 PM	Helium valve closed
9/24/2011	4:38:41 PM	H2 valve closed
9/24/2011	4:38:41 PM	BCl3 valve closed
9/24/2011	4:38:41 PM	PH3 valve closed
9/24/2011	4:38:41 PM	SiCl4 pre valve closed
9/24/2011	4:38:41 PM	SiCl4 post valve closed
9/24/2011	4:38:41 PM	Bypass valve closed
9/24/2011	4:38:41 PM	Bubbler valve closed
9/24/2011	4:38:41 PM	Main Vac valve opened
9/24/2011	4:38:41 PM	Helium MFC set to  0.000000
9/24/2011	4:38:41 PM	H2 MFC set to  0.000000
9/24/2011	4:38:41 PM	BCl3 MFC set to  0.000000
9/24/2011	4:38:41 PM	PHl3 MFC set to  0.000000
9/24/2011	4:38:41 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:38:41 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:38:41 PM	Tube furnace set to 0
9/24/2011	4:39:11 PM	H2 valve closed
9/24/2011	4:39:11 PM	BCl3 valve closed
9/24/2011	4:39:11 PM	PH3 valve closed
9/24/2011	4:39:11 PM	SiCl4 pre valve closed
9/24/2011	4:39:11 PM	SiCl4 post valve closed
9/24/2011	4:39:11 PM	Bypass valve closed
9/24/2011	4:39:11 PM	Bubbler valve closed
9/24/2011	4:39:11 PM	Helium valve opened
9/24/2011	4:39:11 PM	Main Vac valve opened
9/24/2011	4:39:11 PM	Helium MFC set to  20.000000
9/24/2011	4:39:11 PM	H2 MFC set to  0.000000
9/24/2011	4:39:11 PM	BCl3 MFC set to  0.000000
9/24/2011	4:39:11 PM	PHl3 MFC set to  0.000000
9/24/2011	4:39:11 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:39:11 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:39:11 PM	Tube furnace set to 0
9/24/2011	4:39:41 PM	Helium valve closed
9/24/2011	4:39:41 PM	H2 valve closed
9/24/2011	4:39:41 PM	BCl3 valve closed
9/24/2011	4:39:41 PM	PH3 valve closed
9/24/2011	4:39:41 PM	SiCl4 pre valve closed
9/24/2011	4:39:41 PM	SiCl4 post valve closed
9/24/2011	4:39:41 PM	Bypass valve closed
9/24/2011	4:39:41 PM	Bubbler valve closed
9/24/2011	4:39:41 PM	Main Vac valve opened
9/24/2011	4:39:41 PM	Helium MFC set to  0.000000
9/24/2011	4:39:41 PM	H2 MFC set to  0.000000
9/24/2011	4:39:41 PM	BCl3 MFC set to  0.000000
9/24/2011	4:39:41 PM	PHl3 MFC set to  0.000000
9/24/2011	4:39:41 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:39:41 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:39:41 PM	Tube furnace set to 0
9/24/2011	4:40:11 PM	H2 valve closed
9/24/2011	4:40:11 PM	BCl3 valve closed
9/24/2011	4:40:11 PM	PH3 valve closed
9/24/2011	4:40:11 PM	SiCl4 pre valve closed
9/24/2011	4:40:11 PM	SiCl4 post valve closed
9/24/2011	4:40:11 PM	Bypass valve closed
9/24/2011	4:40:11 PM	Bubbler valve closed
9/24/2011	4:40:11 PM	Helium valve opened
9/24/2011	4:40:11 PM	Main Vac valve opened
9/24/2011	4:40:11 PM	Helium MFC set to  20.000000
9/24/2011	4:40:11 PM	H2 MFC set to  0.000000
9/24/2011	4:40:11 PM	BCl3 MFC set to  0.000000
9/24/2011	4:40:11 PM	PHl3 MFC set to  0.000000
9/24/2011	4:40:11 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:40:11 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:40:11 PM	Tube furnace set to 0
9/24/2011	4:40:41 PM	Helium valve closed
9/24/2011	4:40:41 PM	H2 valve closed
9/24/2011	4:40:41 PM	BCl3 valve closed
9/24/2011	4:40:41 PM	PH3 valve closed
9/24/2011	4:40:41 PM	SiCl4 pre valve closed
9/24/2011	4:40:41 PM	SiCl4 post valve closed
9/24/2011	4:40:41 PM	Bypass valve closed
9/24/2011	4:40:41 PM	Bubbler valve closed
9/24/2011	4:40:41 PM	Main Vac valve opened
9/24/2011	4:40:41 PM	Helium MFC set to  0.000000
9/24/2011	4:40:41 PM	H2 MFC set to  0.000000
9/24/2011	4:40:41 PM	BCl3 MFC set to  0.000000
9/24/2011	4:40:41 PM	PHl3 MFC set to  0.000000
9/24/2011	4:40:41 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:40:41 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:40:42 PM	Tube furnace set to 0
9/24/2011	4:41:12 PM	H2 valve closed
9/24/2011	4:41:12 PM	BCl3 valve closed
9/24/2011	4:41:12 PM	PH3 valve closed
9/24/2011	4:41:12 PM	SiCl4 pre valve closed
9/24/2011	4:41:12 PM	SiCl4 post valve closed
9/24/2011	4:41:12 PM	Bypass valve closed
9/24/2011	4:41:12 PM	Bubbler valve closed
9/24/2011	4:41:12 PM	Helium valve opened
9/24/2011	4:41:12 PM	Main Vac valve opened
9/24/2011	4:41:12 PM	Helium MFC set to  20.000000
9/24/2011	4:41:12 PM	H2 MFC set to  0.000000
9/24/2011	4:41:12 PM	BCl3 MFC set to  0.000000
9/24/2011	4:41:12 PM	PHl3 MFC set to  0.000000
9/24/2011	4:41:12 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:41:12 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:41:12 PM	Tube furnace set to 0
9/24/2011	4:41:42 PM	Helium valve closed
9/24/2011	4:41:42 PM	H2 valve closed
9/24/2011	4:41:42 PM	BCl3 valve closed
9/24/2011	4:41:42 PM	PH3 valve closed
9/24/2011	4:41:42 PM	SiCl4 pre valve closed
9/24/2011	4:41:42 PM	SiCl4 post valve closed
9/24/2011	4:41:42 PM	Bypass valve closed
9/24/2011	4:41:42 PM	Bubbler valve closed
9/24/2011	4:41:42 PM	Main Vac valve opened
9/24/2011	4:41:42 PM	Helium MFC set to  0.000000
9/24/2011	4:41:42 PM	H2 MFC set to  0.000000
9/24/2011	4:41:42 PM	BCl3 MFC set to  0.000000
9/24/2011	4:41:42 PM	PHl3 MFC set to  0.000000
9/24/2011	4:41:42 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:41:42 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:41:42 PM	Tube furnace set to 0
9/24/2011	4:42:12 PM	H2 valve closed
9/24/2011	4:42:12 PM	BCl3 valve closed
9/24/2011	4:42:12 PM	PH3 valve closed
9/24/2011	4:42:12 PM	SiCl4 pre valve closed
9/24/2011	4:42:12 PM	SiCl4 post valve closed
9/24/2011	4:42:12 PM	Bypass valve closed
9/24/2011	4:42:12 PM	Bubbler valve closed
9/24/2011	4:42:12 PM	Helium valve opened
9/24/2011	4:42:12 PM	Main Vac valve opened
9/24/2011	4:42:12 PM	Helium MFC set to  20.000000
9/24/2011	4:42:12 PM	H2 MFC set to  0.000000
9/24/2011	4:42:12 PM	BCl3 MFC set to  0.000000
9/24/2011	4:42:12 PM	PHl3 MFC set to  0.000000
9/24/2011	4:42:12 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:42:12 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:42:12 PM	Tube furnace set to 0
9/24/2011	4:42:42 PM	Helium valve closed
9/24/2011	4:42:42 PM	H2 valve closed
9/24/2011	4:42:42 PM	BCl3 valve closed
9/24/2011	4:42:42 PM	PH3 valve closed
9/24/2011	4:42:42 PM	SiCl4 pre valve closed
9/24/2011	4:42:42 PM	SiCl4 post valve closed
9/24/2011	4:42:42 PM	Bypass valve closed
9/24/2011	4:42:42 PM	Bubbler valve closed
9/24/2011	4:42:42 PM	Main Vac valve opened
9/24/2011	4:42:42 PM	Helium MFC set to  0.000000
9/24/2011	4:42:42 PM	H2 MFC set to  0.000000
9/24/2011	4:42:42 PM	BCl3 MFC set to  0.000000
9/24/2011	4:42:42 PM	PHl3 MFC set to  0.000000
9/24/2011	4:42:42 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:42:42 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:42:42 PM	Tube furnace set to 0
9/24/2011	4:43:12 PM	H2 valve closed
9/24/2011	4:43:12 PM	BCl3 valve closed
9/24/2011	4:43:12 PM	PH3 valve closed
9/24/2011	4:43:12 PM	SiCl4 pre valve closed
9/24/2011	4:43:12 PM	SiCl4 post valve closed
9/24/2011	4:43:12 PM	Bypass valve closed
9/24/2011	4:43:12 PM	Bubbler valve closed
9/24/2011	4:43:12 PM	Helium valve opened
9/24/2011	4:43:12 PM	Main Vac valve opened
9/24/2011	4:43:12 PM	Helium MFC set to  20.000000
9/24/2011	4:43:12 PM	H2 MFC set to  0.000000
9/24/2011	4:43:12 PM	BCl3 MFC set to  0.000000
9/24/2011	4:43:12 PM	PHl3 MFC set to  0.000000
9/24/2011	4:43:12 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:43:12 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:43:13 PM	Tube furnace set to 0
9/24/2011	4:43:43 PM	Helium valve closed
9/24/2011	4:43:43 PM	H2 valve closed
9/24/2011	4:43:43 PM	BCl3 valve closed
9/24/2011	4:43:43 PM	PH3 valve closed
9/24/2011	4:43:43 PM	SiCl4 pre valve closed
9/24/2011	4:43:43 PM	SiCl4 post valve closed
9/24/2011	4:43:43 PM	Bypass valve closed
9/24/2011	4:43:43 PM	Bubbler valve closed
9/24/2011	4:43:43 PM	Main Vac valve opened
9/24/2011	4:43:43 PM	Helium MFC set to  0.000000
9/24/2011	4:43:43 PM	H2 MFC set to  0.000000
9/24/2011	4:43:43 PM	BCl3 MFC set to  0.000000
9/24/2011	4:43:43 PM	PHl3 MFC set to  0.000000
9/24/2011	4:43:43 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:43:43 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:43:43 PM	Tube furnace set to 0
9/24/2011	4:44:13 PM	H2 valve closed
9/24/2011	4:44:13 PM	BCl3 valve closed
9/24/2011	4:44:13 PM	PH3 valve closed
9/24/2011	4:44:13 PM	SiCl4 pre valve closed
9/24/2011	4:44:13 PM	SiCl4 post valve closed
9/24/2011	4:44:13 PM	Bypass valve closed
9/24/2011	4:44:13 PM	Bubbler valve closed
9/24/2011	4:44:13 PM	Helium valve opened
9/24/2011	4:44:13 PM	Main Vac valve opened
9/24/2011	4:44:13 PM	Helium MFC set to  20.000000
9/24/2011	4:44:13 PM	H2 MFC set to  0.000000
9/24/2011	4:44:13 PM	BCl3 MFC set to  0.000000
9/24/2011	4:44:13 PM	PHl3 MFC set to  0.000000
9/24/2011	4:44:13 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:44:13 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:44:13 PM	Tube furnace set to 0
9/24/2011	4:44:43 PM	Helium valve closed
9/24/2011	4:44:43 PM	H2 valve closed
9/24/2011	4:44:43 PM	BCl3 valve closed
9/24/2011	4:44:43 PM	PH3 valve closed
9/24/2011	4:44:43 PM	SiCl4 pre valve closed
9/24/2011	4:44:43 PM	SiCl4 post valve closed
9/24/2011	4:44:43 PM	Bypass valve closed
9/24/2011	4:44:43 PM	Bubbler valve closed
9/24/2011	4:44:43 PM	Main Vac valve opened
9/24/2011	4:44:43 PM	Helium MFC set to  0.000000
9/24/2011	4:44:43 PM	H2 MFC set to  0.000000
9/24/2011	4:44:43 PM	BCl3 MFC set to  0.000000
9/24/2011	4:44:43 PM	PHl3 MFC set to  0.000000
9/24/2011	4:44:43 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:44:43 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:44:43 PM	Tube furnace set to 0
9/24/2011	4:44:44 PM	Run finished at 4:44 PM
9/24/2011	4:44:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/24/2011	4:45:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/24/2011	4:45:20 PM	Recipe started at 4:45 PM
9/24/2011	4:45:20 PM	Helium valve closed
9/24/2011	4:45:20 PM	H2 valve closed
9/24/2011	4:45:20 PM	BCl3 valve closed
9/24/2011	4:45:20 PM	PH3 valve closed
9/24/2011	4:45:20 PM	SiCl4 pre valve closed
9/24/2011	4:45:20 PM	SiCl4 post valve closed
9/24/2011	4:45:20 PM	Main Vac valve closed
9/24/2011	4:45:20 PM	Bubbler valve closed
9/24/2011	4:45:20 PM	Bypass valve opened
9/24/2011	4:45:20 PM	Helium MFC set to  0.000000
9/24/2011	4:45:20 PM	H2 MFC set to  0.000000
9/24/2011	4:45:20 PM	BCl3 MFC set to  0.000000
9/24/2011	4:45:20 PM	PHl3 MFC set to  0.000000
9/24/2011	4:45:20 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:45:20 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:45:21 PM	Tube furnace set to 0
9/24/2011	4:45:21 PM	Helium valve closed
9/24/2011	4:45:21 PM	H2 valve closed
9/24/2011	4:45:21 PM	BCl3 valve closed
9/24/2011	4:45:21 PM	PH3 valve closed
9/24/2011	4:45:21 PM	SiCl4 pre valve closed
9/24/2011	4:45:21 PM	SiCl4 post valve closed
9/24/2011	4:45:21 PM	Main Vac valve closed
9/24/2011	4:45:21 PM	Bubbler valve closed
9/24/2011	4:45:21 PM	Bypass valve opened
9/24/2011	4:45:21 PM	Helium MFC set to  0.000000
9/24/2011	4:45:21 PM	H2 MFC set to  0.000000
9/24/2011	4:45:21 PM	BCl3 MFC set to  0.000000
9/24/2011	4:45:21 PM	PHl3 MFC set to  0.000000
9/24/2011	4:45:21 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:45:21 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:45:21 PM	Tube furnace set to 0
9/24/2011	4:45:51 PM	Helium valve closed
9/24/2011	4:45:51 PM	H2 valve closed
9/24/2011	4:45:51 PM	BCl3 valve closed
9/24/2011	4:45:51 PM	PH3 valve closed
9/24/2011	4:45:51 PM	SiCl4 pre valve closed
9/24/2011	4:45:51 PM	SiCl4 post valve closed
9/24/2011	4:45:51 PM	Bypass valve closed
9/24/2011	4:45:51 PM	Bubbler valve closed
9/24/2011	4:45:51 PM	Main Vac valve opened
9/24/2011	4:45:51 PM	Helium MFC set to  0.000000
9/24/2011	4:45:51 PM	H2 MFC set to  0.000000
9/24/2011	4:45:51 PM	BCl3 MFC set to  0.000000
9/24/2011	4:45:51 PM	PHl3 MFC set to  0.000000
9/24/2011	4:45:51 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:45:51 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:45:51 PM	Tube furnace set to 0
9/24/2011	4:46:21 PM	H2 valve closed
9/24/2011	4:46:21 PM	BCl3 valve closed
9/24/2011	4:46:21 PM	PH3 valve closed
9/24/2011	4:46:21 PM	SiCl4 pre valve closed
9/24/2011	4:46:21 PM	SiCl4 post valve closed
9/24/2011	4:46:21 PM	Bypass valve closed
9/24/2011	4:46:21 PM	Bubbler valve closed
9/24/2011	4:46:21 PM	Helium valve opened
9/24/2011	4:46:21 PM	Main Vac valve opened
9/24/2011	4:46:21 PM	Helium MFC set to  20.000000
9/24/2011	4:46:21 PM	H2 MFC set to  0.000000
9/24/2011	4:46:21 PM	BCl3 MFC set to  0.000000
9/24/2011	4:46:21 PM	PHl3 MFC set to  0.000000
9/24/2011	4:46:21 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:46:21 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:46:21 PM	Tube furnace set to 0
9/24/2011	4:46:51 PM	Helium valve closed
9/24/2011	4:46:51 PM	H2 valve closed
9/24/2011	4:46:51 PM	BCl3 valve closed
9/24/2011	4:46:51 PM	PH3 valve closed
9/24/2011	4:46:51 PM	SiCl4 pre valve closed
9/24/2011	4:46:51 PM	SiCl4 post valve closed
9/24/2011	4:46:51 PM	Bypass valve closed
9/24/2011	4:46:51 PM	Bubbler valve closed
9/24/2011	4:46:51 PM	Main Vac valve opened
9/24/2011	4:46:51 PM	Helium MFC set to  0.000000
9/24/2011	4:46:51 PM	H2 MFC set to  0.000000
9/24/2011	4:46:51 PM	BCl3 MFC set to  0.000000
9/24/2011	4:46:51 PM	PHl3 MFC set to  0.000000
9/24/2011	4:46:51 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:46:51 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:46:52 PM	Tube furnace set to 0
9/24/2011	4:47:22 PM	H2 valve closed
9/24/2011	4:47:22 PM	BCl3 valve closed
9/24/2011	4:47:22 PM	PH3 valve closed
9/24/2011	4:47:22 PM	SiCl4 pre valve closed
9/24/2011	4:47:22 PM	SiCl4 post valve closed
9/24/2011	4:47:22 PM	Bypass valve closed
9/24/2011	4:47:22 PM	Bubbler valve closed
9/24/2011	4:47:22 PM	Helium valve opened
9/24/2011	4:47:22 PM	Main Vac valve opened
9/24/2011	4:47:22 PM	Helium MFC set to  20.000000
9/24/2011	4:47:22 PM	H2 MFC set to  0.000000
9/24/2011	4:47:22 PM	BCl3 MFC set to  0.000000
9/24/2011	4:47:22 PM	PHl3 MFC set to  0.000000
9/24/2011	4:47:22 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:47:22 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:47:22 PM	Tube furnace set to 0
9/24/2011	4:47:52 PM	Helium valve closed
9/24/2011	4:47:52 PM	H2 valve closed
9/24/2011	4:47:52 PM	BCl3 valve closed
9/24/2011	4:47:52 PM	PH3 valve closed
9/24/2011	4:47:52 PM	SiCl4 pre valve closed
9/24/2011	4:47:52 PM	SiCl4 post valve closed
9/24/2011	4:47:52 PM	Bypass valve closed
9/24/2011	4:47:52 PM	Bubbler valve closed
9/24/2011	4:47:52 PM	Main Vac valve opened
9/24/2011	4:47:52 PM	Helium MFC set to  0.000000
9/24/2011	4:47:52 PM	H2 MFC set to  0.000000
9/24/2011	4:47:52 PM	BCl3 MFC set to  0.000000
9/24/2011	4:47:52 PM	PHl3 MFC set to  0.000000
9/24/2011	4:47:52 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:47:52 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:47:52 PM	Tube furnace set to 0
9/24/2011	4:48:22 PM	H2 valve closed
9/24/2011	4:48:22 PM	BCl3 valve closed
9/24/2011	4:48:22 PM	PH3 valve closed
9/24/2011	4:48:22 PM	SiCl4 pre valve closed
9/24/2011	4:48:22 PM	SiCl4 post valve closed
9/24/2011	4:48:22 PM	Bypass valve closed
9/24/2011	4:48:22 PM	Bubbler valve closed
9/24/2011	4:48:22 PM	Helium valve opened
9/24/2011	4:48:22 PM	Main Vac valve opened
9/24/2011	4:48:22 PM	Helium MFC set to  20.000000
9/24/2011	4:48:22 PM	H2 MFC set to  0.000000
9/24/2011	4:48:22 PM	BCl3 MFC set to  0.000000
9/24/2011	4:48:22 PM	PHl3 MFC set to  0.000000
9/24/2011	4:48:22 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:48:22 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:48:22 PM	Tube furnace set to 0
9/24/2011	4:48:52 PM	Helium valve closed
9/24/2011	4:48:52 PM	H2 valve closed
9/24/2011	4:48:52 PM	BCl3 valve closed
9/24/2011	4:48:52 PM	PH3 valve closed
9/24/2011	4:48:52 PM	SiCl4 pre valve closed
9/24/2011	4:48:52 PM	SiCl4 post valve closed
9/24/2011	4:48:52 PM	Bypass valve closed
9/24/2011	4:48:52 PM	Bubbler valve closed
9/24/2011	4:48:52 PM	Main Vac valve opened
9/24/2011	4:48:52 PM	Helium MFC set to  0.000000
9/24/2011	4:48:52 PM	H2 MFC set to  0.000000
9/24/2011	4:48:52 PM	BCl3 MFC set to  0.000000
9/24/2011	4:48:52 PM	PHl3 MFC set to  0.000000
9/24/2011	4:48:52 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:48:52 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:48:52 PM	Tube furnace set to 0
9/24/2011	4:49:22 PM	H2 valve closed
9/24/2011	4:49:22 PM	BCl3 valve closed
9/24/2011	4:49:22 PM	PH3 valve closed
9/24/2011	4:49:22 PM	SiCl4 pre valve closed
9/24/2011	4:49:22 PM	SiCl4 post valve closed
9/24/2011	4:49:22 PM	Bypass valve closed
9/24/2011	4:49:22 PM	Bubbler valve closed
9/24/2011	4:49:22 PM	Helium valve opened
9/24/2011	4:49:23 PM	Main Vac valve opened
9/24/2011	4:49:23 PM	Helium MFC set to  20.000000
9/24/2011	4:49:23 PM	H2 MFC set to  0.000000
9/24/2011	4:49:23 PM	BCl3 MFC set to  0.000000
9/24/2011	4:49:23 PM	PHl3 MFC set to  0.000000
9/24/2011	4:49:23 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:49:23 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:49:23 PM	Tube furnace set to 0
9/24/2011	4:49:53 PM	Helium valve closed
9/24/2011	4:49:53 PM	H2 valve closed
9/24/2011	4:49:53 PM	BCl3 valve closed
9/24/2011	4:49:53 PM	PH3 valve closed
9/24/2011	4:49:53 PM	SiCl4 pre valve closed
9/24/2011	4:49:53 PM	SiCl4 post valve closed
9/24/2011	4:49:53 PM	Bypass valve closed
9/24/2011	4:49:53 PM	Bubbler valve closed
9/24/2011	4:49:53 PM	Main Vac valve opened
9/24/2011	4:49:53 PM	Helium MFC set to  0.000000
9/24/2011	4:49:53 PM	H2 MFC set to  0.000000
9/24/2011	4:49:53 PM	BCl3 MFC set to  0.000000
9/24/2011	4:49:53 PM	PHl3 MFC set to  0.000000
9/24/2011	4:49:53 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:49:53 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:49:53 PM	Tube furnace set to 0
9/24/2011	4:50:23 PM	H2 valve closed
9/24/2011	4:50:23 PM	BCl3 valve closed
9/24/2011	4:50:23 PM	PH3 valve closed
9/24/2011	4:50:23 PM	SiCl4 pre valve closed
9/24/2011	4:50:23 PM	SiCl4 post valve closed
9/24/2011	4:50:23 PM	Bypass valve closed
9/24/2011	4:50:23 PM	Bubbler valve closed
9/24/2011	4:50:23 PM	Helium valve opened
9/24/2011	4:50:23 PM	Main Vac valve opened
9/24/2011	4:50:23 PM	Helium MFC set to  20.000000
9/24/2011	4:50:23 PM	H2 MFC set to  0.000000
9/24/2011	4:50:23 PM	BCl3 MFC set to  0.000000
9/24/2011	4:50:23 PM	PHl3 MFC set to  0.000000
9/24/2011	4:50:23 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:50:23 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:50:23 PM	Tube furnace set to 0
9/24/2011	4:50:53 PM	Helium valve closed
9/24/2011	4:50:53 PM	H2 valve closed
9/24/2011	4:50:53 PM	BCl3 valve closed
9/24/2011	4:50:53 PM	PH3 valve closed
9/24/2011	4:50:53 PM	SiCl4 pre valve closed
9/24/2011	4:50:53 PM	SiCl4 post valve closed
9/24/2011	4:50:53 PM	Bypass valve closed
9/24/2011	4:50:53 PM	Bubbler valve closed
9/24/2011	4:50:53 PM	Main Vac valve opened
9/24/2011	4:50:53 PM	Helium MFC set to  0.000000
9/24/2011	4:50:53 PM	H2 MFC set to  0.000000
9/24/2011	4:50:53 PM	BCl3 MFC set to  0.000000
9/24/2011	4:50:53 PM	PHl3 MFC set to  0.000000
9/24/2011	4:50:53 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:50:53 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:50:53 PM	Tube furnace set to 0
9/24/2011	4:51:23 PM	H2 valve closed
9/24/2011	4:51:23 PM	BCl3 valve closed
9/24/2011	4:51:23 PM	PH3 valve closed
9/24/2011	4:51:23 PM	SiCl4 pre valve closed
9/24/2011	4:51:23 PM	SiCl4 post valve closed
9/24/2011	4:51:23 PM	Bypass valve closed
9/24/2011	4:51:23 PM	Bubbler valve closed
9/24/2011	4:51:23 PM	Helium valve opened
9/24/2011	4:51:23 PM	Main Vac valve opened
9/24/2011	4:51:23 PM	Helium MFC set to  20.000000
9/24/2011	4:51:23 PM	H2 MFC set to  0.000000
9/24/2011	4:51:23 PM	BCl3 MFC set to  0.000000
9/24/2011	4:51:23 PM	PHl3 MFC set to  0.000000
9/24/2011	4:51:23 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:51:23 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:51:24 PM	Tube furnace set to 0
9/24/2011	4:51:54 PM	Helium valve closed
9/24/2011	4:51:54 PM	H2 valve closed
9/24/2011	4:51:54 PM	BCl3 valve closed
9/24/2011	4:51:54 PM	PH3 valve closed
9/24/2011	4:51:54 PM	SiCl4 pre valve closed
9/24/2011	4:51:54 PM	SiCl4 post valve closed
9/24/2011	4:51:54 PM	Bypass valve closed
9/24/2011	4:51:54 PM	Bubbler valve closed
9/24/2011	4:51:54 PM	Main Vac valve opened
9/24/2011	4:51:54 PM	Helium MFC set to  0.000000
9/24/2011	4:51:54 PM	H2 MFC set to  0.000000
9/24/2011	4:51:54 PM	BCl3 MFC set to  0.000000
9/24/2011	4:51:54 PM	PHl3 MFC set to  0.000000
9/24/2011	4:51:54 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:51:54 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:51:54 PM	Tube furnace set to 0
9/24/2011	4:52:24 PM	H2 valve closed
9/24/2011	4:52:24 PM	BCl3 valve closed
9/24/2011	4:52:24 PM	PH3 valve closed
9/24/2011	4:52:24 PM	SiCl4 pre valve closed
9/24/2011	4:52:24 PM	SiCl4 post valve closed
9/24/2011	4:52:24 PM	Bypass valve closed
9/24/2011	4:52:24 PM	Bubbler valve closed
9/24/2011	4:52:24 PM	Helium valve opened
9/24/2011	4:52:24 PM	Main Vac valve opened
9/24/2011	4:52:24 PM	Helium MFC set to  20.000000
9/24/2011	4:52:24 PM	H2 MFC set to  0.000000
9/24/2011	4:52:24 PM	BCl3 MFC set to  0.000000
9/24/2011	4:52:24 PM	PHl3 MFC set to  0.000000
9/24/2011	4:52:24 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:52:24 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:52:24 PM	Tube furnace set to 0
9/24/2011	4:52:54 PM	Helium valve closed
9/24/2011	4:52:54 PM	H2 valve closed
9/24/2011	4:52:54 PM	BCl3 valve closed
9/24/2011	4:52:54 PM	PH3 valve closed
9/24/2011	4:52:54 PM	SiCl4 pre valve closed
9/24/2011	4:52:54 PM	SiCl4 post valve closed
9/24/2011	4:52:54 PM	Bypass valve closed
9/24/2011	4:52:54 PM	Bubbler valve closed
9/24/2011	4:52:54 PM	Main Vac valve opened
9/24/2011	4:52:54 PM	Helium MFC set to  0.000000
9/24/2011	4:52:54 PM	H2 MFC set to  0.000000
9/24/2011	4:52:54 PM	BCl3 MFC set to  0.000000
9/24/2011	4:52:54 PM	PHl3 MFC set to  0.000000
9/24/2011	4:52:54 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:52:54 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:52:54 PM	Tube furnace set to 0
9/24/2011	4:53:24 PM	H2 valve closed
9/24/2011	4:53:24 PM	BCl3 valve closed
9/24/2011	4:53:24 PM	PH3 valve closed
9/24/2011	4:53:24 PM	SiCl4 pre valve closed
9/24/2011	4:53:24 PM	SiCl4 post valve closed
9/24/2011	4:53:24 PM	Bypass valve closed
9/24/2011	4:53:24 PM	Bubbler valve closed
9/24/2011	4:53:24 PM	Helium valve opened
9/24/2011	4:53:24 PM	Main Vac valve opened
9/24/2011	4:53:24 PM	Helium MFC set to  20.000000
9/24/2011	4:53:24 PM	H2 MFC set to  0.000000
9/24/2011	4:53:24 PM	BCl3 MFC set to  0.000000
9/24/2011	4:53:24 PM	PHl3 MFC set to  0.000000
9/24/2011	4:53:24 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:53:24 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:53:24 PM	Tube furnace set to 0
9/24/2011	4:53:54 PM	Helium valve closed
9/24/2011	4:53:54 PM	H2 valve closed
9/24/2011	4:53:54 PM	BCl3 valve closed
9/24/2011	4:53:54 PM	PH3 valve closed
9/24/2011	4:53:54 PM	SiCl4 pre valve closed
9/24/2011	4:53:54 PM	SiCl4 post valve closed
9/24/2011	4:53:54 PM	Bypass valve closed
9/24/2011	4:53:54 PM	Bubbler valve closed
9/24/2011	4:53:54 PM	Main Vac valve opened
9/24/2011	4:53:54 PM	Helium MFC set to  0.000000
9/24/2011	4:53:54 PM	H2 MFC set to  0.000000
9/24/2011	4:53:54 PM	BCl3 MFC set to  0.000000
9/24/2011	4:53:54 PM	PHl3 MFC set to  0.000000
9/24/2011	4:53:54 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:53:54 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:53:55 PM	Tube furnace set to 0
9/24/2011	4:54:25 PM	H2 valve closed
9/24/2011	4:54:25 PM	BCl3 valve closed
9/24/2011	4:54:25 PM	PH3 valve closed
9/24/2011	4:54:25 PM	SiCl4 pre valve closed
9/24/2011	4:54:25 PM	SiCl4 post valve closed
9/24/2011	4:54:25 PM	Bypass valve closed
9/24/2011	4:54:25 PM	Bubbler valve closed
9/24/2011	4:54:25 PM	Helium valve opened
9/24/2011	4:54:25 PM	Main Vac valve opened
9/24/2011	4:54:25 PM	Helium MFC set to  20.000000
9/24/2011	4:54:25 PM	H2 MFC set to  0.000000
9/24/2011	4:54:25 PM	BCl3 MFC set to  0.000000
9/24/2011	4:54:25 PM	PHl3 MFC set to  0.000000
9/24/2011	4:54:25 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:54:25 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:54:25 PM	Tube furnace set to 0
9/24/2011	4:54:55 PM	Helium valve closed
9/24/2011	4:54:55 PM	H2 valve closed
9/24/2011	4:54:55 PM	BCl3 valve closed
9/24/2011	4:54:55 PM	PH3 valve closed
9/24/2011	4:54:55 PM	SiCl4 pre valve closed
9/24/2011	4:54:55 PM	SiCl4 post valve closed
9/24/2011	4:54:55 PM	Bypass valve closed
9/24/2011	4:54:55 PM	Bubbler valve closed
9/24/2011	4:54:55 PM	Main Vac valve opened
9/24/2011	4:54:55 PM	Helium MFC set to  0.000000
9/24/2011	4:54:55 PM	H2 MFC set to  0.000000
9/24/2011	4:54:55 PM	BCl3 MFC set to  0.000000
9/24/2011	4:54:55 PM	PHl3 MFC set to  0.000000
9/24/2011	4:54:55 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:54:55 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:54:55 PM	Tube furnace set to 0
9/24/2011	4:55:25 PM	H2 valve closed
9/24/2011	4:55:25 PM	BCl3 valve closed
9/24/2011	4:55:25 PM	PH3 valve closed
9/24/2011	4:55:25 PM	SiCl4 pre valve closed
9/24/2011	4:55:25 PM	SiCl4 post valve closed
9/24/2011	4:55:25 PM	Bypass valve closed
9/24/2011	4:55:25 PM	Bubbler valve closed
9/24/2011	4:55:25 PM	Helium valve opened
9/24/2011	4:55:25 PM	Main Vac valve opened
9/24/2011	4:55:25 PM	Helium MFC set to  20.000000
9/24/2011	4:55:25 PM	H2 MFC set to  0.000000
9/24/2011	4:55:25 PM	BCl3 MFC set to  0.000000
9/24/2011	4:55:25 PM	PHl3 MFC set to  0.000000
9/24/2011	4:55:25 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:55:25 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:55:25 PM	Tube furnace set to 0
9/24/2011	4:55:55 PM	Helium valve closed
9/24/2011	4:55:55 PM	H2 valve closed
9/24/2011	4:55:55 PM	BCl3 valve closed
9/24/2011	4:55:55 PM	PH3 valve closed
9/24/2011	4:55:55 PM	SiCl4 pre valve closed
9/24/2011	4:55:55 PM	SiCl4 post valve closed
9/24/2011	4:55:55 PM	Bypass valve closed
9/24/2011	4:55:55 PM	Bubbler valve closed
9/24/2011	4:55:55 PM	Main Vac valve opened
9/24/2011	4:55:55 PM	Helium MFC set to  0.000000
9/24/2011	4:55:55 PM	H2 MFC set to  0.000000
9/24/2011	4:55:55 PM	BCl3 MFC set to  0.000000
9/24/2011	4:55:55 PM	PHl3 MFC set to  0.000000
9/24/2011	4:55:55 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:55:55 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:55:55 PM	Tube furnace set to 0
9/24/2011	4:55:56 PM	Run finished at 4:55 PM
9/24/2011	4:55:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/24/2011	4:57:04 PM	Main Vac valve closed
9/24/2011	4:57:10 PM	Main Vac valve opened
9/24/2011	4:58:13 PM	Recipe started at 4:58 PM
9/24/2011	4:58:13 PM	Helium valve closed
9/24/2011	4:58:13 PM	H2 valve closed
9/24/2011	4:58:13 PM	BCl3 valve closed
9/24/2011	4:58:13 PM	PH3 valve closed
9/24/2011	4:58:13 PM	SiCl4 pre valve closed
9/24/2011	4:58:13 PM	SiCl4 post valve closed
9/24/2011	4:58:13 PM	Main Vac valve closed
9/24/2011	4:58:13 PM	Bypass valve closed
9/24/2011	4:58:13 PM	Bubbler valve closed
9/24/2011	4:58:13 PM	Helium MFC set to  0.000000
9/24/2011	4:58:13 PM	H2 MFC set to  0.000000
9/24/2011	4:58:13 PM	BCl3 MFC set to  0.000000
9/24/2011	4:58:13 PM	PHl3 MFC set to  0.000000
9/24/2011	4:58:13 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:58:13 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:58:13 PM	Tube furnace set to 0
9/24/2011	4:58:16 PM	Helium valve closed
9/24/2011	4:58:16 PM	BCl3 valve closed
9/24/2011	4:58:16 PM	PH3 valve closed
9/24/2011	4:58:16 PM	SiCl4 pre valve closed
9/24/2011	4:58:16 PM	SiCl4 post valve closed
9/24/2011	4:58:16 PM	Main Vac valve closed
9/24/2011	4:58:16 PM	Bypass valve closed
9/24/2011	4:58:16 PM	Bubbler valve closed
9/24/2011	4:58:16 PM	H2 valve opened
9/24/2011	4:58:16 PM	Helium MFC set to  0.000000
9/24/2011	4:58:16 PM	H2 MFC set to  500.000000
9/24/2011	4:58:16 PM	BCl3 MFC set to  0.000000
9/24/2011	4:58:16 PM	PHl3 MFC set to  0.000000
9/24/2011	4:58:16 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:58:16 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:58:16 PM	Tube furnace set to 0
9/24/2011	4:59:20 PM	Helium valve closed
9/24/2011	4:59:20 PM	BCl3 valve closed
9/24/2011	4:59:20 PM	PH3 valve closed
9/24/2011	4:59:20 PM	SiCl4 pre valve closed
9/24/2011	4:59:20 PM	SiCl4 post valve closed
9/24/2011	4:59:20 PM	Main Vac valve closed
9/24/2011	4:59:20 PM	Bypass valve closed
9/24/2011	4:59:20 PM	H2 valve opened
9/24/2011	4:59:20 PM	Bubbler valve opened
9/24/2011	4:59:20 PM	Helium MFC set to  0.000000
9/24/2011	4:59:20 PM	H2 MFC set to  500.000000
9/24/2011	4:59:20 PM	BCl3 MFC set to  0.000000
9/24/2011	4:59:20 PM	PHl3 MFC set to  0.000000
9/24/2011	4:59:20 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:59:20 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:59:20 PM	Tube furnace set to 0
9/24/2011	4:59:21 PM	Helium valve closed
9/24/2011	4:59:21 PM	BCl3 valve closed
9/24/2011	4:59:21 PM	PH3 valve closed
9/24/2011	4:59:21 PM	SiCl4 pre valve closed
9/24/2011	4:59:21 PM	SiCl4 post valve closed
9/24/2011	4:59:21 PM	Main Vac valve closed
9/24/2011	4:59:21 PM	Bypass valve closed
9/24/2011	4:59:21 PM	H2 valve opened
9/24/2011	4:59:21 PM	Bubbler valve opened
9/24/2011	4:59:21 PM	Helium MFC set to  0.000000
9/24/2011	4:59:21 PM	H2 MFC set to  500.000000
9/24/2011	4:59:21 PM	BCl3 MFC set to  0.000000
9/24/2011	4:59:21 PM	PHl3 MFC set to  0.000000
9/24/2011	4:59:21 PM	SiCl4 MFC set to  0.000000
9/24/2011	4:59:21 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	4:59:21 PM	Tube furnace set to 1000
9/24/2011	5:19:21 PM	Helium valve closed
9/24/2011	5:19:21 PM	BCl3 valve closed
9/24/2011	5:19:21 PM	PH3 valve closed
9/24/2011	5:19:21 PM	Main Vac valve closed
9/24/2011	5:19:21 PM	Bypass valve closed
9/24/2011	5:19:21 PM	H2 valve opened
9/24/2011	5:19:21 PM	SiCl4 pre valve opened
9/24/2011	5:19:21 PM	SiCl4 post valve opened
9/24/2011	5:19:21 PM	Bubbler valve opened
9/24/2011	5:19:21 PM	Helium MFC set to  0.000000
9/24/2011	5:19:21 PM	H2 MFC set to  500.000000
9/24/2011	5:19:21 PM	BCl3 MFC set to  0.000000
9/24/2011	5:19:21 PM	PHl3 MFC set to  0.000000
9/24/2011	5:19:21 PM	SiCl4 MFC set to  50.000000
9/24/2011	5:19:21 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	5:19:21 PM	Tube furnace set to 1000
9/24/2011	5:32:21 PM	Helium valve closed
9/24/2011	5:32:21 PM	BCl3 valve closed
9/24/2011	5:32:21 PM	PH3 valve closed
9/24/2011	5:32:21 PM	SiCl4 pre valve closed
9/24/2011	5:32:21 PM	SiCl4 post valve closed
9/24/2011	5:32:21 PM	Main Vac valve closed
9/24/2011	5:32:21 PM	Bypass valve closed
9/24/2011	5:32:21 PM	H2 valve opened
9/24/2011	5:32:21 PM	Bubbler valve opened
9/24/2011	5:32:21 PM	Helium MFC set to  0.000000
9/24/2011	5:32:21 PM	H2 MFC set to  500.000000
9/24/2011	5:32:21 PM	BCl3 MFC set to  0.000000
9/24/2011	5:32:21 PM	PHl3 MFC set to  0.000000
9/24/2011	5:32:21 PM	SiCl4 MFC set to  0.000000
9/24/2011	5:32:21 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	5:32:21 PM	Tube furnace set to 750
9/24/2011	5:37:21 PM	H2 valve closed
9/24/2011	5:37:21 PM	BCl3 valve closed
9/24/2011	5:37:21 PM	PH3 valve closed
9/24/2011	5:37:21 PM	SiCl4 pre valve closed
9/24/2011	5:37:21 PM	SiCl4 post valve closed
9/24/2011	5:37:21 PM	Main Vac valve closed
9/24/2011	5:37:21 PM	Bypass valve closed
9/24/2011	5:37:21 PM	Helium valve opened
9/24/2011	5:37:21 PM	Bubbler valve opened
9/24/2011	5:37:21 PM	Helium MFC set to  500.000000
9/24/2011	5:37:21 PM	H2 MFC set to  0.000000
9/24/2011	5:37:21 PM	BCl3 MFC set to  0.000000
9/24/2011	5:37:21 PM	PHl3 MFC set to  0.000000
9/24/2011	5:37:21 PM	SiCl4 MFC set to  0.000000
9/24/2011	5:37:21 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	5:37:21 PM	Tube furnace set to 0
9/24/2011	5:49:53 PM	Helium valve closed
9/24/2011	5:49:53 PM	H2 valve closed
9/24/2011	5:49:53 PM	BCl3 valve closed
9/24/2011	5:49:53 PM	PH3 valve closed
9/24/2011	5:49:53 PM	SiCl4 pre valve closed
9/24/2011	5:49:53 PM	SiCl4 post valve closed
9/24/2011	5:49:53 PM	Main Vac valve closed
9/24/2011	5:49:53 PM	Bypass valve closed
9/24/2011	5:49:53 PM	Bubbler valve closed
9/24/2011	5:49:53 PM	Helium MFC set to  0.000000
9/24/2011	5:49:53 PM	H2 MFC set to  0.000000
9/24/2011	5:49:53 PM	BCl3 MFC set to  0.000000
9/24/2011	5:49:53 PM	PHl3 MFC set to  0.000000
9/24/2011	5:49:53 PM	SiCl4 MFC set to  0.000000
9/24/2011	5:49:53 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	5:49:53 PM	Tube furnace set to 0
9/24/2011	5:49:54 PM	Run finished at 5:49 PM
9/24/2011	5:49:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/24/2011	5:50:00 PM	Recipe started at 5:50 PM
9/24/2011	5:50:00 PM	Helium valve closed
9/24/2011	5:50:00 PM	H2 valve closed
9/24/2011	5:50:00 PM	BCl3 valve closed
9/24/2011	5:50:00 PM	PH3 valve closed
9/24/2011	5:50:00 PM	SiCl4 pre valve closed
9/24/2011	5:50:00 PM	SiCl4 post valve closed
9/24/2011	5:50:00 PM	Main Vac valve closed
9/24/2011	5:50:00 PM	Bypass valve closed
9/24/2011	5:50:00 PM	Bubbler valve closed
9/24/2011	5:50:00 PM	Helium MFC set to  0.000000
9/24/2011	5:50:00 PM	H2 MFC set to  0.000000
9/24/2011	5:50:00 PM	BCl3 MFC set to  0.000000
9/24/2011	5:50:00 PM	PHl3 MFC set to  0.000000
9/24/2011	5:50:00 PM	SiCl4 MFC set to  0.000000
9/24/2011	5:50:00 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	5:50:00 PM	Tube furnace set to 0
9/24/2011	5:50:03 PM	H2 valve closed
9/24/2011	5:50:03 PM	BCl3 valve closed
9/24/2011	5:50:03 PM	PH3 valve closed
9/24/2011	5:50:03 PM	SiCl4 pre valve closed
9/24/2011	5:50:03 PM	SiCl4 post valve closed
9/24/2011	5:50:03 PM	Main Vac valve closed
9/24/2011	5:50:03 PM	Bypass valve closed
9/24/2011	5:50:03 PM	Bubbler valve closed
9/24/2011	5:50:04 PM	Helium valve opened
9/24/2011	5:50:04 PM	Helium MFC set to  500.000000
9/24/2011	5:50:04 PM	H2 MFC set to  0.000000
9/24/2011	5:50:04 PM	BCl3 MFC set to  0.000000
9/24/2011	5:50:04 PM	PHl3 MFC set to  0.000000
9/24/2011	5:50:04 PM	SiCl4 MFC set to  0.000000
9/24/2011	5:50:04 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	5:50:04 PM	Tube furnace set to 0
9/24/2011	5:50:04 PM	Helium valve closed
9/24/2011	5:50:04 PM	H2 valve closed
9/24/2011	5:50:04 PM	BCl3 valve closed
9/24/2011	5:50:04 PM	PH3 valve closed
9/24/2011	5:50:04 PM	SiCl4 pre valve closed
9/24/2011	5:50:04 PM	SiCl4 post valve closed
9/24/2011	5:50:04 PM	Main Vac valve closed
9/24/2011	5:50:04 PM	Bypass valve closed
9/24/2011	5:50:04 PM	Bubbler valve closed
9/24/2011	5:50:04 PM	Helium MFC set to  0.000000
9/24/2011	5:50:04 PM	H2 MFC set to  0.000000
9/24/2011	5:50:04 PM	BCl3 MFC set to  0.000000
9/24/2011	5:50:04 PM	PHl3 MFC set to  0.000000
9/24/2011	5:50:04 PM	SiCl4 MFC set to  0.000000
9/24/2011	5:50:04 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	5:50:04 PM	Tube furnace set to 0
9/24/2011	5:50:05 PM	Run finished at 5:50 PM
9/24/2011	5:50:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/24/2011	5:56:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/24/2011	5:56:23 PM	Recipe started at 5:56 PM
9/24/2011	5:56:23 PM	Helium valve closed
9/24/2011	5:56:23 PM	H2 valve closed
9/24/2011	5:56:23 PM	BCl3 valve closed
9/24/2011	5:56:23 PM	PH3 valve closed
9/24/2011	5:56:23 PM	SiCl4 pre valve closed
9/24/2011	5:56:23 PM	SiCl4 post valve closed
9/24/2011	5:56:23 PM	Main Vac valve closed
9/24/2011	5:56:23 PM	Bubbler valve closed
9/24/2011	5:56:23 PM	Bypass valve opened
9/24/2011	5:56:23 PM	Helium MFC set to  0.000000
9/24/2011	5:56:23 PM	H2 MFC set to  0.000000
9/24/2011	5:56:23 PM	BCl3 MFC set to  0.000000
9/24/2011	5:56:23 PM	PHl3 MFC set to  0.000000
9/24/2011	5:56:23 PM	SiCl4 MFC set to  0.000000
9/24/2011	5:56:23 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	5:56:23 PM	Tube furnace set to 0
9/24/2011	5:57:29 PM	Helium valve closed
9/24/2011	5:57:29 PM	H2 valve closed
9/24/2011	5:57:29 PM	BCl3 valve closed
9/24/2011	5:57:29 PM	PH3 valve closed
9/24/2011	5:57:29 PM	SiCl4 pre valve closed
9/24/2011	5:57:29 PM	SiCl4 post valve closed
9/24/2011	5:57:29 PM	Main Vac valve closed
9/24/2011	5:57:29 PM	Bubbler valve closed
9/24/2011	5:57:29 PM	Bypass valve opened
9/24/2011	5:57:29 PM	Helium MFC set to  0.000000
9/24/2011	5:57:29 PM	H2 MFC set to  0.000000
9/24/2011	5:57:29 PM	BCl3 MFC set to  0.000000
9/24/2011	5:57:29 PM	PHl3 MFC set to  0.000000
9/24/2011	5:57:29 PM	SiCl4 MFC set to  0.000000
9/24/2011	5:57:29 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	5:57:29 PM	Tube furnace set to 0
9/24/2011	5:58:29 PM	Helium valve closed
9/24/2011	5:58:29 PM	H2 valve closed
9/24/2011	5:58:29 PM	BCl3 valve closed
9/24/2011	5:58:29 PM	PH3 valve closed
9/24/2011	5:58:29 PM	SiCl4 pre valve closed
9/24/2011	5:58:29 PM	SiCl4 post valve closed
9/24/2011	5:58:29 PM	Bypass valve closed
9/24/2011	5:58:29 PM	Bubbler valve closed
9/24/2011	5:58:29 PM	Main Vac valve opened
9/24/2011	5:58:29 PM	Helium MFC set to  0.000000
9/24/2011	5:58:29 PM	H2 MFC set to  0.000000
9/24/2011	5:58:29 PM	BCl3 MFC set to  0.000000
9/24/2011	5:58:29 PM	PHl3 MFC set to  0.000000
9/24/2011	5:58:29 PM	SiCl4 MFC set to  0.000000
9/24/2011	5:58:29 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	5:58:29 PM	Tube furnace set to 0
9/24/2011	5:58:30 PM	Run finished at 5:58 PM
9/24/2011	5:58:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/24/2011	5:58:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/24/2011	5:58:48 PM	Recipe started at 5:58 PM
9/24/2011	5:58:48 PM	Helium valve closed
9/24/2011	5:58:48 PM	H2 valve closed
9/24/2011	5:58:48 PM	BCl3 valve closed
9/24/2011	5:58:48 PM	PH3 valve closed
9/24/2011	5:58:48 PM	SiCl4 pre valve closed
9/24/2011	5:58:48 PM	SiCl4 post valve closed
9/24/2011	5:58:48 PM	Main Vac valve closed
9/24/2011	5:58:48 PM	Bubbler valve closed
9/24/2011	5:58:48 PM	Bypass valve opened
9/24/2011	5:58:48 PM	Helium MFC set to  0.000000
9/24/2011	5:58:48 PM	H2 MFC set to  0.000000
9/24/2011	5:58:48 PM	BCl3 MFC set to  0.000000
9/24/2011	5:58:48 PM	PHl3 MFC set to  0.000000
9/24/2011	5:58:48 PM	SiCl4 MFC set to  0.000000
9/24/2011	5:58:48 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	5:58:48 PM	Tube furnace set to 0
9/24/2011	5:58:49 PM	Helium valve closed
9/24/2011	5:58:49 PM	H2 valve closed
9/24/2011	5:58:49 PM	BCl3 valve closed
9/24/2011	5:58:49 PM	PH3 valve closed
9/24/2011	5:58:49 PM	SiCl4 pre valve closed
9/24/2011	5:58:49 PM	SiCl4 post valve closed
9/24/2011	5:58:49 PM	Main Vac valve closed
9/24/2011	5:58:49 PM	Bubbler valve closed
9/24/2011	5:58:49 PM	Bypass valve opened
9/24/2011	5:58:49 PM	Helium MFC set to  0.000000
9/24/2011	5:58:49 PM	H2 MFC set to  0.000000
9/24/2011	5:58:49 PM	BCl3 MFC set to  0.000000
9/24/2011	5:58:49 PM	PHl3 MFC set to  0.000000
9/24/2011	5:58:49 PM	SiCl4 MFC set to  0.000000
9/24/2011	5:58:49 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	5:58:49 PM	Tube furnace set to 0
9/24/2011	5:59:19 PM	Helium valve closed
9/24/2011	5:59:19 PM	H2 valve closed
9/24/2011	5:59:19 PM	BCl3 valve closed
9/24/2011	5:59:19 PM	PH3 valve closed
9/24/2011	5:59:19 PM	SiCl4 pre valve closed
9/24/2011	5:59:19 PM	SiCl4 post valve closed
9/24/2011	5:59:19 PM	Bypass valve closed
9/24/2011	5:59:19 PM	Bubbler valve closed
9/24/2011	5:59:19 PM	Main Vac valve opened
9/24/2011	5:59:19 PM	Helium MFC set to  0.000000
9/24/2011	5:59:19 PM	H2 MFC set to  0.000000
9/24/2011	5:59:19 PM	BCl3 MFC set to  0.000000
9/24/2011	5:59:19 PM	PHl3 MFC set to  0.000000
9/24/2011	5:59:19 PM	SiCl4 MFC set to  0.000000
9/24/2011	5:59:19 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	5:59:19 PM	Tube furnace set to 0
9/24/2011	5:59:49 PM	H2 valve closed
9/24/2011	5:59:49 PM	BCl3 valve closed
9/24/2011	5:59:49 PM	PH3 valve closed
9/24/2011	5:59:49 PM	SiCl4 pre valve closed
9/24/2011	5:59:49 PM	SiCl4 post valve closed
9/24/2011	5:59:49 PM	Bypass valve closed
9/24/2011	5:59:49 PM	Bubbler valve closed
9/24/2011	5:59:49 PM	Helium valve opened
9/24/2011	5:59:49 PM	Main Vac valve opened
9/24/2011	5:59:49 PM	Helium MFC set to  20.000000
9/24/2011	5:59:49 PM	H2 MFC set to  0.000000
9/24/2011	5:59:49 PM	BCl3 MFC set to  0.000000
9/24/2011	5:59:49 PM	PHl3 MFC set to  0.000000
9/24/2011	5:59:49 PM	SiCl4 MFC set to  0.000000
9/24/2011	5:59:49 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	5:59:49 PM	Tube furnace set to 0
9/24/2011	6:00:19 PM	Helium valve closed
9/24/2011	6:00:19 PM	H2 valve closed
9/24/2011	6:00:19 PM	BCl3 valve closed
9/24/2011	6:00:19 PM	PH3 valve closed
9/24/2011	6:00:19 PM	SiCl4 pre valve closed
9/24/2011	6:00:19 PM	SiCl4 post valve closed
9/24/2011	6:00:19 PM	Bypass valve closed
9/24/2011	6:00:19 PM	Bubbler valve closed
9/24/2011	6:00:19 PM	Main Vac valve opened
9/24/2011	6:00:19 PM	Helium MFC set to  0.000000
9/24/2011	6:00:19 PM	H2 MFC set to  0.000000
9/24/2011	6:00:19 PM	BCl3 MFC set to  0.000000
9/24/2011	6:00:19 PM	PHl3 MFC set to  0.000000
9/24/2011	6:00:19 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:00:19 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:00:19 PM	Tube furnace set to 0
9/24/2011	6:00:49 PM	H2 valve closed
9/24/2011	6:00:49 PM	BCl3 valve closed
9/24/2011	6:00:49 PM	PH3 valve closed
9/24/2011	6:00:49 PM	SiCl4 pre valve closed
9/24/2011	6:00:49 PM	SiCl4 post valve closed
9/24/2011	6:00:49 PM	Bypass valve closed
9/24/2011	6:00:49 PM	Bubbler valve closed
9/24/2011	6:00:49 PM	Helium valve opened
9/24/2011	6:00:49 PM	Main Vac valve opened
9/24/2011	6:00:49 PM	Helium MFC set to  20.000000
9/24/2011	6:00:49 PM	H2 MFC set to  0.000000
9/24/2011	6:00:49 PM	BCl3 MFC set to  0.000000
9/24/2011	6:00:49 PM	PHl3 MFC set to  0.000000
9/24/2011	6:00:49 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:00:49 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:00:50 PM	Tube furnace set to 0
9/24/2011	6:01:20 PM	Helium valve closed
9/24/2011	6:01:20 PM	H2 valve closed
9/24/2011	6:01:20 PM	BCl3 valve closed
9/24/2011	6:01:20 PM	PH3 valve closed
9/24/2011	6:01:20 PM	SiCl4 pre valve closed
9/24/2011	6:01:20 PM	SiCl4 post valve closed
9/24/2011	6:01:20 PM	Bypass valve closed
9/24/2011	6:01:20 PM	Bubbler valve closed
9/24/2011	6:01:20 PM	Main Vac valve opened
9/24/2011	6:01:20 PM	Helium MFC set to  0.000000
9/24/2011	6:01:20 PM	H2 MFC set to  0.000000
9/24/2011	6:01:20 PM	BCl3 MFC set to  0.000000
9/24/2011	6:01:20 PM	PHl3 MFC set to  0.000000
9/24/2011	6:01:20 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:01:20 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:01:20 PM	Tube furnace set to 0
9/24/2011	6:01:50 PM	H2 valve closed
9/24/2011	6:01:50 PM	BCl3 valve closed
9/24/2011	6:01:50 PM	PH3 valve closed
9/24/2011	6:01:50 PM	SiCl4 pre valve closed
9/24/2011	6:01:50 PM	SiCl4 post valve closed
9/24/2011	6:01:50 PM	Bypass valve closed
9/24/2011	6:01:50 PM	Bubbler valve closed
9/24/2011	6:01:50 PM	Helium valve opened
9/24/2011	6:01:50 PM	Main Vac valve opened
9/24/2011	6:01:50 PM	Helium MFC set to  20.000000
9/24/2011	6:01:50 PM	H2 MFC set to  0.000000
9/24/2011	6:01:50 PM	BCl3 MFC set to  0.000000
9/24/2011	6:01:50 PM	PHl3 MFC set to  0.000000
9/24/2011	6:01:50 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:01:50 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:01:50 PM	Tube furnace set to 0
9/24/2011	6:02:20 PM	Helium valve closed
9/24/2011	6:02:20 PM	H2 valve closed
9/24/2011	6:02:20 PM	BCl3 valve closed
9/24/2011	6:02:20 PM	PH3 valve closed
9/24/2011	6:02:20 PM	SiCl4 pre valve closed
9/24/2011	6:02:20 PM	SiCl4 post valve closed
9/24/2011	6:02:20 PM	Bypass valve closed
9/24/2011	6:02:20 PM	Bubbler valve closed
9/24/2011	6:02:20 PM	Main Vac valve opened
9/24/2011	6:02:20 PM	Helium MFC set to  0.000000
9/24/2011	6:02:20 PM	H2 MFC set to  0.000000
9/24/2011	6:02:20 PM	BCl3 MFC set to  0.000000
9/24/2011	6:02:20 PM	PHl3 MFC set to  0.000000
9/24/2011	6:02:20 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:02:20 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:02:20 PM	Tube furnace set to 0
9/24/2011	6:02:50 PM	H2 valve closed
9/24/2011	6:02:50 PM	BCl3 valve closed
9/24/2011	6:02:50 PM	PH3 valve closed
9/24/2011	6:02:50 PM	SiCl4 pre valve closed
9/24/2011	6:02:50 PM	SiCl4 post valve closed
9/24/2011	6:02:50 PM	Bypass valve closed
9/24/2011	6:02:50 PM	Bubbler valve closed
9/24/2011	6:02:50 PM	Helium valve opened
9/24/2011	6:02:50 PM	Main Vac valve opened
9/24/2011	6:02:50 PM	Helium MFC set to  20.000000
9/24/2011	6:02:50 PM	H2 MFC set to  0.000000
9/24/2011	6:02:50 PM	BCl3 MFC set to  0.000000
9/24/2011	6:02:50 PM	PHl3 MFC set to  0.000000
9/24/2011	6:02:50 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:02:50 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:02:50 PM	Tube furnace set to 0
9/24/2011	6:03:20 PM	Helium valve closed
9/24/2011	6:03:21 PM	H2 valve closed
9/24/2011	6:03:21 PM	BCl3 valve closed
9/24/2011	6:03:21 PM	PH3 valve closed
9/24/2011	6:03:21 PM	SiCl4 pre valve closed
9/24/2011	6:03:21 PM	SiCl4 post valve closed
9/24/2011	6:03:21 PM	Bypass valve closed
9/24/2011	6:03:21 PM	Bubbler valve closed
9/24/2011	6:03:21 PM	Main Vac valve opened
9/24/2011	6:03:21 PM	Helium MFC set to  0.000000
9/24/2011	6:03:21 PM	H2 MFC set to  0.000000
9/24/2011	6:03:21 PM	BCl3 MFC set to  0.000000
9/24/2011	6:03:21 PM	PHl3 MFC set to  0.000000
9/24/2011	6:03:21 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:03:21 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:03:21 PM	Tube furnace set to 0
9/24/2011	6:03:51 PM	H2 valve closed
9/24/2011	6:03:51 PM	BCl3 valve closed
9/24/2011	6:03:51 PM	PH3 valve closed
9/24/2011	6:03:51 PM	SiCl4 pre valve closed
9/24/2011	6:03:51 PM	SiCl4 post valve closed
9/24/2011	6:03:51 PM	Bypass valve closed
9/24/2011	6:03:51 PM	Bubbler valve closed
9/24/2011	6:03:51 PM	Helium valve opened
9/24/2011	6:03:51 PM	Main Vac valve opened
9/24/2011	6:03:51 PM	Helium MFC set to  20.000000
9/24/2011	6:03:51 PM	H2 MFC set to  0.000000
9/24/2011	6:03:51 PM	BCl3 MFC set to  0.000000
9/24/2011	6:03:51 PM	PHl3 MFC set to  0.000000
9/24/2011	6:03:51 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:03:51 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:03:51 PM	Tube furnace set to 0
9/24/2011	6:04:21 PM	Helium valve closed
9/24/2011	6:04:21 PM	H2 valve closed
9/24/2011	6:04:21 PM	BCl3 valve closed
9/24/2011	6:04:21 PM	PH3 valve closed
9/24/2011	6:04:21 PM	SiCl4 pre valve closed
9/24/2011	6:04:21 PM	SiCl4 post valve closed
9/24/2011	6:04:21 PM	Bypass valve closed
9/24/2011	6:04:21 PM	Bubbler valve closed
9/24/2011	6:04:21 PM	Main Vac valve opened
9/24/2011	6:04:21 PM	Helium MFC set to  0.000000
9/24/2011	6:04:21 PM	H2 MFC set to  0.000000
9/24/2011	6:04:21 PM	BCl3 MFC set to  0.000000
9/24/2011	6:04:21 PM	PHl3 MFC set to  0.000000
9/24/2011	6:04:21 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:04:21 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:04:21 PM	Tube furnace set to 0
9/24/2011	6:04:51 PM	H2 valve closed
9/24/2011	6:04:51 PM	BCl3 valve closed
9/24/2011	6:04:51 PM	PH3 valve closed
9/24/2011	6:04:51 PM	SiCl4 pre valve closed
9/24/2011	6:04:51 PM	SiCl4 post valve closed
9/24/2011	6:04:51 PM	Bypass valve closed
9/24/2011	6:04:51 PM	Bubbler valve closed
9/24/2011	6:04:51 PM	Helium valve opened
9/24/2011	6:04:51 PM	Main Vac valve opened
9/24/2011	6:04:51 PM	Helium MFC set to  20.000000
9/24/2011	6:04:51 PM	H2 MFC set to  0.000000
9/24/2011	6:04:51 PM	BCl3 MFC set to  0.000000
9/24/2011	6:04:51 PM	PHl3 MFC set to  0.000000
9/24/2011	6:04:51 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:04:51 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:04:51 PM	Tube furnace set to 0
9/24/2011	6:05:21 PM	Helium valve closed
9/24/2011	6:05:21 PM	H2 valve closed
9/24/2011	6:05:21 PM	BCl3 valve closed
9/24/2011	6:05:21 PM	PH3 valve closed
9/24/2011	6:05:21 PM	SiCl4 pre valve closed
9/24/2011	6:05:21 PM	SiCl4 post valve closed
9/24/2011	6:05:21 PM	Bypass valve closed
9/24/2011	6:05:21 PM	Bubbler valve closed
9/24/2011	6:05:21 PM	Main Vac valve opened
9/24/2011	6:05:21 PM	Helium MFC set to  0.000000
9/24/2011	6:05:21 PM	H2 MFC set to  0.000000
9/24/2011	6:05:21 PM	BCl3 MFC set to  0.000000
9/24/2011	6:05:21 PM	PHl3 MFC set to  0.000000
9/24/2011	6:05:21 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:05:21 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:05:21 PM	Tube furnace set to 0
9/24/2011	6:05:51 PM	H2 valve closed
9/24/2011	6:05:51 PM	BCl3 valve closed
9/24/2011	6:05:52 PM	PH3 valve closed
9/24/2011	6:05:52 PM	SiCl4 pre valve closed
9/24/2011	6:05:52 PM	SiCl4 post valve closed
9/24/2011	6:05:52 PM	Bypass valve closed
9/24/2011	6:05:52 PM	Bubbler valve closed
9/24/2011	6:05:52 PM	Helium valve opened
9/24/2011	6:05:52 PM	Main Vac valve opened
9/24/2011	6:05:52 PM	Helium MFC set to  20.000000
9/24/2011	6:05:52 PM	H2 MFC set to  0.000000
9/24/2011	6:05:52 PM	BCl3 MFC set to  0.000000
9/24/2011	6:05:52 PM	PHl3 MFC set to  0.000000
9/24/2011	6:05:52 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:05:52 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:05:52 PM	Tube furnace set to 0
9/24/2011	6:06:22 PM	Helium valve closed
9/24/2011	6:06:22 PM	H2 valve closed
9/24/2011	6:06:22 PM	BCl3 valve closed
9/24/2011	6:06:22 PM	PH3 valve closed
9/24/2011	6:06:22 PM	SiCl4 pre valve closed
9/24/2011	6:06:22 PM	SiCl4 post valve closed
9/24/2011	6:06:22 PM	Bypass valve closed
9/24/2011	6:06:22 PM	Bubbler valve closed
9/24/2011	6:06:22 PM	Main Vac valve opened
9/24/2011	6:06:22 PM	Helium MFC set to  0.000000
9/24/2011	6:06:22 PM	H2 MFC set to  0.000000
9/24/2011	6:06:22 PM	BCl3 MFC set to  0.000000
9/24/2011	6:06:22 PM	PHl3 MFC set to  0.000000
9/24/2011	6:06:22 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:06:22 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:06:22 PM	Tube furnace set to 0
9/24/2011	6:06:52 PM	H2 valve closed
9/24/2011	6:06:52 PM	BCl3 valve closed
9/24/2011	6:06:52 PM	PH3 valve closed
9/24/2011	6:06:52 PM	SiCl4 pre valve closed
9/24/2011	6:06:52 PM	SiCl4 post valve closed
9/24/2011	6:06:52 PM	Bypass valve closed
9/24/2011	6:06:52 PM	Bubbler valve closed
9/24/2011	6:06:52 PM	Helium valve opened
9/24/2011	6:06:52 PM	Main Vac valve opened
9/24/2011	6:06:52 PM	Helium MFC set to  20.000000
9/24/2011	6:06:52 PM	H2 MFC set to  0.000000
9/24/2011	6:06:52 PM	BCl3 MFC set to  0.000000
9/24/2011	6:06:52 PM	PHl3 MFC set to  0.000000
9/24/2011	6:06:52 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:06:52 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:06:52 PM	Tube furnace set to 0
9/24/2011	6:07:22 PM	Helium valve closed
9/24/2011	6:07:22 PM	H2 valve closed
9/24/2011	6:07:22 PM	BCl3 valve closed
9/24/2011	6:07:22 PM	PH3 valve closed
9/24/2011	6:07:22 PM	SiCl4 pre valve closed
9/24/2011	6:07:22 PM	SiCl4 post valve closed
9/24/2011	6:07:22 PM	Bypass valve closed
9/24/2011	6:07:22 PM	Bubbler valve closed
9/24/2011	6:07:22 PM	Main Vac valve opened
9/24/2011	6:07:22 PM	Helium MFC set to  0.000000
9/24/2011	6:07:22 PM	H2 MFC set to  0.000000
9/24/2011	6:07:22 PM	BCl3 MFC set to  0.000000
9/24/2011	6:07:22 PM	PHl3 MFC set to  0.000000
9/24/2011	6:07:22 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:07:22 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:07:22 PM	Tube furnace set to 0
9/24/2011	6:07:52 PM	H2 valve closed
9/24/2011	6:07:52 PM	BCl3 valve closed
9/24/2011	6:07:52 PM	PH3 valve closed
9/24/2011	6:07:52 PM	SiCl4 pre valve closed
9/24/2011	6:07:52 PM	SiCl4 post valve closed
9/24/2011	6:07:52 PM	Bypass valve closed
9/24/2011	6:07:52 PM	Bubbler valve closed
9/24/2011	6:07:52 PM	Helium valve opened
9/24/2011	6:07:52 PM	Main Vac valve opened
9/24/2011	6:07:52 PM	Helium MFC set to  20.000000
9/24/2011	6:07:52 PM	H2 MFC set to  0.000000
9/24/2011	6:07:52 PM	BCl3 MFC set to  0.000000
9/24/2011	6:07:52 PM	PHl3 MFC set to  0.000000
9/24/2011	6:07:52 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:07:52 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:07:52 PM	Tube furnace set to 0
9/24/2011	6:08:22 PM	Helium valve closed
9/24/2011	6:08:22 PM	H2 valve closed
9/24/2011	6:08:22 PM	BCl3 valve closed
9/24/2011	6:08:23 PM	PH3 valve closed
9/24/2011	6:08:23 PM	SiCl4 pre valve closed
9/24/2011	6:08:23 PM	SiCl4 post valve closed
9/24/2011	6:08:23 PM	Bypass valve closed
9/24/2011	6:08:23 PM	Bubbler valve closed
9/24/2011	6:08:23 PM	Main Vac valve opened
9/24/2011	6:08:23 PM	Helium MFC set to  0.000000
9/24/2011	6:08:23 PM	H2 MFC set to  0.000000
9/24/2011	6:08:23 PM	BCl3 MFC set to  0.000000
9/24/2011	6:08:23 PM	PHl3 MFC set to  0.000000
9/24/2011	6:08:23 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:08:23 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:08:23 PM	Tube furnace set to 0
9/24/2011	6:08:53 PM	H2 valve closed
9/24/2011	6:08:53 PM	BCl3 valve closed
9/24/2011	6:08:53 PM	PH3 valve closed
9/24/2011	6:08:53 PM	SiCl4 pre valve closed
9/24/2011	6:08:53 PM	SiCl4 post valve closed
9/24/2011	6:08:53 PM	Bypass valve closed
9/24/2011	6:08:53 PM	Bubbler valve closed
9/24/2011	6:08:53 PM	Helium valve opened
9/24/2011	6:08:53 PM	Main Vac valve opened
9/24/2011	6:08:53 PM	Helium MFC set to  20.000000
9/24/2011	6:08:53 PM	H2 MFC set to  0.000000
9/24/2011	6:08:53 PM	BCl3 MFC set to  0.000000
9/24/2011	6:08:53 PM	PHl3 MFC set to  0.000000
9/24/2011	6:08:53 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:08:53 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:08:53 PM	Tube furnace set to 0
9/24/2011	6:09:23 PM	Helium valve closed
9/24/2011	6:09:23 PM	H2 valve closed
9/24/2011	6:09:23 PM	BCl3 valve closed
9/24/2011	6:09:23 PM	PH3 valve closed
9/24/2011	6:09:23 PM	SiCl4 pre valve closed
9/24/2011	6:09:23 PM	SiCl4 post valve closed
9/24/2011	6:09:23 PM	Bypass valve closed
9/24/2011	6:09:23 PM	Bubbler valve closed
9/24/2011	6:09:23 PM	Main Vac valve opened
9/24/2011	6:09:23 PM	Helium MFC set to  0.000000
9/24/2011	6:09:23 PM	H2 MFC set to  0.000000
9/24/2011	6:09:23 PM	BCl3 MFC set to  0.000000
9/24/2011	6:09:23 PM	PHl3 MFC set to  0.000000
9/24/2011	6:09:23 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:09:23 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:09:23 PM	Tube furnace set to 0
9/24/2011	6:09:24 PM	Run finished at 6:09 PM
9/24/2011	6:09:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/24/2011	6:11:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/24/2011	6:11:20 PM	Recipe started at 6:11 PM
9/24/2011	6:11:20 PM	Helium valve closed
9/24/2011	6:11:20 PM	H2 valve closed
9/24/2011	6:11:20 PM	BCl3 valve closed
9/24/2011	6:11:20 PM	PH3 valve closed
9/24/2011	6:11:20 PM	SiCl4 pre valve closed
9/24/2011	6:11:20 PM	SiCl4 post valve closed
9/24/2011	6:11:20 PM	Main Vac valve closed
9/24/2011	6:11:20 PM	Bubbler valve closed
9/24/2011	6:11:20 PM	Bypass valve opened
9/24/2011	6:11:20 PM	Helium MFC set to  0.000000
9/24/2011	6:11:20 PM	H2 MFC set to  0.000000
9/24/2011	6:11:20 PM	BCl3 MFC set to  0.000000
9/24/2011	6:11:20 PM	PHl3 MFC set to  0.000000
9/24/2011	6:11:20 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:11:20 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:11:20 PM	Tube furnace set to 0
9/24/2011	6:11:20 PM	Helium valve closed
9/24/2011	6:11:20 PM	H2 valve closed
9/24/2011	6:11:20 PM	BCl3 valve closed
9/24/2011	6:11:20 PM	PH3 valve closed
9/24/2011	6:11:20 PM	SiCl4 pre valve closed
9/24/2011	6:11:20 PM	SiCl4 post valve closed
9/24/2011	6:11:20 PM	Main Vac valve closed
9/24/2011	6:11:20 PM	Bubbler valve closed
9/24/2011	6:11:20 PM	Bypass valve opened
9/24/2011	6:11:20 PM	Helium MFC set to  0.000000
9/24/2011	6:11:20 PM	H2 MFC set to  0.000000
9/24/2011	6:11:20 PM	BCl3 MFC set to  0.000000
9/24/2011	6:11:20 PM	PHl3 MFC set to  0.000000
9/24/2011	6:11:20 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:11:20 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:11:20 PM	Tube furnace set to 0
9/24/2011	6:11:50 PM	Helium valve closed
9/24/2011	6:11:50 PM	H2 valve closed
9/24/2011	6:11:50 PM	BCl3 valve closed
9/24/2011	6:11:50 PM	PH3 valve closed
9/24/2011	6:11:50 PM	SiCl4 pre valve closed
9/24/2011	6:11:50 PM	SiCl4 post valve closed
9/24/2011	6:11:50 PM	Bypass valve closed
9/24/2011	6:11:50 PM	Bubbler valve closed
9/24/2011	6:11:50 PM	Main Vac valve opened
9/24/2011	6:11:50 PM	Helium MFC set to  0.000000
9/24/2011	6:11:50 PM	H2 MFC set to  0.000000
9/24/2011	6:11:50 PM	BCl3 MFC set to  0.000000
9/24/2011	6:11:50 PM	PHl3 MFC set to  0.000000
9/24/2011	6:11:50 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:11:50 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:11:51 PM	Tube furnace set to 0
9/24/2011	6:12:21 PM	H2 valve closed
9/24/2011	6:12:21 PM	BCl3 valve closed
9/24/2011	6:12:21 PM	PH3 valve closed
9/24/2011	6:12:21 PM	SiCl4 pre valve closed
9/24/2011	6:12:21 PM	SiCl4 post valve closed
9/24/2011	6:12:21 PM	Bypass valve closed
9/24/2011	6:12:21 PM	Bubbler valve closed
9/24/2011	6:12:21 PM	Helium valve opened
9/24/2011	6:12:21 PM	Main Vac valve opened
9/24/2011	6:12:21 PM	Helium MFC set to  20.000000
9/24/2011	6:12:21 PM	H2 MFC set to  0.000000
9/24/2011	6:12:21 PM	BCl3 MFC set to  0.000000
9/24/2011	6:12:21 PM	PHl3 MFC set to  0.000000
9/24/2011	6:12:21 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:12:21 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:12:21 PM	Tube furnace set to 0
9/24/2011	6:12:51 PM	Helium valve closed
9/24/2011	6:12:51 PM	H2 valve closed
9/24/2011	6:12:51 PM	BCl3 valve closed
9/24/2011	6:12:51 PM	PH3 valve closed
9/24/2011	6:12:51 PM	SiCl4 pre valve closed
9/24/2011	6:12:51 PM	SiCl4 post valve closed
9/24/2011	6:12:51 PM	Bypass valve closed
9/24/2011	6:12:51 PM	Bubbler valve closed
9/24/2011	6:12:51 PM	Main Vac valve opened
9/24/2011	6:12:51 PM	Helium MFC set to  0.000000
9/24/2011	6:12:51 PM	H2 MFC set to  0.000000
9/24/2011	6:12:51 PM	BCl3 MFC set to  0.000000
9/24/2011	6:12:51 PM	PHl3 MFC set to  0.000000
9/24/2011	6:12:51 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:12:51 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:12:51 PM	Tube furnace set to 0
9/24/2011	6:13:21 PM	H2 valve closed
9/24/2011	6:13:21 PM	BCl3 valve closed
9/24/2011	6:13:21 PM	PH3 valve closed
9/24/2011	6:13:21 PM	SiCl4 pre valve closed
9/24/2011	6:13:21 PM	SiCl4 post valve closed
9/24/2011	6:13:21 PM	Bypass valve closed
9/24/2011	6:13:21 PM	Bubbler valve closed
9/24/2011	6:13:21 PM	Helium valve opened
9/24/2011	6:13:21 PM	Main Vac valve opened
9/24/2011	6:13:21 PM	Helium MFC set to  20.000000
9/24/2011	6:13:21 PM	H2 MFC set to  0.000000
9/24/2011	6:13:21 PM	BCl3 MFC set to  0.000000
9/24/2011	6:13:21 PM	PHl3 MFC set to  0.000000
9/24/2011	6:13:21 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:13:21 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:13:21 PM	Tube furnace set to 0
9/24/2011	6:13:51 PM	Helium valve closed
9/24/2011	6:13:51 PM	H2 valve closed
9/24/2011	6:13:51 PM	BCl3 valve closed
9/24/2011	6:13:51 PM	PH3 valve closed
9/24/2011	6:13:51 PM	SiCl4 pre valve closed
9/24/2011	6:13:51 PM	SiCl4 post valve closed
9/24/2011	6:13:51 PM	Bypass valve closed
9/24/2011	6:13:51 PM	Bubbler valve closed
9/24/2011	6:13:51 PM	Main Vac valve opened
9/24/2011	6:13:51 PM	Helium MFC set to  0.000000
9/24/2011	6:13:51 PM	H2 MFC set to  0.000000
9/24/2011	6:13:51 PM	BCl3 MFC set to  0.000000
9/24/2011	6:13:51 PM	PHl3 MFC set to  0.000000
9/24/2011	6:13:51 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:13:51 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:13:51 PM	Tube furnace set to 0
9/24/2011	6:14:21 PM	H2 valve closed
9/24/2011	6:14:21 PM	BCl3 valve closed
9/24/2011	6:14:21 PM	PH3 valve closed
9/24/2011	6:14:21 PM	SiCl4 pre valve closed
9/24/2011	6:14:21 PM	SiCl4 post valve closed
9/24/2011	6:14:21 PM	Bypass valve closed
9/24/2011	6:14:21 PM	Bubbler valve closed
9/24/2011	6:14:21 PM	Helium valve opened
9/24/2011	6:14:21 PM	Main Vac valve opened
9/24/2011	6:14:21 PM	Helium MFC set to  20.000000
9/24/2011	6:14:21 PM	H2 MFC set to  0.000000
9/24/2011	6:14:21 PM	BCl3 MFC set to  0.000000
9/24/2011	6:14:21 PM	PHl3 MFC set to  0.000000
9/24/2011	6:14:21 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:14:21 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:14:22 PM	Tube furnace set to 0
9/24/2011	6:14:52 PM	Helium valve closed
9/24/2011	6:14:52 PM	H2 valve closed
9/24/2011	6:14:52 PM	BCl3 valve closed
9/24/2011	6:14:52 PM	PH3 valve closed
9/24/2011	6:14:52 PM	SiCl4 pre valve closed
9/24/2011	6:14:52 PM	SiCl4 post valve closed
9/24/2011	6:14:52 PM	Bypass valve closed
9/24/2011	6:14:52 PM	Bubbler valve closed
9/24/2011	6:14:52 PM	Main Vac valve opened
9/24/2011	6:14:52 PM	Helium MFC set to  0.000000
9/24/2011	6:14:52 PM	H2 MFC set to  0.000000
9/24/2011	6:14:52 PM	BCl3 MFC set to  0.000000
9/24/2011	6:14:52 PM	PHl3 MFC set to  0.000000
9/24/2011	6:14:52 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:14:52 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:14:52 PM	Tube furnace set to 0
9/24/2011	6:15:22 PM	H2 valve closed
9/24/2011	6:15:22 PM	BCl3 valve closed
9/24/2011	6:15:22 PM	PH3 valve closed
9/24/2011	6:15:22 PM	SiCl4 pre valve closed
9/24/2011	6:15:22 PM	SiCl4 post valve closed
9/24/2011	6:15:22 PM	Bypass valve closed
9/24/2011	6:15:22 PM	Bubbler valve closed
9/24/2011	6:15:22 PM	Helium valve opened
9/24/2011	6:15:22 PM	Main Vac valve opened
9/24/2011	6:15:22 PM	Helium MFC set to  20.000000
9/24/2011	6:15:22 PM	H2 MFC set to  0.000000
9/24/2011	6:15:22 PM	BCl3 MFC set to  0.000000
9/24/2011	6:15:22 PM	PHl3 MFC set to  0.000000
9/24/2011	6:15:22 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:15:22 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:15:22 PM	Tube furnace set to 0
9/24/2011	6:15:52 PM	Helium valve closed
9/24/2011	6:15:52 PM	H2 valve closed
9/24/2011	6:15:52 PM	BCl3 valve closed
9/24/2011	6:15:52 PM	PH3 valve closed
9/24/2011	6:15:52 PM	SiCl4 pre valve closed
9/24/2011	6:15:52 PM	SiCl4 post valve closed
9/24/2011	6:15:52 PM	Bypass valve closed
9/24/2011	6:15:52 PM	Bubbler valve closed
9/24/2011	6:15:52 PM	Main Vac valve opened
9/24/2011	6:15:52 PM	Helium MFC set to  0.000000
9/24/2011	6:15:52 PM	H2 MFC set to  0.000000
9/24/2011	6:15:52 PM	BCl3 MFC set to  0.000000
9/24/2011	6:15:52 PM	PHl3 MFC set to  0.000000
9/24/2011	6:15:52 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:15:52 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:15:52 PM	Tube furnace set to 0
9/24/2011	6:16:22 PM	H2 valve closed
9/24/2011	6:16:22 PM	BCl3 valve closed
9/24/2011	6:16:22 PM	PH3 valve closed
9/24/2011	6:16:22 PM	SiCl4 pre valve closed
9/24/2011	6:16:22 PM	SiCl4 post valve closed
9/24/2011	6:16:22 PM	Bypass valve closed
9/24/2011	6:16:22 PM	Bubbler valve closed
9/24/2011	6:16:22 PM	Helium valve opened
9/24/2011	6:16:22 PM	Main Vac valve opened
9/24/2011	6:16:22 PM	Helium MFC set to  20.000000
9/24/2011	6:16:22 PM	H2 MFC set to  0.000000
9/24/2011	6:16:22 PM	BCl3 MFC set to  0.000000
9/24/2011	6:16:22 PM	PHl3 MFC set to  0.000000
9/24/2011	6:16:22 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:16:22 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:16:22 PM	Tube furnace set to 0
9/24/2011	6:16:52 PM	Helium valve closed
9/24/2011	6:16:52 PM	H2 valve closed
9/24/2011	6:16:52 PM	BCl3 valve closed
9/24/2011	6:16:52 PM	PH3 valve closed
9/24/2011	6:16:52 PM	SiCl4 pre valve closed
9/24/2011	6:16:52 PM	SiCl4 post valve closed
9/24/2011	6:16:52 PM	Bypass valve closed
9/24/2011	6:16:52 PM	Bubbler valve closed
9/24/2011	6:16:52 PM	Main Vac valve opened
9/24/2011	6:16:52 PM	Helium MFC set to  0.000000
9/24/2011	6:16:52 PM	H2 MFC set to  0.000000
9/24/2011	6:16:52 PM	BCl3 MFC set to  0.000000
9/24/2011	6:16:52 PM	PHl3 MFC set to  0.000000
9/24/2011	6:16:52 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:16:52 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:16:53 PM	Tube furnace set to 0
9/24/2011	6:17:23 PM	H2 valve closed
9/24/2011	6:17:23 PM	BCl3 valve closed
9/24/2011	6:17:23 PM	PH3 valve closed
9/24/2011	6:17:23 PM	SiCl4 pre valve closed
9/24/2011	6:17:23 PM	SiCl4 post valve closed
9/24/2011	6:17:23 PM	Bypass valve closed
9/24/2011	6:17:23 PM	Bubbler valve closed
9/24/2011	6:17:23 PM	Helium valve opened
9/24/2011	6:17:23 PM	Main Vac valve opened
9/24/2011	6:17:23 PM	Helium MFC set to  20.000000
9/24/2011	6:17:23 PM	H2 MFC set to  0.000000
9/24/2011	6:17:23 PM	BCl3 MFC set to  0.000000
9/24/2011	6:17:23 PM	PHl3 MFC set to  0.000000
9/24/2011	6:17:23 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:17:23 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:17:23 PM	Tube furnace set to 0
9/24/2011	6:17:53 PM	Helium valve closed
9/24/2011	6:17:53 PM	H2 valve closed
9/24/2011	6:17:53 PM	BCl3 valve closed
9/24/2011	6:17:53 PM	PH3 valve closed
9/24/2011	6:17:53 PM	SiCl4 pre valve closed
9/24/2011	6:17:53 PM	SiCl4 post valve closed
9/24/2011	6:17:53 PM	Bypass valve closed
9/24/2011	6:17:53 PM	Bubbler valve closed
9/24/2011	6:17:53 PM	Main Vac valve opened
9/24/2011	6:17:53 PM	Helium MFC set to  0.000000
9/24/2011	6:17:53 PM	H2 MFC set to  0.000000
9/24/2011	6:17:53 PM	BCl3 MFC set to  0.000000
9/24/2011	6:17:53 PM	PHl3 MFC set to  0.000000
9/24/2011	6:17:53 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:17:53 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:17:53 PM	Tube furnace set to 0
9/24/2011	6:18:23 PM	H2 valve closed
9/24/2011	6:18:23 PM	BCl3 valve closed
9/24/2011	6:18:23 PM	PH3 valve closed
9/24/2011	6:18:23 PM	SiCl4 pre valve closed
9/24/2011	6:18:23 PM	SiCl4 post valve closed
9/24/2011	6:18:23 PM	Bypass valve closed
9/24/2011	6:18:23 PM	Bubbler valve closed
9/24/2011	6:18:23 PM	Helium valve opened
9/24/2011	6:18:23 PM	Main Vac valve opened
9/24/2011	6:18:23 PM	Helium MFC set to  20.000000
9/24/2011	6:18:23 PM	H2 MFC set to  0.000000
9/24/2011	6:18:23 PM	BCl3 MFC set to  0.000000
9/24/2011	6:18:23 PM	PHl3 MFC set to  0.000000
9/24/2011	6:18:23 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:18:23 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:18:23 PM	Tube furnace set to 0
9/24/2011	6:18:53 PM	Helium valve closed
9/24/2011	6:18:53 PM	H2 valve closed
9/24/2011	6:18:53 PM	BCl3 valve closed
9/24/2011	6:18:53 PM	PH3 valve closed
9/24/2011	6:18:53 PM	SiCl4 pre valve closed
9/24/2011	6:18:53 PM	SiCl4 post valve closed
9/24/2011	6:18:53 PM	Bypass valve closed
9/24/2011	6:18:53 PM	Bubbler valve closed
9/24/2011	6:18:53 PM	Main Vac valve opened
9/24/2011	6:18:53 PM	Helium MFC set to  0.000000
9/24/2011	6:18:53 PM	H2 MFC set to  0.000000
9/24/2011	6:18:53 PM	BCl3 MFC set to  0.000000
9/24/2011	6:18:53 PM	PHl3 MFC set to  0.000000
9/24/2011	6:18:53 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:18:53 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:18:53 PM	Tube furnace set to 0
9/24/2011	6:19:23 PM	H2 valve closed
9/24/2011	6:19:23 PM	BCl3 valve closed
9/24/2011	6:19:23 PM	PH3 valve closed
9/24/2011	6:19:23 PM	SiCl4 pre valve closed
9/24/2011	6:19:23 PM	SiCl4 post valve closed
9/24/2011	6:19:23 PM	Bypass valve closed
9/24/2011	6:19:23 PM	Bubbler valve closed
9/24/2011	6:19:23 PM	Helium valve opened
9/24/2011	6:19:23 PM	Main Vac valve opened
9/24/2011	6:19:23 PM	Helium MFC set to  20.000000
9/24/2011	6:19:23 PM	H2 MFC set to  0.000000
9/24/2011	6:19:23 PM	BCl3 MFC set to  0.000000
9/24/2011	6:19:23 PM	PHl3 MFC set to  0.000000
9/24/2011	6:19:23 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:19:23 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:19:24 PM	Tube furnace set to 0
9/24/2011	6:19:54 PM	Helium valve closed
9/24/2011	6:19:54 PM	H2 valve closed
9/24/2011	6:19:54 PM	BCl3 valve closed
9/24/2011	6:19:54 PM	PH3 valve closed
9/24/2011	6:19:54 PM	SiCl4 pre valve closed
9/24/2011	6:19:54 PM	SiCl4 post valve closed
9/24/2011	6:19:54 PM	Bypass valve closed
9/24/2011	6:19:54 PM	Bubbler valve closed
9/24/2011	6:19:54 PM	Main Vac valve opened
9/24/2011	6:19:54 PM	Helium MFC set to  0.000000
9/24/2011	6:19:54 PM	H2 MFC set to  0.000000
9/24/2011	6:19:54 PM	BCl3 MFC set to  0.000000
9/24/2011	6:19:54 PM	PHl3 MFC set to  0.000000
9/24/2011	6:19:54 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:19:54 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:19:54 PM	Tube furnace set to 0
9/24/2011	6:20:24 PM	H2 valve closed
9/24/2011	6:20:24 PM	BCl3 valve closed
9/24/2011	6:20:24 PM	PH3 valve closed
9/24/2011	6:20:24 PM	SiCl4 pre valve closed
9/24/2011	6:20:24 PM	SiCl4 post valve closed
9/24/2011	6:20:24 PM	Bypass valve closed
9/24/2011	6:20:24 PM	Bubbler valve closed
9/24/2011	6:20:24 PM	Helium valve opened
9/24/2011	6:20:24 PM	Main Vac valve opened
9/24/2011	6:20:24 PM	Helium MFC set to  20.000000
9/24/2011	6:20:24 PM	H2 MFC set to  0.000000
9/24/2011	6:20:24 PM	BCl3 MFC set to  0.000000
9/24/2011	6:20:24 PM	PHl3 MFC set to  0.000000
9/24/2011	6:20:24 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:20:24 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:20:24 PM	Tube furnace set to 0
9/24/2011	6:20:54 PM	Helium valve closed
9/24/2011	6:20:54 PM	H2 valve closed
9/24/2011	6:20:54 PM	BCl3 valve closed
9/24/2011	6:20:54 PM	PH3 valve closed
9/24/2011	6:20:54 PM	SiCl4 pre valve closed
9/24/2011	6:20:54 PM	SiCl4 post valve closed
9/24/2011	6:20:54 PM	Bypass valve closed
9/24/2011	6:20:54 PM	Bubbler valve closed
9/24/2011	6:20:54 PM	Main Vac valve opened
9/24/2011	6:20:54 PM	Helium MFC set to  0.000000
9/24/2011	6:20:54 PM	H2 MFC set to  0.000000
9/24/2011	6:20:54 PM	BCl3 MFC set to  0.000000
9/24/2011	6:20:54 PM	PHl3 MFC set to  0.000000
9/24/2011	6:20:54 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:20:54 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:20:54 PM	Tube furnace set to 0
9/24/2011	6:21:24 PM	H2 valve closed
9/24/2011	6:21:24 PM	BCl3 valve closed
9/24/2011	6:21:24 PM	PH3 valve closed
9/24/2011	6:21:24 PM	SiCl4 pre valve closed
9/24/2011	6:21:24 PM	SiCl4 post valve closed
9/24/2011	6:21:24 PM	Bypass valve closed
9/24/2011	6:21:24 PM	Bubbler valve closed
9/24/2011	6:21:24 PM	Helium valve opened
9/24/2011	6:21:24 PM	Main Vac valve opened
9/24/2011	6:21:24 PM	Helium MFC set to  20.000000
9/24/2011	6:21:24 PM	H2 MFC set to  0.000000
9/24/2011	6:21:24 PM	BCl3 MFC set to  0.000000
9/24/2011	6:21:24 PM	PHl3 MFC set to  0.000000
9/24/2011	6:21:24 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:21:24 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:21:24 PM	Tube furnace set to 0
9/24/2011	6:21:54 PM	Helium valve closed
9/24/2011	6:21:54 PM	H2 valve closed
9/24/2011	6:21:54 PM	BCl3 valve closed
9/24/2011	6:21:54 PM	PH3 valve closed
9/24/2011	6:21:54 PM	SiCl4 pre valve closed
9/24/2011	6:21:54 PM	SiCl4 post valve closed
9/24/2011	6:21:54 PM	Bypass valve closed
9/24/2011	6:21:54 PM	Bubbler valve closed
9/24/2011	6:21:54 PM	Main Vac valve opened
9/24/2011	6:21:54 PM	Helium MFC set to  0.000000
9/24/2011	6:21:54 PM	H2 MFC set to  0.000000
9/24/2011	6:21:54 PM	BCl3 MFC set to  0.000000
9/24/2011	6:21:54 PM	PHl3 MFC set to  0.000000
9/24/2011	6:21:54 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:21:54 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:21:55 PM	Tube furnace set to 0
9/24/2011	6:21:56 PM	Run finished at 6:21 PM
9/24/2011	6:21:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/24/2011	6:23:08 PM	Main Vac valve closed
9/24/2011	6:23:17 PM	Main Vac valve opened
9/24/2011	6:25:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/24/2011	6:25:33 PM	Recipe started at 6:25 PM
9/24/2011	6:25:33 PM	Helium valve closed
9/24/2011	6:25:33 PM	H2 valve closed
9/24/2011	6:25:33 PM	BCl3 valve closed
9/24/2011	6:25:33 PM	PH3 valve closed
9/24/2011	6:25:33 PM	SiCl4 pre valve closed
9/24/2011	6:25:33 PM	SiCl4 post valve closed
9/24/2011	6:25:33 PM	Main Vac valve closed
9/24/2011	6:25:33 PM	Bubbler valve closed
9/24/2011	6:25:33 PM	Bypass valve opened
9/24/2011	6:25:33 PM	Helium MFC set to  0.000000
9/24/2011	6:25:33 PM	H2 MFC set to  0.000000
9/24/2011	6:25:33 PM	BCl3 MFC set to  0.000000
9/24/2011	6:25:33 PM	PHl3 MFC set to  0.000000
9/24/2011	6:25:33 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:25:33 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:25:33 PM	Tube furnace set to 0
9/24/2011	6:25:33 PM	Helium valve closed
9/24/2011	6:25:33 PM	H2 valve closed
9/24/2011	6:25:33 PM	BCl3 valve closed
9/24/2011	6:25:33 PM	PH3 valve closed
9/24/2011	6:25:33 PM	SiCl4 pre valve closed
9/24/2011	6:25:33 PM	SiCl4 post valve closed
9/24/2011	6:25:33 PM	Main Vac valve closed
9/24/2011	6:25:33 PM	Bubbler valve closed
9/24/2011	6:25:33 PM	Bypass valve opened
9/24/2011	6:25:33 PM	Helium MFC set to  0.000000
9/24/2011	6:25:33 PM	H2 MFC set to  0.000000
9/24/2011	6:25:33 PM	BCl3 MFC set to  0.000000
9/24/2011	6:25:33 PM	PHl3 MFC set to  0.000000
9/24/2011	6:25:33 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:25:33 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:25:34 PM	Tube furnace set to 0
9/24/2011	6:26:04 PM	Helium valve closed
9/24/2011	6:26:04 PM	H2 valve closed
9/24/2011	6:26:04 PM	BCl3 valve closed
9/24/2011	6:26:04 PM	PH3 valve closed
9/24/2011	6:26:04 PM	SiCl4 pre valve closed
9/24/2011	6:26:04 PM	SiCl4 post valve closed
9/24/2011	6:26:04 PM	Bypass valve closed
9/24/2011	6:26:04 PM	Bubbler valve closed
9/24/2011	6:26:04 PM	Main Vac valve opened
9/24/2011	6:26:04 PM	Helium MFC set to  0.000000
9/24/2011	6:26:04 PM	H2 MFC set to  0.000000
9/24/2011	6:26:04 PM	BCl3 MFC set to  0.000000
9/24/2011	6:26:04 PM	PHl3 MFC set to  0.000000
9/24/2011	6:26:04 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:26:04 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:26:04 PM	Tube furnace set to 0
9/24/2011	6:26:20 PM	Run aborted at 6:26 PM
9/24/2011	6:26:20 PM	Helium valve closed
9/24/2011	6:26:20 PM	H2 valve closed
9/24/2011	6:26:20 PM	BCl3 valve closed
9/24/2011	6:26:20 PM	PH3 valve closed
9/24/2011	6:26:20 PM	SiCl4 pre valve closed
9/24/2011	6:26:20 PM	SiCl4 post valve closed
9/24/2011	6:26:20 PM	Bypass valve closed
9/24/2011	6:26:20 PM	Main Vac valve closed
9/24/2011	6:26:20 PM	Bubbler valve closed
9/24/2011	6:26:20 PM	Helium MFC set to  0.000000
9/24/2011	6:26:20 PM	H2 MFC set to  0.000000
9/24/2011	6:26:20 PM	BCl3 MFC set to  0.000000
9/24/2011	6:26:20 PM	PHl3 MFC set to  0.000000
9/24/2011	6:26:20 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:26:20 PM	Tube furnace set to 0
9/24/2011	6:26:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/24/2011	6:29:00 PM	Main Vac valve opened
9/24/2011	6:51:04 PM	Main Vac valve closed
9/24/2011	6:51:12 PM	Main Vac valve opened
9/24/2011	6:51:44 PM	Recipe started at 6:51 PM
9/24/2011	6:51:44 PM	Helium valve closed
9/24/2011	6:51:44 PM	H2 valve closed
9/24/2011	6:51:44 PM	BCl3 valve closed
9/24/2011	6:51:44 PM	PH3 valve closed
9/24/2011	6:51:44 PM	SiCl4 pre valve closed
9/24/2011	6:51:44 PM	SiCl4 post valve closed
9/24/2011	6:51:44 PM	Main Vac valve closed
9/24/2011	6:51:44 PM	Bypass valve closed
9/24/2011	6:51:44 PM	Bubbler valve closed
9/24/2011	6:51:44 PM	Helium MFC set to  0.000000
9/24/2011	6:51:44 PM	H2 MFC set to  0.000000
9/24/2011	6:51:44 PM	BCl3 MFC set to  0.000000
9/24/2011	6:51:44 PM	PHl3 MFC set to  0.000000
9/24/2011	6:51:44 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:51:44 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:51:44 PM	Tube furnace set to 0
9/24/2011	6:51:47 PM	Helium valve closed
9/24/2011	6:51:47 PM	BCl3 valve closed
9/24/2011	6:51:47 PM	PH3 valve closed
9/24/2011	6:51:47 PM	SiCl4 pre valve closed
9/24/2011	6:51:47 PM	SiCl4 post valve closed
9/24/2011	6:51:47 PM	Main Vac valve closed
9/24/2011	6:51:47 PM	Bypass valve closed
9/24/2011	6:51:47 PM	Bubbler valve closed
9/24/2011	6:51:47 PM	H2 valve opened
9/24/2011	6:51:47 PM	Helium MFC set to  0.000000
9/24/2011	6:51:47 PM	H2 MFC set to  500.000000
9/24/2011	6:51:47 PM	BCl3 MFC set to  0.000000
9/24/2011	6:51:47 PM	PHl3 MFC set to  0.000000
9/24/2011	6:51:47 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:51:47 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:51:47 PM	Tube furnace set to 0
9/24/2011	6:52:52 PM	Helium valve closed
9/24/2011	6:52:52 PM	BCl3 valve closed
9/24/2011	6:52:52 PM	PH3 valve closed
9/24/2011	6:52:52 PM	SiCl4 pre valve closed
9/24/2011	6:52:52 PM	SiCl4 post valve closed
9/24/2011	6:52:52 PM	Main Vac valve closed
9/24/2011	6:52:52 PM	Bypass valve closed
9/24/2011	6:52:52 PM	H2 valve opened
9/24/2011	6:52:52 PM	Bubbler valve opened
9/24/2011	6:52:52 PM	Helium MFC set to  0.000000
9/24/2011	6:52:52 PM	H2 MFC set to  500.000000
9/24/2011	6:52:52 PM	BCl3 MFC set to  0.000000
9/24/2011	6:52:52 PM	PHl3 MFC set to  0.000000
9/24/2011	6:52:52 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:52:52 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:52:52 PM	Tube furnace set to 0
9/24/2011	6:52:53 PM	Helium valve closed
9/24/2011	6:52:53 PM	BCl3 valve closed
9/24/2011	6:52:53 PM	PH3 valve closed
9/24/2011	6:52:53 PM	SiCl4 pre valve closed
9/24/2011	6:52:53 PM	SiCl4 post valve closed
9/24/2011	6:52:53 PM	Main Vac valve closed
9/24/2011	6:52:53 PM	Bypass valve closed
9/24/2011	6:52:53 PM	H2 valve opened
9/24/2011	6:52:53 PM	Bubbler valve opened
9/24/2011	6:52:53 PM	Helium MFC set to  0.000000
9/24/2011	6:52:53 PM	H2 MFC set to  500.000000
9/24/2011	6:52:53 PM	BCl3 MFC set to  0.000000
9/24/2011	6:52:53 PM	PHl3 MFC set to  0.000000
9/24/2011	6:52:53 PM	SiCl4 MFC set to  0.000000
9/24/2011	6:52:53 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	6:52:53 PM	Tube furnace set to 1000
9/24/2011	7:12:53 PM	Helium valve closed
9/24/2011	7:12:53 PM	BCl3 valve closed
9/24/2011	7:12:53 PM	PH3 valve closed
9/24/2011	7:12:53 PM	Main Vac valve closed
9/24/2011	7:12:53 PM	Bypass valve closed
9/24/2011	7:12:53 PM	H2 valve opened
9/24/2011	7:12:53 PM	SiCl4 pre valve opened
9/24/2011	7:12:53 PM	SiCl4 post valve opened
9/24/2011	7:12:53 PM	Bubbler valve opened
9/24/2011	7:12:53 PM	Helium MFC set to  0.000000
9/24/2011	7:12:53 PM	H2 MFC set to  500.000000
9/24/2011	7:12:53 PM	BCl3 MFC set to  0.000000
9/24/2011	7:12:53 PM	PHl3 MFC set to  0.000000
9/24/2011	7:12:53 PM	SiCl4 MFC set to  50.000000
9/24/2011	7:12:53 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:12:53 PM	Tube furnace set to 1000
9/24/2011	7:22:53 PM	Helium valve closed
9/24/2011	7:22:53 PM	BCl3 valve closed
9/24/2011	7:22:53 PM	PH3 valve closed
9/24/2011	7:22:53 PM	SiCl4 pre valve closed
9/24/2011	7:22:53 PM	SiCl4 post valve closed
9/24/2011	7:22:53 PM	Main Vac valve closed
9/24/2011	7:22:53 PM	Bypass valve closed
9/24/2011	7:22:53 PM	H2 valve opened
9/24/2011	7:22:53 PM	Bubbler valve opened
9/24/2011	7:22:53 PM	Helium MFC set to  0.000000
9/24/2011	7:22:53 PM	H2 MFC set to  500.000000
9/24/2011	7:22:53 PM	BCl3 MFC set to  0.000000
9/24/2011	7:22:53 PM	PHl3 MFC set to  0.000000
9/24/2011	7:22:53 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:22:53 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:22:53 PM	Tube furnace set to 750
9/24/2011	7:27:53 PM	H2 valve closed
9/24/2011	7:27:53 PM	BCl3 valve closed
9/24/2011	7:27:53 PM	PH3 valve closed
9/24/2011	7:27:53 PM	SiCl4 pre valve closed
9/24/2011	7:27:53 PM	SiCl4 post valve closed
9/24/2011	7:27:53 PM	Main Vac valve closed
9/24/2011	7:27:53 PM	Bypass valve closed
9/24/2011	7:27:53 PM	Helium valve opened
9/24/2011	7:27:53 PM	Bubbler valve opened
9/24/2011	7:27:53 PM	Helium MFC set to  500.000000
9/24/2011	7:27:53 PM	H2 MFC set to  0.000000
9/24/2011	7:27:53 PM	BCl3 MFC set to  0.000000
9/24/2011	7:27:53 PM	PHl3 MFC set to  0.000000
9/24/2011	7:27:53 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:27:53 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:27:53 PM	Tube furnace set to 0
9/24/2011	7:34:55 PM	Run aborted at 7:34 PM
9/24/2011	7:34:55 PM	Helium valve closed
9/24/2011	7:34:55 PM	H2 valve closed
9/24/2011	7:34:55 PM	BCl3 valve closed
9/24/2011	7:34:55 PM	PH3 valve closed
9/24/2011	7:34:55 PM	SiCl4 pre valve closed
9/24/2011	7:34:55 PM	SiCl4 post valve closed
9/24/2011	7:34:55 PM	Bypass valve closed
9/24/2011	7:34:55 PM	Main Vac valve closed
9/24/2011	7:34:55 PM	Bubbler valve closed
9/24/2011	7:34:55 PM	Helium MFC set to  0.000000
9/24/2011	7:34:55 PM	H2 MFC set to  0.000000
9/24/2011	7:34:55 PM	BCl3 MFC set to  0.000000
9/24/2011	7:34:55 PM	PHl3 MFC set to  0.000000
9/24/2011	7:34:55 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:34:55 PM	Tube furnace set to 0
9/24/2011	7:35:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/24/2011	7:35:06 PM	Recipe started at 7:35 PM
9/24/2011	7:35:06 PM	Helium valve closed
9/24/2011	7:35:06 PM	H2 valve closed
9/24/2011	7:35:06 PM	BCl3 valve closed
9/24/2011	7:35:06 PM	PH3 valve closed
9/24/2011	7:35:06 PM	SiCl4 pre valve closed
9/24/2011	7:35:06 PM	SiCl4 post valve closed
9/24/2011	7:35:06 PM	Main Vac valve closed
9/24/2011	7:35:06 PM	Bypass valve closed
9/24/2011	7:35:06 PM	Bubbler valve closed
9/24/2011	7:35:06 PM	Helium MFC set to  0.000000
9/24/2011	7:35:06 PM	H2 MFC set to  0.000000
9/24/2011	7:35:06 PM	BCl3 MFC set to  0.000000
9/24/2011	7:35:06 PM	PHl3 MFC set to  0.000000
9/24/2011	7:35:06 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:35:06 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:35:06 PM	Tube furnace set to 0
9/24/2011	7:35:09 PM	H2 valve closed
9/24/2011	7:35:09 PM	BCl3 valve closed
9/24/2011	7:35:09 PM	PH3 valve closed
9/24/2011	7:35:09 PM	SiCl4 pre valve closed
9/24/2011	7:35:09 PM	SiCl4 post valve closed
9/24/2011	7:35:09 PM	Main Vac valve closed
9/24/2011	7:35:09 PM	Bypass valve closed
9/24/2011	7:35:09 PM	Bubbler valve closed
9/24/2011	7:35:09 PM	Helium valve opened
9/24/2011	7:35:09 PM	Helium MFC set to  500.000000
9/24/2011	7:35:09 PM	H2 MFC set to  0.000000
9/24/2011	7:35:09 PM	BCl3 MFC set to  0.000000
9/24/2011	7:35:09 PM	PHl3 MFC set to  0.000000
9/24/2011	7:35:09 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:35:09 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:35:10 PM	Tube furnace set to 0
9/24/2011	7:35:10 PM	Helium valve closed
9/24/2011	7:35:10 PM	H2 valve closed
9/24/2011	7:35:10 PM	BCl3 valve closed
9/24/2011	7:35:10 PM	PH3 valve closed
9/24/2011	7:35:10 PM	SiCl4 pre valve closed
9/24/2011	7:35:10 PM	SiCl4 post valve closed
9/24/2011	7:35:10 PM	Main Vac valve closed
9/24/2011	7:35:10 PM	Bypass valve closed
9/24/2011	7:35:10 PM	Bubbler valve closed
9/24/2011	7:35:10 PM	Helium MFC set to  0.000000
9/24/2011	7:35:10 PM	H2 MFC set to  0.000000
9/24/2011	7:35:10 PM	BCl3 MFC set to  0.000000
9/24/2011	7:35:10 PM	PHl3 MFC set to  0.000000
9/24/2011	7:35:10 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:35:10 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:35:10 PM	Tube furnace set to 0
9/24/2011	7:35:11 PM	Run finished at 7:35 PM
9/24/2011	7:35:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/24/2011	7:42:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/24/2011	7:42:48 PM	Recipe started at 7:42 PM
9/24/2011	7:42:48 PM	Helium valve closed
9/24/2011	7:42:48 PM	H2 valve closed
9/24/2011	7:42:48 PM	BCl3 valve closed
9/24/2011	7:42:48 PM	PH3 valve closed
9/24/2011	7:42:48 PM	SiCl4 pre valve closed
9/24/2011	7:42:48 PM	SiCl4 post valve closed
9/24/2011	7:42:48 PM	Main Vac valve closed
9/24/2011	7:42:48 PM	Bubbler valve closed
9/24/2011	7:42:48 PM	Bypass valve opened
9/24/2011	7:42:48 PM	Helium MFC set to  0.000000
9/24/2011	7:42:48 PM	H2 MFC set to  0.000000
9/24/2011	7:42:48 PM	BCl3 MFC set to  0.000000
9/24/2011	7:42:48 PM	PHl3 MFC set to  0.000000
9/24/2011	7:42:48 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:42:48 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:42:48 PM	Tube furnace set to 0
9/24/2011	7:43:51 PM	Helium valve closed
9/24/2011	7:43:51 PM	H2 valve closed
9/24/2011	7:43:51 PM	BCl3 valve closed
9/24/2011	7:43:51 PM	PH3 valve closed
9/24/2011	7:43:51 PM	SiCl4 pre valve closed
9/24/2011	7:43:51 PM	SiCl4 post valve closed
9/24/2011	7:43:51 PM	Main Vac valve closed
9/24/2011	7:43:51 PM	Bubbler valve closed
9/24/2011	7:43:51 PM	Bypass valve opened
9/24/2011	7:43:51 PM	Helium MFC set to  0.000000
9/24/2011	7:43:51 PM	H2 MFC set to  0.000000
9/24/2011	7:43:51 PM	BCl3 MFC set to  0.000000
9/24/2011	7:43:51 PM	PHl3 MFC set to  0.000000
9/24/2011	7:43:51 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:43:51 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:43:51 PM	Tube furnace set to 0
9/24/2011	7:44:51 PM	Helium valve closed
9/24/2011	7:44:51 PM	H2 valve closed
9/24/2011	7:44:51 PM	BCl3 valve closed
9/24/2011	7:44:51 PM	PH3 valve closed
9/24/2011	7:44:51 PM	SiCl4 pre valve closed
9/24/2011	7:44:51 PM	SiCl4 post valve closed
9/24/2011	7:44:51 PM	Bypass valve closed
9/24/2011	7:44:51 PM	Bubbler valve closed
9/24/2011	7:44:51 PM	Main Vac valve opened
9/24/2011	7:44:51 PM	Helium MFC set to  0.000000
9/24/2011	7:44:51 PM	H2 MFC set to  0.000000
9/24/2011	7:44:51 PM	BCl3 MFC set to  0.000000
9/24/2011	7:44:51 PM	PHl3 MFC set to  0.000000
9/24/2011	7:44:51 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:44:51 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:44:51 PM	Tube furnace set to 0
9/24/2011	7:44:52 PM	Run finished at 7:44 PM
9/24/2011	7:44:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/24/2011	7:45:54 PM	Recipe started at 7:45 PM
9/24/2011	7:45:54 PM	Helium valve closed
9/24/2011	7:45:54 PM	H2 valve closed
9/24/2011	7:45:54 PM	BCl3 valve closed
9/24/2011	7:45:54 PM	PH3 valve closed
9/24/2011	7:45:54 PM	SiCl4 pre valve closed
9/24/2011	7:45:54 PM	SiCl4 post valve closed
9/24/2011	7:45:54 PM	Main Vac valve closed
9/24/2011	7:45:54 PM	Bubbler valve closed
9/24/2011	7:45:54 PM	Bypass valve opened
9/24/2011	7:45:54 PM	Helium MFC set to  0.000000
9/24/2011	7:45:54 PM	H2 MFC set to  0.000000
9/24/2011	7:45:54 PM	BCl3 MFC set to  0.000000
9/24/2011	7:45:54 PM	PHl3 MFC set to  0.000000
9/24/2011	7:45:54 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:45:54 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:45:54 PM	Tube furnace set to 150
9/24/2011	7:45:54 PM	Helium valve closed
9/24/2011	7:45:54 PM	H2 valve closed
9/24/2011	7:45:54 PM	BCl3 valve closed
9/24/2011	7:45:54 PM	PH3 valve closed
9/24/2011	7:45:54 PM	SiCl4 pre valve closed
9/24/2011	7:45:54 PM	SiCl4 post valve closed
9/24/2011	7:45:54 PM	Main Vac valve closed
9/24/2011	7:45:54 PM	Bubbler valve closed
9/24/2011	7:45:54 PM	Bypass valve opened
9/24/2011	7:45:54 PM	Helium MFC set to  0.000000
9/24/2011	7:45:54 PM	H2 MFC set to  0.000000
9/24/2011	7:45:54 PM	BCl3 MFC set to  0.000000
9/24/2011	7:45:54 PM	PHl3 MFC set to  0.000000
9/24/2011	7:45:54 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:45:54 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:45:54 PM	Tube furnace set to 150
9/24/2011	7:46:24 PM	Helium valve closed
9/24/2011	7:46:24 PM	H2 valve closed
9/24/2011	7:46:24 PM	BCl3 valve closed
9/24/2011	7:46:24 PM	PH3 valve closed
9/24/2011	7:46:24 PM	SiCl4 pre valve closed
9/24/2011	7:46:24 PM	SiCl4 post valve closed
9/24/2011	7:46:24 PM	Bypass valve closed
9/24/2011	7:46:24 PM	Bubbler valve closed
9/24/2011	7:46:24 PM	Main Vac valve opened
9/24/2011	7:46:24 PM	Helium MFC set to  0.000000
9/24/2011	7:46:24 PM	H2 MFC set to  0.000000
9/24/2011	7:46:24 PM	BCl3 MFC set to  0.000000
9/24/2011	7:46:24 PM	PHl3 MFC set to  0.000000
9/24/2011	7:46:24 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:46:24 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:46:24 PM	Tube furnace set to 150
9/24/2011	7:46:54 PM	H2 valve closed
9/24/2011	7:46:54 PM	BCl3 valve closed
9/24/2011	7:46:54 PM	PH3 valve closed
9/24/2011	7:46:54 PM	SiCl4 pre valve closed
9/24/2011	7:46:54 PM	SiCl4 post valve closed
9/24/2011	7:46:54 PM	Bypass valve closed
9/24/2011	7:46:54 PM	Bubbler valve closed
9/24/2011	7:46:54 PM	Helium valve opened
9/24/2011	7:46:54 PM	Main Vac valve opened
9/24/2011	7:46:54 PM	Helium MFC set to  20.000000
9/24/2011	7:46:54 PM	H2 MFC set to  0.000000
9/24/2011	7:46:54 PM	BCl3 MFC set to  0.000000
9/24/2011	7:46:54 PM	PHl3 MFC set to  0.000000
9/24/2011	7:46:54 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:46:55 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:46:55 PM	Tube furnace set to 150
9/24/2011	7:47:25 PM	Helium valve closed
9/24/2011	7:47:25 PM	H2 valve closed
9/24/2011	7:47:25 PM	BCl3 valve closed
9/24/2011	7:47:25 PM	PH3 valve closed
9/24/2011	7:47:25 PM	SiCl4 pre valve closed
9/24/2011	7:47:25 PM	SiCl4 post valve closed
9/24/2011	7:47:25 PM	Bypass valve closed
9/24/2011	7:47:25 PM	Bubbler valve closed
9/24/2011	7:47:25 PM	Main Vac valve opened
9/24/2011	7:47:25 PM	Helium MFC set to  0.000000
9/24/2011	7:47:25 PM	H2 MFC set to  0.000000
9/24/2011	7:47:25 PM	BCl3 MFC set to  0.000000
9/24/2011	7:47:25 PM	PHl3 MFC set to  0.000000
9/24/2011	7:47:25 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:47:25 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:47:25 PM	Tube furnace set to 150
9/24/2011	7:47:55 PM	H2 valve closed
9/24/2011	7:47:55 PM	BCl3 valve closed
9/24/2011	7:47:55 PM	PH3 valve closed
9/24/2011	7:47:55 PM	SiCl4 pre valve closed
9/24/2011	7:47:55 PM	SiCl4 post valve closed
9/24/2011	7:47:55 PM	Bypass valve closed
9/24/2011	7:47:55 PM	Bubbler valve closed
9/24/2011	7:47:55 PM	Helium valve opened
9/24/2011	7:47:55 PM	Main Vac valve opened
9/24/2011	7:47:55 PM	Helium MFC set to  20.000000
9/24/2011	7:47:55 PM	H2 MFC set to  0.000000
9/24/2011	7:47:55 PM	BCl3 MFC set to  0.000000
9/24/2011	7:47:55 PM	PHl3 MFC set to  0.000000
9/24/2011	7:47:55 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:47:55 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:47:55 PM	Tube furnace set to 150
9/24/2011	7:48:25 PM	Helium valve closed
9/24/2011	7:48:25 PM	H2 valve closed
9/24/2011	7:48:25 PM	BCl3 valve closed
9/24/2011	7:48:25 PM	PH3 valve closed
9/24/2011	7:48:25 PM	SiCl4 pre valve closed
9/24/2011	7:48:25 PM	SiCl4 post valve closed
9/24/2011	7:48:25 PM	Bypass valve closed
9/24/2011	7:48:25 PM	Bubbler valve closed
9/24/2011	7:48:25 PM	Main Vac valve opened
9/24/2011	7:48:25 PM	Helium MFC set to  0.000000
9/24/2011	7:48:25 PM	H2 MFC set to  0.000000
9/24/2011	7:48:25 PM	BCl3 MFC set to  0.000000
9/24/2011	7:48:25 PM	PHl3 MFC set to  0.000000
9/24/2011	7:48:25 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:48:25 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:48:25 PM	Tube furnace set to 150
9/24/2011	7:48:55 PM	H2 valve closed
9/24/2011	7:48:55 PM	BCl3 valve closed
9/24/2011	7:48:55 PM	PH3 valve closed
9/24/2011	7:48:55 PM	SiCl4 pre valve closed
9/24/2011	7:48:55 PM	SiCl4 post valve closed
9/24/2011	7:48:55 PM	Bypass valve closed
9/24/2011	7:48:55 PM	Bubbler valve closed
9/24/2011	7:48:55 PM	Helium valve opened
9/24/2011	7:48:55 PM	Main Vac valve opened
9/24/2011	7:48:55 PM	Helium MFC set to  20.000000
9/24/2011	7:48:55 PM	H2 MFC set to  0.000000
9/24/2011	7:48:55 PM	BCl3 MFC set to  0.000000
9/24/2011	7:48:55 PM	PHl3 MFC set to  0.000000
9/24/2011	7:48:55 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:48:55 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:48:56 PM	Tube furnace set to 150
9/24/2011	7:49:26 PM	Helium valve closed
9/24/2011	7:49:26 PM	H2 valve closed
9/24/2011	7:49:26 PM	BCl3 valve closed
9/24/2011	7:49:26 PM	PH3 valve closed
9/24/2011	7:49:26 PM	SiCl4 pre valve closed
9/24/2011	7:49:26 PM	SiCl4 post valve closed
9/24/2011	7:49:26 PM	Bypass valve closed
9/24/2011	7:49:26 PM	Bubbler valve closed
9/24/2011	7:49:26 PM	Main Vac valve opened
9/24/2011	7:49:26 PM	Helium MFC set to  0.000000
9/24/2011	7:49:26 PM	H2 MFC set to  0.000000
9/24/2011	7:49:26 PM	BCl3 MFC set to  0.000000
9/24/2011	7:49:26 PM	PHl3 MFC set to  0.000000
9/24/2011	7:49:26 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:49:26 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:49:26 PM	Tube furnace set to 150
9/24/2011	7:49:56 PM	H2 valve closed
9/24/2011	7:49:56 PM	BCl3 valve closed
9/24/2011	7:49:56 PM	PH3 valve closed
9/24/2011	7:49:56 PM	SiCl4 pre valve closed
9/24/2011	7:49:56 PM	SiCl4 post valve closed
9/24/2011	7:49:56 PM	Bypass valve closed
9/24/2011	7:49:56 PM	Bubbler valve closed
9/24/2011	7:49:56 PM	Helium valve opened
9/24/2011	7:49:56 PM	Main Vac valve opened
9/24/2011	7:49:56 PM	Helium MFC set to  20.000000
9/24/2011	7:49:56 PM	H2 MFC set to  0.000000
9/24/2011	7:49:56 PM	BCl3 MFC set to  0.000000
9/24/2011	7:49:56 PM	PHl3 MFC set to  0.000000
9/24/2011	7:49:56 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:49:56 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:49:56 PM	Tube furnace set to 150
9/24/2011	7:50:26 PM	Helium valve closed
9/24/2011	7:50:26 PM	H2 valve closed
9/24/2011	7:50:26 PM	BCl3 valve closed
9/24/2011	7:50:26 PM	PH3 valve closed
9/24/2011	7:50:26 PM	SiCl4 pre valve closed
9/24/2011	7:50:26 PM	SiCl4 post valve closed
9/24/2011	7:50:26 PM	Bypass valve closed
9/24/2011	7:50:26 PM	Bubbler valve closed
9/24/2011	7:50:26 PM	Main Vac valve opened
9/24/2011	7:50:26 PM	Helium MFC set to  0.000000
9/24/2011	7:50:26 PM	H2 MFC set to  0.000000
9/24/2011	7:50:26 PM	BCl3 MFC set to  0.000000
9/24/2011	7:50:26 PM	PHl3 MFC set to  0.000000
9/24/2011	7:50:26 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:50:26 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:50:26 PM	Tube furnace set to 150
9/24/2011	7:50:56 PM	H2 valve closed
9/24/2011	7:50:56 PM	BCl3 valve closed
9/24/2011	7:50:56 PM	PH3 valve closed
9/24/2011	7:50:56 PM	SiCl4 pre valve closed
9/24/2011	7:50:56 PM	SiCl4 post valve closed
9/24/2011	7:50:56 PM	Bypass valve closed
9/24/2011	7:50:56 PM	Bubbler valve closed
9/24/2011	7:50:56 PM	Helium valve opened
9/24/2011	7:50:56 PM	Main Vac valve opened
9/24/2011	7:50:56 PM	Helium MFC set to  20.000000
9/24/2011	7:50:56 PM	H2 MFC set to  0.000000
9/24/2011	7:50:56 PM	BCl3 MFC set to  0.000000
9/24/2011	7:50:56 PM	PHl3 MFC set to  0.000000
9/24/2011	7:50:56 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:50:56 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:50:56 PM	Tube furnace set to 150
9/24/2011	7:51:26 PM	Helium valve closed
9/24/2011	7:51:26 PM	H2 valve closed
9/24/2011	7:51:26 PM	BCl3 valve closed
9/24/2011	7:51:26 PM	PH3 valve closed
9/24/2011	7:51:26 PM	SiCl4 pre valve closed
9/24/2011	7:51:26 PM	SiCl4 post valve closed
9/24/2011	7:51:26 PM	Bypass valve closed
9/24/2011	7:51:26 PM	Bubbler valve closed
9/24/2011	7:51:26 PM	Main Vac valve opened
9/24/2011	7:51:26 PM	Helium MFC set to  0.000000
9/24/2011	7:51:26 PM	H2 MFC set to  0.000000
9/24/2011	7:51:26 PM	BCl3 MFC set to  0.000000
9/24/2011	7:51:26 PM	PHl3 MFC set to  0.000000
9/24/2011	7:51:26 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:51:26 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:51:27 PM	Tube furnace set to 150
9/24/2011	7:51:57 PM	H2 valve closed
9/24/2011	7:51:57 PM	BCl3 valve closed
9/24/2011	7:51:57 PM	PH3 valve closed
9/24/2011	7:51:57 PM	SiCl4 pre valve closed
9/24/2011	7:51:57 PM	SiCl4 post valve closed
9/24/2011	7:51:57 PM	Bypass valve closed
9/24/2011	7:51:57 PM	Bubbler valve closed
9/24/2011	7:51:57 PM	Helium valve opened
9/24/2011	7:51:57 PM	Main Vac valve opened
9/24/2011	7:51:57 PM	Helium MFC set to  20.000000
9/24/2011	7:51:57 PM	H2 MFC set to  0.000000
9/24/2011	7:51:57 PM	BCl3 MFC set to  0.000000
9/24/2011	7:51:57 PM	PHl3 MFC set to  0.000000
9/24/2011	7:51:57 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:51:57 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:51:57 PM	Tube furnace set to 150
9/24/2011	7:52:27 PM	Helium valve closed
9/24/2011	7:52:27 PM	H2 valve closed
9/24/2011	7:52:27 PM	BCl3 valve closed
9/24/2011	7:52:27 PM	PH3 valve closed
9/24/2011	7:52:27 PM	SiCl4 pre valve closed
9/24/2011	7:52:27 PM	SiCl4 post valve closed
9/24/2011	7:52:27 PM	Bypass valve closed
9/24/2011	7:52:27 PM	Bubbler valve closed
9/24/2011	7:52:27 PM	Main Vac valve opened
9/24/2011	7:52:27 PM	Helium MFC set to  0.000000
9/24/2011	7:52:27 PM	H2 MFC set to  0.000000
9/24/2011	7:52:27 PM	BCl3 MFC set to  0.000000
9/24/2011	7:52:27 PM	PHl3 MFC set to  0.000000
9/24/2011	7:52:27 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:52:27 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:52:27 PM	Tube furnace set to 150
9/24/2011	7:52:57 PM	H2 valve closed
9/24/2011	7:52:57 PM	BCl3 valve closed
9/24/2011	7:52:57 PM	PH3 valve closed
9/24/2011	7:52:57 PM	SiCl4 pre valve closed
9/24/2011	7:52:57 PM	SiCl4 post valve closed
9/24/2011	7:52:57 PM	Bypass valve closed
9/24/2011	7:52:57 PM	Bubbler valve closed
9/24/2011	7:52:57 PM	Helium valve opened
9/24/2011	7:52:57 PM	Main Vac valve opened
9/24/2011	7:52:57 PM	Helium MFC set to  20.000000
9/24/2011	7:52:57 PM	H2 MFC set to  0.000000
9/24/2011	7:52:57 PM	BCl3 MFC set to  0.000000
9/24/2011	7:52:57 PM	PHl3 MFC set to  0.000000
9/24/2011	7:52:57 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:52:57 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:52:57 PM	Tube furnace set to 150
9/24/2011	7:53:27 PM	Helium valve closed
9/24/2011	7:53:27 PM	H2 valve closed
9/24/2011	7:53:27 PM	BCl3 valve closed
9/24/2011	7:53:27 PM	PH3 valve closed
9/24/2011	7:53:27 PM	SiCl4 pre valve closed
9/24/2011	7:53:27 PM	SiCl4 post valve closed
9/24/2011	7:53:27 PM	Bypass valve closed
9/24/2011	7:53:27 PM	Bubbler valve closed
9/24/2011	7:53:27 PM	Main Vac valve opened
9/24/2011	7:53:27 PM	Helium MFC set to  0.000000
9/24/2011	7:53:27 PM	H2 MFC set to  0.000000
9/24/2011	7:53:27 PM	BCl3 MFC set to  0.000000
9/24/2011	7:53:27 PM	PHl3 MFC set to  0.000000
9/24/2011	7:53:27 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:53:27 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:53:27 PM	Tube furnace set to 150
9/24/2011	7:53:57 PM	H2 valve closed
9/24/2011	7:53:57 PM	BCl3 valve closed
9/24/2011	7:53:58 PM	PH3 valve closed
9/24/2011	7:53:58 PM	SiCl4 pre valve closed
9/24/2011	7:53:58 PM	SiCl4 post valve closed
9/24/2011	7:53:58 PM	Bypass valve closed
9/24/2011	7:53:58 PM	Bubbler valve closed
9/24/2011	7:53:58 PM	Helium valve opened
9/24/2011	7:53:58 PM	Main Vac valve opened
9/24/2011	7:53:58 PM	Helium MFC set to  20.000000
9/24/2011	7:53:58 PM	H2 MFC set to  0.000000
9/24/2011	7:53:58 PM	BCl3 MFC set to  0.000000
9/24/2011	7:53:58 PM	PHl3 MFC set to  0.000000
9/24/2011	7:53:58 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:53:58 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:53:58 PM	Tube furnace set to 150
9/24/2011	7:54:28 PM	Helium valve closed
9/24/2011	7:54:28 PM	H2 valve closed
9/24/2011	7:54:28 PM	BCl3 valve closed
9/24/2011	7:54:28 PM	PH3 valve closed
9/24/2011	7:54:28 PM	SiCl4 pre valve closed
9/24/2011	7:54:28 PM	SiCl4 post valve closed
9/24/2011	7:54:28 PM	Bypass valve closed
9/24/2011	7:54:28 PM	Bubbler valve closed
9/24/2011	7:54:28 PM	Main Vac valve opened
9/24/2011	7:54:28 PM	Helium MFC set to  0.000000
9/24/2011	7:54:28 PM	H2 MFC set to  0.000000
9/24/2011	7:54:28 PM	BCl3 MFC set to  0.000000
9/24/2011	7:54:28 PM	PHl3 MFC set to  0.000000
9/24/2011	7:54:28 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:54:28 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:54:28 PM	Tube furnace set to 150
9/24/2011	7:54:58 PM	H2 valve closed
9/24/2011	7:54:58 PM	BCl3 valve closed
9/24/2011	7:54:58 PM	PH3 valve closed
9/24/2011	7:54:58 PM	SiCl4 pre valve closed
9/24/2011	7:54:58 PM	SiCl4 post valve closed
9/24/2011	7:54:58 PM	Bypass valve closed
9/24/2011	7:54:58 PM	Bubbler valve closed
9/24/2011	7:54:58 PM	Helium valve opened
9/24/2011	7:54:58 PM	Main Vac valve opened
9/24/2011	7:54:58 PM	Helium MFC set to  20.000000
9/24/2011	7:54:58 PM	H2 MFC set to  0.000000
9/24/2011	7:54:58 PM	BCl3 MFC set to  0.000000
9/24/2011	7:54:58 PM	PHl3 MFC set to  0.000000
9/24/2011	7:54:58 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:54:58 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:54:58 PM	Tube furnace set to 150
9/24/2011	7:55:28 PM	Helium valve closed
9/24/2011	7:55:28 PM	H2 valve closed
9/24/2011	7:55:28 PM	BCl3 valve closed
9/24/2011	7:55:28 PM	PH3 valve closed
9/24/2011	7:55:28 PM	SiCl4 pre valve closed
9/24/2011	7:55:28 PM	SiCl4 post valve closed
9/24/2011	7:55:28 PM	Bypass valve closed
9/24/2011	7:55:28 PM	Bubbler valve closed
9/24/2011	7:55:28 PM	Main Vac valve opened
9/24/2011	7:55:28 PM	Helium MFC set to  0.000000
9/24/2011	7:55:28 PM	H2 MFC set to  0.000000
9/24/2011	7:55:28 PM	BCl3 MFC set to  0.000000
9/24/2011	7:55:28 PM	PHl3 MFC set to  0.000000
9/24/2011	7:55:28 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:55:28 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:55:28 PM	Tube furnace set to 150
9/24/2011	7:55:58 PM	H2 valve closed
9/24/2011	7:55:58 PM	BCl3 valve closed
9/24/2011	7:55:58 PM	PH3 valve closed
9/24/2011	7:55:58 PM	SiCl4 pre valve closed
9/24/2011	7:55:58 PM	SiCl4 post valve closed
9/24/2011	7:55:58 PM	Bypass valve closed
9/24/2011	7:55:58 PM	Bubbler valve closed
9/24/2011	7:55:58 PM	Helium valve opened
9/24/2011	7:55:58 PM	Main Vac valve opened
9/24/2011	7:55:58 PM	Helium MFC set to  20.000000
9/24/2011	7:55:58 PM	H2 MFC set to  0.000000
9/24/2011	7:55:58 PM	BCl3 MFC set to  0.000000
9/24/2011	7:55:58 PM	PHl3 MFC set to  0.000000
9/24/2011	7:55:58 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:55:58 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:55:59 PM	Tube furnace set to 150
9/24/2011	7:56:29 PM	Helium valve closed
9/24/2011	7:56:29 PM	H2 valve closed
9/24/2011	7:56:29 PM	BCl3 valve closed
9/24/2011	7:56:29 PM	PH3 valve closed
9/24/2011	7:56:29 PM	SiCl4 pre valve closed
9/24/2011	7:56:29 PM	SiCl4 post valve closed
9/24/2011	7:56:29 PM	Bypass valve closed
9/24/2011	7:56:29 PM	Bubbler valve closed
9/24/2011	7:56:29 PM	Main Vac valve opened
9/24/2011	7:56:29 PM	Helium MFC set to  0.000000
9/24/2011	7:56:29 PM	H2 MFC set to  0.000000
9/24/2011	7:56:29 PM	BCl3 MFC set to  0.000000
9/24/2011	7:56:29 PM	PHl3 MFC set to  0.000000
9/24/2011	7:56:29 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:56:29 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:56:29 PM	Tube furnace set to 150
9/24/2011	7:56:59 PM	H2 valve closed
9/24/2011	7:56:59 PM	BCl3 valve closed
9/24/2011	7:56:59 PM	PH3 valve closed
9/24/2011	7:56:59 PM	SiCl4 pre valve closed
9/24/2011	7:56:59 PM	SiCl4 post valve closed
9/24/2011	7:56:59 PM	Bypass valve closed
9/24/2011	7:56:59 PM	Bubbler valve closed
9/24/2011	7:56:59 PM	Helium valve opened
9/24/2011	7:56:59 PM	Main Vac valve opened
9/24/2011	7:56:59 PM	Helium MFC set to  20.000000
9/24/2011	7:56:59 PM	H2 MFC set to  0.000000
9/24/2011	7:56:59 PM	BCl3 MFC set to  0.000000
9/24/2011	7:56:59 PM	PHl3 MFC set to  0.000000
9/24/2011	7:56:59 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:56:59 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:56:59 PM	Tube furnace set to 150
9/24/2011	7:57:29 PM	Helium valve closed
9/24/2011	7:57:29 PM	H2 valve closed
9/24/2011	7:57:29 PM	BCl3 valve closed
9/24/2011	7:57:29 PM	PH3 valve closed
9/24/2011	7:57:29 PM	SiCl4 pre valve closed
9/24/2011	7:57:29 PM	SiCl4 post valve closed
9/24/2011	7:57:29 PM	Bypass valve closed
9/24/2011	7:57:29 PM	Bubbler valve closed
9/24/2011	7:57:29 PM	Main Vac valve opened
9/24/2011	7:57:29 PM	Helium MFC set to  0.000000
9/24/2011	7:57:29 PM	H2 MFC set to  0.000000
9/24/2011	7:57:29 PM	BCl3 MFC set to  0.000000
9/24/2011	7:57:29 PM	PHl3 MFC set to  0.000000
9/24/2011	7:57:29 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:57:29 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:57:29 PM	Tube furnace set to 150
9/24/2011	7:57:59 PM	H2 valve closed
9/24/2011	7:57:59 PM	BCl3 valve closed
9/24/2011	7:57:59 PM	PH3 valve closed
9/24/2011	7:57:59 PM	SiCl4 pre valve closed
9/24/2011	7:57:59 PM	SiCl4 post valve closed
9/24/2011	7:57:59 PM	Bypass valve closed
9/24/2011	7:57:59 PM	Bubbler valve closed
9/24/2011	7:57:59 PM	Helium valve opened
9/24/2011	7:57:59 PM	Main Vac valve opened
9/24/2011	7:57:59 PM	Helium MFC set to  20.000000
9/24/2011	7:57:59 PM	H2 MFC set to  0.000000
9/24/2011	7:57:59 PM	BCl3 MFC set to  0.000000
9/24/2011	7:57:59 PM	PHl3 MFC set to  0.000000
9/24/2011	7:57:59 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:57:59 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:57:59 PM	Tube furnace set to 150
9/24/2011	7:58:29 PM	Helium valve closed
9/24/2011	7:58:29 PM	H2 valve closed
9/24/2011	7:58:29 PM	BCl3 valve closed
9/24/2011	7:58:29 PM	PH3 valve closed
9/24/2011	7:58:29 PM	SiCl4 pre valve closed
9/24/2011	7:58:29 PM	SiCl4 post valve closed
9/24/2011	7:58:29 PM	Bypass valve closed
9/24/2011	7:58:29 PM	Bubbler valve closed
9/24/2011	7:58:29 PM	Main Vac valve opened
9/24/2011	7:58:29 PM	Helium MFC set to  0.000000
9/24/2011	7:58:29 PM	H2 MFC set to  0.000000
9/24/2011	7:58:29 PM	BCl3 MFC set to  0.000000
9/24/2011	7:58:29 PM	PHl3 MFC set to  0.000000
9/24/2011	7:58:29 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:58:29 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:58:30 PM	Tube furnace set to 150
9/24/2011	7:59:00 PM	H2 valve closed
9/24/2011	7:59:00 PM	BCl3 valve closed
9/24/2011	7:59:00 PM	PH3 valve closed
9/24/2011	7:59:00 PM	SiCl4 pre valve closed
9/24/2011	7:59:00 PM	SiCl4 post valve closed
9/24/2011	7:59:00 PM	Bypass valve closed
9/24/2011	7:59:00 PM	Bubbler valve closed
9/24/2011	7:59:00 PM	Helium valve opened
9/24/2011	7:59:00 PM	Main Vac valve opened
9/24/2011	7:59:00 PM	Helium MFC set to  20.000000
9/24/2011	7:59:00 PM	H2 MFC set to  0.000000
9/24/2011	7:59:00 PM	BCl3 MFC set to  0.000000
9/24/2011	7:59:00 PM	PHl3 MFC set to  0.000000
9/24/2011	7:59:00 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:59:00 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:59:00 PM	Tube furnace set to 150
9/24/2011	7:59:30 PM	Helium valve closed
9/24/2011	7:59:30 PM	H2 valve closed
9/24/2011	7:59:30 PM	BCl3 valve closed
9/24/2011	7:59:30 PM	PH3 valve closed
9/24/2011	7:59:30 PM	SiCl4 pre valve closed
9/24/2011	7:59:30 PM	SiCl4 post valve closed
9/24/2011	7:59:30 PM	Bypass valve closed
9/24/2011	7:59:30 PM	Bubbler valve closed
9/24/2011	7:59:30 PM	Main Vac valve opened
9/24/2011	7:59:30 PM	Helium MFC set to  0.000000
9/24/2011	7:59:30 PM	H2 MFC set to  0.000000
9/24/2011	7:59:30 PM	BCl3 MFC set to  0.000000
9/24/2011	7:59:30 PM	PHl3 MFC set to  0.000000
9/24/2011	7:59:30 PM	SiCl4 MFC set to  0.000000
9/24/2011	7:59:30 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	7:59:30 PM	Tube furnace set to 150
9/24/2011	8:00:00 PM	H2 valve closed
9/24/2011	8:00:00 PM	BCl3 valve closed
9/24/2011	8:00:00 PM	PH3 valve closed
9/24/2011	8:00:00 PM	SiCl4 pre valve closed
9/24/2011	8:00:00 PM	SiCl4 post valve closed
9/24/2011	8:00:00 PM	Bypass valve closed
9/24/2011	8:00:00 PM	Bubbler valve closed
9/24/2011	8:00:00 PM	Helium valve opened
9/24/2011	8:00:00 PM	Main Vac valve opened
9/24/2011	8:00:00 PM	Helium MFC set to  20.000000
9/24/2011	8:00:00 PM	H2 MFC set to  0.000000
9/24/2011	8:00:00 PM	BCl3 MFC set to  0.000000
9/24/2011	8:00:00 PM	PHl3 MFC set to  0.000000
9/24/2011	8:00:00 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:00:00 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:00:00 PM	Tube furnace set to 150
9/24/2011	8:00:30 PM	Helium valve closed
9/24/2011	8:00:30 PM	H2 valve closed
9/24/2011	8:00:30 PM	BCl3 valve closed
9/24/2011	8:00:30 PM	PH3 valve closed
9/24/2011	8:00:30 PM	SiCl4 pre valve closed
9/24/2011	8:00:30 PM	SiCl4 post valve closed
9/24/2011	8:00:30 PM	Bypass valve closed
9/24/2011	8:00:30 PM	Bubbler valve closed
9/24/2011	8:00:30 PM	Main Vac valve opened
9/24/2011	8:00:30 PM	Helium MFC set to  0.000000
9/24/2011	8:00:30 PM	H2 MFC set to  0.000000
9/24/2011	8:00:30 PM	BCl3 MFC set to  0.000000
9/24/2011	8:00:30 PM	PHl3 MFC set to  0.000000
9/24/2011	8:00:30 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:00:30 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:00:30 PM	Tube furnace set to 150
9/24/2011	8:01:01 PM	H2 valve closed
9/24/2011	8:01:01 PM	BCl3 valve closed
9/24/2011	8:01:01 PM	PH3 valve closed
9/24/2011	8:01:01 PM	SiCl4 pre valve closed
9/24/2011	8:01:01 PM	SiCl4 post valve closed
9/24/2011	8:01:01 PM	Bypass valve closed
9/24/2011	8:01:01 PM	Bubbler valve closed
9/24/2011	8:01:01 PM	Helium valve opened
9/24/2011	8:01:01 PM	Main Vac valve opened
9/24/2011	8:01:01 PM	Helium MFC set to  20.000000
9/24/2011	8:01:01 PM	H2 MFC set to  0.000000
9/24/2011	8:01:01 PM	BCl3 MFC set to  0.000000
9/24/2011	8:01:01 PM	PHl3 MFC set to  0.000000
9/24/2011	8:01:01 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:01:01 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:01:01 PM	Tube furnace set to 150
9/24/2011	8:01:31 PM	Helium valve closed
9/24/2011	8:01:31 PM	H2 valve closed
9/24/2011	8:01:31 PM	BCl3 valve closed
9/24/2011	8:01:31 PM	PH3 valve closed
9/24/2011	8:01:31 PM	SiCl4 pre valve closed
9/24/2011	8:01:31 PM	SiCl4 post valve closed
9/24/2011	8:01:31 PM	Bypass valve closed
9/24/2011	8:01:31 PM	Bubbler valve closed
9/24/2011	8:01:31 PM	Main Vac valve opened
9/24/2011	8:01:31 PM	Helium MFC set to  0.000000
9/24/2011	8:01:31 PM	H2 MFC set to  0.000000
9/24/2011	8:01:31 PM	BCl3 MFC set to  0.000000
9/24/2011	8:01:31 PM	PHl3 MFC set to  0.000000
9/24/2011	8:01:31 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:01:31 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:01:31 PM	Tube furnace set to 150
9/24/2011	8:02:01 PM	H2 valve closed
9/24/2011	8:02:01 PM	BCl3 valve closed
9/24/2011	8:02:01 PM	PH3 valve closed
9/24/2011	8:02:01 PM	SiCl4 pre valve closed
9/24/2011	8:02:01 PM	SiCl4 post valve closed
9/24/2011	8:02:01 PM	Bypass valve closed
9/24/2011	8:02:01 PM	Bubbler valve closed
9/24/2011	8:02:01 PM	Helium valve opened
9/24/2011	8:02:01 PM	Main Vac valve opened
9/24/2011	8:02:01 PM	Helium MFC set to  20.000000
9/24/2011	8:02:01 PM	H2 MFC set to  0.000000
9/24/2011	8:02:01 PM	BCl3 MFC set to  0.000000
9/24/2011	8:02:01 PM	PHl3 MFC set to  0.000000
9/24/2011	8:02:01 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:02:01 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:02:01 PM	Tube furnace set to 150
9/24/2011	8:02:31 PM	Helium valve closed
9/24/2011	8:02:31 PM	H2 valve closed
9/24/2011	8:02:31 PM	BCl3 valve closed
9/24/2011	8:02:31 PM	PH3 valve closed
9/24/2011	8:02:31 PM	SiCl4 pre valve closed
9/24/2011	8:02:31 PM	SiCl4 post valve closed
9/24/2011	8:02:31 PM	Bypass valve closed
9/24/2011	8:02:31 PM	Bubbler valve closed
9/24/2011	8:02:31 PM	Main Vac valve opened
9/24/2011	8:02:31 PM	Helium MFC set to  0.000000
9/24/2011	8:02:31 PM	H2 MFC set to  0.000000
9/24/2011	8:02:31 PM	BCl3 MFC set to  0.000000
9/24/2011	8:02:31 PM	PHl3 MFC set to  0.000000
9/24/2011	8:02:31 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:02:31 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:02:31 PM	Tube furnace set to 150
9/24/2011	8:03:01 PM	H2 valve closed
9/24/2011	8:03:01 PM	BCl3 valve closed
9/24/2011	8:03:01 PM	PH3 valve closed
9/24/2011	8:03:01 PM	SiCl4 pre valve closed
9/24/2011	8:03:01 PM	SiCl4 post valve closed
9/24/2011	8:03:01 PM	Bypass valve closed
9/24/2011	8:03:01 PM	Bubbler valve closed
9/24/2011	8:03:01 PM	Helium valve opened
9/24/2011	8:03:01 PM	Main Vac valve opened
9/24/2011	8:03:01 PM	Helium MFC set to  20.000000
9/24/2011	8:03:01 PM	H2 MFC set to  0.000000
9/24/2011	8:03:01 PM	BCl3 MFC set to  0.000000
9/24/2011	8:03:01 PM	PHl3 MFC set to  0.000000
9/24/2011	8:03:01 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:03:01 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:03:02 PM	Tube furnace set to 150
9/24/2011	8:03:32 PM	Helium valve closed
9/24/2011	8:03:32 PM	H2 valve closed
9/24/2011	8:03:32 PM	BCl3 valve closed
9/24/2011	8:03:32 PM	PH3 valve closed
9/24/2011	8:03:32 PM	SiCl4 pre valve closed
9/24/2011	8:03:32 PM	SiCl4 post valve closed
9/24/2011	8:03:32 PM	Bypass valve closed
9/24/2011	8:03:32 PM	Bubbler valve closed
9/24/2011	8:03:32 PM	Main Vac valve opened
9/24/2011	8:03:32 PM	Helium MFC set to  0.000000
9/24/2011	8:03:32 PM	H2 MFC set to  0.000000
9/24/2011	8:03:32 PM	BCl3 MFC set to  0.000000
9/24/2011	8:03:32 PM	PHl3 MFC set to  0.000000
9/24/2011	8:03:32 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:03:32 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:03:32 PM	Tube furnace set to 150
9/24/2011	8:04:02 PM	H2 valve closed
9/24/2011	8:04:02 PM	BCl3 valve closed
9/24/2011	8:04:02 PM	PH3 valve closed
9/24/2011	8:04:02 PM	SiCl4 pre valve closed
9/24/2011	8:04:02 PM	SiCl4 post valve closed
9/24/2011	8:04:02 PM	Bypass valve closed
9/24/2011	8:04:02 PM	Bubbler valve closed
9/24/2011	8:04:02 PM	Helium valve opened
9/24/2011	8:04:02 PM	Main Vac valve opened
9/24/2011	8:04:02 PM	Helium MFC set to  20.000000
9/24/2011	8:04:02 PM	H2 MFC set to  0.000000
9/24/2011	8:04:02 PM	BCl3 MFC set to  0.000000
9/24/2011	8:04:02 PM	PHl3 MFC set to  0.000000
9/24/2011	8:04:02 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:04:02 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:04:02 PM	Tube furnace set to 150
9/24/2011	8:04:32 PM	Helium valve closed
9/24/2011	8:04:32 PM	H2 valve closed
9/24/2011	8:04:32 PM	BCl3 valve closed
9/24/2011	8:04:32 PM	PH3 valve closed
9/24/2011	8:04:32 PM	SiCl4 pre valve closed
9/24/2011	8:04:32 PM	SiCl4 post valve closed
9/24/2011	8:04:32 PM	Bypass valve closed
9/24/2011	8:04:32 PM	Bubbler valve closed
9/24/2011	8:04:32 PM	Main Vac valve opened
9/24/2011	8:04:32 PM	Helium MFC set to  0.000000
9/24/2011	8:04:32 PM	H2 MFC set to  0.000000
9/24/2011	8:04:32 PM	BCl3 MFC set to  0.000000
9/24/2011	8:04:32 PM	PHl3 MFC set to  0.000000
9/24/2011	8:04:32 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:04:32 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:04:32 PM	Tube furnace set to 150
9/24/2011	8:05:02 PM	H2 valve closed
9/24/2011	8:05:02 PM	BCl3 valve closed
9/24/2011	8:05:02 PM	PH3 valve closed
9/24/2011	8:05:02 PM	SiCl4 pre valve closed
9/24/2011	8:05:02 PM	SiCl4 post valve closed
9/24/2011	8:05:02 PM	Bypass valve closed
9/24/2011	8:05:02 PM	Bubbler valve closed
9/24/2011	8:05:02 PM	Helium valve opened
9/24/2011	8:05:02 PM	Main Vac valve opened
9/24/2011	8:05:02 PM	Helium MFC set to  20.000000
9/24/2011	8:05:02 PM	H2 MFC set to  0.000000
9/24/2011	8:05:02 PM	BCl3 MFC set to  0.000000
9/24/2011	8:05:02 PM	PHl3 MFC set to  0.000000
9/24/2011	8:05:02 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:05:02 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:05:02 PM	Tube furnace set to 150
9/24/2011	8:05:32 PM	Helium valve closed
9/24/2011	8:05:32 PM	H2 valve closed
9/24/2011	8:05:32 PM	BCl3 valve closed
9/24/2011	8:05:32 PM	PH3 valve closed
9/24/2011	8:05:32 PM	SiCl4 pre valve closed
9/24/2011	8:05:32 PM	SiCl4 post valve closed
9/24/2011	8:05:32 PM	Bypass valve closed
9/24/2011	8:05:32 PM	Bubbler valve closed
9/24/2011	8:05:32 PM	Main Vac valve opened
9/24/2011	8:05:32 PM	Helium MFC set to  0.000000
9/24/2011	8:05:32 PM	H2 MFC set to  0.000000
9/24/2011	8:05:32 PM	BCl3 MFC set to  0.000000
9/24/2011	8:05:32 PM	PHl3 MFC set to  0.000000
9/24/2011	8:05:32 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:05:33 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:05:33 PM	Tube furnace set to 150
9/24/2011	8:06:03 PM	H2 valve closed
9/24/2011	8:06:03 PM	BCl3 valve closed
9/24/2011	8:06:03 PM	PH3 valve closed
9/24/2011	8:06:03 PM	SiCl4 pre valve closed
9/24/2011	8:06:03 PM	SiCl4 post valve closed
9/24/2011	8:06:03 PM	Bypass valve closed
9/24/2011	8:06:03 PM	Bubbler valve closed
9/24/2011	8:06:03 PM	Helium valve opened
9/24/2011	8:06:03 PM	Main Vac valve opened
9/24/2011	8:06:03 PM	Helium MFC set to  20.000000
9/24/2011	8:06:03 PM	H2 MFC set to  0.000000
9/24/2011	8:06:03 PM	BCl3 MFC set to  0.000000
9/24/2011	8:06:03 PM	PHl3 MFC set to  0.000000
9/24/2011	8:06:03 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:06:03 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:06:03 PM	Tube furnace set to 150
9/24/2011	8:06:33 PM	Helium valve closed
9/24/2011	8:06:33 PM	H2 valve closed
9/24/2011	8:06:33 PM	BCl3 valve closed
9/24/2011	8:06:33 PM	PH3 valve closed
9/24/2011	8:06:33 PM	SiCl4 pre valve closed
9/24/2011	8:06:33 PM	SiCl4 post valve closed
9/24/2011	8:06:33 PM	Bypass valve closed
9/24/2011	8:06:33 PM	Bubbler valve closed
9/24/2011	8:06:33 PM	Main Vac valve opened
9/24/2011	8:06:33 PM	Helium MFC set to  0.000000
9/24/2011	8:06:33 PM	H2 MFC set to  0.000000
9/24/2011	8:06:33 PM	BCl3 MFC set to  0.000000
9/24/2011	8:06:33 PM	PHl3 MFC set to  0.000000
9/24/2011	8:06:33 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:06:33 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:06:33 PM	Tube furnace set to 150
9/24/2011	8:06:38 PM	Run finished at 8:06 PM
9/24/2011	8:13:18 PM	Main Vac valve closed
9/24/2011	8:13:26 PM	Main Vac valve opened
9/24/2011	8:14:47 PM	Recipe started at 8:14 PM
9/24/2011	8:14:47 PM	Helium valve closed
9/24/2011	8:14:47 PM	H2 valve closed
9/24/2011	8:14:47 PM	BCl3 valve closed
9/24/2011	8:14:47 PM	PH3 valve closed
9/24/2011	8:14:47 PM	SiCl4 pre valve closed
9/24/2011	8:14:47 PM	SiCl4 post valve closed
9/24/2011	8:14:47 PM	Main Vac valve closed
9/24/2011	8:14:47 PM	Bypass valve closed
9/24/2011	8:14:47 PM	Bubbler valve closed
9/24/2011	8:14:47 PM	Helium MFC set to  0.000000
9/24/2011	8:14:47 PM	H2 MFC set to  0.000000
9/24/2011	8:14:47 PM	BCl3 MFC set to  0.000000
9/24/2011	8:14:47 PM	PHl3 MFC set to  0.000000
9/24/2011	8:14:47 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:14:47 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:14:47 PM	Tube furnace set to 0
9/24/2011	8:14:50 PM	Helium valve closed
9/24/2011	8:14:50 PM	BCl3 valve closed
9/24/2011	8:14:50 PM	PH3 valve closed
9/24/2011	8:14:50 PM	SiCl4 pre valve closed
9/24/2011	8:14:50 PM	SiCl4 post valve closed
9/24/2011	8:14:50 PM	Main Vac valve closed
9/24/2011	8:14:50 PM	Bypass valve closed
9/24/2011	8:14:50 PM	Bubbler valve closed
9/24/2011	8:14:50 PM	H2 valve opened
9/24/2011	8:14:50 PM	Helium MFC set to  0.000000
9/24/2011	8:14:50 PM	H2 MFC set to  500.000000
9/24/2011	8:14:50 PM	BCl3 MFC set to  0.000000
9/24/2011	8:14:50 PM	PHl3 MFC set to  0.000000
9/24/2011	8:14:50 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:14:50 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:14:50 PM	Tube furnace set to 0
9/24/2011	8:15:54 PM	Helium valve closed
9/24/2011	8:15:54 PM	BCl3 valve closed
9/24/2011	8:15:54 PM	PH3 valve closed
9/24/2011	8:15:54 PM	SiCl4 pre valve closed
9/24/2011	8:15:54 PM	SiCl4 post valve closed
9/24/2011	8:15:54 PM	Main Vac valve closed
9/24/2011	8:15:54 PM	Bypass valve closed
9/24/2011	8:15:54 PM	H2 valve opened
9/24/2011	8:15:54 PM	Bubbler valve opened
9/24/2011	8:15:54 PM	Helium MFC set to  0.000000
9/24/2011	8:15:54 PM	H2 MFC set to  500.000000
9/24/2011	8:15:54 PM	BCl3 MFC set to  0.000000
9/24/2011	8:15:54 PM	PHl3 MFC set to  0.000000
9/24/2011	8:15:54 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:15:54 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:15:54 PM	Tube furnace set to 0
9/24/2011	8:15:55 PM	Helium valve closed
9/24/2011	8:15:55 PM	BCl3 valve closed
9/24/2011	8:15:55 PM	PH3 valve closed
9/24/2011	8:15:55 PM	SiCl4 pre valve closed
9/24/2011	8:15:55 PM	SiCl4 post valve closed
9/24/2011	8:15:55 PM	Main Vac valve closed
9/24/2011	8:15:55 PM	Bypass valve closed
9/24/2011	8:15:55 PM	H2 valve opened
9/24/2011	8:15:55 PM	Bubbler valve opened
9/24/2011	8:15:55 PM	Helium MFC set to  0.000000
9/24/2011	8:15:55 PM	H2 MFC set to  500.000000
9/24/2011	8:15:55 PM	BCl3 MFC set to  0.000000
9/24/2011	8:15:55 PM	PHl3 MFC set to  0.000000
9/24/2011	8:15:55 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:15:55 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:15:55 PM	Tube furnace set to 1000
9/24/2011	8:35:55 PM	Helium valve closed
9/24/2011	8:35:55 PM	BCl3 valve closed
9/24/2011	8:35:55 PM	PH3 valve closed
9/24/2011	8:35:55 PM	SiCl4 pre valve closed
9/24/2011	8:35:55 PM	SiCl4 post valve closed
9/24/2011	8:35:55 PM	Main Vac valve closed
9/24/2011	8:35:55 PM	Bypass valve closed
9/24/2011	8:35:55 PM	H2 valve opened
9/24/2011	8:35:55 PM	Bubbler valve opened
9/24/2011	8:35:55 PM	Helium MFC set to  0.000000
9/24/2011	8:35:55 PM	H2 MFC set to  500.000000
9/24/2011	8:35:55 PM	BCl3 MFC set to  0.000000
9/24/2011	8:35:55 PM	PHl3 MFC set to  0.000000
9/24/2011	8:35:55 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:35:55 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:35:55 PM	Tube furnace set to 750
9/24/2011	8:40:55 PM	H2 valve closed
9/24/2011	8:40:55 PM	BCl3 valve closed
9/24/2011	8:40:55 PM	PH3 valve closed
9/24/2011	8:40:55 PM	SiCl4 pre valve closed
9/24/2011	8:40:55 PM	SiCl4 post valve closed
9/24/2011	8:40:55 PM	Main Vac valve closed
9/24/2011	8:40:55 PM	Bypass valve closed
9/24/2011	8:40:55 PM	Helium valve opened
9/24/2011	8:40:55 PM	Bubbler valve opened
9/24/2011	8:40:55 PM	Helium MFC set to  500.000000
9/24/2011	8:40:55 PM	H2 MFC set to  0.000000
9/24/2011	8:40:55 PM	BCl3 MFC set to  0.000000
9/24/2011	8:40:55 PM	PHl3 MFC set to  0.000000
9/24/2011	8:40:55 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:40:55 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:40:55 PM	Tube furnace set to 0
9/24/2011	8:46:04 PM	Run aborted at 8:46 PM
9/24/2011	8:46:04 PM	Helium valve closed
9/24/2011	8:46:04 PM	H2 valve closed
9/24/2011	8:46:04 PM	BCl3 valve closed
9/24/2011	8:46:04 PM	PH3 valve closed
9/24/2011	8:46:04 PM	SiCl4 pre valve closed
9/24/2011	8:46:04 PM	SiCl4 post valve closed
9/24/2011	8:46:05 PM	Bypass valve closed
9/24/2011	8:46:05 PM	Main Vac valve closed
9/24/2011	8:46:05 PM	Bubbler valve closed
9/24/2011	8:46:05 PM	Helium MFC set to  0.000000
9/24/2011	8:46:05 PM	H2 MFC set to  0.000000
9/24/2011	8:46:05 PM	BCl3 MFC set to  0.000000
9/24/2011	8:46:05 PM	PHl3 MFC set to  0.000000
9/24/2011	8:46:05 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:46:05 PM	Tube furnace set to 0
9/24/2011	8:50:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/24/2011	8:50:54 PM	Recipe started at 8:50 PM
9/24/2011	8:50:54 PM	Helium valve closed
9/24/2011	8:50:54 PM	H2 valve closed
9/24/2011	8:50:54 PM	BCl3 valve closed
9/24/2011	8:50:54 PM	PH3 valve closed
9/24/2011	8:50:54 PM	SiCl4 pre valve closed
9/24/2011	8:50:54 PM	SiCl4 post valve closed
9/24/2011	8:50:54 PM	Main Vac valve closed
9/24/2011	8:50:54 PM	Bypass valve closed
9/24/2011	8:50:54 PM	Bubbler valve closed
9/24/2011	8:50:54 PM	Helium MFC set to  0.000000
9/24/2011	8:50:54 PM	H2 MFC set to  0.000000
9/24/2011	8:50:54 PM	BCl3 MFC set to  0.000000
9/24/2011	8:50:54 PM	PHl3 MFC set to  0.000000
9/24/2011	8:50:54 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:50:54 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:50:54 PM	Tube furnace set to 0
9/24/2011	8:50:57 PM	H2 valve closed
9/24/2011	8:50:57 PM	BCl3 valve closed
9/24/2011	8:50:57 PM	PH3 valve closed
9/24/2011	8:50:57 PM	SiCl4 pre valve closed
9/24/2011	8:50:57 PM	SiCl4 post valve closed
9/24/2011	8:50:57 PM	Main Vac valve closed
9/24/2011	8:50:57 PM	Bypass valve closed
9/24/2011	8:50:57 PM	Bubbler valve closed
9/24/2011	8:50:57 PM	Helium valve opened
9/24/2011	8:50:57 PM	Helium MFC set to  500.000000
9/24/2011	8:50:57 PM	H2 MFC set to  0.000000
9/24/2011	8:50:57 PM	BCl3 MFC set to  0.000000
9/24/2011	8:50:57 PM	PHl3 MFC set to  0.000000
9/24/2011	8:50:57 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:50:57 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:50:57 PM	Tube furnace set to 0
9/24/2011	8:51:01 PM	Helium valve closed
9/24/2011	8:51:01 PM	H2 valve closed
9/24/2011	8:51:01 PM	BCl3 valve closed
9/24/2011	8:51:01 PM	PH3 valve closed
9/24/2011	8:51:01 PM	SiCl4 pre valve closed
9/24/2011	8:51:01 PM	SiCl4 post valve closed
9/24/2011	8:51:01 PM	Main Vac valve closed
9/24/2011	8:51:01 PM	Bypass valve closed
9/24/2011	8:51:01 PM	Bubbler valve closed
9/24/2011	8:51:01 PM	Helium MFC set to  0.000000
9/24/2011	8:51:01 PM	H2 MFC set to  0.000000
9/24/2011	8:51:01 PM	BCl3 MFC set to  0.000000
9/24/2011	8:51:01 PM	PHl3 MFC set to  0.000000
9/24/2011	8:51:01 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:51:01 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:51:01 PM	Tube furnace set to 0
9/24/2011	8:51:02 PM	Run finished at 8:51 PM
9/24/2011	8:51:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/24/2011	8:57:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/24/2011	8:57:01 PM	Recipe started at 8:57 PM
9/24/2011	8:57:01 PM	Helium valve closed
9/24/2011	8:57:01 PM	H2 valve closed
9/24/2011	8:57:01 PM	BCl3 valve closed
9/24/2011	8:57:01 PM	PH3 valve closed
9/24/2011	8:57:01 PM	SiCl4 pre valve closed
9/24/2011	8:57:01 PM	SiCl4 post valve closed
9/24/2011	8:57:01 PM	Main Vac valve closed
9/24/2011	8:57:01 PM	Bubbler valve closed
9/24/2011	8:57:01 PM	Bypass valve opened
9/24/2011	8:57:01 PM	Helium MFC set to  0.000000
9/24/2011	8:57:01 PM	H2 MFC set to  0.000000
9/24/2011	8:57:01 PM	BCl3 MFC set to  0.000000
9/24/2011	8:57:01 PM	PHl3 MFC set to  0.000000
9/24/2011	8:57:01 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:57:01 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:57:01 PM	Tube furnace set to 0
9/24/2011	8:58:06 PM	Helium valve closed
9/24/2011	8:58:06 PM	H2 valve closed
9/24/2011	8:58:06 PM	BCl3 valve closed
9/24/2011	8:58:06 PM	PH3 valve closed
9/24/2011	8:58:06 PM	SiCl4 pre valve closed
9/24/2011	8:58:06 PM	SiCl4 post valve closed
9/24/2011	8:58:06 PM	Main Vac valve closed
9/24/2011	8:58:06 PM	Bubbler valve closed
9/24/2011	8:58:06 PM	Bypass valve opened
9/24/2011	8:58:06 PM	Helium MFC set to  0.000000
9/24/2011	8:58:06 PM	H2 MFC set to  0.000000
9/24/2011	8:58:06 PM	BCl3 MFC set to  0.000000
9/24/2011	8:58:06 PM	PHl3 MFC set to  0.000000
9/24/2011	8:58:06 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:58:06 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:58:06 PM	Tube furnace set to 0
9/24/2011	8:59:06 PM	Helium valve closed
9/24/2011	8:59:06 PM	H2 valve closed
9/24/2011	8:59:06 PM	BCl3 valve closed
9/24/2011	8:59:06 PM	PH3 valve closed
9/24/2011	8:59:06 PM	SiCl4 pre valve closed
9/24/2011	8:59:06 PM	SiCl4 post valve closed
9/24/2011	8:59:06 PM	Bypass valve closed
9/24/2011	8:59:06 PM	Bubbler valve closed
9/24/2011	8:59:06 PM	Main Vac valve opened
9/24/2011	8:59:06 PM	Helium MFC set to  0.000000
9/24/2011	8:59:06 PM	H2 MFC set to  0.000000
9/24/2011	8:59:06 PM	BCl3 MFC set to  0.000000
9/24/2011	8:59:06 PM	PHl3 MFC set to  0.000000
9/24/2011	8:59:06 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:59:06 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:59:07 PM	Tube furnace set to 0
9/24/2011	8:59:08 PM	Run finished at 8:59 PM
9/24/2011	8:59:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/24/2011	8:59:53 PM	Recipe started at 8:59 PM
9/24/2011	8:59:53 PM	Helium valve closed
9/24/2011	8:59:53 PM	H2 valve closed
9/24/2011	8:59:53 PM	BCl3 valve closed
9/24/2011	8:59:53 PM	PH3 valve closed
9/24/2011	8:59:53 PM	SiCl4 pre valve closed
9/24/2011	8:59:53 PM	SiCl4 post valve closed
9/24/2011	8:59:53 PM	Main Vac valve closed
9/24/2011	8:59:53 PM	Bubbler valve closed
9/24/2011	8:59:53 PM	Bypass valve opened
9/24/2011	8:59:53 PM	Helium MFC set to  0.000000
9/24/2011	8:59:53 PM	H2 MFC set to  0.000000
9/24/2011	8:59:53 PM	BCl3 MFC set to  0.000000
9/24/2011	8:59:53 PM	PHl3 MFC set to  0.000000
9/24/2011	8:59:53 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:59:53 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:59:53 PM	Tube furnace set to 150
9/24/2011	8:59:53 PM	Helium valve closed
9/24/2011	8:59:53 PM	H2 valve closed
9/24/2011	8:59:53 PM	BCl3 valve closed
9/24/2011	8:59:53 PM	PH3 valve closed
9/24/2011	8:59:53 PM	SiCl4 pre valve closed
9/24/2011	8:59:53 PM	SiCl4 post valve closed
9/24/2011	8:59:53 PM	Main Vac valve closed
9/24/2011	8:59:53 PM	Bubbler valve closed
9/24/2011	8:59:53 PM	Bypass valve opened
9/24/2011	8:59:53 PM	Helium MFC set to  0.000000
9/24/2011	8:59:53 PM	H2 MFC set to  0.000000
9/24/2011	8:59:53 PM	BCl3 MFC set to  0.000000
9/24/2011	8:59:53 PM	PHl3 MFC set to  0.000000
9/24/2011	8:59:53 PM	SiCl4 MFC set to  0.000000
9/24/2011	8:59:53 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	8:59:53 PM	Tube furnace set to 150
9/24/2011	9:00:23 PM	Helium valve closed
9/24/2011	9:00:23 PM	H2 valve closed
9/24/2011	9:00:23 PM	BCl3 valve closed
9/24/2011	9:00:23 PM	PH3 valve closed
9/24/2011	9:00:23 PM	SiCl4 pre valve closed
9/24/2011	9:00:23 PM	SiCl4 post valve closed
9/24/2011	9:00:23 PM	Bypass valve closed
9/24/2011	9:00:23 PM	Bubbler valve closed
9/24/2011	9:00:23 PM	Main Vac valve opened
9/24/2011	9:00:23 PM	Helium MFC set to  0.000000
9/24/2011	9:00:23 PM	H2 MFC set to  0.000000
9/24/2011	9:00:23 PM	BCl3 MFC set to  0.000000
9/24/2011	9:00:23 PM	PHl3 MFC set to  0.000000
9/24/2011	9:00:23 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:00:23 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:00:23 PM	Tube furnace set to 150
9/24/2011	9:00:53 PM	H2 valve closed
9/24/2011	9:00:53 PM	BCl3 valve closed
9/24/2011	9:00:53 PM	PH3 valve closed
9/24/2011	9:00:53 PM	SiCl4 pre valve closed
9/24/2011	9:00:53 PM	SiCl4 post valve closed
9/24/2011	9:00:53 PM	Bypass valve closed
9/24/2011	9:00:53 PM	Bubbler valve closed
9/24/2011	9:00:53 PM	Helium valve opened
9/24/2011	9:00:53 PM	Main Vac valve opened
9/24/2011	9:00:53 PM	Helium MFC set to  20.000000
9/24/2011	9:00:53 PM	H2 MFC set to  0.000000
9/24/2011	9:00:53 PM	BCl3 MFC set to  0.000000
9/24/2011	9:00:53 PM	PHl3 MFC set to  0.000000
9/24/2011	9:00:53 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:00:53 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:00:54 PM	Tube furnace set to 150
9/24/2011	9:01:24 PM	Helium valve closed
9/24/2011	9:01:24 PM	H2 valve closed
9/24/2011	9:01:24 PM	BCl3 valve closed
9/24/2011	9:01:24 PM	PH3 valve closed
9/24/2011	9:01:24 PM	SiCl4 pre valve closed
9/24/2011	9:01:24 PM	SiCl4 post valve closed
9/24/2011	9:01:24 PM	Bypass valve closed
9/24/2011	9:01:24 PM	Bubbler valve closed
9/24/2011	9:01:24 PM	Main Vac valve opened
9/24/2011	9:01:24 PM	Helium MFC set to  0.000000
9/24/2011	9:01:24 PM	H2 MFC set to  0.000000
9/24/2011	9:01:24 PM	BCl3 MFC set to  0.000000
9/24/2011	9:01:24 PM	PHl3 MFC set to  0.000000
9/24/2011	9:01:24 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:01:24 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:01:24 PM	Tube furnace set to 150
9/24/2011	9:01:54 PM	H2 valve closed
9/24/2011	9:01:54 PM	BCl3 valve closed
9/24/2011	9:01:54 PM	PH3 valve closed
9/24/2011	9:01:54 PM	SiCl4 pre valve closed
9/24/2011	9:01:54 PM	SiCl4 post valve closed
9/24/2011	9:01:54 PM	Bypass valve closed
9/24/2011	9:01:54 PM	Bubbler valve closed
9/24/2011	9:01:54 PM	Helium valve opened
9/24/2011	9:01:54 PM	Main Vac valve opened
9/24/2011	9:01:54 PM	Helium MFC set to  20.000000
9/24/2011	9:01:54 PM	H2 MFC set to  0.000000
9/24/2011	9:01:54 PM	BCl3 MFC set to  0.000000
9/24/2011	9:01:54 PM	PHl3 MFC set to  0.000000
9/24/2011	9:01:54 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:01:54 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:01:54 PM	Tube furnace set to 150
9/24/2011	9:02:24 PM	Helium valve closed
9/24/2011	9:02:24 PM	H2 valve closed
9/24/2011	9:02:24 PM	BCl3 valve closed
9/24/2011	9:02:24 PM	PH3 valve closed
9/24/2011	9:02:24 PM	SiCl4 pre valve closed
9/24/2011	9:02:24 PM	SiCl4 post valve closed
9/24/2011	9:02:24 PM	Bypass valve closed
9/24/2011	9:02:24 PM	Bubbler valve closed
9/24/2011	9:02:24 PM	Main Vac valve opened
9/24/2011	9:02:24 PM	Helium MFC set to  0.000000
9/24/2011	9:02:24 PM	H2 MFC set to  0.000000
9/24/2011	9:02:24 PM	BCl3 MFC set to  0.000000
9/24/2011	9:02:24 PM	PHl3 MFC set to  0.000000
9/24/2011	9:02:24 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:02:24 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:02:24 PM	Tube furnace set to 150
9/24/2011	9:02:54 PM	H2 valve closed
9/24/2011	9:02:54 PM	BCl3 valve closed
9/24/2011	9:02:54 PM	PH3 valve closed
9/24/2011	9:02:54 PM	SiCl4 pre valve closed
9/24/2011	9:02:54 PM	SiCl4 post valve closed
9/24/2011	9:02:54 PM	Bypass valve closed
9/24/2011	9:02:54 PM	Bubbler valve closed
9/24/2011	9:02:54 PM	Helium valve opened
9/24/2011	9:02:54 PM	Main Vac valve opened
9/24/2011	9:02:54 PM	Helium MFC set to  20.000000
9/24/2011	9:02:54 PM	H2 MFC set to  0.000000
9/24/2011	9:02:54 PM	BCl3 MFC set to  0.000000
9/24/2011	9:02:54 PM	PHl3 MFC set to  0.000000
9/24/2011	9:02:54 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:02:54 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:02:54 PM	Tube furnace set to 150
9/24/2011	9:03:24 PM	Helium valve closed
9/24/2011	9:03:24 PM	H2 valve closed
9/24/2011	9:03:24 PM	BCl3 valve closed
9/24/2011	9:03:24 PM	PH3 valve closed
9/24/2011	9:03:24 PM	SiCl4 pre valve closed
9/24/2011	9:03:24 PM	SiCl4 post valve closed
9/24/2011	9:03:24 PM	Bypass valve closed
9/24/2011	9:03:24 PM	Bubbler valve closed
9/24/2011	9:03:24 PM	Main Vac valve opened
9/24/2011	9:03:24 PM	Helium MFC set to  0.000000
9/24/2011	9:03:24 PM	H2 MFC set to  0.000000
9/24/2011	9:03:24 PM	BCl3 MFC set to  0.000000
9/24/2011	9:03:24 PM	PHl3 MFC set to  0.000000
9/24/2011	9:03:24 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:03:24 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:03:25 PM	Tube furnace set to 150
9/24/2011	9:03:55 PM	H2 valve closed
9/24/2011	9:03:55 PM	BCl3 valve closed
9/24/2011	9:03:55 PM	PH3 valve closed
9/24/2011	9:03:55 PM	SiCl4 pre valve closed
9/24/2011	9:03:55 PM	SiCl4 post valve closed
9/24/2011	9:03:55 PM	Bypass valve closed
9/24/2011	9:03:55 PM	Bubbler valve closed
9/24/2011	9:03:55 PM	Helium valve opened
9/24/2011	9:03:55 PM	Main Vac valve opened
9/24/2011	9:03:55 PM	Helium MFC set to  20.000000
9/24/2011	9:03:55 PM	H2 MFC set to  0.000000
9/24/2011	9:03:55 PM	BCl3 MFC set to  0.000000
9/24/2011	9:03:55 PM	PHl3 MFC set to  0.000000
9/24/2011	9:03:55 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:03:55 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:03:55 PM	Tube furnace set to 150
9/24/2011	9:04:25 PM	Helium valve closed
9/24/2011	9:04:25 PM	H2 valve closed
9/24/2011	9:04:25 PM	BCl3 valve closed
9/24/2011	9:04:25 PM	PH3 valve closed
9/24/2011	9:04:25 PM	SiCl4 pre valve closed
9/24/2011	9:04:25 PM	SiCl4 post valve closed
9/24/2011	9:04:25 PM	Bypass valve closed
9/24/2011	9:04:25 PM	Bubbler valve closed
9/24/2011	9:04:25 PM	Main Vac valve opened
9/24/2011	9:04:25 PM	Helium MFC set to  0.000000
9/24/2011	9:04:25 PM	H2 MFC set to  0.000000
9/24/2011	9:04:25 PM	BCl3 MFC set to  0.000000
9/24/2011	9:04:25 PM	PHl3 MFC set to  0.000000
9/24/2011	9:04:25 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:04:25 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:04:25 PM	Tube furnace set to 150
9/24/2011	9:04:55 PM	H2 valve closed
9/24/2011	9:04:55 PM	BCl3 valve closed
9/24/2011	9:04:55 PM	PH3 valve closed
9/24/2011	9:04:55 PM	SiCl4 pre valve closed
9/24/2011	9:04:55 PM	SiCl4 post valve closed
9/24/2011	9:04:55 PM	Bypass valve closed
9/24/2011	9:04:55 PM	Bubbler valve closed
9/24/2011	9:04:55 PM	Helium valve opened
9/24/2011	9:04:55 PM	Main Vac valve opened
9/24/2011	9:04:55 PM	Helium MFC set to  20.000000
9/24/2011	9:04:55 PM	H2 MFC set to  0.000000
9/24/2011	9:04:55 PM	BCl3 MFC set to  0.000000
9/24/2011	9:04:55 PM	PHl3 MFC set to  0.000000
9/24/2011	9:04:55 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:04:55 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:04:55 PM	Tube furnace set to 150
9/24/2011	9:05:25 PM	Helium valve closed
9/24/2011	9:05:25 PM	H2 valve closed
9/24/2011	9:05:25 PM	BCl3 valve closed
9/24/2011	9:05:25 PM	PH3 valve closed
9/24/2011	9:05:25 PM	SiCl4 pre valve closed
9/24/2011	9:05:25 PM	SiCl4 post valve closed
9/24/2011	9:05:25 PM	Bypass valve closed
9/24/2011	9:05:25 PM	Bubbler valve closed
9/24/2011	9:05:25 PM	Main Vac valve opened
9/24/2011	9:05:25 PM	Helium MFC set to  0.000000
9/24/2011	9:05:25 PM	H2 MFC set to  0.000000
9/24/2011	9:05:25 PM	BCl3 MFC set to  0.000000
9/24/2011	9:05:25 PM	PHl3 MFC set to  0.000000
9/24/2011	9:05:25 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:05:25 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:05:25 PM	Tube furnace set to 150
9/24/2011	9:05:55 PM	H2 valve closed
9/24/2011	9:05:55 PM	BCl3 valve closed
9/24/2011	9:05:55 PM	PH3 valve closed
9/24/2011	9:05:55 PM	SiCl4 pre valve closed
9/24/2011	9:05:55 PM	SiCl4 post valve closed
9/24/2011	9:05:55 PM	Bypass valve closed
9/24/2011	9:05:55 PM	Bubbler valve closed
9/24/2011	9:05:55 PM	Helium valve opened
9/24/2011	9:05:55 PM	Main Vac valve opened
9/24/2011	9:05:55 PM	Helium MFC set to  20.000000
9/24/2011	9:05:55 PM	H2 MFC set to  0.000000
9/24/2011	9:05:55 PM	BCl3 MFC set to  0.000000
9/24/2011	9:05:55 PM	PHl3 MFC set to  0.000000
9/24/2011	9:05:55 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:05:55 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:05:56 PM	Tube furnace set to 150
9/24/2011	9:06:26 PM	Helium valve closed
9/24/2011	9:06:26 PM	H2 valve closed
9/24/2011	9:06:26 PM	BCl3 valve closed
9/24/2011	9:06:26 PM	PH3 valve closed
9/24/2011	9:06:26 PM	SiCl4 pre valve closed
9/24/2011	9:06:26 PM	SiCl4 post valve closed
9/24/2011	9:06:26 PM	Bypass valve closed
9/24/2011	9:06:26 PM	Bubbler valve closed
9/24/2011	9:06:26 PM	Main Vac valve opened
9/24/2011	9:06:26 PM	Helium MFC set to  0.000000
9/24/2011	9:06:26 PM	H2 MFC set to  0.000000
9/24/2011	9:06:26 PM	BCl3 MFC set to  0.000000
9/24/2011	9:06:26 PM	PHl3 MFC set to  0.000000
9/24/2011	9:06:26 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:06:26 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:06:26 PM	Tube furnace set to 150
9/24/2011	9:06:56 PM	H2 valve closed
9/24/2011	9:06:56 PM	BCl3 valve closed
9/24/2011	9:06:56 PM	PH3 valve closed
9/24/2011	9:06:56 PM	SiCl4 pre valve closed
9/24/2011	9:06:56 PM	SiCl4 post valve closed
9/24/2011	9:06:56 PM	Bypass valve closed
9/24/2011	9:06:56 PM	Bubbler valve closed
9/24/2011	9:06:56 PM	Helium valve opened
9/24/2011	9:06:56 PM	Main Vac valve opened
9/24/2011	9:06:56 PM	Helium MFC set to  20.000000
9/24/2011	9:06:56 PM	H2 MFC set to  0.000000
9/24/2011	9:06:56 PM	BCl3 MFC set to  0.000000
9/24/2011	9:06:56 PM	PHl3 MFC set to  0.000000
9/24/2011	9:06:56 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:06:56 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:06:56 PM	Tube furnace set to 150
9/24/2011	9:07:26 PM	Helium valve closed
9/24/2011	9:07:26 PM	H2 valve closed
9/24/2011	9:07:26 PM	BCl3 valve closed
9/24/2011	9:07:26 PM	PH3 valve closed
9/24/2011	9:07:26 PM	SiCl4 pre valve closed
9/24/2011	9:07:26 PM	SiCl4 post valve closed
9/24/2011	9:07:26 PM	Bypass valve closed
9/24/2011	9:07:26 PM	Bubbler valve closed
9/24/2011	9:07:26 PM	Main Vac valve opened
9/24/2011	9:07:26 PM	Helium MFC set to  0.000000
9/24/2011	9:07:26 PM	H2 MFC set to  0.000000
9/24/2011	9:07:26 PM	BCl3 MFC set to  0.000000
9/24/2011	9:07:26 PM	PHl3 MFC set to  0.000000
9/24/2011	9:07:26 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:07:26 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:07:26 PM	Tube furnace set to 150
9/24/2011	9:07:56 PM	H2 valve closed
9/24/2011	9:07:56 PM	BCl3 valve closed
9/24/2011	9:07:56 PM	PH3 valve closed
9/24/2011	9:07:56 PM	SiCl4 pre valve closed
9/24/2011	9:07:56 PM	SiCl4 post valve closed
9/24/2011	9:07:56 PM	Bypass valve closed
9/24/2011	9:07:56 PM	Bubbler valve closed
9/24/2011	9:07:56 PM	Helium valve opened
9/24/2011	9:07:56 PM	Main Vac valve opened
9/24/2011	9:07:56 PM	Helium MFC set to  20.000000
9/24/2011	9:07:56 PM	H2 MFC set to  0.000000
9/24/2011	9:07:56 PM	BCl3 MFC set to  0.000000
9/24/2011	9:07:56 PM	PHl3 MFC set to  0.000000
9/24/2011	9:07:56 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:07:56 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:07:57 PM	Tube furnace set to 150
9/24/2011	9:08:27 PM	Helium valve closed
9/24/2011	9:08:27 PM	H2 valve closed
9/24/2011	9:08:27 PM	BCl3 valve closed
9/24/2011	9:08:27 PM	PH3 valve closed
9/24/2011	9:08:27 PM	SiCl4 pre valve closed
9/24/2011	9:08:27 PM	SiCl4 post valve closed
9/24/2011	9:08:27 PM	Bypass valve closed
9/24/2011	9:08:27 PM	Bubbler valve closed
9/24/2011	9:08:27 PM	Main Vac valve opened
9/24/2011	9:08:27 PM	Helium MFC set to  0.000000
9/24/2011	9:08:27 PM	H2 MFC set to  0.000000
9/24/2011	9:08:27 PM	BCl3 MFC set to  0.000000
9/24/2011	9:08:27 PM	PHl3 MFC set to  0.000000
9/24/2011	9:08:27 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:08:27 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:08:27 PM	Tube furnace set to 150
9/24/2011	9:08:57 PM	H2 valve closed
9/24/2011	9:08:57 PM	BCl3 valve closed
9/24/2011	9:08:57 PM	PH3 valve closed
9/24/2011	9:08:57 PM	SiCl4 pre valve closed
9/24/2011	9:08:57 PM	SiCl4 post valve closed
9/24/2011	9:08:57 PM	Bypass valve closed
9/24/2011	9:08:57 PM	Bubbler valve closed
9/24/2011	9:08:57 PM	Helium valve opened
9/24/2011	9:08:57 PM	Main Vac valve opened
9/24/2011	9:08:57 PM	Helium MFC set to  20.000000
9/24/2011	9:08:57 PM	H2 MFC set to  0.000000
9/24/2011	9:08:57 PM	BCl3 MFC set to  0.000000
9/24/2011	9:08:57 PM	PHl3 MFC set to  0.000000
9/24/2011	9:08:57 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:08:57 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:08:57 PM	Tube furnace set to 150
9/24/2011	9:09:27 PM	Helium valve closed
9/24/2011	9:09:27 PM	H2 valve closed
9/24/2011	9:09:27 PM	BCl3 valve closed
9/24/2011	9:09:27 PM	PH3 valve closed
9/24/2011	9:09:27 PM	SiCl4 pre valve closed
9/24/2011	9:09:27 PM	SiCl4 post valve closed
9/24/2011	9:09:27 PM	Bypass valve closed
9/24/2011	9:09:27 PM	Bubbler valve closed
9/24/2011	9:09:27 PM	Main Vac valve opened
9/24/2011	9:09:27 PM	Helium MFC set to  0.000000
9/24/2011	9:09:27 PM	H2 MFC set to  0.000000
9/24/2011	9:09:27 PM	BCl3 MFC set to  0.000000
9/24/2011	9:09:27 PM	PHl3 MFC set to  0.000000
9/24/2011	9:09:27 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:09:27 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:09:27 PM	Tube furnace set to 150
9/24/2011	9:09:57 PM	H2 valve closed
9/24/2011	9:09:57 PM	BCl3 valve closed
9/24/2011	9:09:57 PM	PH3 valve closed
9/24/2011	9:09:57 PM	SiCl4 pre valve closed
9/24/2011	9:09:57 PM	SiCl4 post valve closed
9/24/2011	9:09:57 PM	Bypass valve closed
9/24/2011	9:09:57 PM	Bubbler valve closed
9/24/2011	9:09:57 PM	Helium valve opened
9/24/2011	9:09:57 PM	Main Vac valve opened
9/24/2011	9:09:57 PM	Helium MFC set to  20.000000
9/24/2011	9:09:57 PM	H2 MFC set to  0.000000
9/24/2011	9:09:57 PM	BCl3 MFC set to  0.000000
9/24/2011	9:09:57 PM	PHl3 MFC set to  0.000000
9/24/2011	9:09:57 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:09:57 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:09:57 PM	Tube furnace set to 150
9/24/2011	9:10:27 PM	Helium valve closed
9/24/2011	9:10:27 PM	H2 valve closed
9/24/2011	9:10:27 PM	BCl3 valve closed
9/24/2011	9:10:27 PM	PH3 valve closed
9/24/2011	9:10:27 PM	SiCl4 pre valve closed
9/24/2011	9:10:27 PM	SiCl4 post valve closed
9/24/2011	9:10:27 PM	Bypass valve closed
9/24/2011	9:10:27 PM	Bubbler valve closed
9/24/2011	9:10:27 PM	Main Vac valve opened
9/24/2011	9:10:27 PM	Helium MFC set to  0.000000
9/24/2011	9:10:27 PM	H2 MFC set to  0.000000
9/24/2011	9:10:27 PM	BCl3 MFC set to  0.000000
9/24/2011	9:10:27 PM	PHl3 MFC set to  0.000000
9/24/2011	9:10:27 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:10:27 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:10:28 PM	Tube furnace set to 150
9/24/2011	9:10:58 PM	H2 valve closed
9/24/2011	9:10:58 PM	BCl3 valve closed
9/24/2011	9:10:58 PM	PH3 valve closed
9/24/2011	9:10:58 PM	SiCl4 pre valve closed
9/24/2011	9:10:58 PM	SiCl4 post valve closed
9/24/2011	9:10:58 PM	Bypass valve closed
9/24/2011	9:10:58 PM	Bubbler valve closed
9/24/2011	9:10:58 PM	Helium valve opened
9/24/2011	9:10:58 PM	Main Vac valve opened
9/24/2011	9:10:58 PM	Helium MFC set to  20.000000
9/24/2011	9:10:58 PM	H2 MFC set to  0.000000
9/24/2011	9:10:58 PM	BCl3 MFC set to  0.000000
9/24/2011	9:10:58 PM	PHl3 MFC set to  0.000000
9/24/2011	9:10:58 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:10:58 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:10:58 PM	Tube furnace set to 150
9/24/2011	9:11:28 PM	Helium valve closed
9/24/2011	9:11:28 PM	H2 valve closed
9/24/2011	9:11:28 PM	BCl3 valve closed
9/24/2011	9:11:28 PM	PH3 valve closed
9/24/2011	9:11:28 PM	SiCl4 pre valve closed
9/24/2011	9:11:28 PM	SiCl4 post valve closed
9/24/2011	9:11:28 PM	Bypass valve closed
9/24/2011	9:11:28 PM	Bubbler valve closed
9/24/2011	9:11:28 PM	Main Vac valve opened
9/24/2011	9:11:28 PM	Helium MFC set to  0.000000
9/24/2011	9:11:28 PM	H2 MFC set to  0.000000
9/24/2011	9:11:28 PM	BCl3 MFC set to  0.000000
9/24/2011	9:11:28 PM	PHl3 MFC set to  0.000000
9/24/2011	9:11:28 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:11:28 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:11:28 PM	Tube furnace set to 150
9/24/2011	9:11:58 PM	H2 valve closed
9/24/2011	9:11:58 PM	BCl3 valve closed
9/24/2011	9:11:58 PM	PH3 valve closed
9/24/2011	9:11:58 PM	SiCl4 pre valve closed
9/24/2011	9:11:58 PM	SiCl4 post valve closed
9/24/2011	9:11:58 PM	Bypass valve closed
9/24/2011	9:11:58 PM	Bubbler valve closed
9/24/2011	9:11:58 PM	Helium valve opened
9/24/2011	9:11:58 PM	Main Vac valve opened
9/24/2011	9:11:58 PM	Helium MFC set to  20.000000
9/24/2011	9:11:58 PM	H2 MFC set to  0.000000
9/24/2011	9:11:58 PM	BCl3 MFC set to  0.000000
9/24/2011	9:11:58 PM	PHl3 MFC set to  0.000000
9/24/2011	9:11:58 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:11:58 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:11:58 PM	Tube furnace set to 150
9/24/2011	9:12:28 PM	Helium valve closed
9/24/2011	9:12:28 PM	H2 valve closed
9/24/2011	9:12:28 PM	BCl3 valve closed
9/24/2011	9:12:28 PM	PH3 valve closed
9/24/2011	9:12:28 PM	SiCl4 pre valve closed
9/24/2011	9:12:28 PM	SiCl4 post valve closed
9/24/2011	9:12:28 PM	Bypass valve closed
9/24/2011	9:12:28 PM	Bubbler valve closed
9/24/2011	9:12:28 PM	Main Vac valve opened
9/24/2011	9:12:28 PM	Helium MFC set to  0.000000
9/24/2011	9:12:28 PM	H2 MFC set to  0.000000
9/24/2011	9:12:28 PM	BCl3 MFC set to  0.000000
9/24/2011	9:12:28 PM	PHl3 MFC set to  0.000000
9/24/2011	9:12:28 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:12:28 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:12:28 PM	Tube furnace set to 150
9/24/2011	9:12:58 PM	H2 valve closed
9/24/2011	9:12:58 PM	BCl3 valve closed
9/24/2011	9:12:58 PM	PH3 valve closed
9/24/2011	9:12:58 PM	SiCl4 pre valve closed
9/24/2011	9:12:58 PM	SiCl4 post valve closed
9/24/2011	9:12:58 PM	Bypass valve closed
9/24/2011	9:12:58 PM	Bubbler valve closed
9/24/2011	9:12:58 PM	Helium valve opened
9/24/2011	9:12:58 PM	Main Vac valve opened
9/24/2011	9:12:58 PM	Helium MFC set to  20.000000
9/24/2011	9:12:59 PM	H2 MFC set to  0.000000
9/24/2011	9:12:59 PM	BCl3 MFC set to  0.000000
9/24/2011	9:12:59 PM	PHl3 MFC set to  0.000000
9/24/2011	9:12:59 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:12:59 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:12:59 PM	Tube furnace set to 150
9/24/2011	9:13:29 PM	Helium valve closed
9/24/2011	9:13:29 PM	H2 valve closed
9/24/2011	9:13:29 PM	BCl3 valve closed
9/24/2011	9:13:29 PM	PH3 valve closed
9/24/2011	9:13:29 PM	SiCl4 pre valve closed
9/24/2011	9:13:29 PM	SiCl4 post valve closed
9/24/2011	9:13:29 PM	Bypass valve closed
9/24/2011	9:13:29 PM	Bubbler valve closed
9/24/2011	9:13:29 PM	Main Vac valve opened
9/24/2011	9:13:29 PM	Helium MFC set to  0.000000
9/24/2011	9:13:29 PM	H2 MFC set to  0.000000
9/24/2011	9:13:29 PM	BCl3 MFC set to  0.000000
9/24/2011	9:13:29 PM	PHl3 MFC set to  0.000000
9/24/2011	9:13:29 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:13:29 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:13:29 PM	Tube furnace set to 150
9/24/2011	9:13:59 PM	H2 valve closed
9/24/2011	9:13:59 PM	BCl3 valve closed
9/24/2011	9:13:59 PM	PH3 valve closed
9/24/2011	9:13:59 PM	SiCl4 pre valve closed
9/24/2011	9:13:59 PM	SiCl4 post valve closed
9/24/2011	9:13:59 PM	Bypass valve closed
9/24/2011	9:13:59 PM	Bubbler valve closed
9/24/2011	9:13:59 PM	Helium valve opened
9/24/2011	9:13:59 PM	Main Vac valve opened
9/24/2011	9:13:59 PM	Helium MFC set to  20.000000
9/24/2011	9:13:59 PM	H2 MFC set to  0.000000
9/24/2011	9:13:59 PM	BCl3 MFC set to  0.000000
9/24/2011	9:13:59 PM	PHl3 MFC set to  0.000000
9/24/2011	9:13:59 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:13:59 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:13:59 PM	Tube furnace set to 150
9/24/2011	9:14:29 PM	Helium valve closed
9/24/2011	9:14:29 PM	H2 valve closed
9/24/2011	9:14:29 PM	BCl3 valve closed
9/24/2011	9:14:29 PM	PH3 valve closed
9/24/2011	9:14:29 PM	SiCl4 pre valve closed
9/24/2011	9:14:29 PM	SiCl4 post valve closed
9/24/2011	9:14:29 PM	Bypass valve closed
9/24/2011	9:14:29 PM	Bubbler valve closed
9/24/2011	9:14:29 PM	Main Vac valve opened
9/24/2011	9:14:29 PM	Helium MFC set to  0.000000
9/24/2011	9:14:29 PM	H2 MFC set to  0.000000
9/24/2011	9:14:29 PM	BCl3 MFC set to  0.000000
9/24/2011	9:14:29 PM	PHl3 MFC set to  0.000000
9/24/2011	9:14:29 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:14:29 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:14:29 PM	Tube furnace set to 150
9/24/2011	9:14:59 PM	H2 valve closed
9/24/2011	9:14:59 PM	BCl3 valve closed
9/24/2011	9:14:59 PM	PH3 valve closed
9/24/2011	9:14:59 PM	SiCl4 pre valve closed
9/24/2011	9:14:59 PM	SiCl4 post valve closed
9/24/2011	9:14:59 PM	Bypass valve closed
9/24/2011	9:14:59 PM	Bubbler valve closed
9/24/2011	9:14:59 PM	Helium valve opened
9/24/2011	9:14:59 PM	Main Vac valve opened
9/24/2011	9:14:59 PM	Helium MFC set to  20.000000
9/24/2011	9:14:59 PM	H2 MFC set to  0.000000
9/24/2011	9:14:59 PM	BCl3 MFC set to  0.000000
9/24/2011	9:14:59 PM	PHl3 MFC set to  0.000000
9/24/2011	9:14:59 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:14:59 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:15:00 PM	Tube furnace set to 150
9/24/2011	9:15:30 PM	Helium valve closed
9/24/2011	9:15:30 PM	H2 valve closed
9/24/2011	9:15:30 PM	BCl3 valve closed
9/24/2011	9:15:30 PM	PH3 valve closed
9/24/2011	9:15:30 PM	SiCl4 pre valve closed
9/24/2011	9:15:30 PM	SiCl4 post valve closed
9/24/2011	9:15:30 PM	Bypass valve closed
9/24/2011	9:15:30 PM	Bubbler valve closed
9/24/2011	9:15:30 PM	Main Vac valve opened
9/24/2011	9:15:30 PM	Helium MFC set to  0.000000
9/24/2011	9:15:30 PM	H2 MFC set to  0.000000
9/24/2011	9:15:30 PM	BCl3 MFC set to  0.000000
9/24/2011	9:15:30 PM	PHl3 MFC set to  0.000000
9/24/2011	9:15:30 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:15:30 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:15:30 PM	Tube furnace set to 150
9/24/2011	9:16:00 PM	H2 valve closed
9/24/2011	9:16:00 PM	BCl3 valve closed
9/24/2011	9:16:00 PM	PH3 valve closed
9/24/2011	9:16:00 PM	SiCl4 pre valve closed
9/24/2011	9:16:00 PM	SiCl4 post valve closed
9/24/2011	9:16:00 PM	Bypass valve closed
9/24/2011	9:16:00 PM	Bubbler valve closed
9/24/2011	9:16:00 PM	Helium valve opened
9/24/2011	9:16:00 PM	Main Vac valve opened
9/24/2011	9:16:00 PM	Helium MFC set to  20.000000
9/24/2011	9:16:00 PM	H2 MFC set to  0.000000
9/24/2011	9:16:00 PM	BCl3 MFC set to  0.000000
9/24/2011	9:16:00 PM	PHl3 MFC set to  0.000000
9/24/2011	9:16:00 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:16:00 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:16:00 PM	Tube furnace set to 150
9/24/2011	9:16:30 PM	Helium valve closed
9/24/2011	9:16:30 PM	H2 valve closed
9/24/2011	9:16:30 PM	BCl3 valve closed
9/24/2011	9:16:30 PM	PH3 valve closed
9/24/2011	9:16:30 PM	SiCl4 pre valve closed
9/24/2011	9:16:30 PM	SiCl4 post valve closed
9/24/2011	9:16:30 PM	Bypass valve closed
9/24/2011	9:16:30 PM	Bubbler valve closed
9/24/2011	9:16:30 PM	Main Vac valve opened
9/24/2011	9:16:30 PM	Helium MFC set to  0.000000
9/24/2011	9:16:30 PM	H2 MFC set to  0.000000
9/24/2011	9:16:30 PM	BCl3 MFC set to  0.000000
9/24/2011	9:16:30 PM	PHl3 MFC set to  0.000000
9/24/2011	9:16:30 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:16:30 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:16:30 PM	Tube furnace set to 150
9/24/2011	9:17:00 PM	H2 valve closed
9/24/2011	9:17:00 PM	BCl3 valve closed
9/24/2011	9:17:00 PM	PH3 valve closed
9/24/2011	9:17:00 PM	SiCl4 pre valve closed
9/24/2011	9:17:00 PM	SiCl4 post valve closed
9/24/2011	9:17:00 PM	Bypass valve closed
9/24/2011	9:17:00 PM	Bubbler valve closed
9/24/2011	9:17:00 PM	Helium valve opened
9/24/2011	9:17:00 PM	Main Vac valve opened
9/24/2011	9:17:00 PM	Helium MFC set to  20.000000
9/24/2011	9:17:00 PM	H2 MFC set to  0.000000
9/24/2011	9:17:00 PM	BCl3 MFC set to  0.000000
9/24/2011	9:17:00 PM	PHl3 MFC set to  0.000000
9/24/2011	9:17:00 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:17:00 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:17:00 PM	Tube furnace set to 150
9/24/2011	9:17:30 PM	Helium valve closed
9/24/2011	9:17:30 PM	H2 valve closed
9/24/2011	9:17:30 PM	BCl3 valve closed
9/24/2011	9:17:30 PM	PH3 valve closed
9/24/2011	9:17:30 PM	SiCl4 pre valve closed
9/24/2011	9:17:30 PM	SiCl4 post valve closed
9/24/2011	9:17:30 PM	Bypass valve closed
9/24/2011	9:17:30 PM	Bubbler valve closed
9/24/2011	9:17:30 PM	Main Vac valve opened
9/24/2011	9:17:30 PM	Helium MFC set to  0.000000
9/24/2011	9:17:30 PM	H2 MFC set to  0.000000
9/24/2011	9:17:30 PM	BCl3 MFC set to  0.000000
9/24/2011	9:17:30 PM	PHl3 MFC set to  0.000000
9/24/2011	9:17:30 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:17:30 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:17:31 PM	Tube furnace set to 150
9/24/2011	9:18:01 PM	H2 valve closed
9/24/2011	9:18:01 PM	BCl3 valve closed
9/24/2011	9:18:01 PM	PH3 valve closed
9/24/2011	9:18:01 PM	SiCl4 pre valve closed
9/24/2011	9:18:01 PM	SiCl4 post valve closed
9/24/2011	9:18:01 PM	Bypass valve closed
9/24/2011	9:18:01 PM	Bubbler valve closed
9/24/2011	9:18:01 PM	Helium valve opened
9/24/2011	9:18:01 PM	Main Vac valve opened
9/24/2011	9:18:01 PM	Helium MFC set to  20.000000
9/24/2011	9:18:01 PM	H2 MFC set to  0.000000
9/24/2011	9:18:01 PM	BCl3 MFC set to  0.000000
9/24/2011	9:18:01 PM	PHl3 MFC set to  0.000000
9/24/2011	9:18:01 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:18:01 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:18:01 PM	Tube furnace set to 150
9/24/2011	9:18:31 PM	Helium valve closed
9/24/2011	9:18:31 PM	H2 valve closed
9/24/2011	9:18:31 PM	BCl3 valve closed
9/24/2011	9:18:31 PM	PH3 valve closed
9/24/2011	9:18:31 PM	SiCl4 pre valve closed
9/24/2011	9:18:31 PM	SiCl4 post valve closed
9/24/2011	9:18:31 PM	Bypass valve closed
9/24/2011	9:18:31 PM	Bubbler valve closed
9/24/2011	9:18:31 PM	Main Vac valve opened
9/24/2011	9:18:31 PM	Helium MFC set to  0.000000
9/24/2011	9:18:31 PM	H2 MFC set to  0.000000
9/24/2011	9:18:31 PM	BCl3 MFC set to  0.000000
9/24/2011	9:18:31 PM	PHl3 MFC set to  0.000000
9/24/2011	9:18:31 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:18:31 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:18:31 PM	Tube furnace set to 150
9/24/2011	9:19:01 PM	H2 valve closed
9/24/2011	9:19:01 PM	BCl3 valve closed
9/24/2011	9:19:01 PM	PH3 valve closed
9/24/2011	9:19:01 PM	SiCl4 pre valve closed
9/24/2011	9:19:01 PM	SiCl4 post valve closed
9/24/2011	9:19:01 PM	Bypass valve closed
9/24/2011	9:19:01 PM	Bubbler valve closed
9/24/2011	9:19:01 PM	Helium valve opened
9/24/2011	9:19:01 PM	Main Vac valve opened
9/24/2011	9:19:01 PM	Helium MFC set to  20.000000
9/24/2011	9:19:01 PM	H2 MFC set to  0.000000
9/24/2011	9:19:01 PM	BCl3 MFC set to  0.000000
9/24/2011	9:19:01 PM	PHl3 MFC set to  0.000000
9/24/2011	9:19:01 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:19:01 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:19:01 PM	Tube furnace set to 150
9/24/2011	9:19:31 PM	Helium valve closed
9/24/2011	9:19:31 PM	H2 valve closed
9/24/2011	9:19:31 PM	BCl3 valve closed
9/24/2011	9:19:31 PM	PH3 valve closed
9/24/2011	9:19:31 PM	SiCl4 pre valve closed
9/24/2011	9:19:31 PM	SiCl4 post valve closed
9/24/2011	9:19:31 PM	Bypass valve closed
9/24/2011	9:19:31 PM	Bubbler valve closed
9/24/2011	9:19:31 PM	Main Vac valve opened
9/24/2011	9:19:31 PM	Helium MFC set to  0.000000
9/24/2011	9:19:31 PM	H2 MFC set to  0.000000
9/24/2011	9:19:31 PM	BCl3 MFC set to  0.000000
9/24/2011	9:19:31 PM	PHl3 MFC set to  0.000000
9/24/2011	9:19:31 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:19:31 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:19:31 PM	Tube furnace set to 150
9/24/2011	9:20:02 PM	H2 valve closed
9/24/2011	9:20:02 PM	BCl3 valve closed
9/24/2011	9:20:02 PM	PH3 valve closed
9/24/2011	9:20:02 PM	SiCl4 pre valve closed
9/24/2011	9:20:02 PM	SiCl4 post valve closed
9/24/2011	9:20:02 PM	Bypass valve closed
9/24/2011	9:20:02 PM	Bubbler valve closed
9/24/2011	9:20:02 PM	Helium valve opened
9/24/2011	9:20:02 PM	Main Vac valve opened
9/24/2011	9:20:02 PM	Helium MFC set to  20.000000
9/24/2011	9:20:02 PM	H2 MFC set to  0.000000
9/24/2011	9:20:02 PM	BCl3 MFC set to  0.000000
9/24/2011	9:20:02 PM	PHl3 MFC set to  0.000000
9/24/2011	9:20:02 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:20:02 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:20:02 PM	Tube furnace set to 150
9/24/2011	9:20:32 PM	Helium valve closed
9/24/2011	9:20:32 PM	H2 valve closed
9/24/2011	9:20:32 PM	BCl3 valve closed
9/24/2011	9:20:32 PM	PH3 valve closed
9/24/2011	9:20:32 PM	SiCl4 pre valve closed
9/24/2011	9:20:32 PM	SiCl4 post valve closed
9/24/2011	9:20:32 PM	Bypass valve closed
9/24/2011	9:20:32 PM	Bubbler valve closed
9/24/2011	9:20:32 PM	Main Vac valve opened
9/24/2011	9:20:32 PM	Helium MFC set to  0.000000
9/24/2011	9:20:32 PM	H2 MFC set to  0.000000
9/24/2011	9:20:32 PM	BCl3 MFC set to  0.000000
9/24/2011	9:20:32 PM	PHl3 MFC set to  0.000000
9/24/2011	9:20:32 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:20:32 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:20:32 PM	Tube furnace set to 150
9/24/2011	9:20:37 PM	Run finished at 9:20 PM
9/24/2011	9:25:47 PM	Main Vac valve closed
9/24/2011	9:25:56 PM	Main Vac valve opened
9/24/2011	9:26:29 PM	Recipe started at 9:26 PM
9/24/2011	9:26:29 PM	Helium valve closed
9/24/2011	9:26:29 PM	H2 valve closed
9/24/2011	9:26:29 PM	BCl3 valve closed
9/24/2011	9:26:29 PM	PH3 valve closed
9/24/2011	9:26:29 PM	SiCl4 pre valve closed
9/24/2011	9:26:29 PM	SiCl4 post valve closed
9/24/2011	9:26:29 PM	Main Vac valve closed
9/24/2011	9:26:29 PM	Bypass valve closed
9/24/2011	9:26:29 PM	Bubbler valve closed
9/24/2011	9:26:29 PM	Helium MFC set to  0.000000
9/24/2011	9:26:29 PM	H2 MFC set to  0.000000
9/24/2011	9:26:29 PM	BCl3 MFC set to  0.000000
9/24/2011	9:26:29 PM	PHl3 MFC set to  0.000000
9/24/2011	9:26:29 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:26:29 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:26:29 PM	Tube furnace set to 0
9/24/2011	9:26:32 PM	Helium valve closed
9/24/2011	9:26:32 PM	BCl3 valve closed
9/24/2011	9:26:32 PM	PH3 valve closed
9/24/2011	9:26:32 PM	SiCl4 pre valve closed
9/24/2011	9:26:32 PM	SiCl4 post valve closed
9/24/2011	9:26:32 PM	Main Vac valve closed
9/24/2011	9:26:32 PM	Bypass valve closed
9/24/2011	9:26:32 PM	Bubbler valve closed
9/24/2011	9:26:32 PM	H2 valve opened
9/24/2011	9:26:32 PM	Helium MFC set to  0.000000
9/24/2011	9:26:32 PM	H2 MFC set to  500.000000
9/24/2011	9:26:32 PM	BCl3 MFC set to  0.000000
9/24/2011	9:26:32 PM	PHl3 MFC set to  0.000000
9/24/2011	9:26:32 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:26:32 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:26:32 PM	Tube furnace set to 0
9/24/2011	9:27:35 PM	Helium valve closed
9/24/2011	9:27:35 PM	BCl3 valve closed
9/24/2011	9:27:35 PM	PH3 valve closed
9/24/2011	9:27:35 PM	SiCl4 pre valve closed
9/24/2011	9:27:35 PM	SiCl4 post valve closed
9/24/2011	9:27:35 PM	Main Vac valve closed
9/24/2011	9:27:35 PM	Bypass valve closed
9/24/2011	9:27:35 PM	H2 valve opened
9/24/2011	9:27:35 PM	Bubbler valve opened
9/24/2011	9:27:35 PM	Helium MFC set to  0.000000
9/24/2011	9:27:35 PM	H2 MFC set to  500.000000
9/24/2011	9:27:35 PM	BCl3 MFC set to  0.000000
9/24/2011	9:27:35 PM	PHl3 MFC set to  0.000000
9/24/2011	9:27:35 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:27:35 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:27:35 PM	Tube furnace set to 0
9/24/2011	9:27:36 PM	Helium valve closed
9/24/2011	9:27:36 PM	BCl3 valve closed
9/24/2011	9:27:36 PM	PH3 valve closed
9/24/2011	9:27:36 PM	SiCl4 pre valve closed
9/24/2011	9:27:36 PM	SiCl4 post valve closed
9/24/2011	9:27:36 PM	Main Vac valve closed
9/24/2011	9:27:36 PM	Bypass valve closed
9/24/2011	9:27:37 PM	H2 valve opened
9/24/2011	9:27:37 PM	Bubbler valve opened
9/24/2011	9:27:37 PM	Helium MFC set to  0.000000
9/24/2011	9:27:37 PM	H2 MFC set to  500.000000
9/24/2011	9:27:37 PM	BCl3 MFC set to  0.000000
9/24/2011	9:27:37 PM	PHl3 MFC set to  0.000000
9/24/2011	9:27:37 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:27:37 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:27:37 PM	Tube furnace set to 1000
9/24/2011	9:57:37 PM	Helium valve closed
9/24/2011	9:57:37 PM	BCl3 valve closed
9/24/2011	9:57:37 PM	PH3 valve closed
9/24/2011	9:57:37 PM	SiCl4 pre valve closed
9/24/2011	9:57:37 PM	SiCl4 post valve closed
9/24/2011	9:57:37 PM	Main Vac valve closed
9/24/2011	9:57:37 PM	Bypass valve closed
9/24/2011	9:57:37 PM	H2 valve opened
9/24/2011	9:57:37 PM	Bubbler valve opened
9/24/2011	9:57:37 PM	Helium MFC set to  0.000000
9/24/2011	9:57:37 PM	H2 MFC set to  500.000000
9/24/2011	9:57:37 PM	BCl3 MFC set to  0.000000
9/24/2011	9:57:37 PM	PHl3 MFC set to  0.000000
9/24/2011	9:57:37 PM	SiCl4 MFC set to  0.000000
9/24/2011	9:57:37 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	9:57:37 PM	Tube furnace set to 750
9/24/2011	10:02:37 PM	H2 valve closed
9/24/2011	10:02:37 PM	BCl3 valve closed
9/24/2011	10:02:37 PM	PH3 valve closed
9/24/2011	10:02:37 PM	SiCl4 pre valve closed
9/24/2011	10:02:37 PM	SiCl4 post valve closed
9/24/2011	10:02:37 PM	Main Vac valve closed
9/24/2011	10:02:37 PM	Bypass valve closed
9/24/2011	10:02:37 PM	Helium valve opened
9/24/2011	10:02:37 PM	Bubbler valve opened
9/24/2011	10:02:37 PM	Helium MFC set to  500.000000
9/24/2011	10:02:37 PM	H2 MFC set to  0.000000
9/24/2011	10:02:37 PM	BCl3 MFC set to  0.000000
9/24/2011	10:02:37 PM	PHl3 MFC set to  0.000000
9/24/2011	10:02:37 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:02:37 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:02:37 PM	Tube furnace set to 0
9/24/2011	10:19:38 PM	Run aborted at 10:19 PM
9/24/2011	10:19:38 PM	Helium valve closed
9/24/2011	10:19:38 PM	H2 valve closed
9/24/2011	10:19:38 PM	BCl3 valve closed
9/24/2011	10:19:38 PM	PH3 valve closed
9/24/2011	10:19:38 PM	SiCl4 pre valve closed
9/24/2011	10:19:38 PM	SiCl4 post valve closed
9/24/2011	10:19:38 PM	Bypass valve closed
9/24/2011	10:19:38 PM	Main Vac valve closed
9/24/2011	10:19:38 PM	Bubbler valve closed
9/24/2011	10:19:38 PM	Helium MFC set to  0.000000
9/24/2011	10:19:38 PM	H2 MFC set to  0.000000
9/24/2011	10:19:38 PM	BCl3 MFC set to  0.000000
9/24/2011	10:19:38 PM	PHl3 MFC set to  0.000000
9/24/2011	10:19:38 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:19:38 PM	Tube furnace set to 0
9/24/2011	10:19:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/24/2011	10:19:45 PM	Recipe started at 10:19 PM
9/24/2011	10:19:45 PM	Helium valve closed
9/24/2011	10:19:45 PM	H2 valve closed
9/24/2011	10:19:45 PM	BCl3 valve closed
9/24/2011	10:19:45 PM	PH3 valve closed
9/24/2011	10:19:45 PM	SiCl4 pre valve closed
9/24/2011	10:19:45 PM	SiCl4 post valve closed
9/24/2011	10:19:45 PM	Main Vac valve closed
9/24/2011	10:19:45 PM	Bypass valve closed
9/24/2011	10:19:45 PM	Bubbler valve closed
9/24/2011	10:19:45 PM	Helium MFC set to  0.000000
9/24/2011	10:19:45 PM	H2 MFC set to  0.000000
9/24/2011	10:19:45 PM	BCl3 MFC set to  0.000000
9/24/2011	10:19:45 PM	PHl3 MFC set to  0.000000
9/24/2011	10:19:45 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:19:45 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:19:45 PM	Tube furnace set to 0
9/24/2011	10:19:48 PM	H2 valve closed
9/24/2011	10:19:48 PM	BCl3 valve closed
9/24/2011	10:19:48 PM	PH3 valve closed
9/24/2011	10:19:48 PM	SiCl4 pre valve closed
9/24/2011	10:19:48 PM	SiCl4 post valve closed
9/24/2011	10:19:48 PM	Main Vac valve closed
9/24/2011	10:19:48 PM	Bypass valve closed
9/24/2011	10:19:48 PM	Bubbler valve closed
9/24/2011	10:19:48 PM	Helium valve opened
9/24/2011	10:19:48 PM	Helium MFC set to  500.000000
9/24/2011	10:19:48 PM	H2 MFC set to  0.000000
9/24/2011	10:19:48 PM	BCl3 MFC set to  0.000000
9/24/2011	10:19:48 PM	PHl3 MFC set to  0.000000
9/24/2011	10:19:48 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:19:48 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:19:48 PM	Tube furnace set to 0
9/24/2011	10:19:48 PM	Helium valve closed
9/24/2011	10:19:48 PM	H2 valve closed
9/24/2011	10:19:48 PM	BCl3 valve closed
9/24/2011	10:19:48 PM	PH3 valve closed
9/24/2011	10:19:48 PM	SiCl4 pre valve closed
9/24/2011	10:19:48 PM	SiCl4 post valve closed
9/24/2011	10:19:48 PM	Main Vac valve closed
9/24/2011	10:19:48 PM	Bypass valve closed
9/24/2011	10:19:48 PM	Bubbler valve closed
9/24/2011	10:19:48 PM	Helium MFC set to  0.000000
9/24/2011	10:19:48 PM	H2 MFC set to  0.000000
9/24/2011	10:19:48 PM	BCl3 MFC set to  0.000000
9/24/2011	10:19:48 PM	PHl3 MFC set to  0.000000
9/24/2011	10:19:48 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:19:48 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:19:48 PM	Tube furnace set to 0
9/24/2011	10:19:49 PM	Run finished at 10:19 PM
9/24/2011	10:19:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/24/2011	10:27:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/24/2011	10:27:58 PM	Recipe started at 10:27 PM
9/24/2011	10:27:58 PM	Helium valve closed
9/24/2011	10:27:58 PM	H2 valve closed
9/24/2011	10:27:58 PM	BCl3 valve closed
9/24/2011	10:27:58 PM	PH3 valve closed
9/24/2011	10:27:58 PM	SiCl4 pre valve closed
9/24/2011	10:27:58 PM	SiCl4 post valve closed
9/24/2011	10:27:58 PM	Main Vac valve closed
9/24/2011	10:27:58 PM	Bubbler valve closed
9/24/2011	10:27:58 PM	Bypass valve opened
9/24/2011	10:27:58 PM	Helium MFC set to  0.000000
9/24/2011	10:27:58 PM	H2 MFC set to  0.000000
9/24/2011	10:27:58 PM	BCl3 MFC set to  0.000000
9/24/2011	10:27:58 PM	PHl3 MFC set to  0.000000
9/24/2011	10:27:58 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:27:58 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:27:58 PM	Tube furnace set to 0
9/24/2011	10:29:11 PM	Helium valve closed
9/24/2011	10:29:11 PM	H2 valve closed
9/24/2011	10:29:11 PM	BCl3 valve closed
9/24/2011	10:29:11 PM	PH3 valve closed
9/24/2011	10:29:11 PM	SiCl4 pre valve closed
9/24/2011	10:29:11 PM	SiCl4 post valve closed
9/24/2011	10:29:11 PM	Main Vac valve closed
9/24/2011	10:29:11 PM	Bubbler valve closed
9/24/2011	10:29:11 PM	Bypass valve opened
9/24/2011	10:29:11 PM	Helium MFC set to  0.000000
9/24/2011	10:29:11 PM	H2 MFC set to  0.000000
9/24/2011	10:29:11 PM	BCl3 MFC set to  0.000000
9/24/2011	10:29:11 PM	PHl3 MFC set to  0.000000
9/24/2011	10:29:11 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:29:11 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:29:11 PM	Tube furnace set to 0
9/24/2011	10:30:11 PM	Helium valve closed
9/24/2011	10:30:11 PM	H2 valve closed
9/24/2011	10:30:11 PM	BCl3 valve closed
9/24/2011	10:30:11 PM	PH3 valve closed
9/24/2011	10:30:11 PM	SiCl4 pre valve closed
9/24/2011	10:30:11 PM	SiCl4 post valve closed
9/24/2011	10:30:11 PM	Bypass valve closed
9/24/2011	10:30:11 PM	Bubbler valve closed
9/24/2011	10:30:11 PM	Main Vac valve opened
9/24/2011	10:30:11 PM	Helium MFC set to  0.000000
9/24/2011	10:30:11 PM	H2 MFC set to  0.000000
9/24/2011	10:30:11 PM	BCl3 MFC set to  0.000000
9/24/2011	10:30:11 PM	PHl3 MFC set to  0.000000
9/24/2011	10:30:11 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:30:11 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:30:11 PM	Tube furnace set to 0
9/24/2011	10:30:12 PM	Run finished at 10:30 PM
9/24/2011	10:30:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/24/2011	10:32:08 PM	Recipe started at 10:31 PM
9/24/2011	10:32:08 PM	Helium valve closed
9/24/2011	10:32:08 PM	H2 valve closed
9/24/2011	10:32:08 PM	BCl3 valve closed
9/24/2011	10:32:08 PM	PH3 valve closed
9/24/2011	10:32:08 PM	SiCl4 pre valve closed
9/24/2011	10:32:08 PM	SiCl4 post valve closed
9/24/2011	10:32:08 PM	Main Vac valve closed
9/24/2011	10:32:08 PM	Bubbler valve closed
9/24/2011	10:32:08 PM	Bypass valve opened
9/24/2011	10:32:08 PM	Helium MFC set to  0.000000
9/24/2011	10:32:08 PM	H2 MFC set to  0.000000
9/24/2011	10:32:08 PM	BCl3 MFC set to  0.000000
9/24/2011	10:32:08 PM	PHl3 MFC set to  0.000000
9/24/2011	10:32:08 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:32:08 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:32:08 PM	Tube furnace set to 150
9/24/2011	10:32:09 PM	Helium valve closed
9/24/2011	10:32:09 PM	H2 valve closed
9/24/2011	10:32:09 PM	BCl3 valve closed
9/24/2011	10:32:09 PM	PH3 valve closed
9/24/2011	10:32:09 PM	SiCl4 pre valve closed
9/24/2011	10:32:09 PM	SiCl4 post valve closed
9/24/2011	10:32:09 PM	Main Vac valve closed
9/24/2011	10:32:09 PM	Bubbler valve closed
9/24/2011	10:32:09 PM	Bypass valve opened
9/24/2011	10:32:09 PM	Helium MFC set to  0.000000
9/24/2011	10:32:09 PM	H2 MFC set to  0.000000
9/24/2011	10:32:09 PM	BCl3 MFC set to  0.000000
9/24/2011	10:32:09 PM	PHl3 MFC set to  0.000000
9/24/2011	10:32:09 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:32:09 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:32:09 PM	Tube furnace set to 150
9/24/2011	10:32:39 PM	Helium valve closed
9/24/2011	10:32:39 PM	H2 valve closed
9/24/2011	10:32:39 PM	BCl3 valve closed
9/24/2011	10:32:39 PM	PH3 valve closed
9/24/2011	10:32:39 PM	SiCl4 pre valve closed
9/24/2011	10:32:39 PM	SiCl4 post valve closed
9/24/2011	10:32:39 PM	Bypass valve closed
9/24/2011	10:32:39 PM	Bubbler valve closed
9/24/2011	10:32:39 PM	Main Vac valve opened
9/24/2011	10:32:39 PM	Helium MFC set to  0.000000
9/24/2011	10:32:39 PM	H2 MFC set to  0.000000
9/24/2011	10:32:39 PM	BCl3 MFC set to  0.000000
9/24/2011	10:32:39 PM	PHl3 MFC set to  0.000000
9/24/2011	10:32:39 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:32:39 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:32:39 PM	Tube furnace set to 150
9/24/2011	10:33:09 PM	H2 valve closed
9/24/2011	10:33:09 PM	BCl3 valve closed
9/24/2011	10:33:09 PM	PH3 valve closed
9/24/2011	10:33:09 PM	SiCl4 pre valve closed
9/24/2011	10:33:09 PM	SiCl4 post valve closed
9/24/2011	10:33:09 PM	Bypass valve closed
9/24/2011	10:33:09 PM	Bubbler valve closed
9/24/2011	10:33:09 PM	Helium valve opened
9/24/2011	10:33:09 PM	Main Vac valve opened
9/24/2011	10:33:09 PM	Helium MFC set to  20.000000
9/24/2011	10:33:09 PM	H2 MFC set to  0.000000
9/24/2011	10:33:09 PM	BCl3 MFC set to  0.000000
9/24/2011	10:33:09 PM	PHl3 MFC set to  0.000000
9/24/2011	10:33:09 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:33:09 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:33:09 PM	Tube furnace set to 150
9/24/2011	10:33:39 PM	Helium valve closed
9/24/2011	10:33:39 PM	H2 valve closed
9/24/2011	10:33:39 PM	BCl3 valve closed
9/24/2011	10:33:39 PM	PH3 valve closed
9/24/2011	10:33:39 PM	SiCl4 pre valve closed
9/24/2011	10:33:39 PM	SiCl4 post valve closed
9/24/2011	10:33:39 PM	Bypass valve closed
9/24/2011	10:33:39 PM	Bubbler valve closed
9/24/2011	10:33:39 PM	Main Vac valve opened
9/24/2011	10:33:39 PM	Helium MFC set to  0.000000
9/24/2011	10:33:39 PM	H2 MFC set to  0.000000
9/24/2011	10:33:39 PM	BCl3 MFC set to  0.000000
9/24/2011	10:33:39 PM	PHl3 MFC set to  0.000000
9/24/2011	10:33:39 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:33:39 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:33:40 PM	Tube furnace set to 150
9/24/2011	10:34:10 PM	H2 valve closed
9/24/2011	10:34:10 PM	BCl3 valve closed
9/24/2011	10:34:10 PM	PH3 valve closed
9/24/2011	10:34:10 PM	SiCl4 pre valve closed
9/24/2011	10:34:10 PM	SiCl4 post valve closed
9/24/2011	10:34:10 PM	Bypass valve closed
9/24/2011	10:34:10 PM	Bubbler valve closed
9/24/2011	10:34:10 PM	Helium valve opened
9/24/2011	10:34:10 PM	Main Vac valve opened
9/24/2011	10:34:10 PM	Helium MFC set to  20.000000
9/24/2011	10:34:10 PM	H2 MFC set to  0.000000
9/24/2011	10:34:10 PM	BCl3 MFC set to  0.000000
9/24/2011	10:34:10 PM	PHl3 MFC set to  0.000000
9/24/2011	10:34:10 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:34:10 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:34:10 PM	Tube furnace set to 150
9/24/2011	10:34:40 PM	Helium valve closed
9/24/2011	10:34:40 PM	H2 valve closed
9/24/2011	10:34:40 PM	BCl3 valve closed
9/24/2011	10:34:40 PM	PH3 valve closed
9/24/2011	10:34:40 PM	SiCl4 pre valve closed
9/24/2011	10:34:40 PM	SiCl4 post valve closed
9/24/2011	10:34:40 PM	Bypass valve closed
9/24/2011	10:34:40 PM	Bubbler valve closed
9/24/2011	10:34:40 PM	Main Vac valve opened
9/24/2011	10:34:40 PM	Helium MFC set to  0.000000
9/24/2011	10:34:40 PM	H2 MFC set to  0.000000
9/24/2011	10:34:40 PM	BCl3 MFC set to  0.000000
9/24/2011	10:34:40 PM	PHl3 MFC set to  0.000000
9/24/2011	10:34:40 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:34:40 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:34:40 PM	Tube furnace set to 150
9/24/2011	10:35:10 PM	H2 valve closed
9/24/2011	10:35:10 PM	BCl3 valve closed
9/24/2011	10:35:10 PM	PH3 valve closed
9/24/2011	10:35:10 PM	SiCl4 pre valve closed
9/24/2011	10:35:10 PM	SiCl4 post valve closed
9/24/2011	10:35:10 PM	Bypass valve closed
9/24/2011	10:35:10 PM	Bubbler valve closed
9/24/2011	10:35:10 PM	Helium valve opened
9/24/2011	10:35:10 PM	Main Vac valve opened
9/24/2011	10:35:10 PM	Helium MFC set to  20.000000
9/24/2011	10:35:10 PM	H2 MFC set to  0.000000
9/24/2011	10:35:10 PM	BCl3 MFC set to  0.000000
9/24/2011	10:35:10 PM	PHl3 MFC set to  0.000000
9/24/2011	10:35:10 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:35:10 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:35:10 PM	Tube furnace set to 150
9/24/2011	10:35:40 PM	Helium valve closed
9/24/2011	10:35:40 PM	H2 valve closed
9/24/2011	10:35:40 PM	BCl3 valve closed
9/24/2011	10:35:40 PM	PH3 valve closed
9/24/2011	10:35:40 PM	SiCl4 pre valve closed
9/24/2011	10:35:40 PM	SiCl4 post valve closed
9/24/2011	10:35:40 PM	Bypass valve closed
9/24/2011	10:35:40 PM	Bubbler valve closed
9/24/2011	10:35:40 PM	Main Vac valve opened
9/24/2011	10:35:40 PM	Helium MFC set to  0.000000
9/24/2011	10:35:40 PM	H2 MFC set to  0.000000
9/24/2011	10:35:40 PM	BCl3 MFC set to  0.000000
9/24/2011	10:35:40 PM	PHl3 MFC set to  0.000000
9/24/2011	10:35:40 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:35:40 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:35:40 PM	Tube furnace set to 150
9/24/2011	10:36:10 PM	H2 valve closed
9/24/2011	10:36:10 PM	BCl3 valve closed
9/24/2011	10:36:10 PM	PH3 valve closed
9/24/2011	10:36:10 PM	SiCl4 pre valve closed
9/24/2011	10:36:10 PM	SiCl4 post valve closed
9/24/2011	10:36:10 PM	Bypass valve closed
9/24/2011	10:36:10 PM	Bubbler valve closed
9/24/2011	10:36:10 PM	Helium valve opened
9/24/2011	10:36:10 PM	Main Vac valve opened
9/24/2011	10:36:10 PM	Helium MFC set to  20.000000
9/24/2011	10:36:10 PM	H2 MFC set to  0.000000
9/24/2011	10:36:10 PM	BCl3 MFC set to  0.000000
9/24/2011	10:36:10 PM	PHl3 MFC set to  0.000000
9/24/2011	10:36:10 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:36:10 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:36:11 PM	Tube furnace set to 150
9/24/2011	10:36:41 PM	Helium valve closed
9/24/2011	10:36:41 PM	H2 valve closed
9/24/2011	10:36:41 PM	BCl3 valve closed
9/24/2011	10:36:41 PM	PH3 valve closed
9/24/2011	10:36:41 PM	SiCl4 pre valve closed
9/24/2011	10:36:41 PM	SiCl4 post valve closed
9/24/2011	10:36:41 PM	Bypass valve closed
9/24/2011	10:36:41 PM	Bubbler valve closed
9/24/2011	10:36:41 PM	Main Vac valve opened
9/24/2011	10:36:41 PM	Helium MFC set to  0.000000
9/24/2011	10:36:41 PM	H2 MFC set to  0.000000
9/24/2011	10:36:41 PM	BCl3 MFC set to  0.000000
9/24/2011	10:36:41 PM	PHl3 MFC set to  0.000000
9/24/2011	10:36:41 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:36:41 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:36:41 PM	Tube furnace set to 150
9/24/2011	10:37:11 PM	H2 valve closed
9/24/2011	10:37:11 PM	BCl3 valve closed
9/24/2011	10:37:11 PM	PH3 valve closed
9/24/2011	10:37:11 PM	SiCl4 pre valve closed
9/24/2011	10:37:11 PM	SiCl4 post valve closed
9/24/2011	10:37:11 PM	Bypass valve closed
9/24/2011	10:37:11 PM	Bubbler valve closed
9/24/2011	10:37:11 PM	Helium valve opened
9/24/2011	10:37:11 PM	Main Vac valve opened
9/24/2011	10:37:11 PM	Helium MFC set to  20.000000
9/24/2011	10:37:11 PM	H2 MFC set to  0.000000
9/24/2011	10:37:11 PM	BCl3 MFC set to  0.000000
9/24/2011	10:37:11 PM	PHl3 MFC set to  0.000000
9/24/2011	10:37:11 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:37:11 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:37:11 PM	Tube furnace set to 150
9/24/2011	10:37:41 PM	Helium valve closed
9/24/2011	10:37:41 PM	H2 valve closed
9/24/2011	10:37:41 PM	BCl3 valve closed
9/24/2011	10:37:41 PM	PH3 valve closed
9/24/2011	10:37:41 PM	SiCl4 pre valve closed
9/24/2011	10:37:41 PM	SiCl4 post valve closed
9/24/2011	10:37:41 PM	Bypass valve closed
9/24/2011	10:37:41 PM	Bubbler valve closed
9/24/2011	10:37:41 PM	Main Vac valve opened
9/24/2011	10:37:41 PM	Helium MFC set to  0.000000
9/24/2011	10:37:41 PM	H2 MFC set to  0.000000
9/24/2011	10:37:41 PM	BCl3 MFC set to  0.000000
9/24/2011	10:37:41 PM	PHl3 MFC set to  0.000000
9/24/2011	10:37:41 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:37:41 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:37:41 PM	Tube furnace set to 150
9/24/2011	10:38:11 PM	H2 valve closed
9/24/2011	10:38:11 PM	BCl3 valve closed
9/24/2011	10:38:11 PM	PH3 valve closed
9/24/2011	10:38:11 PM	SiCl4 pre valve closed
9/24/2011	10:38:11 PM	SiCl4 post valve closed
9/24/2011	10:38:11 PM	Bypass valve closed
9/24/2011	10:38:11 PM	Bubbler valve closed
9/24/2011	10:38:11 PM	Helium valve opened
9/24/2011	10:38:11 PM	Main Vac valve opened
9/24/2011	10:38:11 PM	Helium MFC set to  20.000000
9/24/2011	10:38:11 PM	H2 MFC set to  0.000000
9/24/2011	10:38:11 PM	BCl3 MFC set to  0.000000
9/24/2011	10:38:11 PM	PHl3 MFC set to  0.000000
9/24/2011	10:38:11 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:38:11 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:38:11 PM	Tube furnace set to 150
9/24/2011	10:38:41 PM	Helium valve closed
9/24/2011	10:38:41 PM	H2 valve closed
9/24/2011	10:38:41 PM	BCl3 valve closed
9/24/2011	10:38:41 PM	PH3 valve closed
9/24/2011	10:38:41 PM	SiCl4 pre valve closed
9/24/2011	10:38:41 PM	SiCl4 post valve closed
9/24/2011	10:38:41 PM	Bypass valve closed
9/24/2011	10:38:41 PM	Bubbler valve closed
9/24/2011	10:38:41 PM	Main Vac valve opened
9/24/2011	10:38:41 PM	Helium MFC set to  0.000000
9/24/2011	10:38:41 PM	H2 MFC set to  0.000000
9/24/2011	10:38:41 PM	BCl3 MFC set to  0.000000
9/24/2011	10:38:41 PM	PHl3 MFC set to  0.000000
9/24/2011	10:38:41 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:38:41 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:38:42 PM	Tube furnace set to 150
9/24/2011	10:39:12 PM	H2 valve closed
9/24/2011	10:39:12 PM	BCl3 valve closed
9/24/2011	10:39:12 PM	PH3 valve closed
9/24/2011	10:39:12 PM	SiCl4 pre valve closed
9/24/2011	10:39:12 PM	SiCl4 post valve closed
9/24/2011	10:39:12 PM	Bypass valve closed
9/24/2011	10:39:12 PM	Bubbler valve closed
9/24/2011	10:39:12 PM	Helium valve opened
9/24/2011	10:39:12 PM	Main Vac valve opened
9/24/2011	10:39:12 PM	Helium MFC set to  20.000000
9/24/2011	10:39:12 PM	H2 MFC set to  0.000000
9/24/2011	10:39:12 PM	BCl3 MFC set to  0.000000
9/24/2011	10:39:12 PM	PHl3 MFC set to  0.000000
9/24/2011	10:39:12 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:39:12 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:39:12 PM	Tube furnace set to 150
9/24/2011	10:39:42 PM	Helium valve closed
9/24/2011	10:39:42 PM	H2 valve closed
9/24/2011	10:39:42 PM	BCl3 valve closed
9/24/2011	10:39:42 PM	PH3 valve closed
9/24/2011	10:39:42 PM	SiCl4 pre valve closed
9/24/2011	10:39:42 PM	SiCl4 post valve closed
9/24/2011	10:39:42 PM	Bypass valve closed
9/24/2011	10:39:42 PM	Bubbler valve closed
9/24/2011	10:39:42 PM	Main Vac valve opened
9/24/2011	10:39:42 PM	Helium MFC set to  0.000000
9/24/2011	10:39:42 PM	H2 MFC set to  0.000000
9/24/2011	10:39:42 PM	BCl3 MFC set to  0.000000
9/24/2011	10:39:42 PM	PHl3 MFC set to  0.000000
9/24/2011	10:39:42 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:39:42 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:39:42 PM	Tube furnace set to 150
9/24/2011	10:40:12 PM	H2 valve closed
9/24/2011	10:40:12 PM	BCl3 valve closed
9/24/2011	10:40:12 PM	PH3 valve closed
9/24/2011	10:40:12 PM	SiCl4 pre valve closed
9/24/2011	10:40:12 PM	SiCl4 post valve closed
9/24/2011	10:40:12 PM	Bypass valve closed
9/24/2011	10:40:12 PM	Bubbler valve closed
9/24/2011	10:40:12 PM	Helium valve opened
9/24/2011	10:40:12 PM	Main Vac valve opened
9/24/2011	10:40:12 PM	Helium MFC set to  20.000000
9/24/2011	10:40:12 PM	H2 MFC set to  0.000000
9/24/2011	10:40:12 PM	BCl3 MFC set to  0.000000
9/24/2011	10:40:12 PM	PHl3 MFC set to  0.000000
9/24/2011	10:40:12 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:40:12 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:40:12 PM	Tube furnace set to 150
9/24/2011	10:40:42 PM	Helium valve closed
9/24/2011	10:40:42 PM	H2 valve closed
9/24/2011	10:40:42 PM	BCl3 valve closed
9/24/2011	10:40:42 PM	PH3 valve closed
9/24/2011	10:40:42 PM	SiCl4 pre valve closed
9/24/2011	10:40:42 PM	SiCl4 post valve closed
9/24/2011	10:40:42 PM	Bypass valve closed
9/24/2011	10:40:42 PM	Bubbler valve closed
9/24/2011	10:40:42 PM	Main Vac valve opened
9/24/2011	10:40:42 PM	Helium MFC set to  0.000000
9/24/2011	10:40:42 PM	H2 MFC set to  0.000000
9/24/2011	10:40:42 PM	BCl3 MFC set to  0.000000
9/24/2011	10:40:42 PM	PHl3 MFC set to  0.000000
9/24/2011	10:40:42 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:40:42 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:40:42 PM	Tube furnace set to 150
9/24/2011	10:41:12 PM	H2 valve closed
9/24/2011	10:41:12 PM	BCl3 valve closed
9/24/2011	10:41:12 PM	PH3 valve closed
9/24/2011	10:41:12 PM	SiCl4 pre valve closed
9/24/2011	10:41:12 PM	SiCl4 post valve closed
9/24/2011	10:41:12 PM	Bypass valve closed
9/24/2011	10:41:12 PM	Bubbler valve closed
9/24/2011	10:41:12 PM	Helium valve opened
9/24/2011	10:41:12 PM	Main Vac valve opened
9/24/2011	10:41:12 PM	Helium MFC set to  20.000000
9/24/2011	10:41:12 PM	H2 MFC set to  0.000000
9/24/2011	10:41:12 PM	BCl3 MFC set to  0.000000
9/24/2011	10:41:12 PM	PHl3 MFC set to  0.000000
9/24/2011	10:41:12 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:41:12 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:41:12 PM	Tube furnace set to 150
9/24/2011	10:41:43 PM	Helium valve closed
9/24/2011	10:41:43 PM	H2 valve closed
9/24/2011	10:41:43 PM	BCl3 valve closed
9/24/2011	10:41:43 PM	PH3 valve closed
9/24/2011	10:41:43 PM	SiCl4 pre valve closed
9/24/2011	10:41:43 PM	SiCl4 post valve closed
9/24/2011	10:41:43 PM	Bypass valve closed
9/24/2011	10:41:43 PM	Bubbler valve closed
9/24/2011	10:41:43 PM	Main Vac valve opened
9/24/2011	10:41:43 PM	Helium MFC set to  0.000000
9/24/2011	10:41:43 PM	H2 MFC set to  0.000000
9/24/2011	10:41:43 PM	BCl3 MFC set to  0.000000
9/24/2011	10:41:43 PM	PHl3 MFC set to  0.000000
9/24/2011	10:41:43 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:41:43 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:41:43 PM	Tube furnace set to 150
9/24/2011	10:42:13 PM	H2 valve closed
9/24/2011	10:42:13 PM	BCl3 valve closed
9/24/2011	10:42:13 PM	PH3 valve closed
9/24/2011	10:42:13 PM	SiCl4 pre valve closed
9/24/2011	10:42:13 PM	SiCl4 post valve closed
9/24/2011	10:42:13 PM	Bypass valve closed
9/24/2011	10:42:13 PM	Bubbler valve closed
9/24/2011	10:42:13 PM	Helium valve opened
9/24/2011	10:42:13 PM	Main Vac valve opened
9/24/2011	10:42:13 PM	Helium MFC set to  20.000000
9/24/2011	10:42:13 PM	H2 MFC set to  0.000000
9/24/2011	10:42:13 PM	BCl3 MFC set to  0.000000
9/24/2011	10:42:13 PM	PHl3 MFC set to  0.000000
9/24/2011	10:42:13 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:42:13 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:42:13 PM	Tube furnace set to 150
9/24/2011	10:42:43 PM	Helium valve closed
9/24/2011	10:42:43 PM	H2 valve closed
9/24/2011	10:42:43 PM	BCl3 valve closed
9/24/2011	10:42:43 PM	PH3 valve closed
9/24/2011	10:42:43 PM	SiCl4 pre valve closed
9/24/2011	10:42:43 PM	SiCl4 post valve closed
9/24/2011	10:42:43 PM	Bypass valve closed
9/24/2011	10:42:43 PM	Bubbler valve closed
9/24/2011	10:42:43 PM	Main Vac valve opened
9/24/2011	10:42:43 PM	Helium MFC set to  0.000000
9/24/2011	10:42:43 PM	H2 MFC set to  0.000000
9/24/2011	10:42:43 PM	BCl3 MFC set to  0.000000
9/24/2011	10:42:43 PM	PHl3 MFC set to  0.000000
9/24/2011	10:42:43 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:42:43 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:42:43 PM	Tube furnace set to 150
9/24/2011	10:43:13 PM	H2 valve closed
9/24/2011	10:43:13 PM	BCl3 valve closed
9/24/2011	10:43:13 PM	PH3 valve closed
9/24/2011	10:43:13 PM	SiCl4 pre valve closed
9/24/2011	10:43:13 PM	SiCl4 post valve closed
9/24/2011	10:43:13 PM	Bypass valve closed
9/24/2011	10:43:13 PM	Bubbler valve closed
9/24/2011	10:43:13 PM	Helium valve opened
9/24/2011	10:43:13 PM	Main Vac valve opened
9/24/2011	10:43:13 PM	Helium MFC set to  20.000000
9/24/2011	10:43:13 PM	H2 MFC set to  0.000000
9/24/2011	10:43:13 PM	BCl3 MFC set to  0.000000
9/24/2011	10:43:13 PM	PHl3 MFC set to  0.000000
9/24/2011	10:43:13 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:43:13 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:43:13 PM	Tube furnace set to 150
9/24/2011	10:43:43 PM	Helium valve closed
9/24/2011	10:43:43 PM	H2 valve closed
9/24/2011	10:43:43 PM	BCl3 valve closed
9/24/2011	10:43:43 PM	PH3 valve closed
9/24/2011	10:43:43 PM	SiCl4 pre valve closed
9/24/2011	10:43:43 PM	SiCl4 post valve closed
9/24/2011	10:43:43 PM	Bypass valve closed
9/24/2011	10:43:43 PM	Bubbler valve closed
9/24/2011	10:43:43 PM	Main Vac valve opened
9/24/2011	10:43:43 PM	Helium MFC set to  0.000000
9/24/2011	10:43:43 PM	H2 MFC set to  0.000000
9/24/2011	10:43:43 PM	BCl3 MFC set to  0.000000
9/24/2011	10:43:43 PM	PHl3 MFC set to  0.000000
9/24/2011	10:43:43 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:43:43 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:43:44 PM	Tube furnace set to 150
9/24/2011	10:44:14 PM	H2 valve closed
9/24/2011	10:44:14 PM	BCl3 valve closed
9/24/2011	10:44:14 PM	PH3 valve closed
9/24/2011	10:44:14 PM	SiCl4 pre valve closed
9/24/2011	10:44:14 PM	SiCl4 post valve closed
9/24/2011	10:44:14 PM	Bypass valve closed
9/24/2011	10:44:14 PM	Bubbler valve closed
9/24/2011	10:44:14 PM	Helium valve opened
9/24/2011	10:44:14 PM	Main Vac valve opened
9/24/2011	10:44:14 PM	Helium MFC set to  20.000000
9/24/2011	10:44:14 PM	H2 MFC set to  0.000000
9/24/2011	10:44:14 PM	BCl3 MFC set to  0.000000
9/24/2011	10:44:14 PM	PHl3 MFC set to  0.000000
9/24/2011	10:44:14 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:44:14 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:44:14 PM	Tube furnace set to 150
9/24/2011	10:44:44 PM	Helium valve closed
9/24/2011	10:44:44 PM	H2 valve closed
9/24/2011	10:44:44 PM	BCl3 valve closed
9/24/2011	10:44:44 PM	PH3 valve closed
9/24/2011	10:44:44 PM	SiCl4 pre valve closed
9/24/2011	10:44:44 PM	SiCl4 post valve closed
9/24/2011	10:44:44 PM	Bypass valve closed
9/24/2011	10:44:44 PM	Bubbler valve closed
9/24/2011	10:44:44 PM	Main Vac valve opened
9/24/2011	10:44:44 PM	Helium MFC set to  0.000000
9/24/2011	10:44:44 PM	H2 MFC set to  0.000000
9/24/2011	10:44:44 PM	BCl3 MFC set to  0.000000
9/24/2011	10:44:44 PM	PHl3 MFC set to  0.000000
9/24/2011	10:44:44 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:44:44 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:44:44 PM	Tube furnace set to 150
9/24/2011	10:45:14 PM	H2 valve closed
9/24/2011	10:45:14 PM	BCl3 valve closed
9/24/2011	10:45:14 PM	PH3 valve closed
9/24/2011	10:45:14 PM	SiCl4 pre valve closed
9/24/2011	10:45:14 PM	SiCl4 post valve closed
9/24/2011	10:45:14 PM	Bypass valve closed
9/24/2011	10:45:14 PM	Bubbler valve closed
9/24/2011	10:45:14 PM	Helium valve opened
9/24/2011	10:45:14 PM	Main Vac valve opened
9/24/2011	10:45:14 PM	Helium MFC set to  20.000000
9/24/2011	10:45:14 PM	H2 MFC set to  0.000000
9/24/2011	10:45:14 PM	BCl3 MFC set to  0.000000
9/24/2011	10:45:14 PM	PHl3 MFC set to  0.000000
9/24/2011	10:45:14 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:45:14 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:45:14 PM	Tube furnace set to 150
9/24/2011	10:45:44 PM	Helium valve closed
9/24/2011	10:45:44 PM	H2 valve closed
9/24/2011	10:45:44 PM	BCl3 valve closed
9/24/2011	10:45:44 PM	PH3 valve closed
9/24/2011	10:45:44 PM	SiCl4 pre valve closed
9/24/2011	10:45:44 PM	SiCl4 post valve closed
9/24/2011	10:45:44 PM	Bypass valve closed
9/24/2011	10:45:44 PM	Bubbler valve closed
9/24/2011	10:45:44 PM	Main Vac valve opened
9/24/2011	10:45:44 PM	Helium MFC set to  0.000000
9/24/2011	10:45:44 PM	H2 MFC set to  0.000000
9/24/2011	10:45:44 PM	BCl3 MFC set to  0.000000
9/24/2011	10:45:44 PM	PHl3 MFC set to  0.000000
9/24/2011	10:45:44 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:45:44 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:45:44 PM	Tube furnace set to 150
9/24/2011	10:46:14 PM	H2 valve closed
9/24/2011	10:46:14 PM	BCl3 valve closed
9/24/2011	10:46:14 PM	PH3 valve closed
9/24/2011	10:46:14 PM	SiCl4 pre valve closed
9/24/2011	10:46:14 PM	SiCl4 post valve closed
9/24/2011	10:46:14 PM	Bypass valve closed
9/24/2011	10:46:14 PM	Bubbler valve closed
9/24/2011	10:46:14 PM	Helium valve opened
9/24/2011	10:46:14 PM	Main Vac valve opened
9/24/2011	10:46:14 PM	Helium MFC set to  20.000000
9/24/2011	10:46:14 PM	H2 MFC set to  0.000000
9/24/2011	10:46:14 PM	BCl3 MFC set to  0.000000
9/24/2011	10:46:14 PM	PHl3 MFC set to  0.000000
9/24/2011	10:46:14 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:46:14 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:46:15 PM	Tube furnace set to 150
9/24/2011	10:46:45 PM	Helium valve closed
9/24/2011	10:46:45 PM	H2 valve closed
9/24/2011	10:46:45 PM	BCl3 valve closed
9/24/2011	10:46:45 PM	PH3 valve closed
9/24/2011	10:46:45 PM	SiCl4 pre valve closed
9/24/2011	10:46:45 PM	SiCl4 post valve closed
9/24/2011	10:46:45 PM	Bypass valve closed
9/24/2011	10:46:45 PM	Bubbler valve closed
9/24/2011	10:46:45 PM	Main Vac valve opened
9/24/2011	10:46:45 PM	Helium MFC set to  0.000000
9/24/2011	10:46:45 PM	H2 MFC set to  0.000000
9/24/2011	10:46:45 PM	BCl3 MFC set to  0.000000
9/24/2011	10:46:45 PM	PHl3 MFC set to  0.000000
9/24/2011	10:46:45 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:46:45 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:46:45 PM	Tube furnace set to 150
9/24/2011	10:47:15 PM	H2 valve closed
9/24/2011	10:47:15 PM	BCl3 valve closed
9/24/2011	10:47:15 PM	PH3 valve closed
9/24/2011	10:47:15 PM	SiCl4 pre valve closed
9/24/2011	10:47:15 PM	SiCl4 post valve closed
9/24/2011	10:47:15 PM	Bypass valve closed
9/24/2011	10:47:15 PM	Bubbler valve closed
9/24/2011	10:47:15 PM	Helium valve opened
9/24/2011	10:47:15 PM	Main Vac valve opened
9/24/2011	10:47:15 PM	Helium MFC set to  20.000000
9/24/2011	10:47:15 PM	H2 MFC set to  0.000000
9/24/2011	10:47:15 PM	BCl3 MFC set to  0.000000
9/24/2011	10:47:15 PM	PHl3 MFC set to  0.000000
9/24/2011	10:47:15 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:47:15 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:47:15 PM	Tube furnace set to 150
9/24/2011	10:47:45 PM	Helium valve closed
9/24/2011	10:47:45 PM	H2 valve closed
9/24/2011	10:47:45 PM	BCl3 valve closed
9/24/2011	10:47:45 PM	PH3 valve closed
9/24/2011	10:47:45 PM	SiCl4 pre valve closed
9/24/2011	10:47:45 PM	SiCl4 post valve closed
9/24/2011	10:47:45 PM	Bypass valve closed
9/24/2011	10:47:45 PM	Bubbler valve closed
9/24/2011	10:47:45 PM	Main Vac valve opened
9/24/2011	10:47:45 PM	Helium MFC set to  0.000000
9/24/2011	10:47:45 PM	H2 MFC set to  0.000000
9/24/2011	10:47:45 PM	BCl3 MFC set to  0.000000
9/24/2011	10:47:45 PM	PHl3 MFC set to  0.000000
9/24/2011	10:47:45 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:47:45 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:47:45 PM	Tube furnace set to 150
9/24/2011	10:48:15 PM	H2 valve closed
9/24/2011	10:48:15 PM	BCl3 valve closed
9/24/2011	10:48:15 PM	PH3 valve closed
9/24/2011	10:48:15 PM	SiCl4 pre valve closed
9/24/2011	10:48:15 PM	SiCl4 post valve closed
9/24/2011	10:48:15 PM	Bypass valve closed
9/24/2011	10:48:15 PM	Bubbler valve closed
9/24/2011	10:48:15 PM	Helium valve opened
9/24/2011	10:48:15 PM	Main Vac valve opened
9/24/2011	10:48:15 PM	Helium MFC set to  20.000000
9/24/2011	10:48:15 PM	H2 MFC set to  0.000000
9/24/2011	10:48:15 PM	BCl3 MFC set to  0.000000
9/24/2011	10:48:15 PM	PHl3 MFC set to  0.000000
9/24/2011	10:48:15 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:48:15 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:48:15 PM	Tube furnace set to 150
9/24/2011	10:48:46 PM	Helium valve closed
9/24/2011	10:48:46 PM	H2 valve closed
9/24/2011	10:48:46 PM	BCl3 valve closed
9/24/2011	10:48:46 PM	PH3 valve closed
9/24/2011	10:48:46 PM	SiCl4 pre valve closed
9/24/2011	10:48:46 PM	SiCl4 post valve closed
9/24/2011	10:48:46 PM	Bypass valve closed
9/24/2011	10:48:46 PM	Bubbler valve closed
9/24/2011	10:48:46 PM	Main Vac valve opened
9/24/2011	10:48:46 PM	Helium MFC set to  0.000000
9/24/2011	10:48:46 PM	H2 MFC set to  0.000000
9/24/2011	10:48:46 PM	BCl3 MFC set to  0.000000
9/24/2011	10:48:46 PM	PHl3 MFC set to  0.000000
9/24/2011	10:48:46 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:48:46 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:48:46 PM	Tube furnace set to 150
9/24/2011	10:49:16 PM	H2 valve closed
9/24/2011	10:49:16 PM	BCl3 valve closed
9/24/2011	10:49:16 PM	PH3 valve closed
9/24/2011	10:49:16 PM	SiCl4 pre valve closed
9/24/2011	10:49:16 PM	SiCl4 post valve closed
9/24/2011	10:49:16 PM	Bypass valve closed
9/24/2011	10:49:16 PM	Bubbler valve closed
9/24/2011	10:49:16 PM	Helium valve opened
9/24/2011	10:49:16 PM	Main Vac valve opened
9/24/2011	10:49:16 PM	Helium MFC set to  20.000000
9/24/2011	10:49:16 PM	H2 MFC set to  0.000000
9/24/2011	10:49:16 PM	BCl3 MFC set to  0.000000
9/24/2011	10:49:16 PM	PHl3 MFC set to  0.000000
9/24/2011	10:49:16 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:49:16 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:49:16 PM	Tube furnace set to 150
9/24/2011	10:49:46 PM	Helium valve closed
9/24/2011	10:49:46 PM	H2 valve closed
9/24/2011	10:49:46 PM	BCl3 valve closed
9/24/2011	10:49:46 PM	PH3 valve closed
9/24/2011	10:49:46 PM	SiCl4 pre valve closed
9/24/2011	10:49:46 PM	SiCl4 post valve closed
9/24/2011	10:49:46 PM	Bypass valve closed
9/24/2011	10:49:46 PM	Bubbler valve closed
9/24/2011	10:49:46 PM	Main Vac valve opened
9/24/2011	10:49:46 PM	Helium MFC set to  0.000000
9/24/2011	10:49:46 PM	H2 MFC set to  0.000000
9/24/2011	10:49:46 PM	BCl3 MFC set to  0.000000
9/24/2011	10:49:46 PM	PHl3 MFC set to  0.000000
9/24/2011	10:49:46 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:49:46 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:49:46 PM	Tube furnace set to 150
9/24/2011	10:50:16 PM	H2 valve closed
9/24/2011	10:50:16 PM	BCl3 valve closed
9/24/2011	10:50:16 PM	PH3 valve closed
9/24/2011	10:50:16 PM	SiCl4 pre valve closed
9/24/2011	10:50:16 PM	SiCl4 post valve closed
9/24/2011	10:50:16 PM	Bypass valve closed
9/24/2011	10:50:16 PM	Bubbler valve closed
9/24/2011	10:50:16 PM	Helium valve opened
9/24/2011	10:50:16 PM	Main Vac valve opened
9/24/2011	10:50:16 PM	Helium MFC set to  20.000000
9/24/2011	10:50:16 PM	H2 MFC set to  0.000000
9/24/2011	10:50:16 PM	BCl3 MFC set to  0.000000
9/24/2011	10:50:16 PM	PHl3 MFC set to  0.000000
9/24/2011	10:50:16 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:50:16 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:50:16 PM	Tube furnace set to 150
9/24/2011	10:50:46 PM	Helium valve closed
9/24/2011	10:50:46 PM	H2 valve closed
9/24/2011	10:50:46 PM	BCl3 valve closed
9/24/2011	10:50:46 PM	PH3 valve closed
9/24/2011	10:50:46 PM	SiCl4 pre valve closed
9/24/2011	10:50:46 PM	SiCl4 post valve closed
9/24/2011	10:50:46 PM	Bypass valve closed
9/24/2011	10:50:46 PM	Bubbler valve closed
9/24/2011	10:50:46 PM	Main Vac valve opened
9/24/2011	10:50:46 PM	Helium MFC set to  0.000000
9/24/2011	10:50:46 PM	H2 MFC set to  0.000000
9/24/2011	10:50:46 PM	BCl3 MFC set to  0.000000
9/24/2011	10:50:46 PM	PHl3 MFC set to  0.000000
9/24/2011	10:50:46 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:50:46 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:50:47 PM	Tube furnace set to 150
9/24/2011	10:51:17 PM	H2 valve closed
9/24/2011	10:51:17 PM	BCl3 valve closed
9/24/2011	10:51:17 PM	PH3 valve closed
9/24/2011	10:51:17 PM	SiCl4 pre valve closed
9/24/2011	10:51:17 PM	SiCl4 post valve closed
9/24/2011	10:51:17 PM	Bypass valve closed
9/24/2011	10:51:17 PM	Bubbler valve closed
9/24/2011	10:51:17 PM	Helium valve opened
9/24/2011	10:51:17 PM	Main Vac valve opened
9/24/2011	10:51:17 PM	Helium MFC set to  20.000000
9/24/2011	10:51:17 PM	H2 MFC set to  0.000000
9/24/2011	10:51:17 PM	BCl3 MFC set to  0.000000
9/24/2011	10:51:17 PM	PHl3 MFC set to  0.000000
9/24/2011	10:51:17 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:51:17 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:51:17 PM	Tube furnace set to 150
9/24/2011	10:51:47 PM	Helium valve closed
9/24/2011	10:51:47 PM	H2 valve closed
9/24/2011	10:51:47 PM	BCl3 valve closed
9/24/2011	10:51:47 PM	PH3 valve closed
9/24/2011	10:51:47 PM	SiCl4 pre valve closed
9/24/2011	10:51:47 PM	SiCl4 post valve closed
9/24/2011	10:51:47 PM	Bypass valve closed
9/24/2011	10:51:47 PM	Bubbler valve closed
9/24/2011	10:51:47 PM	Main Vac valve opened
9/24/2011	10:51:47 PM	Helium MFC set to  0.000000
9/24/2011	10:51:47 PM	H2 MFC set to  0.000000
9/24/2011	10:51:47 PM	BCl3 MFC set to  0.000000
9/24/2011	10:51:47 PM	PHl3 MFC set to  0.000000
9/24/2011	10:51:47 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:51:47 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:51:47 PM	Tube furnace set to 150
9/24/2011	10:52:17 PM	H2 valve closed
9/24/2011	10:52:17 PM	BCl3 valve closed
9/24/2011	10:52:17 PM	PH3 valve closed
9/24/2011	10:52:17 PM	SiCl4 pre valve closed
9/24/2011	10:52:17 PM	SiCl4 post valve closed
9/24/2011	10:52:17 PM	Bypass valve closed
9/24/2011	10:52:17 PM	Bubbler valve closed
9/24/2011	10:52:17 PM	Helium valve opened
9/24/2011	10:52:17 PM	Main Vac valve opened
9/24/2011	10:52:17 PM	Helium MFC set to  20.000000
9/24/2011	10:52:17 PM	H2 MFC set to  0.000000
9/24/2011	10:52:17 PM	BCl3 MFC set to  0.000000
9/24/2011	10:52:17 PM	PHl3 MFC set to  0.000000
9/24/2011	10:52:17 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:52:17 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:52:17 PM	Tube furnace set to 150
9/24/2011	10:52:47 PM	Helium valve closed
9/24/2011	10:52:47 PM	H2 valve closed
9/24/2011	10:52:47 PM	BCl3 valve closed
9/24/2011	10:52:47 PM	PH3 valve closed
9/24/2011	10:52:47 PM	SiCl4 pre valve closed
9/24/2011	10:52:47 PM	SiCl4 post valve closed
9/24/2011	10:52:47 PM	Bypass valve closed
9/24/2011	10:52:47 PM	Bubbler valve closed
9/24/2011	10:52:47 PM	Main Vac valve opened
9/24/2011	10:52:47 PM	Helium MFC set to  0.000000
9/24/2011	10:52:47 PM	H2 MFC set to  0.000000
9/24/2011	10:52:47 PM	BCl3 MFC set to  0.000000
9/24/2011	10:52:47 PM	PHl3 MFC set to  0.000000
9/24/2011	10:52:47 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:52:47 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:52:47 PM	Tube furnace set to 150
9/24/2011	10:52:52 PM	Run finished at 10:52 PM
9/24/2011	10:53:52 PM	Recipe started at 10:53 PM
9/24/2011	10:53:52 PM	Helium valve closed
9/24/2011	10:53:52 PM	H2 valve closed
9/24/2011	10:53:52 PM	BCl3 valve closed
9/24/2011	10:53:52 PM	PH3 valve closed
9/24/2011	10:53:52 PM	SiCl4 pre valve closed
9/24/2011	10:53:52 PM	SiCl4 post valve closed
9/24/2011	10:53:52 PM	Main Vac valve closed
9/24/2011	10:53:52 PM	Bubbler valve closed
9/24/2011	10:53:52 PM	Bypass valve opened
9/24/2011	10:53:52 PM	Helium MFC set to  0.000000
9/24/2011	10:53:52 PM	H2 MFC set to  0.000000
9/24/2011	10:53:52 PM	BCl3 MFC set to  0.000000
9/24/2011	10:53:52 PM	PHl3 MFC set to  0.000000
9/24/2011	10:53:52 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:53:52 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:53:53 PM	Tube furnace set to 150
9/24/2011	10:53:53 PM	Helium valve closed
9/24/2011	10:53:53 PM	H2 valve closed
9/24/2011	10:53:53 PM	BCl3 valve closed
9/24/2011	10:53:53 PM	PH3 valve closed
9/24/2011	10:53:53 PM	SiCl4 pre valve closed
9/24/2011	10:53:53 PM	SiCl4 post valve closed
9/24/2011	10:53:53 PM	Main Vac valve closed
9/24/2011	10:53:53 PM	Bubbler valve closed
9/24/2011	10:53:53 PM	Bypass valve opened
9/24/2011	10:53:53 PM	Helium MFC set to  0.000000
9/24/2011	10:53:53 PM	H2 MFC set to  0.000000
9/24/2011	10:53:53 PM	BCl3 MFC set to  0.000000
9/24/2011	10:53:53 PM	PHl3 MFC set to  0.000000
9/24/2011	10:53:53 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:53:53 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:53:53 PM	Tube furnace set to 150
9/24/2011	10:54:23 PM	Helium valve closed
9/24/2011	10:54:23 PM	H2 valve closed
9/24/2011	10:54:23 PM	BCl3 valve closed
9/24/2011	10:54:23 PM	PH3 valve closed
9/24/2011	10:54:23 PM	SiCl4 pre valve closed
9/24/2011	10:54:23 PM	SiCl4 post valve closed
9/24/2011	10:54:23 PM	Bypass valve closed
9/24/2011	10:54:23 PM	Bubbler valve closed
9/24/2011	10:54:23 PM	Main Vac valve opened
9/24/2011	10:54:23 PM	Helium MFC set to  0.000000
9/24/2011	10:54:23 PM	H2 MFC set to  0.000000
9/24/2011	10:54:23 PM	BCl3 MFC set to  0.000000
9/24/2011	10:54:23 PM	PHl3 MFC set to  0.000000
9/24/2011	10:54:23 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:54:23 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:54:23 PM	Tube furnace set to 150
9/24/2011	10:54:53 PM	H2 valve closed
9/24/2011	10:54:53 PM	BCl3 valve closed
9/24/2011	10:54:53 PM	PH3 valve closed
9/24/2011	10:54:53 PM	SiCl4 pre valve closed
9/24/2011	10:54:53 PM	SiCl4 post valve closed
9/24/2011	10:54:53 PM	Bypass valve closed
9/24/2011	10:54:53 PM	Bubbler valve closed
9/24/2011	10:54:53 PM	Helium valve opened
9/24/2011	10:54:53 PM	Main Vac valve opened
9/24/2011	10:54:53 PM	Helium MFC set to  20.000000
9/24/2011	10:54:53 PM	H2 MFC set to  0.000000
9/24/2011	10:54:53 PM	BCl3 MFC set to  0.000000
9/24/2011	10:54:53 PM	PHl3 MFC set to  0.000000
9/24/2011	10:54:53 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:54:53 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:54:53 PM	Tube furnace set to 150
9/24/2011	10:55:01 PM	Run aborted at 10:55 PM
9/24/2011	10:55:01 PM	Helium valve closed
9/24/2011	10:55:01 PM	H2 valve closed
9/24/2011	10:55:01 PM	BCl3 valve closed
9/24/2011	10:55:01 PM	PH3 valve closed
9/24/2011	10:55:01 PM	SiCl4 pre valve closed
9/24/2011	10:55:01 PM	SiCl4 post valve closed
9/24/2011	10:55:01 PM	Bypass valve closed
9/24/2011	10:55:01 PM	Main Vac valve closed
9/24/2011	10:55:01 PM	Bubbler valve closed
9/24/2011	10:55:01 PM	Helium MFC set to  0.000000
9/24/2011	10:55:01 PM	H2 MFC set to  0.000000
9/24/2011	10:55:01 PM	BCl3 MFC set to  0.000000
9/24/2011	10:55:01 PM	PHl3 MFC set to  0.000000
9/24/2011	10:55:01 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:55:01 PM	Tube furnace set to 0
9/24/2011	10:55:06 PM	Main Vac valve opened
9/24/2011	10:58:08 PM	Main Vac valve closed
9/24/2011	10:58:15 PM	Main Vac valve opened
9/24/2011	10:58:49 PM	Recipe started at 10:58 PM
9/24/2011	10:58:49 PM	Helium valve closed
9/24/2011	10:58:49 PM	H2 valve closed
9/24/2011	10:58:49 PM	BCl3 valve closed
9/24/2011	10:58:49 PM	PH3 valve closed
9/24/2011	10:58:50 PM	SiCl4 pre valve closed
9/24/2011	10:58:50 PM	SiCl4 post valve closed
9/24/2011	10:58:50 PM	Main Vac valve closed
9/24/2011	10:58:50 PM	Bypass valve closed
9/24/2011	10:58:50 PM	Bubbler valve closed
9/24/2011	10:58:50 PM	Helium MFC set to  0.000000
9/24/2011	10:58:50 PM	H2 MFC set to  0.000000
9/24/2011	10:58:50 PM	BCl3 MFC set to  0.000000
9/24/2011	10:58:50 PM	PHl3 MFC set to  0.000000
9/24/2011	10:58:50 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:58:50 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:58:50 PM	Tube furnace set to 0
9/24/2011	10:58:53 PM	Helium valve closed
9/24/2011	10:58:53 PM	BCl3 valve closed
9/24/2011	10:58:53 PM	PH3 valve closed
9/24/2011	10:58:53 PM	SiCl4 pre valve closed
9/24/2011	10:58:53 PM	SiCl4 post valve closed
9/24/2011	10:58:53 PM	Main Vac valve closed
9/24/2011	10:58:53 PM	Bypass valve closed
9/24/2011	10:58:53 PM	Bubbler valve closed
9/24/2011	10:58:53 PM	H2 valve opened
9/24/2011	10:58:53 PM	Helium MFC set to  0.000000
9/24/2011	10:58:53 PM	H2 MFC set to  500.000000
9/24/2011	10:58:53 PM	BCl3 MFC set to  0.000000
9/24/2011	10:58:53 PM	PHl3 MFC set to  0.000000
9/24/2011	10:58:53 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:58:53 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:58:53 PM	Tube furnace set to 0
9/24/2011	10:59:56 PM	Helium valve closed
9/24/2011	10:59:56 PM	BCl3 valve closed
9/24/2011	10:59:56 PM	PH3 valve closed
9/24/2011	10:59:56 PM	SiCl4 pre valve closed
9/24/2011	10:59:56 PM	SiCl4 post valve closed
9/24/2011	10:59:56 PM	Main Vac valve closed
9/24/2011	10:59:56 PM	Bypass valve closed
9/24/2011	10:59:56 PM	H2 valve opened
9/24/2011	10:59:56 PM	Bubbler valve opened
9/24/2011	10:59:56 PM	Helium MFC set to  0.000000
9/24/2011	10:59:56 PM	H2 MFC set to  500.000000
9/24/2011	10:59:56 PM	BCl3 MFC set to  0.000000
9/24/2011	10:59:56 PM	PHl3 MFC set to  0.000000
9/24/2011	10:59:56 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:59:56 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:59:56 PM	Tube furnace set to 0
9/24/2011	10:59:57 PM	Helium valve closed
9/24/2011	10:59:57 PM	BCl3 valve closed
9/24/2011	10:59:57 PM	PH3 valve closed
9/24/2011	10:59:57 PM	SiCl4 pre valve closed
9/24/2011	10:59:57 PM	SiCl4 post valve closed
9/24/2011	10:59:57 PM	Main Vac valve closed
9/24/2011	10:59:57 PM	Bypass valve closed
9/24/2011	10:59:57 PM	H2 valve opened
9/24/2011	10:59:57 PM	Bubbler valve opened
9/24/2011	10:59:57 PM	Helium MFC set to  0.000000
9/24/2011	10:59:57 PM	H2 MFC set to  500.000000
9/24/2011	10:59:57 PM	BCl3 MFC set to  0.000000
9/24/2011	10:59:57 PM	PHl3 MFC set to  0.000000
9/24/2011	10:59:57 PM	SiCl4 MFC set to  0.000000
9/24/2011	10:59:57 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	10:59:57 PM	Tube furnace set to 1000
9/24/2011	11:19:57 PM	Helium valve closed
9/24/2011	11:19:57 PM	BCl3 valve closed
9/24/2011	11:19:57 PM	PH3 valve closed
9/24/2011	11:19:57 PM	Main Vac valve closed
9/24/2011	11:19:57 PM	Bypass valve closed
9/24/2011	11:19:57 PM	H2 valve opened
9/24/2011	11:19:57 PM	SiCl4 pre valve opened
9/24/2011	11:19:57 PM	SiCl4 post valve opened
9/24/2011	11:19:57 PM	Bubbler valve opened
9/24/2011	11:19:57 PM	Helium MFC set to  0.000000
9/24/2011	11:19:57 PM	H2 MFC set to  500.000000
9/24/2011	11:19:57 PM	BCl3 MFC set to  0.000000
9/24/2011	11:19:57 PM	PHl3 MFC set to  0.000000
9/24/2011	11:19:57 PM	SiCl4 MFC set to  50.000000
9/24/2011	11:19:57 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:19:57 PM	Tube furnace set to 1000
9/24/2011	11:29:57 PM	Helium valve closed
9/24/2011	11:29:57 PM	BCl3 valve closed
9/24/2011	11:29:57 PM	PH3 valve closed
9/24/2011	11:29:57 PM	SiCl4 pre valve closed
9/24/2011	11:29:57 PM	SiCl4 post valve closed
9/24/2011	11:29:57 PM	Main Vac valve closed
9/24/2011	11:29:57 PM	Bypass valve closed
9/24/2011	11:29:57 PM	H2 valve opened
9/24/2011	11:29:57 PM	Bubbler valve opened
9/24/2011	11:29:57 PM	Helium MFC set to  0.000000
9/24/2011	11:29:57 PM	H2 MFC set to  500.000000
9/24/2011	11:29:57 PM	BCl3 MFC set to  0.000000
9/24/2011	11:29:57 PM	PHl3 MFC set to  0.000000
9/24/2011	11:29:57 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:29:57 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:29:58 PM	Tube furnace set to 750
9/24/2011	11:34:58 PM	H2 valve closed
9/24/2011	11:34:58 PM	BCl3 valve closed
9/24/2011	11:34:58 PM	PH3 valve closed
9/24/2011	11:34:58 PM	SiCl4 pre valve closed
9/24/2011	11:34:58 PM	SiCl4 post valve closed
9/24/2011	11:34:58 PM	Main Vac valve closed
9/24/2011	11:34:58 PM	Bypass valve closed
9/24/2011	11:34:58 PM	Helium valve opened
9/24/2011	11:34:58 PM	Bubbler valve opened
9/24/2011	11:34:58 PM	Helium MFC set to  500.000000
9/24/2011	11:34:58 PM	H2 MFC set to  0.000000
9/24/2011	11:34:58 PM	BCl3 MFC set to  0.000000
9/24/2011	11:34:58 PM	PHl3 MFC set to  0.000000
9/24/2011	11:34:58 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:34:58 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:34:58 PM	Tube furnace set to 0
9/24/2011	11:41:49 PM	Run aborted at 11:41 PM
9/24/2011	11:41:49 PM	Helium valve closed
9/24/2011	11:41:49 PM	H2 valve closed
9/24/2011	11:41:49 PM	BCl3 valve closed
9/24/2011	11:41:49 PM	PH3 valve closed
9/24/2011	11:41:49 PM	SiCl4 pre valve closed
9/24/2011	11:41:49 PM	SiCl4 post valve closed
9/24/2011	11:41:49 PM	Bypass valve closed
9/24/2011	11:41:49 PM	Main Vac valve closed
9/24/2011	11:41:49 PM	Bubbler valve closed
9/24/2011	11:41:49 PM	Helium MFC set to  0.000000
9/24/2011	11:41:49 PM	H2 MFC set to  0.000000
9/24/2011	11:41:49 PM	BCl3 MFC set to  0.000000
9/24/2011	11:41:49 PM	PHl3 MFC set to  0.000000
9/24/2011	11:41:49 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:41:49 PM	Tube furnace set to 0
9/24/2011	11:41:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/24/2011	11:41:52 PM	Recipe started at 11:41 PM
9/24/2011	11:41:52 PM	Helium valve closed
9/24/2011	11:41:52 PM	H2 valve closed
9/24/2011	11:41:52 PM	BCl3 valve closed
9/24/2011	11:41:52 PM	PH3 valve closed
9/24/2011	11:41:52 PM	SiCl4 pre valve closed
9/24/2011	11:41:52 PM	SiCl4 post valve closed
9/24/2011	11:41:52 PM	Main Vac valve closed
9/24/2011	11:41:52 PM	Bypass valve closed
9/24/2011	11:41:52 PM	Bubbler valve closed
9/24/2011	11:41:52 PM	Helium MFC set to  0.000000
9/24/2011	11:41:52 PM	H2 MFC set to  0.000000
9/24/2011	11:41:52 PM	BCl3 MFC set to  0.000000
9/24/2011	11:41:52 PM	PHl3 MFC set to  0.000000
9/24/2011	11:41:52 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:41:52 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:41:52 PM	Tube furnace set to 0
9/24/2011	11:41:55 PM	H2 valve closed
9/24/2011	11:41:55 PM	BCl3 valve closed
9/24/2011	11:41:55 PM	PH3 valve closed
9/24/2011	11:41:55 PM	SiCl4 pre valve closed
9/24/2011	11:41:55 PM	SiCl4 post valve closed
9/24/2011	11:41:55 PM	Main Vac valve closed
9/24/2011	11:41:55 PM	Bypass valve closed
9/24/2011	11:41:55 PM	Bubbler valve closed
9/24/2011	11:41:55 PM	Helium valve opened
9/24/2011	11:41:55 PM	Helium MFC set to  500.000000
9/24/2011	11:41:55 PM	H2 MFC set to  0.000000
9/24/2011	11:41:55 PM	BCl3 MFC set to  0.000000
9/24/2011	11:41:55 PM	PHl3 MFC set to  0.000000
9/24/2011	11:41:55 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:41:55 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:41:55 PM	Tube furnace set to 0
9/24/2011	11:41:55 PM	Helium valve closed
9/24/2011	11:41:55 PM	H2 valve closed
9/24/2011	11:41:55 PM	BCl3 valve closed
9/24/2011	11:41:55 PM	PH3 valve closed
9/24/2011	11:41:55 PM	SiCl4 pre valve closed
9/24/2011	11:41:55 PM	SiCl4 post valve closed
9/24/2011	11:41:55 PM	Main Vac valve closed
9/24/2011	11:41:55 PM	Bypass valve closed
9/24/2011	11:41:55 PM	Bubbler valve closed
9/24/2011	11:41:55 PM	Helium MFC set to  0.000000
9/24/2011	11:41:55 PM	H2 MFC set to  0.000000
9/24/2011	11:41:55 PM	BCl3 MFC set to  0.000000
9/24/2011	11:41:55 PM	PHl3 MFC set to  0.000000
9/24/2011	11:41:55 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:41:55 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:41:56 PM	Tube furnace set to 0
9/24/2011	11:41:57 PM	Run finished at 11:41 PM
9/24/2011	11:41:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/24/2011	11:46:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/24/2011	11:46:14 PM	Recipe started at 11:46 PM
9/24/2011	11:46:14 PM	Helium valve closed
9/24/2011	11:46:14 PM	H2 valve closed
9/24/2011	11:46:14 PM	BCl3 valve closed
9/24/2011	11:46:14 PM	PH3 valve closed
9/24/2011	11:46:14 PM	SiCl4 pre valve closed
9/24/2011	11:46:14 PM	SiCl4 post valve closed
9/24/2011	11:46:14 PM	Main Vac valve closed
9/24/2011	11:46:14 PM	Bubbler valve closed
9/24/2011	11:46:14 PM	Bypass valve opened
9/24/2011	11:46:14 PM	Helium MFC set to  0.000000
9/24/2011	11:46:14 PM	H2 MFC set to  0.000000
9/24/2011	11:46:14 PM	BCl3 MFC set to  0.000000
9/24/2011	11:46:14 PM	PHl3 MFC set to  0.000000
9/24/2011	11:46:14 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:46:14 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:46:14 PM	Tube furnace set to 0
9/24/2011	11:47:15 PM	Helium valve closed
9/24/2011	11:47:15 PM	H2 valve closed
9/24/2011	11:47:15 PM	BCl3 valve closed
9/24/2011	11:47:15 PM	PH3 valve closed
9/24/2011	11:47:15 PM	SiCl4 pre valve closed
9/24/2011	11:47:15 PM	SiCl4 post valve closed
9/24/2011	11:47:15 PM	Main Vac valve closed
9/24/2011	11:47:15 PM	Bubbler valve closed
9/24/2011	11:47:15 PM	Bypass valve opened
9/24/2011	11:47:15 PM	Helium MFC set to  0.000000
9/24/2011	11:47:15 PM	H2 MFC set to  0.000000
9/24/2011	11:47:15 PM	BCl3 MFC set to  0.000000
9/24/2011	11:47:15 PM	PHl3 MFC set to  0.000000
9/24/2011	11:47:15 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:47:15 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:47:15 PM	Tube furnace set to 0
9/24/2011	11:48:15 PM	Helium valve closed
9/24/2011	11:48:15 PM	H2 valve closed
9/24/2011	11:48:15 PM	BCl3 valve closed
9/24/2011	11:48:15 PM	PH3 valve closed
9/24/2011	11:48:15 PM	SiCl4 pre valve closed
9/24/2011	11:48:15 PM	SiCl4 post valve closed
9/24/2011	11:48:15 PM	Bypass valve closed
9/24/2011	11:48:15 PM	Bubbler valve closed
9/24/2011	11:48:15 PM	Main Vac valve opened
9/24/2011	11:48:15 PM	Helium MFC set to  0.000000
9/24/2011	11:48:15 PM	H2 MFC set to  0.000000
9/24/2011	11:48:15 PM	BCl3 MFC set to  0.000000
9/24/2011	11:48:15 PM	PHl3 MFC set to  0.000000
9/24/2011	11:48:15 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:48:15 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:48:15 PM	Tube furnace set to 0
9/24/2011	11:48:16 PM	Run finished at 11:48 PM
9/24/2011	11:48:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/24/2011	11:49:35 PM	Recipe started at 11:49 PM
9/24/2011	11:49:35 PM	Helium valve closed
9/24/2011	11:49:35 PM	H2 valve closed
9/24/2011	11:49:35 PM	BCl3 valve closed
9/24/2011	11:49:35 PM	PH3 valve closed
9/24/2011	11:49:35 PM	SiCl4 pre valve closed
9/24/2011	11:49:35 PM	SiCl4 post valve closed
9/24/2011	11:49:35 PM	Main Vac valve closed
9/24/2011	11:49:35 PM	Bubbler valve closed
9/24/2011	11:49:35 PM	Bypass valve opened
9/24/2011	11:49:35 PM	Helium MFC set to  0.000000
9/24/2011	11:49:35 PM	H2 MFC set to  0.000000
9/24/2011	11:49:35 PM	BCl3 MFC set to  0.000000
9/24/2011	11:49:35 PM	PHl3 MFC set to  0.000000
9/24/2011	11:49:35 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:49:35 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:49:35 PM	Tube furnace set to 150
9/24/2011	11:49:36 PM	Helium valve closed
9/24/2011	11:49:36 PM	H2 valve closed
9/24/2011	11:49:36 PM	BCl3 valve closed
9/24/2011	11:49:36 PM	PH3 valve closed
9/24/2011	11:49:36 PM	SiCl4 pre valve closed
9/24/2011	11:49:36 PM	SiCl4 post valve closed
9/24/2011	11:49:36 PM	Main Vac valve closed
9/24/2011	11:49:36 PM	Bubbler valve closed
9/24/2011	11:49:36 PM	Bypass valve opened
9/24/2011	11:49:36 PM	Helium MFC set to  0.000000
9/24/2011	11:49:36 PM	H2 MFC set to  0.000000
9/24/2011	11:49:36 PM	BCl3 MFC set to  0.000000
9/24/2011	11:49:36 PM	PHl3 MFC set to  0.000000
9/24/2011	11:49:36 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:49:36 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:49:36 PM	Tube furnace set to 150
9/24/2011	11:50:06 PM	Helium valve closed
9/24/2011	11:50:06 PM	H2 valve closed
9/24/2011	11:50:06 PM	BCl3 valve closed
9/24/2011	11:50:06 PM	PH3 valve closed
9/24/2011	11:50:06 PM	SiCl4 pre valve closed
9/24/2011	11:50:06 PM	SiCl4 post valve closed
9/24/2011	11:50:06 PM	Bypass valve closed
9/24/2011	11:50:06 PM	Bubbler valve closed
9/24/2011	11:50:06 PM	Main Vac valve opened
9/24/2011	11:50:06 PM	Helium MFC set to  0.000000
9/24/2011	11:50:06 PM	H2 MFC set to  0.000000
9/24/2011	11:50:06 PM	BCl3 MFC set to  0.000000
9/24/2011	11:50:06 PM	PHl3 MFC set to  0.000000
9/24/2011	11:50:06 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:50:06 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:50:06 PM	Tube furnace set to 150
9/24/2011	11:50:36 PM	H2 valve closed
9/24/2011	11:50:36 PM	BCl3 valve closed
9/24/2011	11:50:36 PM	PH3 valve closed
9/24/2011	11:50:36 PM	SiCl4 pre valve closed
9/24/2011	11:50:36 PM	SiCl4 post valve closed
9/24/2011	11:50:36 PM	Bypass valve closed
9/24/2011	11:50:36 PM	Bubbler valve closed
9/24/2011	11:50:36 PM	Helium valve opened
9/24/2011	11:50:36 PM	Main Vac valve opened
9/24/2011	11:50:36 PM	Helium MFC set to  20.000000
9/24/2011	11:50:36 PM	H2 MFC set to  0.000000
9/24/2011	11:50:36 PM	BCl3 MFC set to  0.000000
9/24/2011	11:50:36 PM	PHl3 MFC set to  0.000000
9/24/2011	11:50:36 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:50:36 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:50:36 PM	Tube furnace set to 150
9/24/2011	11:51:06 PM	Helium valve closed
9/24/2011	11:51:06 PM	H2 valve closed
9/24/2011	11:51:06 PM	BCl3 valve closed
9/24/2011	11:51:06 PM	PH3 valve closed
9/24/2011	11:51:06 PM	SiCl4 pre valve closed
9/24/2011	11:51:06 PM	SiCl4 post valve closed
9/24/2011	11:51:06 PM	Bypass valve closed
9/24/2011	11:51:06 PM	Bubbler valve closed
9/24/2011	11:51:06 PM	Main Vac valve opened
9/24/2011	11:51:06 PM	Helium MFC set to  0.000000
9/24/2011	11:51:06 PM	H2 MFC set to  0.000000
9/24/2011	11:51:06 PM	BCl3 MFC set to  0.000000
9/24/2011	11:51:06 PM	PHl3 MFC set to  0.000000
9/24/2011	11:51:06 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:51:06 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:51:06 PM	Tube furnace set to 150
9/24/2011	11:51:36 PM	H2 valve closed
9/24/2011	11:51:36 PM	BCl3 valve closed
9/24/2011	11:51:36 PM	PH3 valve closed
9/24/2011	11:51:36 PM	SiCl4 pre valve closed
9/24/2011	11:51:36 PM	SiCl4 post valve closed
9/24/2011	11:51:36 PM	Bypass valve closed
9/24/2011	11:51:36 PM	Bubbler valve closed
9/24/2011	11:51:36 PM	Helium valve opened
9/24/2011	11:51:36 PM	Main Vac valve opened
9/24/2011	11:51:36 PM	Helium MFC set to  20.000000
9/24/2011	11:51:36 PM	H2 MFC set to  0.000000
9/24/2011	11:51:36 PM	BCl3 MFC set to  0.000000
9/24/2011	11:51:36 PM	PHl3 MFC set to  0.000000
9/24/2011	11:51:36 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:51:36 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:51:36 PM	Tube furnace set to 150
9/24/2011	11:52:07 PM	Helium valve closed
9/24/2011	11:52:07 PM	H2 valve closed
9/24/2011	11:52:07 PM	BCl3 valve closed
9/24/2011	11:52:07 PM	PH3 valve closed
9/24/2011	11:52:07 PM	SiCl4 pre valve closed
9/24/2011	11:52:07 PM	SiCl4 post valve closed
9/24/2011	11:52:07 PM	Bypass valve closed
9/24/2011	11:52:07 PM	Bubbler valve closed
9/24/2011	11:52:07 PM	Main Vac valve opened
9/24/2011	11:52:07 PM	Helium MFC set to  0.000000
9/24/2011	11:52:07 PM	H2 MFC set to  0.000000
9/24/2011	11:52:07 PM	BCl3 MFC set to  0.000000
9/24/2011	11:52:07 PM	PHl3 MFC set to  0.000000
9/24/2011	11:52:07 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:52:07 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:52:07 PM	Tube furnace set to 150
9/24/2011	11:52:37 PM	H2 valve closed
9/24/2011	11:52:37 PM	BCl3 valve closed
9/24/2011	11:52:37 PM	PH3 valve closed
9/24/2011	11:52:37 PM	SiCl4 pre valve closed
9/24/2011	11:52:37 PM	SiCl4 post valve closed
9/24/2011	11:52:37 PM	Bypass valve closed
9/24/2011	11:52:37 PM	Bubbler valve closed
9/24/2011	11:52:37 PM	Helium valve opened
9/24/2011	11:52:37 PM	Main Vac valve opened
9/24/2011	11:52:37 PM	Helium MFC set to  20.000000
9/24/2011	11:52:37 PM	H2 MFC set to  0.000000
9/24/2011	11:52:37 PM	BCl3 MFC set to  0.000000
9/24/2011	11:52:37 PM	PHl3 MFC set to  0.000000
9/24/2011	11:52:37 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:52:37 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:52:37 PM	Tube furnace set to 150
9/24/2011	11:53:07 PM	Helium valve closed
9/24/2011	11:53:07 PM	H2 valve closed
9/24/2011	11:53:07 PM	BCl3 valve closed
9/24/2011	11:53:07 PM	PH3 valve closed
9/24/2011	11:53:07 PM	SiCl4 pre valve closed
9/24/2011	11:53:07 PM	SiCl4 post valve closed
9/24/2011	11:53:07 PM	Bypass valve closed
9/24/2011	11:53:07 PM	Bubbler valve closed
9/24/2011	11:53:07 PM	Main Vac valve opened
9/24/2011	11:53:07 PM	Helium MFC set to  0.000000
9/24/2011	11:53:07 PM	H2 MFC set to  0.000000
9/24/2011	11:53:07 PM	BCl3 MFC set to  0.000000
9/24/2011	11:53:07 PM	PHl3 MFC set to  0.000000
9/24/2011	11:53:07 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:53:07 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:53:07 PM	Tube furnace set to 150
9/24/2011	11:53:37 PM	H2 valve closed
9/24/2011	11:53:37 PM	BCl3 valve closed
9/24/2011	11:53:37 PM	PH3 valve closed
9/24/2011	11:53:37 PM	SiCl4 pre valve closed
9/24/2011	11:53:37 PM	SiCl4 post valve closed
9/24/2011	11:53:37 PM	Bypass valve closed
9/24/2011	11:53:37 PM	Bubbler valve closed
9/24/2011	11:53:37 PM	Helium valve opened
9/24/2011	11:53:37 PM	Main Vac valve opened
9/24/2011	11:53:37 PM	Helium MFC set to  20.000000
9/24/2011	11:53:37 PM	H2 MFC set to  0.000000
9/24/2011	11:53:37 PM	BCl3 MFC set to  0.000000
9/24/2011	11:53:37 PM	PHl3 MFC set to  0.000000
9/24/2011	11:53:37 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:53:37 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:53:37 PM	Tube furnace set to 150
9/24/2011	11:54:07 PM	Helium valve closed
9/24/2011	11:54:07 PM	H2 valve closed
9/24/2011	11:54:07 PM	BCl3 valve closed
9/24/2011	11:54:07 PM	PH3 valve closed
9/24/2011	11:54:07 PM	SiCl4 pre valve closed
9/24/2011	11:54:07 PM	SiCl4 post valve closed
9/24/2011	11:54:07 PM	Bypass valve closed
9/24/2011	11:54:07 PM	Bubbler valve closed
9/24/2011	11:54:07 PM	Main Vac valve opened
9/24/2011	11:54:07 PM	Helium MFC set to  0.000000
9/24/2011	11:54:07 PM	H2 MFC set to  0.000000
9/24/2011	11:54:07 PM	BCl3 MFC set to  0.000000
9/24/2011	11:54:07 PM	PHl3 MFC set to  0.000000
9/24/2011	11:54:07 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:54:07 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:54:07 PM	Tube furnace set to 150
9/24/2011	11:54:38 PM	H2 valve closed
9/24/2011	11:54:38 PM	BCl3 valve closed
9/24/2011	11:54:38 PM	PH3 valve closed
9/24/2011	11:54:38 PM	SiCl4 pre valve closed
9/24/2011	11:54:38 PM	SiCl4 post valve closed
9/24/2011	11:54:38 PM	Bypass valve closed
9/24/2011	11:54:38 PM	Bubbler valve closed
9/24/2011	11:54:38 PM	Helium valve opened
9/24/2011	11:54:38 PM	Main Vac valve opened
9/24/2011	11:54:38 PM	Helium MFC set to  20.000000
9/24/2011	11:54:38 PM	H2 MFC set to  0.000000
9/24/2011	11:54:38 PM	BCl3 MFC set to  0.000000
9/24/2011	11:54:38 PM	PHl3 MFC set to  0.000000
9/24/2011	11:54:38 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:54:38 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:54:38 PM	Tube furnace set to 150
9/24/2011	11:55:08 PM	Helium valve closed
9/24/2011	11:55:08 PM	H2 valve closed
9/24/2011	11:55:08 PM	BCl3 valve closed
9/24/2011	11:55:08 PM	PH3 valve closed
9/24/2011	11:55:08 PM	SiCl4 pre valve closed
9/24/2011	11:55:08 PM	SiCl4 post valve closed
9/24/2011	11:55:08 PM	Bypass valve closed
9/24/2011	11:55:08 PM	Bubbler valve closed
9/24/2011	11:55:08 PM	Main Vac valve opened
9/24/2011	11:55:08 PM	Helium MFC set to  0.000000
9/24/2011	11:55:08 PM	H2 MFC set to  0.000000
9/24/2011	11:55:08 PM	BCl3 MFC set to  0.000000
9/24/2011	11:55:08 PM	PHl3 MFC set to  0.000000
9/24/2011	11:55:08 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:55:08 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:55:08 PM	Tube furnace set to 150
9/24/2011	11:55:38 PM	H2 valve closed
9/24/2011	11:55:38 PM	BCl3 valve closed
9/24/2011	11:55:38 PM	PH3 valve closed
9/24/2011	11:55:38 PM	SiCl4 pre valve closed
9/24/2011	11:55:38 PM	SiCl4 post valve closed
9/24/2011	11:55:38 PM	Bypass valve closed
9/24/2011	11:55:38 PM	Bubbler valve closed
9/24/2011	11:55:38 PM	Helium valve opened
9/24/2011	11:55:38 PM	Main Vac valve opened
9/24/2011	11:55:38 PM	Helium MFC set to  20.000000
9/24/2011	11:55:38 PM	H2 MFC set to  0.000000
9/24/2011	11:55:38 PM	BCl3 MFC set to  0.000000
9/24/2011	11:55:38 PM	PHl3 MFC set to  0.000000
9/24/2011	11:55:38 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:55:38 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:55:38 PM	Tube furnace set to 150
9/24/2011	11:56:08 PM	Helium valve closed
9/24/2011	11:56:08 PM	H2 valve closed
9/24/2011	11:56:08 PM	BCl3 valve closed
9/24/2011	11:56:08 PM	PH3 valve closed
9/24/2011	11:56:08 PM	SiCl4 pre valve closed
9/24/2011	11:56:08 PM	SiCl4 post valve closed
9/24/2011	11:56:08 PM	Bypass valve closed
9/24/2011	11:56:08 PM	Bubbler valve closed
9/24/2011	11:56:08 PM	Main Vac valve opened
9/24/2011	11:56:08 PM	Helium MFC set to  0.000000
9/24/2011	11:56:08 PM	H2 MFC set to  0.000000
9/24/2011	11:56:08 PM	BCl3 MFC set to  0.000000
9/24/2011	11:56:08 PM	PHl3 MFC set to  0.000000
9/24/2011	11:56:08 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:56:08 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:56:08 PM	Tube furnace set to 150
9/24/2011	11:56:38 PM	H2 valve closed
9/24/2011	11:56:38 PM	BCl3 valve closed
9/24/2011	11:56:38 PM	PH3 valve closed
9/24/2011	11:56:38 PM	SiCl4 pre valve closed
9/24/2011	11:56:38 PM	SiCl4 post valve closed
9/24/2011	11:56:38 PM	Bypass valve closed
9/24/2011	11:56:38 PM	Bubbler valve closed
9/24/2011	11:56:38 PM	Helium valve opened
9/24/2011	11:56:38 PM	Main Vac valve opened
9/24/2011	11:56:38 PM	Helium MFC set to  20.000000
9/24/2011	11:56:38 PM	H2 MFC set to  0.000000
9/24/2011	11:56:38 PM	BCl3 MFC set to  0.000000
9/24/2011	11:56:38 PM	PHl3 MFC set to  0.000000
9/24/2011	11:56:38 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:56:38 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:56:38 PM	Tube furnace set to 150
9/24/2011	11:57:09 PM	Helium valve closed
9/24/2011	11:57:09 PM	H2 valve closed
9/24/2011	11:57:09 PM	BCl3 valve closed
9/24/2011	11:57:09 PM	PH3 valve closed
9/24/2011	11:57:09 PM	SiCl4 pre valve closed
9/24/2011	11:57:09 PM	SiCl4 post valve closed
9/24/2011	11:57:09 PM	Bypass valve closed
9/24/2011	11:57:09 PM	Bubbler valve closed
9/24/2011	11:57:09 PM	Main Vac valve opened
9/24/2011	11:57:09 PM	Helium MFC set to  0.000000
9/24/2011	11:57:09 PM	H2 MFC set to  0.000000
9/24/2011	11:57:09 PM	BCl3 MFC set to  0.000000
9/24/2011	11:57:09 PM	PHl3 MFC set to  0.000000
9/24/2011	11:57:09 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:57:09 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:57:09 PM	Tube furnace set to 150
9/24/2011	11:57:39 PM	H2 valve closed
9/24/2011	11:57:39 PM	BCl3 valve closed
9/24/2011	11:57:39 PM	PH3 valve closed
9/24/2011	11:57:39 PM	SiCl4 pre valve closed
9/24/2011	11:57:39 PM	SiCl4 post valve closed
9/24/2011	11:57:39 PM	Bypass valve closed
9/24/2011	11:57:39 PM	Bubbler valve closed
9/24/2011	11:57:39 PM	Helium valve opened
9/24/2011	11:57:39 PM	Main Vac valve opened
9/24/2011	11:57:39 PM	Helium MFC set to  20.000000
9/24/2011	11:57:39 PM	H2 MFC set to  0.000000
9/24/2011	11:57:39 PM	BCl3 MFC set to  0.000000
9/24/2011	11:57:39 PM	PHl3 MFC set to  0.000000
9/24/2011	11:57:39 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:57:39 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:57:39 PM	Tube furnace set to 150
9/24/2011	11:58:09 PM	Helium valve closed
9/24/2011	11:58:09 PM	H2 valve closed
9/24/2011	11:58:09 PM	BCl3 valve closed
9/24/2011	11:58:09 PM	PH3 valve closed
9/24/2011	11:58:09 PM	SiCl4 pre valve closed
9/24/2011	11:58:09 PM	SiCl4 post valve closed
9/24/2011	11:58:09 PM	Bypass valve closed
9/24/2011	11:58:09 PM	Bubbler valve closed
9/24/2011	11:58:09 PM	Main Vac valve opened
9/24/2011	11:58:09 PM	Helium MFC set to  0.000000
9/24/2011	11:58:09 PM	H2 MFC set to  0.000000
9/24/2011	11:58:09 PM	BCl3 MFC set to  0.000000
9/24/2011	11:58:09 PM	PHl3 MFC set to  0.000000
9/24/2011	11:58:09 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:58:09 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:58:09 PM	Tube furnace set to 150
9/24/2011	11:58:39 PM	H2 valve closed
9/24/2011	11:58:39 PM	BCl3 valve closed
9/24/2011	11:58:39 PM	PH3 valve closed
9/24/2011	11:58:39 PM	SiCl4 pre valve closed
9/24/2011	11:58:39 PM	SiCl4 post valve closed
9/24/2011	11:58:39 PM	Bypass valve closed
9/24/2011	11:58:39 PM	Bubbler valve closed
9/24/2011	11:58:39 PM	Helium valve opened
9/24/2011	11:58:39 PM	Main Vac valve opened
9/24/2011	11:58:39 PM	Helium MFC set to  20.000000
9/24/2011	11:58:39 PM	H2 MFC set to  0.000000
9/24/2011	11:58:39 PM	BCl3 MFC set to  0.000000
9/24/2011	11:58:39 PM	PHl3 MFC set to  0.000000
9/24/2011	11:58:39 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:58:39 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:58:39 PM	Tube furnace set to 150
9/24/2011	11:59:09 PM	Helium valve closed
9/24/2011	11:59:09 PM	H2 valve closed
9/24/2011	11:59:09 PM	BCl3 valve closed
9/24/2011	11:59:09 PM	PH3 valve closed
9/24/2011	11:59:09 PM	SiCl4 pre valve closed
9/24/2011	11:59:09 PM	SiCl4 post valve closed
9/24/2011	11:59:09 PM	Bypass valve closed
9/24/2011	11:59:09 PM	Bubbler valve closed
9/24/2011	11:59:09 PM	Main Vac valve opened
9/24/2011	11:59:09 PM	Helium MFC set to  0.000000
9/24/2011	11:59:09 PM	H2 MFC set to  0.000000
9/24/2011	11:59:09 PM	BCl3 MFC set to  0.000000
9/24/2011	11:59:09 PM	PHl3 MFC set to  0.000000
9/24/2011	11:59:09 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:59:09 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:59:10 PM	Tube furnace set to 150
9/24/2011	11:59:40 PM	H2 valve closed
9/24/2011	11:59:40 PM	BCl3 valve closed
9/24/2011	11:59:40 PM	PH3 valve closed
9/24/2011	11:59:40 PM	SiCl4 pre valve closed
9/24/2011	11:59:40 PM	SiCl4 post valve closed
9/24/2011	11:59:40 PM	Bypass valve closed
9/24/2011	11:59:40 PM	Bubbler valve closed
9/24/2011	11:59:40 PM	Helium valve opened
9/24/2011	11:59:40 PM	Main Vac valve opened
9/24/2011	11:59:40 PM	Helium MFC set to  20.000000
9/24/2011	11:59:40 PM	H2 MFC set to  0.000000
9/24/2011	11:59:40 PM	BCl3 MFC set to  0.000000
9/24/2011	11:59:40 PM	PHl3 MFC set to  0.000000
9/24/2011	11:59:40 PM	SiCl4 MFC set to  0.000000
9/24/2011	11:59:40 PM	Bypass solenoid MFC set to  0.000000
9/24/2011	11:59:40 PM	Tube furnace set to 150
